P. Lega, Sergey R. Romanov, A. Orlov, A. Kartsev, A.V. Prokunin, Nikita Yu. Kataev, V. Koledov
{"title":"High speed operation of the composite shape memory effect microactuator: computer modelling and experiment","authors":"P. Lega, Sergey R. Romanov, A. Orlov, A. Kartsev, A.V. Prokunin, Nikita Yu. Kataev, V. Koledov","doi":"10.1109/MARSS55884.2022.9870508","DOIUrl":"https://doi.org/10.1109/MARSS55884.2022.9870508","url":null,"abstract":"the kinetic properties and high-speed processes during phase transformations and related effects of giant deformations in micro- and nanosamples of functional nanomaterials in alternating electric and thermal fields have been studied. Theoretically and experimentally studied the processes of controlled deformation (activation) and heat distribution at small sample sizes, in which the manifestation of such phenomena as thermoelastic martensitic phase transition and associated shape memory effect (SME) is possible. Using the focused ion beam method, samples of composite nanotweezers based on the Ti2NiCu alloy with SME were created. A computing model of the speedwork of a composite actuator has been constructed and the dependence of the maximum activation frequency on the linear dimensions of the micro-actuator has been determined. An experimental study of the speedwork of the microactuator was carried out using scanning electron microscopy. The activation of the microactuator was achieved by heating by passing electric current pulses through it. The operation of the microactuator at frequencies up to 8 kHz is demonstrated. A design of the nanotweezers has been created, which for the first time makes it possible to work with thermal drift almost zero (a few tens nanometers), which is a very important aspect in the three-dimensional manipulation of the nanoobjects.","PeriodicalId":144730,"journal":{"name":"2022 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"197 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-07-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115290349","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Oğulcan Işıtman, Hakan Kandemir, G. Alcan, Zoran M Cenev, Quan Zhou
{"title":"Simultaneous and Independent Micromanipulation of Two Identical Particles with Robotic Electromagnetic Needles","authors":"Oğulcan Işıtman, Hakan Kandemir, G. Alcan, Zoran M Cenev, Quan Zhou","doi":"10.1109/MARSS55884.2022.9870468","DOIUrl":"https://doi.org/10.1109/MARSS55884.2022.9870468","url":null,"abstract":"Magnetic manipulation of particles at close vicinity is a challenging task. In this paper, we propose simultaneous and independent manipulation of two identical particles at close vicinity using two mobile robotic electromagnetic needles. We developed a neural network that can predict the magnetic flux density gradient for any given needle positions. Using the neural network, we developed a control algorithm to solve the optimal needle positions that generate the forces in the required directions while keeping a safe distance between the two needles and particles. We applied our method in five typical cases of simultaneous and independent microparticle manipulation, with the closest particle separation of 30 μm.","PeriodicalId":144730,"journal":{"name":"2022 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-07-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125221826","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Navid Asmari, Mustafa Kangül, Santiago H. Andany, A. Karimi, G. Fantner
{"title":"Data-Driven Feedforward Hysteresis Compensation with Genetic Algorithm for Atomic Force Microscope*","authors":"Navid Asmari, Mustafa Kangül, Santiago H. Andany, A. Karimi, G. Fantner","doi":"10.1109/MARSS55884.2022.9870479","DOIUrl":"https://doi.org/10.1109/MARSS55884.2022.9870479","url":null,"abstract":"Nonlinear dynamics of piezo actuators such as hysteresis, distort the Atomic Force Microscopy (AFM) images as they adversely affect the accuracy of the nano-positioning setup. To compensate for the effects of hysteresis on lateral scanner actuators of AFM, a data-driven feedforward controller design algorithm is proposed. The pair of forward and backward images of a sample are used to extract a mapping between the trace and retrace motion of the actuator. A model corresponding to the input-output mapping of the actuator is defined with a set of unknown parameters. The values of these parameters, which shape the hysteresis curves of the actuator, are optimized through defining and solving an optimization problem. A genetic algorithm is utilized as a tool to look for the optimal values. The hysteresis mapping model is then implemented in the form of an inversion-based feedforward controller to correct the scan waveforms and get matching forward and backward images of the sample. The proposed sensor-less data-driven method is easy to implement as it does not depend on the instrument, the sample under study, or the imaging properties.","PeriodicalId":144730,"journal":{"name":"2022 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"12 6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-07-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133831192","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Forced Wetting by Ion Implantation for Liquid Nanoelectronics","authors":"F. V. von Kleist-Retzow, S. Fatikow","doi":"10.1109/MARSS55884.2022.9870249","DOIUrl":"https://doi.org/10.1109/MARSS55884.2022.9870249","url":null,"abstract":"In this paper a strategy for and the fabrication of liquid metal (LM) nanoelectronics is presented. Two techniques that were invented by our group are combined for the highly accurate fabrication of arbitrary two-dimensional LM structures. The electromigration technique is applied for the highly controllable fabrication of LM volumes and the forced wetting by ion implantation technique is used for the manipulation of LM reservoirs into functionalized structures. The ion implantation technique represents a completely new technique for nanoscale LM manipulation and offers new possibilities for reversible and highly accurate patterning of surfaces using LM. By combining these two techniques, LM can be patterned into nanoelectronic components. These components are afterwards characterized by AC and RF measurements. The results obtained show the beneficial effects of using the LM. Both contact resistance and abrasion effects are significantly reduced, which can greatly extend the longevity of electronic components and significantly reduce measurement errors.","PeriodicalId":144730,"journal":{"name":"2022 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-07-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115665171","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Optimal design of high bandwidth piezo-based nanopositioners employing bridge-type displacement amplifiers *","authors":"S. Lavanya, G. Jayanth","doi":"10.1109/MARSS55884.2022.9870469","DOIUrl":"https://doi.org/10.1109/MARSS55884.2022.9870469","url":null,"abstract":"Piezo-based nanopositioners are widely employed in precision positioning applications. This paper proposes the design, modeling, and optimization of high bandwidth nanopositioner, whose design reduces the effect of the mass of the sample on its bandwidth and achieves greater bandwidth than a piezo actuator of the same range. The nanopositioner’s range is improved by employing bridge-type displacement amplifiers, while its bandwidth is improved by minimizing the inertial loading of the sample on each of the parallelly connected amplifiers. An analytical model is developed, and the closed-form expressions for amplification ratio and bandwidth of nanopositioner are derived and then validated using finite element analysis. The results of amplification ratio and bandwidth of the positioner match within an average error of 3%. Finally, the optimal number of amplifiers and their corresponding tilt angle required to achieve the maximum bandwidth for the desired positioning range is discussed. It is shown that as the range increases, higher bandwidths can be achieved with the proposed design. In particular, for the 100 μm range, the positioner’s bandwidth is improved by a factor of 6.5 compared to just a piezo actuator moving the same sample.","PeriodicalId":144730,"journal":{"name":"2022 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-07-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124464942","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Ondřej Sodomka, Vojtěch Skřivan, Kateřina Jozová, F. Mach
{"title":"Magnetically Controlled Microfluidic Channels","authors":"Ondřej Sodomka, Vojtěch Skřivan, Kateřina Jozová, F. Mach","doi":"10.1109/MARSS55884.2022.9870465","DOIUrl":"https://doi.org/10.1109/MARSS55884.2022.9870465","url":null,"abstract":"A technological framework for entirely soft microfluidic channels controlled by an external magnetic is pro-posed. The crucial part of the channel is a multilayer structure compounded of a magnetorheological elastomer (MRE) and additional nonmagnetic layers that provide unique properties to the system. The proposed concept is studied by numerical simulations and experiments on laboratory prototypes.","PeriodicalId":144730,"journal":{"name":"2022 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"72 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-07-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128508776","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Chunyuan Gan, Jiaying Zhang, Jiawei Zhao, Shuzhang Liang, Yiming Ji, Lin Feng
{"title":"Cell Focusing and Rotation by a Planar Optoelectronic Tweezers","authors":"Chunyuan Gan, Jiaying Zhang, Jiawei Zhao, Shuzhang Liang, Yiming Ji, Lin Feng","doi":"10.1109/MARSS55884.2022.9870458","DOIUrl":"https://doi.org/10.1109/MARSS55884.2022.9870458","url":null,"abstract":"Optoelectronic tweezers (OETs) based on dielectrophoresis (DEP) force is a valuable tool for the manipulation of particles and cells. However, DEP-based methods that can measure the electrical parameters are always preformed on static metal electrode DEP systems. Here, we present a partitioned single-sided OET chip that combines an OET system and microfluidic channel. Unlike classical sandwich-structure OET chip, the single-sided chip is close to the metal electrode DEP system but can switch functions easily. Numerical simulations are studied to analyze the electric field on a microfluidic chip and provide data for characterizing cell electric properties. The focusing and electro-rotation are successfully realized by partitioned multi-signal OET system. By analyzing the rotation speed, some specific electric parameters of Raw cells are characterized. The work has laid a foundation for OET-based single-sided chip fabrication and experiment validation.","PeriodicalId":144730,"journal":{"name":"2022 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-07-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116004889","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Shenghang Zhai, Jialin Shi, Peng Yu, Tie Yang, C. Su, Lianqing Liu
{"title":"Noncontact displacement sensing with high bandwidth and subnanometer resolution based on squeeze film damping effect","authors":"Shenghang Zhai, Jialin Shi, Peng Yu, Tie Yang, C. Su, Lianqing Liu","doi":"10.1109/MARSS55884.2022.9870502","DOIUrl":"https://doi.org/10.1109/MARSS55884.2022.9870502","url":null,"abstract":"Noncontact displacement measurement with high bandwidth and subnanometer resolution is critical for precision engineering applications. However, the existing displacement sensors with subnanometer resolution either require a special plate to be fixed on the object to be measured or are bulky and inconvenient to integrate with other instruments. The air film height between two plates affects the squeeze film damping coefficient, which has the potential for subnanometer displacement sensing. However, lacking comprehensive analysis, modelling and experimental research, the possibility of the use of the squeeze film damping effect for displacement sensing is still unknown. In this paper, the displacement sensing mechanism based on the squeeze film damping effect is thoroughly analyzed, and the related experiments are conducted. The air film height is converted into the vibration amplitude of a resonant microcantilever. Then, the cantilever vibration amplitude is measured by the optical lever method, and finally, the noncontact sample displacement measurement is realized. The squeeze film damping force on the plate is analyzed, and the model of the vibrated cantilever subject to squeeze film damping force is established. It is found that increasing the driving amplitude can improve the sensitivity of the displacement sensing and reduce the measurement noise. Experimental results show that the resolution of the surface displacement measurement is 0.5nm, the linear region is about 8μm, and the measurement bandwidth of the sensor is 700Hz.","PeriodicalId":144730,"journal":{"name":"2022 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"103 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-07-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132454803","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Tony Wang, Daasol Yang, Jiehao Chen, Jocelyn Chow, Yuhang Hu, Kimberly Hoang, A. Ansari
{"title":"A Tetherless Microdriller for Maneuverability and On-Board Cargo Delivery Inside Viscoelastic Media","authors":"Tony Wang, Daasol Yang, Jiehao Chen, Jocelyn Chow, Yuhang Hu, Kimberly Hoang, A. Ansari","doi":"10.1109/MARSS55884.2022.9870461","DOIUrl":"https://doi.org/10.1109/MARSS55884.2022.9870461","url":null,"abstract":"Untethered microrobots capable of drilling offer an attractive alternative to conventional surgical tools due to their lower invasiveness and maneuverability in subsurface tissue. This work presents a magnetically actuated microdriller (250µm in width and 1.25mm in length) capable of drilling at speeds of up to 780µm/s under a 10mT rotational magnetic field in an agar gel tissue phantom. The microdriller consists of a neodymium cube attached onto a driller printed via two-photon polymerization. Under sufficiently high static and rotational magnetic fields, the microdriller could reorient itself and travel a targeted trajectory inside the viscoelastic material. To demonstrate drug delivery capabilities, the microdriller could carry an attached pH-sensitive, fluorescein-loaded hydrogel along its path. In slightly acidic solutions similar to extracellular tumor environments, the hydrogel package selectively swelled and released the molecules held inside it. These results document one of the smallest microdrillers fabricated to date and the first to carry an on-board, pH-sensitive hydrogel for drug delivery and microsurgery applications.","PeriodicalId":144730,"journal":{"name":"2022 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-07-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131835898","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Chuang Li, F. Halfwerk, J. Arens, S. Misra, M. Warlé, I. Khalil
{"title":"Controlled Helical Propulsion Against the Flow of a Physiological Fluid","authors":"Chuang Li, F. Halfwerk, J. Arens, S. Misra, M. Warlé, I. Khalil","doi":"10.1109/MARSS55884.2022.9870248","DOIUrl":"https://doi.org/10.1109/MARSS55884.2022.9870248","url":null,"abstract":"Untethered helical magnetic devices (UHMDs) have the potential to navigate bodily fluids using permanent-magnet robotic systems for minimally invasive diagnostic and surgical procedures. These devices can be actuated by robotically moving rotating permanent magnets (RPMs) to achieve controllable steering and propulsion simultaneously in a wireless manner. To date, the vast majority of motion control systems using UHMDs are constrained to operate in the absence of a dynamic flow field and prior work did not rigorously address the fundamental roles of rheological, magnetic, and geometric characteristics of the UHMD and its surroundings on the resulting stability. In this work, we show how to construct the region of attraction of a UHMD driven by two synchronized RPMs inside fluid-filled lumen around an equilibrium point. We first present the governing hydrodynamic model of a magnetically-driven UHMD to describe its behavior against the flow of blood serum. Then we validate the model using 1-D frequency response characterization and show that it captures the measured linear relationship between the actuation frequency and propulsive thrust at various flow fields. We find that a region of asymptotic stability can be achieved around an equilibrium point allowing a 6-mm-long UHMD to overcome maximum volumetric flow field of 1.2 l/hr (i.e., 2.65 cm/s).","PeriodicalId":144730,"journal":{"name":"2022 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-07-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122382706","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}