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Thermal deformation measurement of Al2O3 ceramic substrate based on radial basis function 基于径向基函数的Al2O3陶瓷基板热变形测量
SPIE/SIOM Pacific Rim Laser Damage Pub Date : 2019-07-08 DOI: 10.1117/12.2537449
Linlin Wang, Chen Tang, YuHui Ma, Xiyuan Li
{"title":"Thermal deformation measurement of Al2O3 ceramic substrate based on radial basis function","authors":"Linlin Wang, Chen Tang, YuHui Ma, Xiyuan Li","doi":"10.1117/12.2537449","DOIUrl":"https://doi.org/10.1117/12.2537449","url":null,"abstract":"In this paper, the method of Radial basis function(RBF) to Electronic Speckle Pattern Interferometry (ESPI)information extraction is studied, mainly including: the filtering method based on radial basis function for ESPI fringe patterns with wide density; introducing the radial basis function to interpolate the number of fringe in the fringe skeleton method. Thermal deformation phase measurement of Al2O3 ceramic substrate at the circumstance of thermal load was estimated based on the ESPI. In the experiment, four ESPI fringe patterns at different moment at the beginning of the experiment were captured. The RBF filtering method and the fringe skeleton method with RBF interpolating were used to estimating the thermal deformation phase measurement. The acquiring out-of-plane displacements by our method were in good agreement with the real deformation under the stepped-up thermal load gradually. This measurement can provide assistance for studying the performance of ceramic substrate in the process of laser processing.","PeriodicalId":197837,"journal":{"name":"SPIE/SIOM Pacific Rim Laser Damage","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134366944","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Investigation of laser induced air breakdown thresholds at 1064, 532, 355, 266 and 248nm 1064、532、355、266和248nm激光诱导空气击穿阈值的研究
SPIE/SIOM Pacific Rim Laser Damage Pub Date : 2019-07-08 DOI: 10.1117/12.2539007
Zhixing Gao, L. Han, Jing Li
{"title":"Investigation of laser induced air breakdown thresholds at 1064, 532, 355, 266 and 248nm","authors":"Zhixing Gao, L. Han, Jing Li","doi":"10.1117/12.2539007","DOIUrl":"https://doi.org/10.1117/12.2539007","url":null,"abstract":"Laboratory air is one most popular transparent medium for high power laser beam propagation. Its threshold of laser induced breakdown is one of the key characters for the high power laser system. The thresholds of laser induced air breakdown under laboratory condition were measured using 1064, 532, 355, 266 and 248nm short pulse laser. The focal spot varies from 50μ m to 150μ m which achieved using a lens with 117mm focal length. The measured breakdown thresholds range from 3.2×1010W/cm2 to 5.1×1011W/cm2, depending on the wavelength. It is confirmed that the KrF laser induced air breakdown threshold should be 3.2×1010W/cm2, which is almost 1 order of magnitude higher than the reported value of 2.7 ×109W/cm2 .The measurements indicate multi-photon ionization is the dominant mechanism since the air breakdown thresholds at 1064, 532, 355, 266 and 248nm seemed well-agreed with the scale law of λ2.","PeriodicalId":197837,"journal":{"name":"SPIE/SIOM Pacific Rim Laser Damage","volume":"431 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116545639","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Optical and electrical characteristics of radio frequency sputtered ITO and In-free transparent conductors 射频溅射ITO和无in透明导体的光学和电学特性
SPIE/SIOM Pacific Rim Laser Damage Pub Date : 2019-07-08 DOI: 10.1117/12.2535715
M. Grilli
{"title":"Optical and electrical characteristics of radio frequency sputtered ITO and In-free transparent conductors","authors":"M. Grilli","doi":"10.1117/12.2535715","DOIUrl":"https://doi.org/10.1117/12.2535715","url":null,"abstract":"In this work the optical and electrical characteristics of radio frequency sputtered indium tin oxide (ITO), aluminum doped zinc oxide (AZO) and nickel oxide (NiOx) are reported. ITO and AZO films showed very high visible transmittance values, with maxima up to 90-91%, and sheet resistance of 35 and 33 Ω/□, respectively, while non stoichiometric NiO films showed visible transmittance up to 53% and sheet resistance of several tens of KΩ/□. Properties of the films were correlated to their structure and morphology which are strongly dependent on the growth parameters.","PeriodicalId":197837,"journal":{"name":"SPIE/SIOM Pacific Rim Laser Damage","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116978438","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A focusing mechanism based on flexible hinges for space telescope 一种基于柔性铰链的空间望远镜调焦机构
SPIE/SIOM Pacific Rim Laser Damage Pub Date : 2019-07-08 DOI: 10.1117/12.2539681
Xiaozhe Ma, Chuang Li, Penghui Cheng, Bin Hu
{"title":"A focusing mechanism based on flexible hinges for space telescope","authors":"Xiaozhe Ma, Chuang Li, Penghui Cheng, Bin Hu","doi":"10.1117/12.2539681","DOIUrl":"https://doi.org/10.1117/12.2539681","url":null,"abstract":"In this paper, a new type of focusing mechanism for space telescope is designed to compensate defocusing caused by alteration of space condition in orbit. The focusing mechanism is driven by a stepping motor and a worm gear reducer, transmitted by a ball screw and output by a flexible hinge. It has advantages of low mass, small overall size and especially high accuracy that is better than 1 micrometer. As one of main parts of focusing mechanism, the flexible hinge is mounted in the focusing shaft and connected to the nuts of ball screw kinematic pair which has mechanical end stops. The focusing shaft is guided by two couples of thin film boards to ensure the precise displacement along optical axis direction. The secondary mirror frame is connected to the shaft to complete focusing. Firstly, the focusing mechanism is designed, and the design scheme is illustrated in this paper. Then a modal analysis with finite element method for the mechanism is completed. The results show that the dynamic stiffness is high enough and meets the requirement.","PeriodicalId":197837,"journal":{"name":"SPIE/SIOM Pacific Rim Laser Damage","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125090907","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Research on high precision combined processing technology of meter-level optical glass guideway 米级光学玻璃导轨高精度组合加工技术研究
SPIE/SIOM Pacific Rim Laser Damage Pub Date : 2019-07-08 DOI: 10.1117/12.2536468
Hanqiang Zhang, Yi-fan Dai, Ci Song, Guipeng Tie
{"title":"Research on high precision combined processing technology of meter-level optical glass guideway","authors":"Hanqiang Zhang, Yi-fan Dai, Ci Song, Guipeng Tie","doi":"10.1117/12.2536468","DOIUrl":"https://doi.org/10.1117/12.2536468","url":null,"abstract":"Guideway of the measuring system can affect the measuring accuracy. In order to provide a high-precision motion reference for the coordinate measuring system, this paper proposes the use of ultra -low expansion glass as the material of the measuring platform guideway, and optical processing is introduced to improve the surface accuracy. Meanwhile, guideway edge is easy to produce edge effect and the high-precision measurement is difficult, the combined processing method of magnetorheological finishing, CCOS large disc by circle motion and linear motion of rectangular plate is proposed, and the guideway is measured by sub-aperture stitching method. The results show that the Peak-Valley value of the 1000×240mm2 glass guideway surface is 0.347μm and the Root-Mean-Square value is 0.033wave1wave=0.6328μm). Moreover, the edge effect is controlled in the process. Ultimately, the accuracy of the one meters long glass guideway is reached at deep sub-micron level, and the combined processing technology is verified to be feasible.","PeriodicalId":197837,"journal":{"name":"SPIE/SIOM Pacific Rim Laser Damage","volume":"184 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116553193","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Research on the time and mechanism of laser-induced air plasmas ignition 激光诱导空气等离子体点火的时间和机理研究
SPIE/SIOM Pacific Rim Laser Damage Pub Date : 2019-07-08 DOI: 10.1117/12.2539866
Guixia Wang, Junhong Su
{"title":"Research on the time and mechanism of laser-induced air plasmas ignition","authors":"Guixia Wang, Junhong Su","doi":"10.1117/12.2539866","DOIUrl":"https://doi.org/10.1117/12.2539866","url":null,"abstract":"To research the initiation of breakdown and the earliest stages of plasma formation, analyzing the ignition time and mechanism is necessary. The ignition time of laser-induced air plasmas is numerically simulated on the basis of air breakdown conditions in atmospheric air. This time is on the order of a few nanoseconds, and increases with increasing laser facula radius and pulse width, and decreases with increasing laser wavelength and incident laser energy. In addition, images obtained using a high-speed camera (NX5-X2) indicate that the ignition process of laser-induced air plasmas includes preionization, ionization, significant ionization, plasma shielding , plasma ignition and extinction.","PeriodicalId":197837,"journal":{"name":"SPIE/SIOM Pacific Rim Laser Damage","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122917684","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Study on optical constants of coatings at different temperatures 不同温度下涂层光学常数的研究
SPIE/SIOM Pacific Rim Laser Damage Pub Date : 2019-07-08 DOI: 10.1117/12.2540401
Xiaoyan Wang, Kui Yi, Guohang Hu, Yuanan Zhao, J. Shao
{"title":"Study on optical constants of coatings at different temperatures","authors":"Xiaoyan Wang, Kui Yi, Guohang Hu, Yuanan Zhao, J. Shao","doi":"10.1117/12.2540401","DOIUrl":"https://doi.org/10.1117/12.2540401","url":null,"abstract":"In order to analyze the thermal damage process under high energy laser irradiation, this paper focused on the high temperature condition and designed experimental device for coatings heating at different temperature. Ellipsometer was applied to measure the ellipsometric parameter (Ψ, ▵) of SiO2, HfO2 and Al2O3 single layer (prepared by electron beam (EB) evaporation on BK7 glass) at different temperatures, so the variation of optical constants with temperatures was obtained by inversion calculation. With the increase of temperature, the refractive index (n) of SiO2, HfO2 and Al2O3 single layer first decreased and then increased, the thickness (d) of these layers first increase and then decreased. However, the inflection point occurred at different temperature, and the amount of change was different for the layer with different material. The physical processes of thermal expansion and water evaporation were applied to explain the temperature dependent properties of the dielectric coatings.","PeriodicalId":197837,"journal":{"name":"SPIE/SIOM Pacific Rim Laser Damage","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114520867","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Influence of laser output parameters on film damage threshold 激光输出参数对薄膜损伤阈值的影响
SPIE/SIOM Pacific Rim Laser Damage Pub Date : 2019-07-08 DOI: 10.1117/12.2539368
Rongrong Yan, Junhong Su, Jianle Zhao
{"title":"Influence of laser output parameters on film damage threshold","authors":"Rongrong Yan, Junhong Su, Jianle Zhao","doi":"10.1117/12.2539368","DOIUrl":"https://doi.org/10.1117/12.2539368","url":null,"abstract":"Optical film damage threshold is an important basis for measuring the ability of film to resist laser damage, and laser parameters are the key factors affecting its accurate measurement. The single-factor control variable method was used to establish the the numerical model of laser energy error, the focused spot size error and the damage threshold error, and the M 2 factor and the damage threshold. The theoretical analysis and computer simulation of the energy error, the focused spot size error and the beam quality on the film damage threshold influences. A method based on the Shack-Hartman wave-front detection method is proposed to measure the pulsed laser beam parameters. The working principle is described in detail, and the Shack-Hartman beam shape parameter measurement system is designed. The actual output energy of the laser and the size of the focused spot were measured experimentally, and the uncertainty of the film damage threshold was evaluated according to the statistical principle. The results shows that the energy error and the focused spot error are directly proportional to the damage threshold error, and M 2 is inversely related to the damage threshold. From the thin film sample analysis, the relative uncertainty of the damage threshold measurement is 18.78%. Therefore, studying the influence of laser parameters on the damage threshold provides a direction for obtaining accurate film damage threshold test results.","PeriodicalId":197837,"journal":{"name":"SPIE/SIOM Pacific Rim Laser Damage","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115236838","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Mitigation of laser induced damage on dielectric mirrors in a robust way 激光对介质反射镜损伤的鲁棒缓解
SPIE/SIOM Pacific Rim Laser Damage Pub Date : 2019-07-08 DOI: 10.1117/12.2540919
Li Zhou, Youen Jiang, Simin Zhang, Hui Wei, W. Fan, Xuechun Li
{"title":"Mitigation of laser induced damage on dielectric mirrors in a robust way","authors":"Li Zhou, Youen Jiang, Simin Zhang, Hui Wei, W. Fan, Xuechun Li","doi":"10.1117/12.2540919","DOIUrl":"https://doi.org/10.1117/12.2540919","url":null,"abstract":"Laser induced damage on dielectric mirrors and its rapid growth with successive shots have been and continue to be an important barrier to high power laser systems. Here the morphology of mitigation pit is optimized theoretically, and an ultrashort laser is utilized to totally remove damage on both high-reflective (HR) and anti-reflective (AR) coating. At the same time, the substrate is handled carefully and free of laser ablation, which lower the scattering loss and the amount of debris during laser machining process. Then, using R-on-1 test procedure, several mitigated sites with size of 1mm× 1mm are investigated by a Nd:YAG laser system with a flat-top spatial distribution of fully covering the mitigated site. The experimental results show even at the average fluence of 18J/cm2@6ns, there’s no damage initiation on AR coatings and no damage growth on HR coatings. It demonstrates that ultrashort laser machining is an effective and robust way to mitigate laser damage and a promising way to improve dielectric mirror performance of high power laser system in volume production.","PeriodicalId":197837,"journal":{"name":"SPIE/SIOM Pacific Rim Laser Damage","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114855775","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Effects of different oxygen flow on refractive index and absorption characteristics of Ta2O5 film 不同氧流量对Ta2O5薄膜折射率和吸收特性的影响
SPIE/SIOM Pacific Rim Laser Damage Pub Date : 2019-07-08 DOI: 10.1117/12.2539869
Chenghui Jiang, Lishuan Wang, Shida Li, Hua-song Liu, Yugang Jiang, Meiping Zhu, Yi-qin Ji
{"title":"Effects of different oxygen flow on refractive index and absorption characteristics of Ta2O5 film","authors":"Chenghui Jiang, Lishuan Wang, Shida Li, Hua-song Liu, Yugang Jiang, Meiping Zhu, Yi-qin Ji","doi":"10.1117/12.2539869","DOIUrl":"https://doi.org/10.1117/12.2539869","url":null,"abstract":"Ta2O5 film has low absorption in the range of visible wavelength and it has high refractive index and thermal stability. So it is widely used to prepare low loss films. Ta2O5 single layer with different oxygen flow rates were prepared by ion beam sputtering technique. The refractive index and absorption characteristics of metal oxide films were compared at different oxygen flow rates. The refractive index and absorption of thin film materials were studied by ellipsometry technology and surface thermal lens technology. The results show that: the absorption of Ta2O5 film is decreased first and then increased with the increase of oxygen flow. When oxygen flow is 40 sccm, the absorption is smallest, only 4.4ppm. And the refractive index is decreased with oxygen flow increasing, after oxygen flow reached 40 sccm, the refractive index tend to be stable.","PeriodicalId":197837,"journal":{"name":"SPIE/SIOM Pacific Rim Laser Damage","volume":"72 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114695577","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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