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2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)最新文献

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Process tolerant design of baw resonators via hole engineering 基于孔工程的双腔谐振器工艺容差设计
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6627265
B. Figeys, R. Jansen, B. Nauwelaers, H. Tilmans, X. Rottenberg
{"title":"Process tolerant design of baw resonators via hole engineering","authors":"B. Figeys, R. Jansen, B. Nauwelaers, H. Tilmans, X. Rottenberg","doi":"10.1109/TRANSDUCERS.2013.6627265","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627265","url":null,"abstract":"This paper presents a design approach for a process tolerant design of BAW resonators. Process variations, e.g., etch non-uniformities, affect the edge definition and the exact dimensions of the resonator, and thus impact on the resonance frequency. Through simulation it is demonstrated that a properly designed periodic hole distribution in the bulk of the device can compensate such frequency variations. The perforated resonator is modeled by using effective material properties to make an abstraction of the holes in the resonator. This effective medium model is extended to include the electrostatic spring softening, for which an effective Young's modulus depending on the applied DC-bias is derived. Finally, results are presented for square lattices of circular and rectangular hole shapes.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"116 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131926747","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Ferrofluid-assisted levitation mechanism for micromotor applications 用于微电机的铁磁流体辅助悬浮机构
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6627368
B. Assadsangabi, M. H. Tee, K. Takahata
{"title":"Ferrofluid-assisted levitation mechanism for micromotor applications","authors":"B. Assadsangabi, M. H. Tee, K. Takahata","doi":"10.1109/TRANSDUCERS.2013.6627368","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627368","url":null,"abstract":"This paper reports a highly simple and robust levitation method realized by ferrofluid for micromotor applications. A layer of ferrofluid is self-sustained on a permanent magnet to serve as liquid bearing that lifts the magnet up on the substrate, enabling low-friction movements of the magnet. A levitation height of ~500 μm is observed with a 1.6-mm-sized NdFeB magnet. The levitated magnet is electromagnetically driven by microfabricated planar coils to demonstrate a linear micromotor. The dynamic responses of the magnet slider are characterized to show its acceleration level of ~1 m/s2. The actuation force of 388 μN or greater is obtained. Using an array of the planar coils as the rail track, continuous actuations of the slider is achieved with the maximum velocity of 19 mm/s.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131943267","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Top-down batch-fabricating bottom-up self-assembles for region-selective multi-functionalization of microfluidic chips 基于区域选择性多功能化的微流控芯片自组装
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6627360
Chuanzhao Chen, P. Xu, Xinxin Li
{"title":"Top-down batch-fabricating bottom-up self-assembles for region-selective multi-functionalization of microfluidic chips","authors":"Chuanzhao Chen, P. Xu, Xinxin Li","doi":"10.1109/TRANSDUCERS.2013.6627360","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627360","url":null,"abstract":"In this study, we propose and develop a novel technology to top-down batch-fabricate bottom up SAMs(self-assembled mono-layers) for sequentially patterning region-selective flow-guide surface-functionalizations of micro-flow chips. Using IC-like masked photolithographic process, different segments of micro-channel chips are surface-modified with different molecule-layers for designated fluidic properties, such as hydro(oleo)-phobicity, hydro(oleo)-philicity, or other bio/chemical functions like repellence of nonspecific bio-adsorption. By using this technology, wafer-level region-selective multiple modifications for microchannel-chips are experimentally implemented and the designated flow-guide and chemical-exaction functions are demonstrated.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132397994","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Novel format chromatographic columns for improved overall analytical performance 新格式色谱柱，提高整体分析性能
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6626746
D. Gaddes, Jessica L. Westland, F. Dorman, S. Tadigadapa
{"title":"Novel format chromatographic columns for improved overall analytical performance","authors":"D. Gaddes, Jessica L. Westland, F. Dorman, S. Tadigadapa","doi":"10.1109/TRANSDUCERS.2013.6626746","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626746","url":null,"abstract":"In this work, we have developed gas chromatography columns using microfabrication techniques and interfaced them using compression sealing technique to enable high temperature (~400°C) operation. Specifically, we present graphite compression sealing technique to achieve leak-proof fluidic interconnection between the inlet tubing and the microchannel, thus removing the limiting factor of epoxy and allowing for high temperature operations. This approach also represents a significant improvement from previous designs in which the tubing are interfaced to the microfluidic channel from the side of the chip resulting which results in significant band broadening and tailing, as well as making the device less amenable to automatic installation. The microfabricated gas chromatography (μGC) column has been successfully used to perform high temperature gas separation.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130032529","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Ultrasonically actuated inserted neural probes for increased recording reliability 超声驱动插入神经探针，增加记录可靠性
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6626906
Po-Cheng Chen, Catharine G. Clark, C. Shen, C. Schaffer, A. Lal
{"title":"Ultrasonically actuated inserted neural probes for increased recording reliability","authors":"Po-Cheng Chen, Catharine G. Clark, C. Shen, C. Schaffer, A. Lal","doi":"10.1109/TRANSDUCERS.2013.6626906","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626906","url":null,"abstract":"In this paper we investigated the effect of ultrasonic insertion of neural probes on tissue induced immune response. We report reduction of the activated microglia population by a factor of 1.96, measured over 18 insertions. This suggests decreased immune response for neural probes inserted using ultrasonic insertion. This addresses a key requirement of increasing the operational lifetime of neural probe recording sites. A wirelessly connected neural probe system is used for in vivo electrical, mechanical, and ultrasonic response measurement. A chronic mouse model with in vivo two-photon excited fluorescence microscopy combined with the neural interface is developed to investigate the immune response of the brain, as a potential cause for microelectrode failure with continuous electrical neural measurements.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130175940","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Experimental study on the impact of anchor losses on the quality factor of contour mode AlN resonators 锚损对轮廓模AlN谐振器品质因子影响的实验研究
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6627307
J. Segovia-Fernandez, M. Cremonesi, C. Cassella, A. Frangi, G. Piazza
{"title":"Experimental study on the impact of anchor losses on the quality factor of contour mode AlN resonators","authors":"J. Segovia-Fernandez, M. Cremonesi, C. Cassella, A. Frangi, G. Piazza","doi":"10.1109/TRANSDUCERS.2013.6627307","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627307","url":null,"abstract":"This paper presents an experimental study on the impact of anchor losses on the quality factor (Q) of laterally vibrating AlN contour mode resonators for three different resonance frequency devices (220 MHz, 370 MHz, and 1.05 GHz). Anchors of different width (Wa) and length (La) were designed as supports for resonators having a vibrating body of identical dimensions. The results confirm that the main source of damping is associated with anchor losses at 220 MHz and interfacial losses at 1.05 GHz. Furthermore, finite element analysis (FEA) was used to model anchor losses in AlN CMRs, exhibiting excellent agreement with the measurements.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134120144","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 26
Confocal laser scanning microscopic observation of deformation, biological reaction, and contact of cells using mechanical trapping system with parylene micro filter 采用聚对二甲苯微滤片的机械捕获系统，共聚焦激光扫描显微观察细胞的变形、生物反应和接触
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6626791
Y. Abe, K. Kamiya, T. Osaki, R. Kawano, N. Miki, Shoji Takeuchi
{"title":"Confocal laser scanning microscopic observation of deformation, biological reaction, and contact of cells using mechanical trapping system with parylene micro filter","authors":"Y. Abe, K. Kamiya, T. Osaki, R. Kawano, N. Miki, Shoji Takeuchi","doi":"10.1109/TRANSDUCERS.2013.6626791","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626791","url":null,"abstract":"This paper proposes a confocal laser scanning microscopic (CLSM) observation system for liposomes and cells that are mechanically trapped on a parylene microfilter. CLSM allowed us to acquire three-dimensional and highly sensitive fluorescent images, which we exploited to evaluate the deformability of liposomes with or without cholesterol, the amount of calcein that was introduced into the liposomes via membrane proteins, and the contact areas of the adjacent cells. The proposed system is readily applicable to analyze a single liposome and cells.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"150 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134228184","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Pirani gauge based on alternative self-heating of silicon nanowire 基于硅纳米线自加热的皮拉尼测量仪
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6627330
J. Ruellan, J. Arcamone, D. Mercier, C. Dupré, L. Duraffourg
{"title":"Pirani gauge based on alternative self-heating of silicon nanowire","authors":"J. Ruellan, J. Arcamone, D. Mercier, C. Dupré, L. Duraffourg","doi":"10.1109/TRANSDUCERS.2013.6627330","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627330","url":null,"abstract":"This work reports on the realization of the smallest Pirani gauge ever, based upon highly-doped silicon nanowires. This paper details the fabrication process and the characterization of the thermal properties of Si nanowires, such as thermal conductivity and thermal coefficient of resistivity for various working temperatures in the 300K-700K range. A dynamic transduction technique, based on the 3-omega measurement is described and the device performances (i.e. sensitivity and signal-to-noise ratio) are measured. With the tested devices a resolution below 5%/Hz1/2 is obtained in the 0.1mbar-1bar range.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"57 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134231369","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Well-based microfluidic chip for monitoring non-contacting cell-to-cell interactions through microchannel 基于良好的微流控芯片，用于通过微通道监测非接触细胞间相互作用
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6626792
Myounggun Jeon, Hey Jin Tak, Y. Kim, E. Yoon, Sehyun Shin, Il-Joo Cho
{"title":"Well-based microfluidic chip for monitoring non-contacting cell-to-cell interactions through microchannel","authors":"Myounggun Jeon, Hey Jin Tak, Y. Kim, E. Yoon, Sehyun Shin, Il-Joo Cho","doi":"10.1109/TRANSDUCERS.2013.6626792","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626792","url":null,"abstract":"We present a new well-based microfluidic cell culture chip for monitoring non-contacting cell-to-cell interactions through micro-channels between chambers. The chip is fabricated with PDMS layers using SU-8 as molds. The fabricated chip was applied to monitor non-contacting cell-to-cell interaction between human glioblastoma cells and tau-engineered cells to study the association between malignant brain tumor and Alzheimer's disease (AD). Our results clearly demonstrated that the secreted components from glioblastoma cells enhanced tau aggregation. We have successfully demonstrated that the proposed well-based cell-to-cell interaction-monitoring chip can make two different cells interact through micro-channels without contacting each other using interactions between tau-BiFC cells and glioblastoma cells.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133883485","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Piezo-actuated tunable diamond/AlN micro lenses 压电驱动可调金刚石/AlN微透镜
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6627269
V. Zuerbig, D. Paetz, W. Pletschen, J. Hees, R. E. Sah, L. Kirste, N. Heidrich, V. Cimalla, C. Nebel, O. Ambacher, V. Lebedev
{"title":"Piezo-actuated tunable diamond/AlN micro lenses","authors":"V. Zuerbig, D. Paetz, W. Pletschen, J. Hees, R. E. Sah, L. Kirste, N. Heidrich, V. Cimalla, C. Nebel, O. Ambacher, V. Lebedev","doi":"10.1109/TRANSDUCERS.2013.6627269","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627269","url":null,"abstract":"Tunable micro lenses based on boron-doped nanocrystalline diamond and aluminum nitride (AlN) thin films are investigated. It is demonstrated that such a material combination is advantageous for the fabrication of highly transparent, mechanically stable optical components capable to operate at high actuation frequencies. In addition, it is shown that radially segmented AlN piezo-actuators allow for free aspheric deformation of the lens surface. It enables the use of such tunable lenses either in wave front filters or for correction of aberrations induced in complex optical systems.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134390066","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
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