Thermal deformation measurement of Al2O3 ceramic substrate based on radial basis function

Abstract

In this paper, the method of Radial basis function(RBF) to Electronic Speckle Pattern Interferometry (ESPI)information extraction is studied, mainly including: the filtering method based on radial basis function for ESPI fringe patterns with wide density; introducing the radial basis function to interpolate the number of fringe in the fringe skeleton method. Thermal deformation phase measurement of Al2O3 ceramic substrate at the circumstance of thermal load was estimated based on the ESPI. In the experiment, four ESPI fringe patterns at different moment at the beginning of the experiment were captured. The RBF filtering method and the fringe skeleton method with RBF interpolating were used to estimating the thermal deformation phase measurement. The acquiring out-of-plane displacements by our method were in good agreement with the real deformation under the stepped-up thermal load gradually. This measurement can provide assistance for studying the performance of ceramic substrate in the process of laser processing.