Research on high precision combined processing technology of meter-level optical glass guideway

Guideway of the measuring system can affect the measuring accuracy. In order to provide a high-precision motion reference for the coordinate measuring system, this paper proposes the use of ultra -low expansion glass as the material of the measuring platform guideway, and optical processing is introduced to improve the surface accuracy. Meanwhile, guideway edge is easy to produce edge effect and the high-precision measurement is difficult, the combined processing method of magnetorheological finishing, CCOS large disc by circle motion and linear motion of rectangular plate is proposed, and the guideway is measured by sub-aperture stitching method. The results show that the Peak-Valley value of the 1000×240mm2 glass guideway surface is 0.347μm and the Root-Mean-Square value is 0.033wave1wave=0.6328μm). Moreover, the edge effect is controlled in the process. Ultimately, the accuracy of the one meters long glass guideway is reached at deep sub-micron level, and the combined processing technology is verified to be feasible.