{"title":"Novel insights into hole characteristics and fracture toughness in polycrystalline diamond micro-drilling of single-crystal silicon","authors":"Wan-Sik Woo , Sang-Won Kwon , Dong-Gyu Kim","doi":"10.1016/j.jmapro.2025.03.066","DOIUrl":"10.1016/j.jmapro.2025.03.066","url":null,"abstract":"<div><div>The high purity and perfect crystalline structure of single-crystal silicon makes it a critical material for semiconductors, photovoltaics, micro-electro-mechanical systems, and optical devices. In particular, the electrodes used in semiconductor etching, a key process in semiconductor manufacturing, require the drilling of thousands of micro-holes. However, single-crystal silicon is extremely hard and brittle, making it susceptible to surface defects such as cracking, chipping, and fracture during drilling. This study investigated the drilling characteristics of single-crystal silicon using polycrystalline diamond micro-drills. With the exception of a few cases, no significant trends were observed, providing a theoretical basis for predicting cutting force, entrance hole chipping, diameter error, and surface roughness under various drilling conditions. However, all results were found to be directly related to the drilling distance. Diameter error and cutting force exhibited similar patterns with respect to drilling distance, and chipping was identified as a discernible trend when expressed as a function of cutting force and drilling distance. Thus, taken together, our results suggest that considering drilling distance allows for better predictability of the drilling outcomes of single-crystal silicon, contributing to improved manufacturing efficiency and product quality by addressing chipping and other defects.</div></div>","PeriodicalId":16148,"journal":{"name":"Journal of Manufacturing Processes","volume":"141 ","pages":"Pages 1195-1210"},"PeriodicalIF":6.1,"publicationDate":"2025-03-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143644943","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Yongliang Lu, Jun Zhao, Xujie Tang, Anhai Li, Jiazheng Li
{"title":"Milling force prediction in titanium alloy thin-walled components side milling based on Tri-Dexel model with comprehensive consideration of tool runout and workpiece deflection","authors":"Yongliang Lu, Jun Zhao, Xujie Tang, Anhai Li, Jiazheng Li","doi":"10.1016/j.jmapro.2025.03.060","DOIUrl":"10.1016/j.jmapro.2025.03.060","url":null,"abstract":"<div><div>Titanium alloy thin-walled structures are extensively used in aerospace, automotive manufacturing and other industries due to their exceptional performance. However, the low rigidity of thin-walled components makes them highly susceptible to deflection and vibration during the side milling process, adversely impacting machining accuracy and surface quality.</div><div>This paper presents an accurate and reliable prediction model for cutting forces during the side milling of titanium alloy thin-walled components using flat-end mills. This method comprehensively accounts for the effects of tool runout and workpiece deflection on the undeformed cutting thickness (UCT), examines the chip geometry due to cutting force-induced workpiece deflection and develops a milling force prediction model. Based on the proposed model, a virtual machining simulation environment is constructed using computer graphics technology and Tri-dexel geometric modeling technology, and the development of a milling simulation software prototype based on the Tri-dexel model is completed. The software utilizes the established Tri-Dexel model to calculate the chip geometries and material removal volume of the cutter-workpiece engagement (CWE) area, enabling the estimation of milling forces during the machining of thin-walled components. The cutting force coefficients, tool runout values, as well as the workpiece's natural frequency and damping ratio are calibrated by cutting experiment, dial gauge experiment and modal hammer experiment, respectively. Moreover, to investigate the variation patterns of milling forces and validate the effectiveness of the milling force prediction model, a comparative study is performed to analyze milling force variations with different machining parameters and methods. The experimental results demonstrate that the proposed model provides more accurate milling force predictions in the <em>X</em>-, <em>Y</em>- and <em>Z</em>- directions compared to classical milling force prediction method. Some conclusions obtained and the methods utilized can be used in side milling, virtual manufacturing and computer numerical control (CNC) simulation software development etc., and can be further applied in the machining of various metallic materials.</div></div>","PeriodicalId":16148,"journal":{"name":"Journal of Manufacturing Processes","volume":"141 ","pages":"Pages 1211-1234"},"PeriodicalIF":6.1,"publicationDate":"2025-03-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143644944","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Gang Mou , Teng Zhang , Fang Li , Xueming Hua , Hongliang Xiang , Xu Yang , Fushan He , Kaikui Zheng
{"title":"Research on gap-adaptive high frequency pulse arc welding of stainless-steel thin plate based on machine learning","authors":"Gang Mou , Teng Zhang , Fang Li , Xueming Hua , Hongliang Xiang , Xu Yang , Fushan He , Kaikui Zheng","doi":"10.1016/j.jmapro.2025.03.045","DOIUrl":"10.1016/j.jmapro.2025.03.045","url":null,"abstract":"<div><div>The demand for butt welding of stainless-steel thin plates has been increasing year by year in industries such as shipbuilding, pharmaceuticals, petrochemicals, and food processing. However, during the butt welding of thin plates, the low structural rigidity causes real-time change in the gap, which complicates the ability of automated welding to achieve uniform weld seam geometry. Therefore, this paper aims to overcome the challenges of cross coupling and the sensitivity of hyperparameter selection and realize the gap-adaptive welding during the high frequency pulse arc welding process by implementing to optimize the number of trees and the minimum number of leaf nodes in the random forest model. After the optimal welding parameters are then used to train the random forest model, a gap-adaptive control platform, which take gap, weld face width, weld root width, and face reinforcement as input features and peak current, wire feed speed, and welding speed as output features, is established to enable real-time measure the gap by using a laser track sensor. The results demonstrate that under fixed and gradient gap conditions, the weld seam geometry is uniformly formed and no significant defects can be found. Under step gap conditions, gap-adaptive welding effectively prevents burn-through defects and ensures stable weld seam geometry. Furthermore, microstructural and mechanical property characterization indicates that an increase in frequency during welding effectively refines the grain size in the seam. The tensile strength values of the samples are similar and all samples fracture at the base metal.</div></div>","PeriodicalId":16148,"journal":{"name":"Journal of Manufacturing Processes","volume":"141 ","pages":"Pages 1084-1097"},"PeriodicalIF":6.1,"publicationDate":"2025-03-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143629515","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
David Peña-Mangas, Carlos Cernuda, Daniel Reguera-Bakhache
{"title":"Data-driven glass viscosity soft sensor development and validation in a glass container manufacturing line","authors":"David Peña-Mangas, Carlos Cernuda, Daniel Reguera-Bakhache","doi":"10.1016/j.jmapro.2025.03.031","DOIUrl":"10.1016/j.jmapro.2025.03.031","url":null,"abstract":"<div><div>Viscosity plays a key role in glass container manufacturing, directly impacting product quality and consistency. To date, online measuring of this property during the glass manufacturing process has been both difficult and costly. This study proposes and validates a data-driven approach to develop a soft sensor for measuring glass viscosity.</div><div>This method employs data on the height of the rotating tube at the forehearth outlet, along with the corresponding glass temperatures. To validate the approach, viscosity estimates are applied to predict glass gob length. Analysis of over 70 production days across various operations demonstrates high predictive accuracy on a per-job basis, with <span><math><msup><mrow><mi>R</mi></mrow><mrow><mn>2</mn></mrow></msup></math></span> and MSE values consistently above 0.80 and below 1 millimeters, respectively, and reaching <span><math><msup><mrow><mi>R</mi></mrow><mrow><mn>2</mn></mrow></msup></math></span> over 0.95 for certain jobs. Here, <em>job</em> refers to the continuous production of a single type of container on the production line. Additionally, an aggregate model across all data achieves a predictive accuracy of MSE = 3.80 millimeters.</div><div>The proposed methodology offers a reliable means to monitor and control glass viscosity, enhancing production efficiency and product quality in the glass container industry.</div></div>","PeriodicalId":16148,"journal":{"name":"Journal of Manufacturing Processes","volume":"141 ","pages":"Pages 1060-1070"},"PeriodicalIF":6.1,"publicationDate":"2025-03-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143628327","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Bo Zhang, Guangjun Chen, Zhuang Chen, Gaofeng Hu, Yingxin Lv, Haiyu Li
{"title":"Ultrasonic elliptic vibration assisted turning SiCp/Al composite surface morphology","authors":"Bo Zhang, Guangjun Chen, Zhuang Chen, Gaofeng Hu, Yingxin Lv, Haiyu Li","doi":"10.1016/j.jmapro.2025.03.043","DOIUrl":"10.1016/j.jmapro.2025.03.043","url":null,"abstract":"<div><div>Aluminum based silicon carbide (SiCp/Al) composite is a typical high brittle and hard material, which is prone to surface defects such as matrix tearing and edge breakage during processing. In order to carry out ultra-precision ultrasonic elliptical vibration turning for SiCp/Al composites with a body fraction ratio of 35 %, the principle of ultrasonic vibration was investigated, and the surface defects after turning under ultrasonic and conventional machining (non-ultrasonic) conditions were simulated and analyzed, and the influence of the spindle speed, the feed, and the radius of the tool tip circle was investigated under the two conditions, and the influence of the change of amplitude under ultrasonic conditions on the surface roughness and the surface morphology was investigated. The results show that the surface roughness of SiCp/Al composites can be significantly reduced and the surface morphology can be improved after ultrasonic elliptical vibration-assisted turning compared to non-ultrasonic conditions; Among them, within the parameter range studied, the decreasing amplitude of surface roughness value Ra is as follows: spindle speed decreased by 31.04 %–42.14 %, feed rate decreased by 20.42 %–37.96 %, tool tip arc radius decreased by 18.54 %–25.74 %; Compared with non-ultrasonic conditions, the surface roughness is improved in different degree under different power amplitudes.</div></div>","PeriodicalId":16148,"journal":{"name":"Journal of Manufacturing Processes","volume":"141 ","pages":"Pages 1071-1083"},"PeriodicalIF":6.1,"publicationDate":"2025-03-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143628328","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pu Xu , Qihan Li , Chengyan Wang , Lin Li , Dapeng Tan , Huaping Wu
{"title":"Interlayer healing mechanism of multipath deposition 3D printing models and interlayer strength regulation method","authors":"Pu Xu , Qihan Li , Chengyan Wang , Lin Li , Dapeng Tan , Huaping Wu","doi":"10.1016/j.jmapro.2025.03.062","DOIUrl":"10.1016/j.jmapro.2025.03.062","url":null,"abstract":"<div><div>Extrusion-based 3D printing technology has gained widespread application in industrial production due to its low cost, high customizability, and excellent material compatibility. However, during the molding process of extrusion-based additive manufacturing, the influence of healing temperature, interlayer pressure, and insufficient healing time leads to inadequate healing behavior between deposition paths, making it challenging to maintain mechanical strength consistency in the deposition direction with other directions. Considering the interlayer healing theory of polymers, this study proposes a 3D printing strategy based on material extrusion, achieving enhanced interlayer mechanical properties through topologically optimized nozzle structures. Firstly, based on the rheological behavior of consumables at the nozzle of the fused filament fabrication (FFF) extruder, a molten fluid deposition model is established, and the nozzle cross-sectional shapes for different target extruded filament shapes are obtained through inverse extrusion prediction techniques. On this basis, combined with the interlayer healing strength theory of FFF extrusion molding, the relationship between extruded filament geometry, intimate contact, and contact pressure is analyzed to achieve the goal of improving the interlayer tensile strength of molded parts. A highly compatible, real-time monitorable 3D printing platform was established, and standard tensile specimens of different extruded filaments were prepared and their tensile properties measured to validate the correctness of the multi-path deposition model. Results showed that compared to traditional nozzles, the interlayer tensile strength of parts manufactured using square nozzles increased by approximately 37.8 %. This technology provides a new paradigm for extrusion-based additive manufacturing in the 3D printing of high-performance mechanical structures and has potential implications in fields such as aerospace and automotive components.</div></div>","PeriodicalId":16148,"journal":{"name":"Journal of Manufacturing Processes","volume":"141 ","pages":"Pages 1031-1047"},"PeriodicalIF":6.1,"publicationDate":"2025-03-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143619878","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Yi Mo , Zhiyuan Huang , Xinghong Deng , Zhongduo Zhu , Jing Qiao , Dekai Zhou , Longqiu Li
{"title":"Multi-material DLP printing: Enhanced layer stacking precision with common flexible interface support","authors":"Yi Mo , Zhiyuan Huang , Xinghong Deng , Zhongduo Zhu , Jing Qiao , Dekai Zhou , Longqiu Li","doi":"10.1016/j.jmapro.2025.03.040","DOIUrl":"10.1016/j.jmapro.2025.03.040","url":null,"abstract":"<div><div>Multi-material photocuring technology is an effective approach for fabricating multifunctional integrated devices, widely utilized in fields such as mechatronics, biomedical engineering, and aerospace. However, current multi-material additive manufacturing technologies exhibit low positional accuracy in thin layers, which is sensitive to build size and may lead to inconsistencies in material layers. Additionally, the material exchange process often introduces air bubbles into the cured layers, adversely affecting mechanical properties and potentially causing structural failures. This study presents a novel digital light processing technique based on multi-resin reservoirs with a flexible release interface supported by a common datum, investigating the impact of common platform support on layer stacking accuracy within multi-material systems. Furthermore, the research reveals the mechanisms by which bubbles are entrapped during the immersion of multi-material printed devices into the resin reservoir and proposes the Two-Sides Cooperate to Enter the Reservoir (TSCETR) method to mitigate bubble residues within the cured layer space. Ultimately, multi-material microfluidic devices featuring complex flow channels are fabricated, demonstrating high precision in channel characteristics. This innovative multi-material printing system enhances the stacking accuracy of multi-material layers and effectively reduces bubble defects in printed devices, offering a promising pathway for advancing the surface customization of microfluidic devices.</div></div>","PeriodicalId":16148,"journal":{"name":"Journal of Manufacturing Processes","volume":"141 ","pages":"Pages 1011-1019"},"PeriodicalIF":6.1,"publicationDate":"2025-03-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143619981","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Guanjin Yan , Masoud M. Pour , Teresa J. Rinker , Junjie Ma , Blair E. Carlson , Wenda Tan
{"title":"Laser keyhole welding of dissimilar metals with spiral contours: Metal mixing, microstructure, and mechanical strength","authors":"Guanjin Yan , Masoud M. Pour , Teresa J. Rinker , Junjie Ma , Blair E. Carlson , Wenda Tan","doi":"10.1016/j.jmapro.2025.02.071","DOIUrl":"10.1016/j.jmapro.2025.02.071","url":null,"abstract":"<div><div>Laser keyhole welding of dissimilar metals has broad applications in various industrial sectors, but, like many other fusion welding techniques, suffers from the formation of intermetallic compound (IMC) phases, which are brittle and can significantly compromise the mechanical performance of the joints. This is a critical challenge for the adoption of laser welding techniques by industry. This study focused on laser keyhole welding of lap joints of Aluminum (Al) on Copper (Cu) using spiral contours, which were expected to offer longer weld lengths in limited space and could potentially increase the maximum loading of the joints. Experiments were performed to produce spiral welds using different processing parameters and characterize the chemical composition, microstructure, and mechanical strength of the joints. Analysis revealed that by increasing the spiral distance and/or decreasing the laser power, the joint geometry is changed and the average Cu concentration in the joints is reduced, less brittle IMCs are formed in the joints, and the mechanical strength of the joints is improved. Furthermore, computational fluid dynamics simulations were leveraged to understand the dominating physics that drove the asymmetric fluid flow and metal mixing in melt pool with a curved contour, and the details of re-melting and Al-Cu re-mixing in the melt pools of adjacent spiral arcs were investigated.</div></div>","PeriodicalId":16148,"journal":{"name":"Journal of Manufacturing Processes","volume":"141 ","pages":"Pages 1020-1030"},"PeriodicalIF":6.1,"publicationDate":"2025-03-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143619876","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Rusheng Bai, Yi Tan, Ying Yang, Lidan Ning, Yunpeng Wang, Pengting Li
{"title":"Refined microstructure and propensity to crack of typical hard-to-deform GH4151 superalloy prepared by electron beam drip melting","authors":"Rusheng Bai, Yi Tan, Ying Yang, Lidan Ning, Yunpeng Wang, Pengting Li","doi":"10.1016/j.jmapro.2025.03.029","DOIUrl":"10.1016/j.jmapro.2025.03.029","url":null,"abstract":"<div><div>High-alloyed superalloy castings often exhibit issues such as coarsening of low-melting point phases and severe microsegregation during the preparation process using existing dual or triple melting methods, which can even lead to cracking of the castings. This study employs Electron Beam Drip Melting (EBDM) technology to fabricate GH4151 superalloy casting with uniform microstructures. The results indicate a significant reduction in the content of gaseous impurity elements in the casting, with an O content of only 2.0 ± 0.1 ppmw. The microstructure of the casting is dense, with grains growing axially, and the secondary dendrite arm spacing (<em>λ</em><sub><em>2</em></sub>) at the center of the casting is approximately 50 μm. The sizes of low-melting point phases between dendrites are small, with a total area fraction of <0.4 %, and the number and size of these phases significantly decrease as the height of the casting decreases. The microsegregation coefficients (<em>k</em>) for three typical easily segregated elements are <em>k</em><sub>W</sub> < 1.45, <em>k</em><sub>Ti</sub> > 0.70, and <em>k</em><sub>Nb</sub> > 0.45, respectively. The γ′ phases within the casting are all square-shaped, with sizes of approximately 300 nm for dendrite cores and 400 nm for the inter dendritic γ′ phases. After homogenization treatment, the primary γ′ phase size reaches 550 nm. Calculations show that during the EBDM preparation of the casting, the temperature gradients (<em>G</em>) at the center and at R/2 are 7.2 K/mm and 15.1 K/mm, respectively. Compared to other melting methods, the ability to replenish the mushy zone is enhanced, and the sensitivity to cracking is reduced. The EBDM-GH4151 casting exhibit higher levels of both yield strength and elongation compared to those produced by other melting methods. This study demonstrates that the EBDM process can refine the as-cast microstructure of high-alloyed superalloys, providing castings with a higher uniformity for subsequent heat treatment and thermal processing.</div></div>","PeriodicalId":16148,"journal":{"name":"Journal of Manufacturing Processes","volume":"141 ","pages":"Pages 1048-1059"},"PeriodicalIF":6.1,"publicationDate":"2025-03-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143628326","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Jiahui Wang, Weiliang Zhong, Jiulong Wang, Le Yu, Zheyang Li, Rui Jin
{"title":"A multiphysics model of TCS/C2H4/H2 system involving chemical reaction kinetics for silicon carbide chemical vapor deposition","authors":"Jiahui Wang, Weiliang Zhong, Jiulong Wang, Le Yu, Zheyang Li, Rui Jin","doi":"10.1016/j.jmapro.2025.03.013","DOIUrl":"10.1016/j.jmapro.2025.03.013","url":null,"abstract":"<div><div>4H-SiC epitaxial growth is a complex process of chemical and physical phenomena occurring at different time and length scales, while the understanding of the deposition mechanism at the multiscale is still very poor. Responding to the challenge, a highly accurate multiphysics model for the TCS/C₂H₄/H₂ system was constructed by integrating the chemical reaction kinetics in detail within a three-dimensional simulation framework. Through systematic exploration, we explored the surface reaction mechanism and evaluated the coupled influence of critical process parameters, including temperature, susceptor rotation speed, C/Si ratio, and center/side flow ratio on growth rate and uniformity. Furthermore, the optimal process parameters were determined through orthogonal experimental method. And simulations show the possibility to obtain high-quality SiC epitaxial layers at the border between surface carbon-limited and silicon-limited regimes for TCS/C<sub>2</sub>H<sub>4</sub>/H<sub>2</sub> system. This research presents a valuable modeling approach that improves the understanding of SiC deposition, thereby facilitating advancements in material fabrication techniques.</div></div>","PeriodicalId":16148,"journal":{"name":"Journal of Manufacturing Processes","volume":"141 ","pages":"Pages 1002-1010"},"PeriodicalIF":6.1,"publicationDate":"2025-03-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143619980","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}