Sensors and Actuators A-physical最新文献_第3页

MEMS-based PANI@UiO-66 sensor for NH3 detection with rapid response and low limit 基于mems的PANI@UiO-66传感器用于NH3检测，具有快速响应和低极限

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-09-23 DOI: 10.1016/j.sna.2025.117092

Mingxia Feng , Jintian Qian , Dawu Lv , Hao Liu , Qiuju Zhang , Weijie Song , Wenfeng Shen , Ruiqin Tan

引用次数: 0

Single-nanoplastic detection based on plasmon-coupled scattering microscopy 基于等离子体耦合散射显微镜的单纳米塑料检测

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-09-23 DOI: 10.1016/j.sna.2025.117065

Eduardo Pisano , Fabiola Armenta-Monzón , Lluvia M. Hernández-Sonora , Nancy Ornelas-Soto , Alejandra García-García , Jesús E. Gómez-Correa

{"title":"Single-nanoplastic detection based on plasmon-coupled scattering microscopy","authors":"Eduardo Pisano , Fabiola Armenta-Monzón , Lluvia M. Hernández-Sonora , Nancy Ornelas-Soto , Alejandra García-García , Jesús E. Gómez-Correa","doi":"10.1016/j.sna.2025.117065","DOIUrl":"10.1016/j.sna.2025.117065","url":null,"abstract":"<div><div>The increasing presence of nanoplastics in aquatic environments has raised significant concerns due to their potential impact on ecosystems and human health. Traditional detection techniques face limitations in resolution, sensitivity, and cost-effectiveness, making the development of new methodologies essential. In this study, we introduce Plasmon-Coupled Scattering Microscopy (PCSM) as a novel approach for high-sensitivity detection and characterization of single nanoplastic particles. Unlike conventional Surface Plasmon Resonance techniques, which analyze bulk refractive index variations, PCSM enables localized detection of individual nanoparticles by leveraging plasmon-coupled scattering. This method was experimentally validated using polystyrene nanoparticles of different diameters, immersed in water over a gold thin film within a variant of the Kretschmann configuration. Theoretical modeling was performed using the T-matrix method, showing strong agreement with experimental results. This study demonstrates the technical feasibility of single-particle detection using PCSM under controlled conditions. Although it has not yet been applied to environmental matrices, the approach covers a broad particle size range (1–2500 nm) and is suitable for detecting commonly reported plastic pollutants. The method also shows potential for extension to other nanoscale water contaminants, supporting its future development as a versatile tool for environmental monitoring and pollution assessment.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117065"},"PeriodicalIF":4.9,"publicationDate":"2025-09-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145157998","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A depth-customizable double-sided 3D neural probe array for simultaneous investigation of multiple brain regions 一种深度可定制的双面3D神经探针阵列，用于同时研究多个大脑区域

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-09-23 DOI: 10.1016/j.sna.2025.117084

Sehwan Park , Minseok Kim , Haeyun Lee , Jimin Lee , Namsun Chou , Hyogeun Shin

{"title":"A depth-customizable double-sided 3D neural probe array for simultaneous investigation of multiple brain regions","authors":"Sehwan Park , Minseok Kim , Haeyun Lee , Jimin Lee , Namsun Chou , Hyogeun Shin","doi":"10.1016/j.sna.2025.117084","DOIUrl":"10.1016/j.sna.2025.117084","url":null,"abstract":"<div><div>Understanding the complex neural circuits within the brain requires advanced tools capable of simultaneously recording signals from multiple regions and depths. However, previously developed tools have limited capability to address 3D structures in the brain as they typically feature fixed probe lengths and single-sided electrode configurations. To overcome these challenges, we developed a depth-customizable 3D electrode array structure comprising double-sided 2D neural probe arrays via flexible printed circuit board technology with a zero-insertion-force connector and a supporting board without requiring additional fabrication steps. This enables precise depth adjustments and the double-sided electrode configuration effectively doubles the number of recording sites, thereby facilitating volumetric and comprehensive neural signal acquisition. Our device allows user-defined adjustment of probe spacing, achieving a minimum inter-probe distance of 1 mm, and enables fine-tuned control of insertion depth for precise targeting of specific brain regions, with a maximum depth difference of only 0.168 mm. Also, by employing a PSR ink insulation layer, we achieved a total probe thickness of approximately 80 µm, resulting in a compact design that eliminates the need for complex semiconductor processes. Validation of the device <em>in vivo</em> demonstrated its capability to simultaneously monitor neural signals from multiple brain regions. Its depth-customizable design facilitated functional connectivity studies across various depths, the results of which could provide critical insights into neural network dynamics. Our approach significantly enhances the flexibility, scalability, and efficiency of neural probes and provides a powerful platform for neuroscience research into areas such as brain-machine interface development and functional connectivity.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117084"},"PeriodicalIF":4.9,"publicationDate":"2025-09-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145157868","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Research on the fabrication process of DMC sensors based on RF magnetron sputtered SnO2 thin films 基于射频磁控溅射SnO2薄膜的DMC传感器制备工艺研究

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-09-23 DOI: 10.1016/j.sna.2025.117088

Jia Ren , Gaoxiang Xu , Kanglu Li , Aijun Yang , Jifeng Chu , Huan Yuan , Mingzhe Rong , Xiaohua Wang

{"title":"Research on the fabrication process of DMC sensors based on RF magnetron sputtered SnO2 thin films","authors":"Jia Ren , Gaoxiang Xu , Kanglu Li , Aijun Yang , Jifeng Chu , Huan Yuan , Mingzhe Rong , Xiaohua Wang","doi":"10.1016/j.sna.2025.117088","DOIUrl":"10.1016/j.sna.2025.117088","url":null,"abstract":"<div><div>Lithium-ion battery thermal runaway poses significant safety risks, necessitating effective early monitoring via characteristic gas detection. This study focuses on developing highly selective and sensitive SnO<sub>2</sub>-based gas sensors for detecting dimethyl carbonate (DMC), a key early warning gas during thermal runaway. Using radio frequency magnetron sputtering, single-layer SnO<sub>2</sub> and stacked SnO<sub>2</sub>/TiO<sub>2</sub> sensors were fabricated and optimized for process parameters (sputtering power, time, vacuum, Ar/O<sub>2</sub> ratio, and annealing). Experimental results show that the optimal single-layer SnO<sub>2</sub> sensor (60 W power, 6 h sputtering, 1 Pa vacuum, 30:5 Ar/O<sub>2</sub> ratio, and 500°C annealing) exhibits a detection limit of 50 ppb for DMC, with rapid response (7 s) and superior selectivity against H<sub>2</sub> and CO interference. The stacked SnO<sub>2</sub>/TiO<sub>2</sub> structure further enhances performance, achieving a resistance baseline stability of 30–40 Ω and a response to DMC 2–14 times higher than other gases. Characterization via SEM and XRD confirms the formation of porous, crystalline SnO<sub>2</sub> and heterojunction structures, explaining improved gas adsorption and electron transfer efficiency. This work demonstrates that magnetron sputtering enables precise control of sensor microstructure, offering a viable solution for early thermal runaway detection in lithium-ion batteries.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117088"},"PeriodicalIF":4.9,"publicationDate":"2025-09-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145220138","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A large-stroke thermomechanical MEMS actuator with lever amplification for helium detection 一种用于氦探测的带有杠杆放大的大行程热机械式MEMS驱动器

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-09-23 DOI: 10.1016/j.sna.2025.117091

Sulaiman Mohaidat , Hamed Nikfarjam , Mohammad Okour , Mohammad Megdadi , Mutaz Al Fayad , Siavash Pourkamali , Fadi Alsaleem

{"title":"A large-stroke thermomechanical MEMS actuator with lever amplification for helium detection","authors":"Sulaiman Mohaidat , Hamed Nikfarjam , Mohammad Okour , Mohammad Megdadi , Mutaz Al Fayad , Siavash Pourkamali , Fadi Alsaleem","doi":"10.1016/j.sna.2025.117091","DOIUrl":"10.1016/j.sna.2025.117091","url":null,"abstract":"<div><div>Helium plays a critical role as a fill gas in dry cask storage systems for spent nuclear fuel, where its leakage can compromise thermal performance and safety. This study presents the design, fabrication, modeling, and experimental validation of a novel MEMS-based thermomechanical actuator for helium detection, leveraging the gas's distinct thermal conductivity relative to air. The device features a U-shaped electrothermal actuator composed of a joule-heated fixed hot arm and a conduction-heated flexible cold arm. The cold arm acts as a mechanical lever, amplifying displacement differences caused by gas-specific thermal gradients. Fabricated from silicon, the actuator exhibits a large-stroke out-of-plane displacement, with a measured difference of 7.75 µm between helium and air environments. This differential enables the actuator to function as a normally closed mechanical switch that opens in the presence of helium. Finite element simulations using COMSOL Multiphysics closely match experimental results. Furthermore, uncertainty quantification reveals minimal variation in maximum temperature but notable sensitivity in displacement, underscoring the importance of fabrication precision. These results establish a foundation for developing compact, low-power, high-sensitivity helium detection switches for nuclear and other safety-critical applications.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117091"},"PeriodicalIF":4.9,"publicationDate":"2025-09-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145158012","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

An advanced microfluidic platform for assessment of DOX uptake by MCF-7 cells inside microenvironment mimicking blood capillary networks 一个先进的微流控平台，用于评估微环境中模拟毛细血管网络的MCF-7细胞对DOX的摄取

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-09-23 DOI: 10.1016/j.sna.2025.117067

Niraj Kr Prasad , Arisha Arora , Siddhartha Sankar Ghosh , Amaresh Dalal

{"title":"An advanced microfluidic platform for assessment of DOX uptake by MCF-7 cells inside microenvironment mimicking blood capillary networks","authors":"Niraj Kr Prasad , Arisha Arora , Siddhartha Sankar Ghosh , Amaresh Dalal","doi":"10.1016/j.sna.2025.117067","DOIUrl":"10.1016/j.sna.2025.117067","url":null,"abstract":"<div><div>Estimating drug uptake by cells in vitro is widely determined in a static environment or centrifuge. Such an uptake study cannot give a correct estimation of drug uptake on cells as drug uptake by cells happens when both drug and cells are in movement. Considering these two aspects, microchannels with two different configurations were fabricated to replicate the confinement of the blood capillary network. Channel A was designed to replicate the bifurcations of blood capillaries, while Channel B was designed to replicate its curves. The microchannels were fabricated to decipher the drug uptake on breast cancer cells (MCF-7 cells) when they flow through conditions similar to the blood capillary network. The drug uptake in Channel A and Channel B was observed to be 1.17 and 1.78 times higher than the conventional method. The inflection region where channel curvature changed caused MCF-7 cells to deform, resulting in an alteration of cytoskeleton morphology, thus allowing a better drug uptake by cells. Furthermore, the hydrodynamic effect on cell movement inside the microchannel was also investigated. It was observed that the MCF-7 cells showed noticeable deformation at the entry of the bifurcations and the inflection region. The MCF-7 cells also exhibited faster stress relaxation in the region of higher stresses. The cells’ fore tip and tail end were observed to move at different speeds during stress relaxation. The novel microfluidic channel discussed in the study provided a new and efficient platform for the complete assessment of cellular uptake of drugs.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117067"},"PeriodicalIF":4.9,"publicationDate":"2025-09-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145220135","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Effects of NbN superconducting electrodes on the cryogenic characteristics of lamb wave mode AlScN piezoelectric MEMS resonators NbN超导电极对lamb波型AlScN压电MEMS谐振器低温特性的影响

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-09-23 DOI: 10.1016/j.sna.2025.117089

Wenzhen Li , Xuankai Xu , Jiawei Li , Peng Dong , Yiyao Zhu , Jun Li , Xufeng Kou , Tao Wu

{"title":"Effects of NbN superconducting electrodes on the cryogenic characteristics of lamb wave mode AlScN piezoelectric MEMS resonators","authors":"Wenzhen Li , Xuankai Xu , Jiawei Li , Peng Dong , Yiyao Zhu , Jun Li , Xufeng Kou , Tao Wu","doi":"10.1016/j.sna.2025.117089","DOIUrl":"10.1016/j.sna.2025.117089","url":null,"abstract":"<div><div>In this work, we propose a S<sub>0</sub> mode Lamb wave resonator (LWR) on the Al<sub>0.7</sub>Sc<sub>0.3</sub>N platform, utilizing niobium nitride (NbN) as a superconducting electrode to replace traditional metal electrodes. Using the zero-resistivity characteristic of NbN at its critical temperature, we effectively reduce electrode loss in a cryogenic environment. Resonators with identical designs were fabricated using NbN and aluminum (Al) as electrode materials, respectively, and tested at temperatures as low as 4 K. The experimental results were fitted using a specially adapted modified Butterworth-Van Dyke (MBVD) model to analyze performance variations with temperature. Compared to the Al-based resonators, the NbN-based devices demonstrated superior cryogenic performance, achieving a quality factor (<em>Q</em>) of 1524, which is 7.29 times higher than at room temperature, and a figure-of-merit (FoM = <em>Q</em> × <em>k</em><sub><em>t</em></sub><sup>2</sup>) of 57.89, a 5.76-fold improvement. This study highlights the advantages of NbN electrodes over Al electrodes in cryogenic environments and provides a novel design approach for acoustic resonators in qubit systems, showcasing their potential for next-generation hybrid quantum networks.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117089"},"PeriodicalIF":4.9,"publicationDate":"2025-09-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145220050","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Impulse response-based actuation of ultrasound transducer for enhanced axial resolution in A-mode ultrasound scanner 基于脉冲响应的超声换能器驱动提高a型超声扫描仪轴向分辨率

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-09-22 DOI: 10.1016/j.sna.2025.117082

Dae-Il Kim , Se-Hwan Yang , Ji-Yong Um

{"title":"Impulse response-based actuation of ultrasound transducer for enhanced axial resolution in A-mode ultrasound scanner","authors":"Dae-Il Kim , Se-Hwan Yang , Ji-Yong Um","doi":"10.1016/j.sna.2025.117082","DOIUrl":"10.1016/j.sna.2025.117082","url":null,"abstract":"<div><div>This work proposes a novel method for adaptively acquiring the impulse response of an ultrasound scanner and using it to drive the transducer, thereby optimizing the pulse-echo response. Specifically, this work introduces a new technique for obtaining the equivalent impulse response of the entire system, including the ultrasound transmitter (TX) circuit, transducer, medium, and receiver (RX) circuit. Compared to conventional transducer actuation using pulse waves or sine waves, the proposed method achieves efficient acoustic energy transmission and reception by fully utilizing the system bandwidth through impulse response-based transducer re-actuation. The proposed impulse response acquisition algorithm and transducer actuation method were implemented on a field-programmable gate array (FPGA) device and validated using an A-mode ultrasound scanner circuit. Experimental results demonstrated that, under the same TX power condition, the axial resolution of the pulse-echo response was improved by at least 1.42 times compared to conventional pulse sine-wave, bipolar, and unipolar actuation methods.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117082"},"PeriodicalIF":4.9,"publicationDate":"2025-09-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145157996","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Optoelectronic integrated sensing and communication system based on InGaN/GaN MQW for wireless detection of air pressure 基于InGaN/GaN MQW的气压无线检测光电集成传感与通信系统

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-09-22 DOI: 10.1016/j.sna.2025.117086

Zitong Jiang, Zhaoling Chu, Minqi Huang, Meixin Lu, Fan Shi, Yongjing Wang, Jiabin Yan

{"title":"Optoelectronic integrated sensing and communication system based on InGaN/GaN MQW for wireless detection of air pressure","authors":"Zitong Jiang, Zhaoling Chu, Minqi Huang, Meixin Lu, Fan Shi, Yongjing Wang, Jiabin Yan","doi":"10.1016/j.sna.2025.117086","DOIUrl":"10.1016/j.sna.2025.117086","url":null,"abstract":"<div><div>The integration of air pressure sensing and wireless optical communication is crucial for data acquisition, processing, and transmission in sealed environments, ensuring both vacuum integrity and transmission efficiency while enhancing data security. Herein, this work proposes an optoelectronic integrated sensing and communication (ISAC) system capable of performing air pressure sensing and simultaneously transmitting information via wireless optical signals from a sealed chamber, which is based on an InGaN/GaN multiple quantum well integrated transceiver chip covered with a polydimethylsiloxane porous film. Variations in air pressure are converted into mechanical deformation of the porous film, which modulates the intensity of reflected light and alters the photocurrent detected by the on-chip photodiode, enabling simultaneous pressure sensing and optical signal modulation. The modulated visible light signal is wirelessly transmitted to an external optoelectronic receiver for air pressure data extraction. Experimental results demonstrate that the system can detect air pressure in the range of 51–101 kPa and successfully transmit the corresponding information to an external receiver. The proposed ISAC system features excellent output linearity, rapid response times, and electromagnetic immunity, making it suitable for air pressure detection applications in extreme environments such as vacuum-sealed chambers and underwater conditions.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117086"},"PeriodicalIF":4.9,"publicationDate":"2025-09-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145157999","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Sensitivity enhancement of NPD: Alq3 based organic humidity sensor via thermal annealing treatment 通过热处理提高NPD: Alq3基有机湿度传感器的灵敏度

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2025-09-22 DOI: 10.1016/j.sna.2025.117085

Hanan Alzahrani , Aisha Okmi , S. Sasi Florence , Khairul Anwar Ishak , Mohamad Hafiz Bin Mamat , Nur Adilah Roslan , Azzuliani Supangat

{"title":"Sensitivity enhancement of NPD: Alq3 based organic humidity sensor via thermal annealing treatment","authors":"Hanan Alzahrani , Aisha Okmi , S. Sasi Florence , Khairul Anwar Ishak , Mohamad Hafiz Bin Mamat , Nur Adilah Roslan , Azzuliani Supangat","doi":"10.1016/j.sna.2025.117085","DOIUrl":"10.1016/j.sna.2025.117085","url":null,"abstract":"<div><div>The present study aims to develop a simple and cost-effective organic-based humidity sensor with a planar Al/organic sensing layer/Al structure. The organic sensing layer, composed of pristine N,N′-Di(1-naphthyl)-N,N′-diphenyl-(1,1′-biphenyl)-4,4′-diamine (NPD) and tris(8-hydroxyquinolinato)aluminum (Alq₃) as well as their evenly blended composite, were deposited via a solution-processed spin coating technique onto aluminum electrodes with a ∼67.5 µm gap. Thermal annealing treatments ranging from 80 to 200 °C were conducted to improve surface properties and enhancing their sensing parameters for the purpose of device optimization. Wettability properties were observed, use being made of contact angle measurement while, the morphology insights were obtained by atomic force microscopy (AFM). The study employed both capacitive and resistive measurement modes, revealing a significant enhancement in humidity sensitivity post-annealing. Notably, the device annealed at 100°C exhibited the highest sensitivity, demonstrating superior repeatability and stability under cyclic humidity variations. The response and recovery times for transitions between 5 % and 100 % relative humidity (RH) were recorded at 11.17 s and 1.76 s<strong>,</strong> respectively. These findings provide deeper insights into organic-based humidity sensing mechanisms and paving their way for their potential integration of organic thin-film-based sensors for reliable and efficient humidity detection across diverse applications.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117085"},"PeriodicalIF":4.9,"publicationDate":"2025-09-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145157997","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0