SPIE Optical Systems Design最新文献_第3页

An automated calibration system that combines fringe projection and 2D digital image correlation 一种结合条纹投影和二维数字图像相关的自动校准系统

SPIE Optical Systems Design Pub Date : 2015-09-24 DOI: 10.1117/12.2191110

P. Siegmann, L. Felipe-Sesé, F. D. Díaz Garrido, J. Pineiro-Ave

{"title":"An automated calibration system that combines fringe projection and 2D digital image correlation","authors":"P. Siegmann, L. Felipe-Sesé, F. D. Díaz Garrido, J. Pineiro-Ave","doi":"10.1117/12.2191110","DOIUrl":"https://doi.org/10.1117/12.2191110","url":null,"abstract":"An optical non-contact and full-field system that allows large displacement measurements in x-, y- and z-direction is presented. The system combines 2-dimentional digital image correlation (for in-plane measurements) and fringe projection (for out-of-plane displacements) and uses only one camera. The in- and out-of-plane displacements are obtained at the same instant allowing real-time measurements thanks to a color encoding filtering procedure. The out-of-plane measurement allows the correction of the in-plane measurements and the system has to be precisely aligned by following an established alignment procedure. Furthermore, a calibration has to be done to obtain a fringe parameter k for each pixel of the specimen surface image necessary to relate the shifted phase with the out-of-plane displacements. The presented system obtains different values of k for each pixel because of the divergent and non-normal incidence of the fringe beam onto the sample surface (non zero incidence angle). The calibration is performed automatically and only has to be done once for each configuration of the system. The system is portable and can be easily adapted to measure large displacements and wide areas (using small incidence angle) or smaller distances but with higher resolutions (when increasing the incidence angle).","PeriodicalId":212434,"journal":{"name":"SPIE Optical Systems Design","volume":"83 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-09-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129056860","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Fabrication and testing of STREEGO: a compact optical payload for earth observation on small satellites STREEGO:用于小卫星地球观测的紧凑型光学有效载荷的制造和测试

SPIE Optical Systems Design Pub Date : 2015-09-24 DOI: 10.1117/12.2191285

M. Rossi, I. Ferrario, R. Ghislanzoni, P. Holbrouck, A. Ritucci, M. Taccola, M. Terraneo, F. Zocchi

引用次数: 3

Manufacturing and testing large SiC mirrors in an efficient way 高效制造和测试大型碳化硅反射镜

SPIE Optical Systems Design Pub Date : 2015-09-24 DOI: 10.1117/12.2189751

Xuejun Zhang, Xuefeng Zeng, Haixiang Hu, Xiao Luo

引用次数: 2

Possibilities and limitations of imaging spectroscopic reflectometry in optical characterization of thin films 成像光谱反射法在薄膜光学表征中的可能性和局限性

SPIE Optical Systems Design Pub Date : 2015-09-24 DOI: 10.1117/12.2191052

M. Ohlídal, I. Ohlídal, D. Nečas, J. Vodák, D. Franta, P. Nádaský, František Vižd'a

{"title":"Possibilities and limitations of imaging spectroscopic reflectometry in optical characterization of thin films","authors":"M. Ohlídal, I. Ohlídal, D. Nečas, J. Vodák, D. Franta, P. Nádaský, František Vižd'a","doi":"10.1117/12.2191052","DOIUrl":"https://doi.org/10.1117/12.2191052","url":null,"abstract":"It is possible to encounter thin films exhibiting various defects in practice. One of these defects is area non-uniformity in optical parameters (e.g. in thickness). Therefore it is necessary to have methods for an optical characterization of nonuniform thin films. Imaging spectroscopic reflectometry provides methods enabling us to perform an efficient optical characterization of such films. It gives a possibility to determine spectral dependencies of a local reflectance at normal incidence of light belonging to small areas (37 μm × 37 μm in our case) on these non-uniform films. The local reflectance is measured by individual pixels of a CCD camera serving as a detector of an imaging spectroscopic reflectometer. It is mostly possible to express the local reflectance using formulas corresponding to a uniform thin film. It allows a relatively simple treatment of the experimental data obtained by imaging spectroscopic reflectometry. There are three methods for treating these experimental data in the special case of thickness non-uniformity, i.e. in the case of the same optical constants within a certain area of the film - single pixel imaging spectroscopic reflectometry method, combination of single-pixel imaging spectroscopic reflectometry method and conventional methods (conventional single spot spectroscopic ellipsometry and spectrophotometry), and multi-pixel imaging spectroscopic reflectometry method. These methods are discussed and examples of the optical characterization of thin films non-uniform in thickness corresponding to these methods are presented in this contribution.","PeriodicalId":212434,"journal":{"name":"SPIE Optical Systems Design","volume":"47 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-09-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114797488","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 4

Surface assessment and mitigation of DUV optics DUV光学的表面评估和减缓

SPIE Optical Systems Design Pub Date : 2015-09-24 DOI: 10.1117/12.2190684

Jue Wang

引用次数: 7

Reducing the cycle time of cementing processes for high quality doublets 减少高质量双晶胶凝工艺周期

SPIE Optical Systems Design Pub Date : 2015-09-24 DOI: 10.1117/12.2196876

C. Wilde, F. Hahne, P. Langehanenberg, J. Heinisch

{"title":"Reducing the cycle time of cementing processes for high quality doublets","authors":"C. Wilde, F. Hahne, P. Langehanenberg, J. Heinisch","doi":"10.1117/12.2196876","DOIUrl":"https://doi.org/10.1117/12.2196876","url":null,"abstract":"For the manufacturing of high performance optical systems, centered alignment of the optical surfaces within the assembly is becoming increasingly important. In this contribution, we will present a system for the automated alignment of optical surfaces for the high-throughput manufacturing of cemented doublets (and triplets) with optimized imaging performance. First of all, different concepts for the alignment of doublets etc. are discussed. Standard methods for cementing evaluate mechanical features, such as the outer barrel of one element as reference axis. Using this procedure the optical performance of the assembly that can be achieved is limited by imperfections in the collinearity of the element’s barrel axis and its optical axis. Instead, using the optical axis of the bottom element as target axis opens up perspectives for the production of multiplets with perfect symmetric imaging performance. For this concept, all three center of curvature positions of the optical surfaces are measured. Then, the top surface is aligned to the bottom element's optical axis using high-precision actuators. In order to increase the throughput of this procedure, the system is equipped with a novel measurement head that acquires autocollimation images of all three surfaces of a doublet at the same time. Thus, the positions of all surfaces are measured simultaneously during just a single rotation, avoiding both additional rotations and focus movements. Using this approach, cycle times can significantly be reduced from an average of 1 min to less than 10 seconds (w/o curing time). The system is reconfigurable in order to support a wide range of sample designs and enables cementing of high quality optics with centering errors below 2 μm.","PeriodicalId":212434,"journal":{"name":"SPIE Optical Systems Design","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-09-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115938936","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

Multilevel micro-structuring of glassy carbon molds for precision glass molding 精密玻璃成型用玻碳模具的多级微结构

SPIE Optical Systems Design Pub Date : 2015-09-24 DOI: 10.1117/12.2191661

K. Prater, J. Dukwen, T. Scharf, H. Herzig, S. Plöger, A. Hermerschmidt

{"title":"Multilevel micro-structuring of glassy carbon molds for precision glass molding","authors":"K. Prater, J. Dukwen, T. Scharf, H. Herzig, S. Plöger, A. Hermerschmidt","doi":"10.1117/12.2191661","DOIUrl":"https://doi.org/10.1117/12.2191661","url":null,"abstract":"Replication techniques for diffractive optical elements (DOEs) in soft materials such as plastic injection molding are state of the art. For precision glass molding in glasses with high transition temperatures, molds with extreme thermal resistivity, low chemical reactivity and high mechanical strength are needed. Glassy Carbon can be operated up to 2000°C making it possible to mold almost all glasses including Fused Silica with a transition temperatures above 1060°C. For the structuring of Glassy Carbon wafers photolithography and a RIE process is used. We have developed a process using Si as a hard mask material. If the flow rates of the etching gases O2 and SF6 are chosen properly, high selectivity of GC to Si 19:1 can be achieved, which provides excellent conditions to realize high resolution elements with feature size down to 1 micron and fulfills requirements for optical applications. We fabricated several multilevel GC molds with 8 levels of structuring. Two different optical functionalities were implemented: 6x6 array beamsplitter and 1x4 linear beamsplitter. The molds were applied for precision glass molding of a low Tg glass L-BAL 42 (from Ohara) with a transition temperature of 565°C. Their optical performance was measured. A more detailed analysis of the impact of mold fabrication defects on optical performance is done. Rigorous coupled wave analysis simulations are performed, where we included fabrication constrains such as duty cycle, edge depth errors, wall verticality and misalignment errors. We will compare the results with the design specifications and discuss the influence of fabrication errors introduced during the different process steps.","PeriodicalId":212434,"journal":{"name":"SPIE Optical Systems Design","volume":"94 7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-09-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127987208","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Handheld probes and galvanometer scanning for optical coherence tomography 光学相干断层扫描的手持探头和振镜扫描

SPIE Optical Systems Design Pub Date : 2015-09-24 DOI: 10.1117/12.2191130

V. Duma, G. Dobre, D. Demian, R. Cernat, C. Sinescu, F. Topala, M. Negruțiu, Gheorghe Huţiu, A. Bradu, J. Rolland, A. Podoleanu

{"title":"Handheld probes and galvanometer scanning for optical coherence tomography","authors":"V. Duma, G. Dobre, D. Demian, R. Cernat, C. Sinescu, F. Topala, M. Negruțiu, Gheorghe Huţiu, A. Bradu, J. Rolland, A. Podoleanu","doi":"10.1117/12.2191130","DOIUrl":"https://doi.org/10.1117/12.2191130","url":null,"abstract":"As part of the ongoing effort of the biomedical imaging community to move Optical Coherence Tomography (OCT) systems from the lab to the clinical environment and produce OCT systems appropriate for multiple types of investigations in a medical department, handheld probes equipped with different types of scanners need to be developed. These allow different areas of a patient’s body to be investigated using OCT with the same system and even without changing the patient’s position. This paper reviews first the state of the art regarding OCT handheld probes. Novel probes with a uni-dimensional (1D) galvanometer-based scanner (GS) developed in our groups are presented. Their advantages and limitations are discussed. Aspects regarding the use of galvoscanners with regard to Micro-Electro- Mechanical Systems (MEMS) are pointed out, in relationship with our studies on optimal scanning functions of galvanometer devices in OCT. These scanning functions are briefly discussed with regard to their main parameters: profile, theoretical duty cycle, scan frequency, and scan amplitude. The optical design of the galvoscanner and refractive optics combination in the probe head, optimized for various applications, is considered. Perspectives of the field are pointed out in the final part of the paper.","PeriodicalId":212434,"journal":{"name":"SPIE Optical Systems Design","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-09-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127304431","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

Measuring and quantifying scatter from a variety of sample types 测量和量化来自各种样品类型的散射

SPIE Optical Systems Design Pub Date : 2015-09-24 DOI: 10.1117/12.2190986

J. Stover

引用次数: 1

Advances in corneal topography measurements with conical null-screens 锥形零屏测量角膜地形图的研究进展

SPIE Optical Systems Design Pub Date : 2015-09-24 DOI: 10.1117/12.2192137

M. Campos-García, Cesar Cossio-Guerrero, O. Huerta-Carranza, V. Moreno-Oliva

引用次数: 5