2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)最新文献

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Easily Adjusting Capillary Flow Rates on Nitrocellulose Membranes by a Household Laminator 很容易调整毛细管流速对硝化纤维素膜的家用层压机
Peiyi Chen, Zejingqiu Chen, Zitao Feng, Haonan Li, Muyang Zhang, Weijin Guo
{"title":"Easily Adjusting Capillary Flow Rates on Nitrocellulose Membranes by a Household Laminator","authors":"Peiyi Chen, Zejingqiu Chen, Zitao Feng, Haonan Li, Muyang Zhang, Weijin Guo","doi":"10.1109/NEMS57332.2023.10190923","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190923","url":null,"abstract":"Capillary flow rate control is interesting for biosensors based on nitrocellulose membranes. This paper introduces a method to control capillary flow rates on nitrocellulose membranes by simply pressing the nitrocellulose membranes using a household laminator. By applying pressure on nitrocellulose membranes, we can easily change the thickness of the nitrocellulose membrane and therefore change the pore size of the porous structure. We also notice that the pressure can break some nitrocellulose fibers. We investigate the influence by measuring the capillary flow rates on nitrocellulose membranes treated by different pressure, and also check their capacity of water absorption. We find that capillary flow rates decrease on nitrocellulose membranes with pressure treatment and the method can reduce the capillary flow rate by up to 42.3%. The water absorption capacity also decreases for nitrocellulose membranes with pressure treatment, and the maximum decrease is 44.6%. This method is promising in reducing the sample flow rates in biosensing devices made of nitrocellulose membranes.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"10 12","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"113990131","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Haptic interface with flexible self-sensing actuators for wireless touch communication 具有柔性自传感执行器的触觉接口,用于无线触摸通信
Dengfeng Li, Jingkun Zhou, Qing'ao Qu, Xinge Yu
{"title":"Haptic interface with flexible self-sensing actuators for wireless touch communication","authors":"Dengfeng Li, Jingkun Zhou, Qing'ao Qu, Xinge Yu","doi":"10.1109/NEMS57332.2023.10190909","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190909","url":null,"abstract":"At present, touch communication with each other mainly relies on direct physical contact. Imagine if touch communication could be realized in non-contact wireless ways just as sight and sound do, there could be a revolutionary change in the way that we feel the world. Here, we developed a haptic interface with self-sensing actuators for wireless touch communication. The flexible self-sensing actuator owns the functions in both tactile sensing and haptic feedback. When this soft haptic interface is conformally worn on the skin and dynamically pressed, the actuators on the interface will generate a response sensing voltage as tactile signal. When the actuator is actuated by an alternating voltage, the magnet in the actuator will generate a mechanical vibration as the haptic feedback. Via wireless Bluetooth transmission, one haptic interface could receive the tactile signal from the other haptic interface and then run synchronized haptic feedback. Thus, the touch communication is realized between two users in bidirectional way. This wireless touch communication also makes remote touch video possible, which will greatly enrich human social experience and shorten the social distance.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114832091","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
NEMS 2023 Cover Page NEMS 2023封面
{"title":"NEMS 2023 Cover Page","authors":"","doi":"10.1109/nems57332.2023.10190876","DOIUrl":"https://doi.org/10.1109/nems57332.2023.10190876","url":null,"abstract":"","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114837037","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Sphygmopalpation of Pulse Waves with Variable Applied Fingertip Pressure using a MEMS Flexible Tactile Sensor Array 基于MEMS柔性触觉传感器阵列的可变指尖压力下脉搏波的触觉感应
Senlin Hou, Donghai Yang, Xiaotong Chen, Qingjiu Chen, Jiangang Shen, Wen Jung Li
{"title":"Sphygmopalpation of Pulse Waves with Variable Applied Fingertip Pressure using a MEMS Flexible Tactile Sensor Array","authors":"Senlin Hou, Donghai Yang, Xiaotong Chen, Qingjiu Chen, Jiangang Shen, Wen Jung Li","doi":"10.1109/NEMS57332.2023.10190952","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190952","url":null,"abstract":"With the advancement of Digital Chinese Medicine (DCM) using micro/nano sensors and AI technologies, researchers have invested significant efforts in acquiring pulse wave information and relating them to disease symptoms. Many flexible sensors have been developed in the past decade attempting to improve and digitize Traditional Chinese Medicine Pulse Sphygmopalpation (TCMPS) data. Typically, TCM doctors use their fingers to obtain physiological information from the wrist radial artery and determine a patient’s physical condition by sensing temporal and spatial information of the pulse waves. However, an important element in the TCMPS method is that the fingertips must apply three different pressure levels onto a patient’s wrist in order to properly obtain the wave patterns described by TCM doctors. Unfortunately, past work failed at addressing this fundamental problem for TCMPS – existing flexible sensors have not reported the capability of measuring the truly applied pressure onto a patient’s skin while measuring temporal variations of the pulse waves. We present here a method that allows TCM doctors to record a patient’s pulse in real-time using a tactile sensor array while the fingertip pressure applied to the skin can also be recorded. We believe our work will significantly advance TCM by providing a repeatable and stable pulse wave collection methodology incorporating the vital concept of sphygmopalpation with variable applied fingertip pressures.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134240834","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Microfabricated Aluminum Nitride MEMS Resonator 微加工氮化铝MEMS谐振器
Yuxin Zhang, Tianren Feng, Hui Chen, Yangyang Chai, Yuxuan Wu, Quan Yuan
{"title":"Microfabricated Aluminum Nitride MEMS Resonator","authors":"Yuxin Zhang, Tianren Feng, Hui Chen, Yangyang Chai, Yuxuan Wu, Quan Yuan","doi":"10.1109/NEMS57332.2023.10190879","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190879","url":null,"abstract":"In this paper, a piezoelectric MEMS resonator is presented working as laterally vibrating resonator. The device is microfabricated with the SOI silicon wafer and piezoelectric aluminum nitride (A1N) thin films. The rectangular resonant plate was supported with two beams and the gap from the silicon substrate is 2 $mu$m. Molybdenum (Mo) interdigitated electrodes (IDEs) is fabricated on the top of A1N piezoelectric film. The resonant frequency of the resonator is 276 MHz, Q factor is 362.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125065821","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Experimental investigations of manifold structure on cooling performance in embedded microfluidic cooling 嵌入式微流控冷却中流形结构冷却性能的实验研究
Wei Li, Yuxin Ye, Yingzhang Yan, Xiangbin Du, Yanmei Kong, Ruiwen Liu, Zhiqiang Wang, Binbin Jiao
{"title":"Experimental investigations of manifold structure on cooling performance in embedded microfluidic cooling","authors":"Wei Li, Yuxin Ye, Yingzhang Yan, Xiangbin Du, Yanmei Kong, Ruiwen Liu, Zhiqiang Wang, Binbin Jiao","doi":"10.1109/NEMS57332.2023.10190961","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190961","url":null,"abstract":"For embedded microfluidics cooling, the morphology of the microfluidics structure and the liquid injection mode have a great impact on the cooling performance. Manifold structure can adjust the flow direction of the coolant before heat convection, reducing pumping power and improving cooling efficiency of embedded cooling. In this work, four manifold structures for embedded cooling are designed and fabricated, the cooling performance and hydraulic performance of different structures is compared through experimental investigations. The results show that compared with the horizontal cooling, the manifold structure based on vertical cooling not only reduces the temperature by 20.8%, but also reduces the pressure loss by 43.5%.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124212526","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Integrated Circuit of an Intelligent Reflecting Surface for sub-THz Wireless Communication 一种用于亚太赫兹无线通信的智能反射面集成电路
A. Shurakov, A. Prikhodko, I. Belikov, Anita Razakova, G. Gol’tsman
{"title":"Integrated Circuit of an Intelligent Reflecting Surface for sub-THz Wireless Communication","authors":"A. Shurakov, A. Prikhodko, I. Belikov, Anita Razakova, G. Gol’tsman","doi":"10.1109/NEMS57332.2023.10190913","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190913","url":null,"abstract":"Next-generation networks demand efficient hardware solutions for wireless communication channels with carrier frequencies beyond 100 GHz. In particular, beamforming in reflected light is suggested to reduce signal attenuation due to blockages and to enhance overall quality of a wireless connection. This task can be solved with the aid of a network of intelligent reflecting surfaces placed in optical path between transmitter and receiver. In this work, we propose design of such a surface operated at 140 GHz which is fully compatible with clean room fabrication processes.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"159 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123020953","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Study on Complementary Auxiliary Cathode Method for Improving the Microstructure Uniformity of Electroplated Thick Metal Film 提高电镀厚金属膜组织均匀性的互补辅助阴极法研究
T. Yin, Yunna Sun, Yan Wang, G. Ding, Mingyu Zhang
{"title":"Study on Complementary Auxiliary Cathode Method for Improving the Microstructure Uniformity of Electroplated Thick Metal Film","authors":"T. Yin, Yunna Sun, Yan Wang, G. Ding, Mingyu Zhang","doi":"10.1109/NEMS57332.2023.10190965","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190965","url":null,"abstract":"The uniformity of electroplating thick metal film in microstructure devices is an important factor affecting the surface quality, dimensional accuracy, performance and yield of devices. There are few studies on the traditional electroplating assisted cathode to improve the thickness uniformity of metal coating, and most of them use a single surrounding structure, which is difficult to adapt to the thickness uniformity improving of thick metal coating in complex microstructure devices. This paper presents a method for improving the uniformity of coating thickness by using complementary auxiliary cathode structure. A cross-shaped on-chip auxiliary cathode structure complementary to the mask pattern is designed to disperse the local over-concentrated current density. At the same time, the annular off-chip auxiliary cathode is combined to improve the uniformity of the same batch and single module at the wafer level and module level. A FEM model is established to optimize the structure, size and position distribution of the auxiliary cathode. The simulation results show that compared with the structure without auxiliary cathode, the uniformity between the components and inside the components of film thickness are improved by 90.1% and 55.9% respectively. This is of great significance to ensure the processing consistency and performance stability of thick metal film microstructure devices.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129549451","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Detection of Lower-Limb Motion Using a Kneepad Sensor Based on Textile Strain Sensor 基于纺织应变传感器的膝部传感器检测下肢运动
Xiaoyang Zou, Xiaoting Li, Jiaqi Xue, K. Lai
{"title":"Detection of Lower-Limb Motion Using a Kneepad Sensor Based on Textile Strain Sensor","authors":"Xiaoyang Zou, Xiaoting Li, Jiaqi Xue, K. Lai","doi":"10.1109/NEMS57332.2023.10190914","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190914","url":null,"abstract":"The monitoring of the knee joint angle during lower-limb motions is crucial for knee disorders patients and their rehabilitation. However, commonly used methods for lower-limb motion detection, such as inertial measurement units (IMUs) and motion capture systems, have limitations such as drift and high cost. To address these issues, we developed a wearable kneepad sensor using textile resistive strain sensors to measure knee angle during lower-limb motion. The strain sensors change in resistance signals caused by their deformation of them when the knee joint bends. To improve the accuracy of knee angle measurements, an encoder was integrated with kneepad sensor onto a prosthetic limb and used linear mapping method to calibrate the kneepad sensor with the encoder data as the ground truth. The calibrated kneepad sensor achieved an R$^{2}$ value of 0.956, MAE of 6.15°, and MSE of 64.35 while detecting the knee angle. It was demonstrated that the ability of the kneepad sensor to measure knee angles during two types of lower-limb motions, sit-to-stand (STS) and knee extension. It is shown in this work that this comfortable, wearable kneepad sensor can help detect knee angles during lower-limb motions in various environments and has broad applications in healthcare and robotics.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123503191","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Growing organoids and spheroids on a chip 在芯片上培育类器官和球体
Amani Ghassan, S. Sahloul, A. Orozaliev, P. Percipalle, Yong-Ak Song
{"title":"Growing organoids and spheroids on a chip","authors":"Amani Ghassan, S. Sahloul, A. Orozaliev, P. Percipalle, Yong-Ak Song","doi":"10.1109/NEMS57332.2023.10190866","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190866","url":null,"abstract":"Organoids have gained significant interests in the recent years to recapitulate organ development and disease progression in-vitro for personalized medicine. We propose a microfluidic chip design to grow organoids and spheroids of more uniform size and shape with minimal intervention. The hybrid design of the microfluidic chip allows to open and close culture wells using a reversibly bonded cover sheet. By combining the advantages of open wells similar to the conventional microplate wells and the sealed channel of microfluidic chips, cells can directly be pipetted into individual wells and continuously perfused after sealing. We demonstrated the concept of the hybrid chip by growing spheroids out of mouse embryonic fibroblasts and characterized the uniformity of their size and shape.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116479308","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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