锚损对轮廓模AlN谐振器品质因子影响的实验研究

2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI:10.1109/TRANSDUCERS.2013.6627307

J. Segovia-Fernandez, M. Cremonesi, C. Cassella, A. Frangi, G. Piazza

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引用次数: 26

摘要

本文对三种不同谐振频率器件(220 MHz、370 MHz和1.05 GHz)下横向振动AlN轮廓模谐振器锚损对质量因子Q的影响进行了实验研究。设计了不同宽度(Wa)和长度(La)的锚作为具有相同尺寸振动体的谐振器的支撑。结果证实，阻尼的主要来源与220 MHz的锚杆损耗和1.05 GHz的界面损耗有关。此外，有限元分析(FEA)用于模拟AlN cmr中的锚损，结果与测量结果非常吻合。

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Experimental study on the impact of anchor losses on the quality factor of contour mode AlN resonators

This paper presents an experimental study on the impact of anchor losses on the quality factor (Q) of laterally vibrating AlN contour mode resonators for three different resonance frequency devices (220 MHz, 370 MHz, and 1.05 GHz). Anchors of different width (Wa) and length (La) were designed as supports for resonators having a vibrating body of identical dimensions. The results confirm that the main source of damping is associated with anchor losses at 220 MHz and interfacial losses at 1.05 GHz. Furthermore, finite element analysis (FEA) was used to model anchor losses in AlN CMRs, exhibiting excellent agreement with the measurements.

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2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)

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