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Enhancement of Oxidation Resistance via Chromium Boron Carbide on Diamond Particles 碳化硼铬增强金刚石颗粒抗氧化性能的研究
THE Coatings Pub Date : 2021-01-30 DOI: 10.3390/COATINGS11020162
Xuliang Zhang, Youhong Sun, Q. Meng, Wu Jinhao, He Linkai
{"title":"Enhancement of Oxidation Resistance via Chromium Boron Carbide on Diamond Particles","authors":"Xuliang Zhang, Youhong Sun, Q. Meng, Wu Jinhao, He Linkai","doi":"10.3390/COATINGS11020162","DOIUrl":"https://doi.org/10.3390/COATINGS11020162","url":null,"abstract":"To improve the oxidation resistance of diamond, chromium boron carbide (Cr–B–C) coatings were synthesized through high temperature solid state synthesis and molten salt method on diamond particles in this paper. After holding the raw material at 900 °C for 2 h, the diamond surface was completely and uniformly covered by Cr–B–C coatings. Oxidation resistance of the diamond coated Cr–B–C was determined by the thermogravimetric analysis (TGA). The results revealed that the Cr–B–C coatings held the diamonds for 100%-mass in air atmosphere until 1151 °C, which was much better than the uncoated diamonds (720 °C) and the B4C-coated diamonds (1090 °C). When Cr–B–C-coated diamond was annealed in air, Cr2O3 and B2O3 were formed as oxygen barrier layer to protect diamond from oxidation. The formation of B2O3 with high temperature fluidity was conducive to avoiding Cr2O3 delamination due to volume expansion during oxidation in air. Furthermore, the presence of Cr2O3 provided lasting protection by reducing the evaporation of B2O3. The oxidation products (B2O3 and Cr2O3) prove a complementary functional protection on diamond particles from oxidation.","PeriodicalId":22482,"journal":{"name":"THE Coatings","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2021-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79197333","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Wear and Corrosion Resistance Analysis of FeCoNiTiAlx High-Entropy Alloy Coatings Prepared by Laser Cladding 激光熔覆法制备FeCoNiTiAlx高熵合金涂层的耐磨损和耐腐蚀性能分析
THE Coatings Pub Date : 2021-01-29 DOI: 10.3390/COATINGS11020155
Zhaolei Sun, Mingyuan Zhang, Gaoqi Wang, Xuefeng Yang, Shouren Wang
{"title":"Wear and Corrosion Resistance Analysis of FeCoNiTiAlx High-Entropy Alloy Coatings Prepared by Laser Cladding","authors":"Zhaolei Sun, Mingyuan Zhang, Gaoqi Wang, Xuefeng Yang, Shouren Wang","doi":"10.3390/COATINGS11020155","DOIUrl":"https://doi.org/10.3390/COATINGS11020155","url":null,"abstract":"FeCoNiTiAlx (x = 0, 0.5, 1) high-entropy alloy coatings were prepared by laser cladding technology. The phase, microstructure, hardness, wear resistance and corrosion resistance were tested and analyzed. The results showed Al element promoted the conversion from the FCC phase to the BCC phase. The coating presented dendritic structure due to the addition of the Al element, while the number of dendrites increased. And the average hardness of the coating increased from 204 to 623 HV. The addition of the Al element increases the corrosion current density of the coating from 1.270 × 10−5 to 3.489 × 10−5 A/cm2. The wear rate of the coatings decreases with the increase of Al content according to dry friction and wear, which indicates the wear resistance of the coating was improved by adding the Al element. According to the corrosion wear test in 3.5% NaCl solution, it can be found that the wear rate of the coating increases firstly and then decreases with the addition of the Al element, which indicates that the addition of the Al element intensifies the wear of the coating in 3.5% NaCl solution.","PeriodicalId":22482,"journal":{"name":"THE Coatings","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2021-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83586379","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Tuning the Optical Properties of MEH–PPV/PFO Hybrid Thin Films via the Incorporation of CsPbBr3 Quantum Dots 利用CsPbBr3量子点调谐MEH-PPV /PFO杂化薄膜的光学性能
THE Coatings Pub Date : 2021-01-29 DOI: 10.3390/COATINGS11020154
Saif M. H. Qaid, B. Al‐Asbahi, Hamid M. Ghaithan, A. Aldwayyan
{"title":"Tuning the Optical Properties of MEH–PPV/PFO Hybrid Thin Films via the Incorporation of CsPbBr3 Quantum Dots","authors":"Saif M. H. Qaid, B. Al‐Asbahi, Hamid M. Ghaithan, A. Aldwayyan","doi":"10.3390/COATINGS11020154","DOIUrl":"https://doi.org/10.3390/COATINGS11020154","url":null,"abstract":"The current work examines the effects of cesium lead bromide (CsPbBr3) perovskite quantum dots (PQDs) on the structural and optical properties of conjugated polymer blends of poly[2-methoxy-5-(2′-ethylhexyloxy)-1,4-phenylene vinylene] (MEH–PPV) and poly(9,9-di-n-octylfluorenyl-2,7-diyl) (PFO). MEH–PPV/PFO composite thin-films containing PQDs with weight ratios between 0.5 wt.% and 10 wt.% were prepared via a solution-blending method prior to spin-coating on glass substrates. The MEH–PPV/PFO composites’ crystallinity was improved, and the roughness was dramatically increased with higher PQDs content, as confirmed by X-ray diffraction (XRD) and atomic force microscopy (AFM), respectively. Conversely, a higher PQDs content resulted in a gradual reduction of the Urbach tail and an increase in the steepness parameter, thereby reducing the localized density of the electronic states within the forbidden bandgap of the hybrids. Moreover, a slight reduction in the direct and indirect bandgaps was found in PQDs/(MEH–PPV/PFO) composite films containing a higher PQDs content and provided evidence of the low concentration of the localized states. The incorporation of the PQDs resulted in enhanced non-radiative energy transfer processes in the MEH–PPV/PFO hybrids, which are very important for the development of optimized optoelectronic devices.","PeriodicalId":22482,"journal":{"name":"THE Coatings","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2021-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76067815","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Improvement in the Figure of Merit of ITO-Metal-ITO Sandwiched Films on Poly Substrate by High-Power Impulse Magnetron Sputtering 大功率脉冲磁控溅射提高ito -金属- ito夹层膜在Poly衬底上的优值
THE Coatings Pub Date : 2021-01-28 DOI: 10.3390/COATINGS11020144
Hui Li, Ying Gao, Shuo-Huang Yuan, D. Wuu, Wan‐Yu Wu, Sam Zhang
{"title":"Improvement in the Figure of Merit of ITO-Metal-ITO Sandwiched Films on Poly Substrate by High-Power Impulse Magnetron Sputtering","authors":"Hui Li, Ying Gao, Shuo-Huang Yuan, D. Wuu, Wan‐Yu Wu, Sam Zhang","doi":"10.3390/COATINGS11020144","DOIUrl":"https://doi.org/10.3390/COATINGS11020144","url":null,"abstract":"High-power impulse magnetron sputtering (HiPIMS) was used to deposit ITO/Ag/ITO (IAgI) and ITO/Cu/ITO (ICuI) sandwiched films on polyethylene naphthalate substrate at room temperature as flexible transparent conductive materials. The hybrid layers were constructed with 40 nm ITO bottom and top layers, and a 5–20 nm Ag or Cu interlayer. The microstructure and optoelectrical properties were estimated for these films with various thicknesses of the metal interlayer. Thanks to the high-power density and highly ionized plasma in the HiPIMS process, the IAgI and ICuI sandwich structures exhibited good crystallinity and smooth surfaces with high optical transmittance and low sheet resistance. The optimal figure of merit was obtained as 101.16 × 10−3·Ω−1 for the IAgI film and 4.83 × 10−3·Ω−1 for the ICuI film with the metal interlayer thickness of 10 nm, both of which are higher than that from a similar structure reported via sputtering at room temperature. These results indicate that HiPIMS is a promising technique to deposit transparent conductive films onto soft substrates for applications in flexible optoelectronic devices.","PeriodicalId":22482,"journal":{"name":"THE Coatings","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2021-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82915158","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 18
Structural Features and Tribological Properties of Detonation Gun Sprayed Ti–Si–C Coating 爆轰枪喷涂Ti-Si-C涂层的结构特征及摩擦学性能
THE Coatings Pub Date : 2021-01-28 DOI: 10.3390/COATINGS11020141
B. Rakhadilov, D. Buitkenov, Zhuldyz Sagdoldina, B. Seitov, S. Kurbanbekov, Meruyert Adilkanova
{"title":"Structural Features and Tribological Properties of Detonation Gun Sprayed Ti–Si–C Coating","authors":"B. Rakhadilov, D. Buitkenov, Zhuldyz Sagdoldina, B. Seitov, S. Kurbanbekov, Meruyert Adilkanova","doi":"10.3390/COATINGS11020141","DOIUrl":"https://doi.org/10.3390/COATINGS11020141","url":null,"abstract":"The paper considers the research results of structural-phase state and tribological characteristics of detonation coatings based on Ti–Si–C, obtained at different filling volumes of the explosive gas mixture barrel of a detonation gun. The results analysis indicates that the phase composition and properties of detonation coatings strongly depend on the technological parameters of spraying. With an increase of the explosive mixture in the filling volume of the detonation barrel up to 70% of the coatings consist mainly of the TiC phase, because high temperature leads to a strong decomposition of Ti3SiC2 powders. Thus, the XRD results confirm that at 70% of the explosive gas mixture’s filling volume, partial decomposition and disintegration of the powders occurs after detonation spraying. We established that detonation coatings based on titanium carbosilicide obtained at the explosive gas mixture’s filling volume at 60% are characterized by high wear resistance and adhesive strength. Thermal annealing was performed after spraying in the temperature range of 700–900 °C for 1 h to reduce microstructural defects and improve the Ti–Si–C coating characteristics. As a result of the heat treatment in the Ti–Si–C system at 800 °C, we observed that an increase in the volume fraction of the Ti3SiC2 and TiO2 phases led to a 2-fold increase in microhardness. This means that the after-heat-treatment can provide a sufficient reaction time for the incomplete reaction of the Ti–Si–C (TSC) coating during the detonation gun spraying. Thus, annealing can provide an equal distribution of elements in the coatings.","PeriodicalId":22482,"journal":{"name":"THE Coatings","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2021-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81033432","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Laser Surface Texturing for Biomedical Applications: A Review 激光表面纹理在生物医学中的应用综述
THE Coatings Pub Date : 2021-01-22 DOI: 10.3390/COATINGS11020124
I. Shivakoti, G. Kibria, R. Čep, B. B. Pradhan, Ashis Sharma
{"title":"Laser Surface Texturing for Biomedical Applications: A Review","authors":"I. Shivakoti, G. Kibria, R. Čep, B. B. Pradhan, Ashis Sharma","doi":"10.3390/COATINGS11020124","DOIUrl":"https://doi.org/10.3390/COATINGS11020124","url":null,"abstract":"For generating a texture or pattern on a work surface, one of the emerging processes is laser surface texturing (LST). It is an effective method for producing texture on a work surface. Literature shows that various lasers have been applied to generate textures on the surface of work materials. Recently, LST has shown tremendous potential in the field of biomedical applications. Applying the LST process, the efficacy of the biomaterial has been drastically improved. This paper presents an in-depth review of laser surface texturing for biomedical applications. The effect of LST on important biomaterial has been thoroughly studied; it was found that LST has extreme potential for surface modification of biomaterial and can be utilized for biomedical applications.","PeriodicalId":22482,"journal":{"name":"THE Coatings","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2021-01-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78753899","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 50
Plasma Enhanced Atomic Layer Deposition of Ruthenium Films Using Ru(EtCp)2 Precursor Ru(EtCp)2前驱体等离子体增强钌膜原子层沉积研究
THE Coatings Pub Date : 2021-01-21 DOI: 10.3390/COATINGS11020117
A. Rogozhin, A. Miakonkikh, E. Smirnova, A. A. Lomov, S. Simakin, K. Rudenko
{"title":"Plasma Enhanced Atomic Layer Deposition of Ruthenium Films Using Ru(EtCp)2 Precursor","authors":"A. Rogozhin, A. Miakonkikh, E. Smirnova, A. A. Lomov, S. Simakin, K. Rudenko","doi":"10.3390/COATINGS11020117","DOIUrl":"https://doi.org/10.3390/COATINGS11020117","url":null,"abstract":"Ruthenium thin films were deposited by plasma-enhanced atomic layer deposition (PEALD) technology using Ru(EtCp)2 and oxygen plasma on the modified surface of silicon and SiO2/Si substrates. The crystal structure, chemical composition, and morphology of films were characterized by grazing incidence XRD (GXRD), secondary ion mass spectrometry (SIMS), and atomic force microscopy (AFM) techniques, respectively. It was found that the mechanism of film growth depends crucially on the substrate temperature. The GXRD and SIMS analysis show that at substrate temperature T = 375 °C, an abrupt change in surface reaction mechanisms occurs, leading to the changing in film composition from RuO2 at low temperatures to pure Ru film at higher temperatures. It was confirmed by electrical resistivity measurements for Ru-based films. Mechanical stress in the films was also analyzed, and it was suggested that this factor increases the surface roughness of growing Ru films. The lowest surface roughness ~1.5 nm was achieved with a film thickness of 29 nm using SiO2/Si-substrate for deposition at 375 °C. The measured resistivity of Ru film is 18–19 µOhm·cm (as deposited).","PeriodicalId":22482,"journal":{"name":"THE Coatings","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2021-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87542168","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Electrodeposited Hydroxyapatite-Based Biocoatings: Recent Progress and Future Challenges 电沉积羟基磷灰石基生物涂料:最新进展和未来挑战
THE Coatings Pub Date : 2021-01-19 DOI: 10.3390/COATINGS11010110
M. S. Safavi, F. Walsh, M. Surmeneva, R. Surmenev, J. Khalil-Allafi
{"title":"Electrodeposited Hydroxyapatite-Based Biocoatings: Recent Progress and Future Challenges","authors":"M. S. Safavi, F. Walsh, M. Surmeneva, R. Surmenev, J. Khalil-Allafi","doi":"10.3390/COATINGS11010110","DOIUrl":"https://doi.org/10.3390/COATINGS11010110","url":null,"abstract":"Hydroxyapatite has become an important coating material for bioimplants, following the introduction of synthetic HAp in the 1950s. The HAp coatings require controlled surface roughness/porosity, adequate corrosion resistance and need to show favorable tribological behavior. The deposition rate must be sufficiently fast and the coating technique needs to be applied at different scales on substrates having a diverse structure, composition, size, and shape. A detailed overview of dry and wet coating methods is given. The benefits of electrodeposition include controlled thickness and morphology, ability to coat a wide range of component size/shape and ease of industrial processing. Pulsed current and potential techniques have provided denser and more uniform coatings on different metallic materials/implants. The mechanism of HAp electrodeposition is considered and the effect of operational variables on deposit properties is highlighted. The most recent progress in the field is critically reviewed. Developments in mineral substituted and included particle, composite HAp coatings, including those reinforced by metallic, ceramic and polymeric particles; carbon nanotubes, modified graphenes, chitosan, and heparin, are considered in detail. Technical challenges which deserve further research are identified and a forward look in the field of the electrodeposited HAp coatings is taken.","PeriodicalId":22482,"journal":{"name":"THE Coatings","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2021-01-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77090709","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 62
Electron Transfer through a Natural Oxide Layer on Real Metal Surfaces Occurring during Sliding with Polytetrafluoroethylene: Dependence on Heat of Formation of Metal Oxides 聚四氟乙烯滑动过程中通过真实金属表面天然氧化层的电子转移:对金属氧化物形成热的依赖
THE Coatings Pub Date : 2021-01-19 DOI: 10.3390/COATINGS11010109
Y. Momose
{"title":"Electron Transfer through a Natural Oxide Layer on Real Metal Surfaces Occurring during Sliding with Polytetrafluoroethylene: Dependence on Heat of Formation of Metal Oxides","authors":"Y. Momose","doi":"10.3390/COATINGS11010109","DOIUrl":"https://doi.org/10.3390/COATINGS11010109","url":null,"abstract":"Electron emission (EE) from real metal surfaces occurring during sliding contact with a polytetrafluoroethylene (PTFE) rider has been investigated using the thermodynamic data of metal oxides and the X-ray photoelectron spectroscopy (XPS) intensity ratio of oxygen/metal on the surfaces. EE was termed triboelectron emission (TriboEE). Rolled metal sheets of 18 types were used. The metal‒oxygen bond energy calculated from the heat of the formation of metal oxide, (D(M–O)), was shown to be a key factor in dividing the EE into two routes, the so-called Schottky effect and the tunnel effect, due to the surface oxide layer. The metals in periodic groups 4 (Ti and Zr), 5 (V, Nb, and Ta), and 6 (Mo and W) maintained higher values of D(M–O), while, moving down the groups, the TriboEE intensity increased, being ascribed to the former route. In groups 10 (Ni, Pd, and Pt) and 11 (Cu, Ag, and Au), the D(M–O) values decreased moving down the groups, but the TriboEE intensity increased significantly, which can be attributed to the latter route. Furthermore, with the increase in the electrical conductivity of metals, the TriboEE intensity became remarkably high, while the D(M–O) value fell rapidly and became almost constant. The XPS results showed that the dependence of the D(M–O) and XPS metal core intensity on the O1s intensity and the XPS intensity ratio of the O1s/metal core was different between groups 10 and 11 and groups 4, 5, and 6. It was concluded that, under the electric field caused on the real metal surface by the friction with PTFE, the electron from metals with small D(M–O) values predominantly tunnels the surface oxide layer as a surface barrier, while with large D(M–O) values, the electron passes over the top of the barrier.","PeriodicalId":22482,"journal":{"name":"THE Coatings","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2021-01-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87671060","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Surface Analysis of Chamber Coating Materials Exposed to CF4/O2 Plasma 暴露于CF4/O2等离子体的腔室涂层材料表面分析
THE Coatings Pub Date : 2021-01-18 DOI: 10.3390/COATINGS11010105
S. Park, K. Kim, S. Hong
{"title":"Surface Analysis of Chamber Coating Materials Exposed to CF4/O2 Plasma","authors":"S. Park, K. Kim, S. Hong","doi":"10.3390/COATINGS11010105","DOIUrl":"https://doi.org/10.3390/COATINGS11010105","url":null,"abstract":"Coating the inner surfaces of high-powered plasma processing equipment has become crucial for reducing maintenance costs, process drift, and contaminants. The conventionally preferred alumina (Al2O3) coating has been replaced with yttria (Y2O3) due to the long-standing endurance achieved by fluorine-based etching; however, the continuous increase in radio frequency (RF) power necessitates the use of alternative coating materials to reduce process shift in a series of high-powered semiconductor manufacturing environments. In this study, we investigated the fluorine-based etching resistance of atmospheric pressure-sprayed alumina, yttria, yttrium aluminum garnet (YAG), and yttrium oxyfluoride (YOF). The prepared ceramic-coated samples were directly exposed to silicon oxide etching, and the surfaces of the plasma-exposed samples were characterized by scanning electron microscopy, energy-dispersive X-ray spectroscopy, and X-ray photoelectron spectroscopy. We found that an ideal coating material must demonstrate high plasma-induced structure distortion by the fluorine atom from the radical. For endurance to fluorine-based plasma exposure, the bonding structure with fluoride was shown to be more effective than oxide-based ceramics. Thus, fluoride-based ceramic materials can be promising candidates for chamber coating materials.","PeriodicalId":22482,"journal":{"name":"THE Coatings","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2021-01-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78721327","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
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