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2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)最新文献

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Electrically Facilitated Transport of Proteins through Glass Nanopores: Electroosmosis versus Electrophoresis 蛋白质通过玻璃纳米孔的电促进运输:电渗透与电泳
2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2023-05-14 DOI: 10.1109/NEMS57332.2023.10190931
Xun Yao, Hongluan Li, Shi-chang Wang, Wei Xu, Jian Ma, J. Mo
{"title":"Electrically Facilitated Transport of Proteins through Glass Nanopores: Electroosmosis versus Electrophoresis","authors":"Xun Yao, Hongluan Li, Shi-chang Wang, Wei Xu, Jian Ma, J. Mo","doi":"10.1109/NEMS57332.2023.10190931","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190931","url":null,"abstract":"Nanopores are powerful tools for single molecule detection in biotechnology. A critical challenge of nanopore detection is the large translocation speed of proteins across the nanopore. In this work, we used glass nanopores made by laser-assisted capillary pulling to investigate the transport characteristics of bovine serum albumin (BSA) driven by electrophoretic or electroosmotic flow respectively. These two flow modes are achieved by modulating the direction of the applied electric field. The experimental results demonstrate that the translocation speed of BSA through glass nanopores driven by electroosmotic flow is significantly slower than that driven by electrophoretic flow. A lower translocation speed is more favorable, which allows more events to be detected and provides more insights into biomolecular information.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130126177","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Research on the Temperature-dependent Performance Improvement of Butterfly Gyroscope with Stress Isolation 利用应力隔离技术改善蝶形陀螺仪温度依赖性性能的研究
2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2023-05-14 DOI: 10.1109/NEMS57332.2023.10190887
Yunbin Kuang, D. Xiao, Z. Hou, Xuezhong Wu, Gao Liu
{"title":"Research on the Temperature-dependent Performance Improvement of Butterfly Gyroscope with Stress Isolation","authors":"Yunbin Kuang, D. Xiao, Z. Hou, Xuezhong Wu, Gao Liu","doi":"10.1109/NEMS57332.2023.10190887","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190887","url":null,"abstract":"The temperature-dependent performance of the x/y-axis MEMS gyroscopes still becomes a limit for high precision. This paper theoretically analyzed the zero offset output and scale factor of the butterfly gyroscope influenced by thermal stress and the hysteresis of strain. And the stress isolated structure was designed to integrate with the gyroscope for relieving the thermal stress. The pre-buried etched mask process was proposed for its fabrication. Tested in variable-temperature environment, the zero offset output difference between heating and cooling process of optimized butterfly gyroscope was declined from 0.08°/s to 0.01°/s. Moreover, the zero-bias stability and instability after compensation were also improved from 32.16°/h to 8.67°/h and 3.04°/h to 0.78°/h respectively, which demonstrate the effectiveness of optimization design. At the same time, the reported temperature-dependent performance reached a high level in the x/y-axis MEMS gyroscopes.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123322482","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Transparent-Reflective Switchable Glass Using Multi-layered Transition Metal Dichalcogenides 使用多层过渡金属二硫族化物的透明-反射可切换玻璃
2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2023-05-14 DOI: 10.1109/NEMS57332.2023.10190960
Yew Jin Ong, J. Chai, W.-Y. Wu, S. Tong
{"title":"Transparent-Reflective Switchable Glass Using Multi-layered Transition Metal Dichalcogenides","authors":"Yew Jin Ong, J. Chai, W.-Y. Wu, S. Tong","doi":"10.1109/NEMS57332.2023.10190960","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190960","url":null,"abstract":"The molybdenum disulfide ($MoS_{2}$) offers high charge density and well-ordered layer structure for good charge balance in the transparent-reflective switchable glass. The electrically actuated device with $MoS_{2}$ counter electrode shows large modulation in the light reflectance between the reflective mirror and transparent bleached states. Under zero power consumption, 95 % of light reflectance of the mirror-state device can be maintained for 80 minutes, paving it a promising technology for energy-efficient applications.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131288117","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
An Opto-mechanical MEMS Accelerometer with Noise Floor of 40 ng/Hz1/2 本底噪声为40 ng/Hz1/2的光电MEMS加速度计
2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2023-05-14 DOI: 10.1109/NEMS57332.2023.10190865
Shimin Jiao, Ouyang Hao, Ziqiang Qu, Qiu Wang, Huafeng Liu, L. Tu
{"title":"An Opto-mechanical MEMS Accelerometer with Noise Floor of 40 ng/Hz1/2","authors":"Shimin Jiao, Ouyang Hao, Ziqiang Qu, Qiu Wang, Huafeng Liu, L. Tu","doi":"10.1109/NEMS57332.2023.10190865","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190865","url":null,"abstract":"Miniaturized accelerometers are in high demand for consumer electronics, acoustic monitoring, and unmanned aerial vehicles. However, there is a tradeoff between accelerometer resolution and size, which poses a major challenge. In this study, we introduce an optomechanical microelectro mechanical system (MEMS) accelerometer based on a Fabry-Perot (F-P) microcavity. The F-P microcavity consists of a fixed hemispherical mirror and a harmonic oscillator made of monocrystalline silicon. Despite its small size (only 10 mm), the MEMS accelerometer exhibits an acceleration noise floor of 40 ng/Hz$^{1/2}$ at 180 Hz, a bandwidth of 500 Hz (-3 dB), and a dynamic range of 80 dB. To suppress dominant laser intensity noise and the disturbance of temperature and pressure on the optical fiber, a balanced detection method is employed, reducing the overall noise floor from 250 ng/Hz$^{1/2}$ to 40 ng/Hz$^{1/2}$, which approaches the mechanical thermal noise limit (37 ng/Hz$^{1/2}$). These results demonstrate that the opto-mechanical coupling between the oscillator and microcavity is an excellent platform for precision measurement and opto-mechanics, benefiting from its extremely small mode volume and ability to restrain photons.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"185 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131818852","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
An Improved SOI-on-Glass Fabrication Method of Large-Area Sheeting of MEMS Isolator 一种改进的MEMS隔离器大面积片材的玻璃上soi制程方法
2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2023-05-14 DOI: 10.1109/NEMS57332.2023.10190975
Longqi Ran, Yichuan Wu, Jiangbo He, Binlei Cao, Zongda Hu, Wu Zhou
{"title":"An Improved SOI-on-Glass Fabrication Method of Large-Area Sheeting of MEMS Isolator","authors":"Longqi Ran, Yichuan Wu, Jiangbo He, Binlei Cao, Zongda Hu, Wu Zhou","doi":"10.1109/NEMS57332.2023.10190975","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190975","url":null,"abstract":"Vibration isolators are utilized to help large-area micromirrors survive in the AEC-Q100 test. The supporting platform of the isolator, however, involves a larger area of movable silicon sheeting and is hard to be fabricated by direct etching due to the collapse and adhesion caused by thermal deformation. In this paper, an SOI-on-Glass (SOIOG) process is proposed to fabricate a large area of sheeting with a controllable air gap and four flexible beams. Six sacrificial pillars are introduced to prop up the sheeting in the center before structure release. Meanwhile, the pillars can increase heat dissipation to reduce thermal deformation during the DRIE process. Finally, an isolator with a $20.2 mathrm{~mm} times 14.2 mathrm{~mm}$ sheeting is fabricated successfully.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114461236","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design of a novel MEMS Interrupter Device 一种新型MEMS中断器件的设计
2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2023-05-14 DOI: 10.1109/NEMS57332.2023.10190864
He Wang, W. Nie, Yun Cao, Sheng-Qing Lei, Xiaoyu Kong, Junlin Lu
{"title":"Design of a novel MEMS Interrupter Device","authors":"He Wang, W. Nie, Yun Cao, Sheng-Qing Lei, Xiaoyu Kong, Junlin Lu","doi":"10.1109/NEMS57332.2023.10190864","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190864","url":null,"abstract":"This paper proposes a novel MEMS interrupter device to achieve the requirements of high isolation reliability and stable latching of MEMS safety and arming device (SAD). It mainly consists of the interrupter and the frame, where the interrupter plays an essential role in switching between the safe position and the arming position by moving under the centrifugal force. The locking head and locking beam together consist of the locking device to ensure the stability and reliability of the locking process. The locking beam mainly provides friction and resistance for the interrupter during the latching process and locks the interrupter after the latching. When the centrifugal force reaches the threshold, the interrupter can be stable latching, and locked by the locking beam. In order to ensure that the interrupter can move to the arming displacement, a theoretical model of the displacement response of the interrupter is proposed in this paper. The feasibility of the designed interrupter device is demonstrated by the finite element analysis.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"351 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115974854","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Rapid Thermogravimetric Analysis based on MEMS Resonant Cantilever 基于MEMS谐振悬臂梁的快速热重分析
2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2023-05-14 DOI: 10.1109/NEMS57332.2023.10190934
Zhi-Duo Cao, Hao Jia, Xiaoyang Zhang, Shanlai Wang, Haitao Yu, P. Xu, Xinxin Li, D. Zheng
{"title":"Rapid Thermogravimetric Analysis based on MEMS Resonant Cantilever","authors":"Zhi-Duo Cao, Hao Jia, Xiaoyang Zhang, Shanlai Wang, Haitao Yu, P. Xu, Xinxin Li, D. Zheng","doi":"10.1109/NEMS57332.2023.10190934","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190934","url":null,"abstract":"We report on the experimental demonstration of rapid thermogravimetric analysis (TGA) with minimized thermal lag using MEMS resonant cantilevers. Thanks to the miniature device size and unique thermal isolation structure design, the sample loading area at the cantilever free end can be heated up to 800°C and simulated to be stabilized within milliseconds, suggesting a theoretical ultrahigh ramp rate of up to $10^5{ }^{circ} mathrm{C} / mathrm{s}$. Our experimental results also support such a high ramp rate up to $sim 8 times 10^3{ }^{circ} mathrm{C} / mathrm{s}$, which is underestimated by the current measurement apparatus. Still, we demonstrate high-performance TGA measurements on calcium oxalate monohydrate using cantilever-TGA, which show much fewer deviations from theoretical 3-stage weight losses, as well as much fewer thermal lags, compared with those measured by the conventional TGA apparatus at the same ramp rates. Our MEMS resonant cantilevers hold promise for the high-efficiency, high-precision thermogravimetric analysis of materials in various fields.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130544320","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A micro and low-cost packaging technology of high accuracy piezoresistive pressure sensors with Parylene coating 高精度压阻式聚对二甲苯涂层压力传感器的微成本封装技术
2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2023-05-14 DOI: 10.1109/NEMS57332.2023.10190892
Shaoxiao Nie, Y. Hao, Fanrui Meng, C. Gao, Zhenchuan Yang
{"title":"A micro and low-cost packaging technology of high accuracy piezoresistive pressure sensors with Parylene coating","authors":"Shaoxiao Nie, Y. Hao, Fanrui Meng, C. Gao, Zhenchuan Yang","doi":"10.1109/NEMS57332.2023.10190892","DOIUrl":"https://doi.org/10.1109/NEMS57332.2023.10190892","url":null,"abstract":"Packaging technology for pressure sensors has always been a problem for protecting sensors applied in harsh environments. In this research, a micro, low – cost packaging method with high dynamic response for the application of high accuracy piezoresistive pressure sensors in corrosive and conductive medium is proposed. Tests for the performance of high accuracy sensors indicate that the method has small package effect and is low-cost than traditional encapsulation process.","PeriodicalId":142575,"journal":{"name":"2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"37 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126877406","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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