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2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)最新文献

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Wafer level packaging for chambers of two different pressures 圆片级封装两种不同压力的腔室
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6626957
K.-C Liang, C.-W Cheng, C.H. Lin, Wei-Chen Lai, W. Fang
{"title":"Wafer level packaging for chambers of two different pressures","authors":"K.-C Liang, C.-W Cheng, C.H. Lin, Wei-Chen Lai, W. Fang","doi":"10.1109/TRANSDUCERS.2013.6626957","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626957","url":null,"abstract":"This study introduces a special process design to fabricate two different pressure chambers (sealed and unsealed chambers) simultaneously by a single wafer bonding process. The pressure in unsealed-chamber is ambient-pressure and sealed-chamber is a specific pressure defined during bonding processes. Two types of sensors were characterized to verify the process scheme. One is a 32 kHz resonator and the other is a Pirani gauge. Characterizations on these two sensors prove that the sensors are functional in different pressure conditions in both unsealed chambers and 10mbar sealed chambers. Therefore the proposed process design is capable of fabricating two different pressure chambers at the same time.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"304 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124332115","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fabrication and characterization of composite hydrogel particles with x-ray attenuating media x射线衰减介质复合水凝胶颗粒的制备与表征
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6627245
Congshun Wang, Xiaoning Wang, S. Anderson, Xin Zhang
{"title":"Fabrication and characterization of composite hydrogel particles with x-ray attenuating media","authors":"Congshun Wang, Xiaoning Wang, S. Anderson, Xin Zhang","doi":"10.1109/TRANSDUCERS.2013.6627245","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627245","url":null,"abstract":"This paper reports the characterization of composite hydrogel particles by using a novel fabrication method, which produces the X-ray attenuating media with particle varying size and shape for computed tomography (CT) imaging. The rheological testing demonstrated tunable mechanical properties of composite hydrogel based on UV crosslinking time. The leakage testing verified longer stability time of gold nanoparticle-based X-ray attenuating media. In contradistinction to the currently clinically available iodinated CT contrast agents, as well as recently developed nanoparticulate CT contrast agents, the approach presented herein yields an engineering flexibility to the design of CT contrast agents for specific imaging and sensing applications.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124382429","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Microdroplet-based synthesis and centrifuge-free retrieval of nanoparticles via a continuous flow micropost array railing system 基于微滴的连续流微柱阵列栏杆系统合成和无离心回收纳米颗粒
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6627352
K. Iwai, E. Erdem, R. Sochol, Jim C. Cheng, F. Doyle, A. Pisano, Liwei Lin
{"title":"Microdroplet-based synthesis and centrifuge-free retrieval of nanoparticles via a continuous flow micropost array railing system","authors":"K. Iwai, E. Erdem, R. Sochol, Jim C. Cheng, F. Doyle, A. Pisano, Liwei Lin","doi":"10.1109/TRANSDUCERS.2013.6627352","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627352","url":null,"abstract":"Microfluidic droplet-based microreactors offer significant advantages for the synthesis of nanoparticles, including high control of reagent loading and mixing. One limitation, however, is that retrieving synthesized nanoparticles from microdroplets typically requires laborious and time-consuming “off-chip” procedures (e.g., droplet collection, centrifugication and nanoparticle resuspension). To bypass these issues, here we introduce a continuous flow microfluidic system to enable the rapid and autonomous droplet-based generation and retrieval of nanoparticles. Specifically, we utilize a micropost array railing technique in order to passively: (i) generate microdroplets in which nanoparticles are synthesized, (ii) guide the particle-containing droplets into an oil-phase wash solution (i.e., to remove surfactant), and (iii) “lyse” the microdroplets to release the nanoparticles into the water flow. Experimental results demonstrated the successful synthesis and retrieval of magnetic iron-oxide nanoparticles, which can be employed for applications including bioseparation, biotagging and imaging.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"201 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124519260","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Palladium-based sensor for electrochemical detection of manganese in the environment 用于环境中锰电化学检测的钯基传感器
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6626975
W. Kang, W. Yue, X. Pei, A. Bange, E. Haynes, W. Heineman, I. Papautsky
{"title":"Palladium-based sensor for electrochemical detection of manganese in the environment","authors":"W. Kang, W. Yue, X. Pei, A. Bange, E. Haynes, W. Heineman, I. Papautsky","doi":"10.1109/TRANSDUCERS.2013.6626975","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626975","url":null,"abstract":"Herein, we report a palladium-based electrochemical sensor for cathodic stripping voltammetry (CSV) detection of highly electronegative manganese (Mn). The unique aspect of the sensor is the integration of electroplated palladium (Pd) working and auxiliary electrodes on copper (Cu) substrate with a new Cu/CuCl2 reference electrode, which reduces cost and simplifies fabrication. The sensor was fully characterized and was found to exhibit a linear response in borate buffer with limit of detection (LOD) of 330nM (18.6ppb). The sensor also demonstrated successful measurement of Mn in river water, and ultimately may be extended to other environmental sample matrices.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"2015 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127615938","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Magneto-elastic resonating ‘μ-diver’ microfluidic-system for wireless bio-sensing in liquid 用于液体无线生物传感的磁弹性谐振“μ-diver”微流体系统
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6627264
C. Xue, X. Li, T. Xu, B. Xu, C. Yang
{"title":"Magneto-elastic resonating ‘μ-diver’ microfluidic-system for wireless bio-sensing in liquid","authors":"C. Xue, X. Li, T. Xu, B. Xu, C. Yang","doi":"10.1109/TRANSDUCERS.2013.6627264","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627264","url":null,"abstract":"A novel concept of lab-on-a-chip (LOC) type magneto-elastic resonant `micro-diver' system (MER-μDS) is reported. By combining magneto-elastic-alloy micro-resonator, microfluidic chamber/channels and embedded excitation/test coil, the microsystem realizes chip-scale bio-sensing in solution (~100 CFU/ml) with wireless signal-readout, which is favorable in real-time, on-site detection of pathogen in liquid food like milk and juice.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127678513","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Very high aspect ratio through silicon vias (TSVs) using wire bonding 高纵横比通过硅孔(tsv)使用线键合
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6626728
S. Schroder, A. Fischer, G. Stemme, F. Niklaus
{"title":"Very high aspect ratio through silicon vias (TSVs) using wire bonding","authors":"S. Schroder, A. Fischer, G. Stemme, F. Niklaus","doi":"10.1109/TRANSDUCERS.2013.6626728","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626728","url":null,"abstract":"This paper reports a fabrication approach for very high aspect ratio through silicon vias (TSVs). The metal filling of the through via holes is implemented by adapting standard wire bonding technology. TSVs with a diameter of 30 μm and aspect ratios between 10:1 and 20:1 have been fabricated. Basic electrical characterization and optical inspection have been conducted to verify the resistance and integrity of the metal and insulator filling of the TSV.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126353314","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Gas sensing properties of nanostructured mixed oxide film prepared by anodizing Zr-W alloy through the alumina nanopores 通过氧化铝纳米孔阳极氧化Zr-W合金制备纳米混合氧化膜的气敏性能
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6627208
R. M. Vázquez, R. Calavia, F. Gispert-Guirado, E. Llobet, J. Hubálek, A. Mozalev
{"title":"Gas sensing properties of nanostructured mixed oxide film prepared by anodizing Zr-W alloy through the alumina nanopores","authors":"R. M. Vázquez, R. Calavia, F. Gispert-Guirado, E. Llobet, J. Hubálek, A. Mozalev","doi":"10.1109/TRANSDUCERS.2013.6627208","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627208","url":null,"abstract":"Nanostructured Zr-W mixed oxide film was prepared via anodizing a sputter-deposited Zr-W alloy layer through nanopores in an anodic alumina layer superimposed on the alloy. The morphology, structure and chemical composition of the film were examined by SEM and XRD. Test sensor employing the ZrO2-WO3 mixed oxide film as active layer was fabricated and utilized for detecting H2 and CO gases of various concentrations (100-1000 ppm) at temperatures up to 300°C. The sensor was fast and highly responsive to hydrogen while showing much weaker and slower response to carbon oxide. The findings are of importance for improving chemical and structural stability of the nanostructured tungsten-oxide-based films and selectivity of gas sensors employing the films.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126404728","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A hydrophone using liquid to bridge the gap of a piezo-resistive cantilever 一种水听器，用液体来桥接压阻悬臂梁的间隙
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6626703
N. Minh-Dung, Phan Hoang-Phuong, Kyoshi Matsumoto, I. Shimoyama
{"title":"A hydrophone using liquid to bridge the gap of a piezo-resistive cantilever","authors":"N. Minh-Dung, Phan Hoang-Phuong, Kyoshi Matsumoto, I. Shimoyama","doi":"10.1109/TRANSDUCERS.2013.6626703","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626703","url":null,"abstract":"This paper reports on a hydrophone based on a structure in which liquid was used to bridge the gap between a piezoresistive cantilever and the surrounding walls. Due to surface tension, the liquid filled the cantilever's gap while it did not leak through the microscale gap. Evaluation experiments showed that the combination of liquid bridge and cantilever enables the hydrophone to have high sensitivity. Being compact, high sensitivity, low cost, simple fabrication process, the hydrophone is promisingly widely applied in under water communication system and medical field.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128102269","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
A microfluidic aptasensor integrated with nanodrop generator for MALDI-TOF MS analysis in clinical applications 集成纳米液滴发生器的MALDI-TOF质谱分析微流控传感器在临床中的应用
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6627324
J. Yang, J. Zhu, Q. Lin
{"title":"A microfluidic aptasensor integrated with nanodrop generator for MALDI-TOF MS analysis in clinical applications","authors":"J. Yang, J. Zhu, Q. Lin","doi":"10.1109/TRANSDUCERS.2013.6627324","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627324","url":null,"abstract":"This paper presents an aptamer-based microchip for sensitive and quantitative detection of biomolecules using matrix-assisted laser desorption/ ionization time-of-flight mass spectrometry (MALDI-TOF MS). The device is capable of both isolating analyte from samples and dispensing purified samples onto a probe plate for a following MS analysis. Aptamers selectively captured and released target molecules for isocratic elution. An integrated nanodrop generator produced small sample spots (300 μm diameter), significantly minimizing spatial intensity variations. Repeated sample deposition on the same spot (50 times) induced on-spot analyte concentration improving the detection sensitivity. We also demonstrated that our integrated device coupled to MALDI MS analysis successfully performs the biomolecular quantification by calibrating relative intensities of analyte peak to its internal standard.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115916748","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Integrating aptamers into micro- and nanobiosystems for diagnostics 将适体整合到用于诊断的微和纳米生物系统中
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6627381
D. Spasic, K. Janssen, F. Toffalini, D. T. Tran, K. Leirs, D. Decrop, J. Lammertyn
{"title":"Integrating aptamers into micro- and nanobiosystems for diagnostics","authors":"D. Spasic, K. Janssen, F. Toffalini, D. T. Tran, K. Leirs, D. Decrop, J. Lammertyn","doi":"10.1109/TRANSDUCERS.2013.6627381","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627381","url":null,"abstract":"Aptamers are short, single stranded DNA/RNA oligonucleotides with the ability to fold into well-defined three-dimensional structures, which are fundamental for their highly selective target recognition, rivaling thus antibodies in terms of affinity and specificity. Thanks to these properties, they have been integrated into different micro- and nanoscale transducers, resulting in a new type of biosensors, known as `aptasensors', used in a truly new generation of diagnostic tools. Here, an overview will be given of different aptamer selection approaches, with the focus on lab-on-a-chip technology based methods, different concepts reported for integrating aptamers into micro- and nanobiosystems aiming at the development of sensitive diagnostics concluding with an outlook on the future of aptamers in theranostics.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"37 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131382605","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
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