SPIE Optical Systems Design最新文献_第4页

Simultaneous determination of optical constants, local thickness, and local roughness of thin films by imaging spectroscopic reflectometry 用成像光谱反射法同时测定薄膜的光学常数、局部厚度和局部粗糙度

SPIE Optical Systems Design Pub Date : 2015-09-24 DOI: 10.1117/12.2190091

D. Nečas, I. Ohlídal, J. Vodák, M. Ohlídal, D. Franta

{"title":"Simultaneous determination of optical constants, local thickness, and local roughness of thin films by imaging spectroscopic reflectometry","authors":"D. Nečas, I. Ohlídal, J. Vodák, M. Ohlídal, D. Franta","doi":"10.1117/12.2190091","DOIUrl":"https://doi.org/10.1117/12.2190091","url":null,"abstract":"A new optical characterization method based on imaging spectroscopic reflectometry (ISR) is presented and illustrated on the characterization of rough non-uniform epitaxial ZnSe films prepared on GaAs substrates. The method allows the determination of all parameters describing the thin films exhibiting boundary roughness and non-uniformity in thickness, i.e. determination of the spectral dependencies of the optical constants, map of local thickness and map of local rms values of heights of the irregularities for the rough boundaries. The local normal reflectance spectra in ISR correspond to small areas (37×37 μm2) on the thin films measured within the spectral range 270{900 nm by pixels of a CCD camera serving as the detector of imaging spectrophotometer constructed in our laboratory. To our experience the small areas corresponding to the pixels are sufficiently small so that the majority of the films can be considered uniform in all parameters within these areas. Boundary roughness is included into the reflectance formulas by means of the scalar diffraction theory (SDT) and the optical constant spectra of the ZnSe films were expressed by the dispersion model based on the parametrization of the joint density of electronic states (PJDOS). In general, there is a correlation between the searched parameters if the individual local reflectance spectra are fitted separately and, therefore, the local reflectance spectra measured for all the pixels are treated simultaneously using so called multi-pixel method in order to remove or reduce this correlation and determine the values of all the parameters with a sufficient accuracy. The results of the optical characterization of the same selected sample of the epitaxial ZnSe thin film obtained using the method presented here and combined method of variable-angle spectroscopic ellipsometry, spectroscopic reflectometry and single-pixel immersion spectroscopic reflectometry are introduced in the contribution as well.","PeriodicalId":212434,"journal":{"name":"SPIE Optical Systems Design","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-09-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116959039","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Compact low-cost lensless digital holographic microscope for topographic measurements of microstructures in reflection geometry 用于反射几何中微结构的地形测量的小型低成本无透镜数字全息显微镜

SPIE Optical Systems Design Pub Date : 2015-09-24 DOI: 10.1117/12.2191073

A. Adinda-Ougba, B. Kabir, N. Koukourakis, F. Mitschker, N. Gerhardt, M. Hofmann

引用次数: 1

Sensitivity of null testing for a local deformation 局部变形零试验的灵敏度

SPIE Optical Systems Design Pub Date : 2015-09-24 DOI: 10.1117/12.2191545

A. Muñoz Potosi, L. G. Valdivieso-González, R. Díaz-Uribe, M. Campos García, F. G. Granados Agustín

引用次数: 0

Optical surfaces for high power laser coatings 用于高功率激光涂层的光学表面

SPIE Optical Systems Design Pub Date : 2015-09-24 DOI: 10.1117/12.2190931

L. Jensen, D. Ristau

引用次数: 0

Two-dimension lateral shearing interferometry with dual-mode 双模二维横向剪切干涉测量

SPIE Optical Systems Design Pub Date : 2015-09-24 DOI: 10.1117/12.2189878

Zhixiang Liu, Tingwen Xin, Yadong Jiang, B. Lv, Fuchao Xu

{"title":"Two-dimension lateral shearing interferometry with dual-mode","authors":"Zhixiang Liu, Tingwen Xin, Yadong Jiang, B. Lv, Fuchao Xu","doi":"10.1117/12.2189878","DOIUrl":"https://doi.org/10.1117/12.2189878","url":null,"abstract":"Lateral shearing interferometry is an attractive technique to measure the wavefront aberration of high numerical aperture optical systems, of which using two-dimensional grating can divide and shear the wavefront in two-dimension simultaneously. A two-dimension lateral shearing interferometer based on chessboard grating was designed, which can work in dual-mode: the phase shifting mode and the Fourier transform mode. In the phase shifting mode, the phase shifting was realized by moving chessboard grating along the shearing direction in the image plane. In the Fourier transform mode, the spatial carrier frequency was realized by positioning the grating at the Talbot distance of the objective image plane. An experimental setup was designed to measure a 10×, NA0.25 microscope objective at 632.8nm wavelength. The objective was measured by the experimental setup in dual-mode, the results showed that the wavefront of the objective was 0.172λ RMS; in the phase shifting mode, the repeatability (3σ) of RMS was 1.1mλ; in the Fourier transform mode, the repeatability (3σ) of RMS was 2.7mλ; after correcting the coordinates of the wavefront, the differences of Z5 to Z36 between phase shifting mode and the Fourier transform mode were better than 8mλ.","PeriodicalId":212434,"journal":{"name":"SPIE Optical Systems Design","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-09-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116500127","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

In-line metrology setup for periodic nanostructures based on sub-wavelength diffraction 基于亚波长衍射的周期性纳米结构在线测量装置

SPIE Optical Systems Design Pub Date : 2015-09-24 DOI: 10.1117/12.2191346

M. Kreuzer, Jordi Gomis Bresco, M. Sledzinska, C. S. Sotomayor Torres

引用次数: 2

Absolute testing of flats in sub-stitching interferometer by rotation-shift method 旋转移位法对亚拼接干涉仪平面的绝对检测

SPIE Optical Systems Design Pub Date : 2015-09-24 DOI: 10.1117/12.2191288

Xin Jia, Fuchao Xu, Weimin Xie, Yun Li, Ting-wen Xing

{"title":"Absolute testing of flats in sub-stitching interferometer by rotation-shift method","authors":"Xin Jia, Fuchao Xu, Weimin Xie, Yun Li, Ting-wen Xing","doi":"10.1117/12.2191288","DOIUrl":"https://doi.org/10.1117/12.2191288","url":null,"abstract":"Most of the commercial available sub-aperture stitching interferometers measure the surface with a standard lens that produces a reference wavefront, and the precision of the interferometer is generally limited by the standard lens. The test accuracy can be achieved by removing the error of reference surface by the absolute testing method. When the testing accuracy (repeatability and reproducibility) is close to 1nm, in addition to the reference surface, other factors will also affect the measuring accuracy such as environment, zoom magnification, stitching precision, tooling and fixture, the characteristics of optical materials and so on. We establish a stitching system in the thousand level cleanroom. The stitching system is including the Zygo interferometer, the motion system with Bilz active isolation system at level VC-F. We review the traditional absolute flat testing methods and emphasize the method of rotation-shift functions. According to the rotation-shift method we get the profile of the reference lens and the testing lens. The problem of the rotation-shift method is the tilt error. In the motion system, we control the tilt error no more than 4 second to reduce the error. In order to obtain higher testing accuracy, we analyze the influence surface shape measurement accuracy by recording the environment error with the fluke testing equipment.","PeriodicalId":212434,"journal":{"name":"SPIE Optical Systems Design","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-09-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132215035","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Scattermeter for measurement of solar cells 太阳能电池测量用散射计

SPIE Optical Systems Design Pub Date : 2015-09-24 DOI: 10.1117/12.2190779

P. Nádaský, J. Klus, J. Vodák, Štěpán Šustek, M. Ohlídal

引用次数: 0

Contribution to the standardization of 3D measurements using a high-resolution PMD camera 使用高分辨率PMD相机对3D测量标准化做出贡献

SPIE Optical Systems Design Pub Date : 2015-09-24 DOI: 10.1117/12.2191042

Henrik Lietz, Jörg Eberhardt

{"title":"Contribution to the standardization of 3D measurements using a high-resolution PMD camera","authors":"Henrik Lietz, Jörg Eberhardt","doi":"10.1117/12.2191042","DOIUrl":"https://doi.org/10.1117/12.2191042","url":null,"abstract":"Three-dimensional image acquisition is still a growing field in optical metrology. Various methods are available to reconstruct an object’s three-dimensional surface. The five main types of 3D cameras are stereo cameras, triangulation (pattern or laser scanning), interferometry, light-field cameras and ToF (time-of-flight) cameras. PMD (photonic mixing device) cameras measure the time of light, and thus belong to the field of ToF cameras. Each camera type has fields of application for which it is particularly well suited. Even within PMD cameras, there is a distinction made between applications for indoor and outdoor use. Until today, there is no method to measure and characterize 3D cameras uniformly. Desirable would be a method, which is able to measure all types of cameras equally. With this work, we want to contribute to the standardization of 3D cameras. In this case, we use a PMD camera for outdoor applications with relatively large pixels. It is shown how to determine the spatial resolution of a PMD camera from both, the amplitude and the distance image. Further, a novel method is presented how to determine the resolution enhancement in an image via gradient image evaluation. Finally, a method is proposed which evaluates the quality of resolution enhancement, when no ground truth data is available. Both are particularly interesting for the use of super-resolution (SR) applications.","PeriodicalId":212434,"journal":{"name":"SPIE Optical Systems Design","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-09-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132189862","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Precision optical device of freeform defects inspection 精密自由曲面缺陷检测光学装置

SPIE Optical Systems Design Pub Date : 2015-09-24 DOI: 10.1117/12.2191202

S. Meguellati

{"title":"Precision optical device of freeform defects inspection","authors":"S. Meguellati","doi":"10.1117/12.2191202","DOIUrl":"https://doi.org/10.1117/12.2191202","url":null,"abstract":"This method of optical scanning presented in this paper is used for precision measurement deformation in shape or absolute forms in comparison with a reference component form, of optical or mechanical components, on reduced surfaces area that are of the order of some mm2 and more. The principle of the method is to project the image of the source grating to palpate optically surface to be inspected, after reflection; the image of the source grating is printed by the object topography and is then projected onto the plane of reference grating for generate moiré fringe for defects detection. The optical device used allows a significant dimensional surface magnification of up to 1000 times the area inspected for micro-surfaces, which allows easy processing and reaches an exceptional nanometric imprecision of measurements. According to the measurement principle, the sensitivity for displacement measurement using moiré technique depends on the frequency grating, for increase the detection resolution. This measurement technique can be used advantageously to measure the deformations generated by the production process or constraints on functional parts and the influence of these variations on the function. The optical device and optical principle, on which it is based, can be used for automated inspection of industrially produced goods. It can also be used for dimensional control when, for example, to quantify the error as to whether a piece is good or rubbish. It then suffices to compare a figure of moiré fringes with another previously recorded from a piece considered standard; which saves time, money and accuracy. The technique has found various applications in diverse fields, from biomedical to industrial and scientific applications.","PeriodicalId":212434,"journal":{"name":"SPIE Optical Systems Design","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-09-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114784657","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0