{"title":"On-Chip Assessment of Scattering in the Response of Si-Based Microdevices","authors":"A. Ghisi, S. Mariani","doi":"10.3390/MICROMACHINES2021-09555","DOIUrl":"https://doi.org/10.3390/MICROMACHINES2021-09555","url":null,"abstract":"The response of micromachines to the external actions is typically affected by a scattering, which is on its own induced by their microstructure and by stages of the microfabrication process. The progressive reduction in size of the mechanical components, forced by a path towards (further) miniaturization, has recently enhanced the outcomes of the aforementioned scattering, and provided a burst in research activities to address issues linked to its assessment [1,2]. In this work, we discuss the features of an on-chip testing device that we purposely designed to efficiently estimate the two major sources of scattering affecting inertial, polysilicon-based micromachines: the morphology of the silicon film constituting the movable parts of the device, and the etch defect or overetch induced by microfabrication. The coupled electro-mechanical behavior of the statically determinate movable (micro)structure of the on-chip device has been modelled via beam bending theory [3], within which the aforementioned sources of scattering have been accounted for through local fluctuating fields in the compliant part of the structure itself, namely the supporting spring. The proposed stochastic model is shown to outperform former ones available in the literature [4,5], which neglected the simultaneous and interacting effects of the two mentioned sources on the measure response. The model can fully catch the scattering in the C-V plots up to pull-in, hence also in the nonlinear working regime of the device. \u0000References \u0000[1] Zhu, J.; Liu, X.; Shi, Q.; He, T.; Sun, Z.; Guo, X.; Liu, W.; Sulaiman, O.B.; Dong, B.; Lee, C. Development Trends and Perspectives of Future Sensors and MEMS/NEMS. Micromachines 2020, 11. \u0000[2] Molina, J.P.Q.; Rosafalco, L.; Mariani, S. Stochastic Mechanical Characterization of Polysilicon MEMS: A Deep Learning Approach. Proceedings 2020, 42. \u0000[3] Mirzazadeh, R.; Eftekhar Azam, S.; Mariani, S. Micromechanical Characterization of Polysilicon Films through On-Chip Tests. Sensors 2016, 16, 1191. \u0000[4] Mirzazadeh, R.; Ghisi, A.; Mariani, S. Statistical Investigation of the Mechanical and Geometrical Properties of Polysilicon Films through On-Chip Tests. Micromachines 2018, 9, 53. \u0000[5] Ghisi, A.; Mariani, S. Effect of imperfections due to material heterogeneity on the offset of polysilicon MEMS structures. Sensors 2019, 19, 3256.","PeriodicalId":137788,"journal":{"name":"Proceedings of Micromachines 2021 — 1st International Conference on Micromachines and Applications (ICMA2021)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-04-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130481317","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Giorgio Casiraghi, D. Caltabiano, A. Picco, S. Mariani
{"title":"Piezoelectric Ultrasonic Micromotor","authors":"Giorgio Casiraghi, D. Caltabiano, A. Picco, S. Mariani","doi":"10.3390/MICROMACHINES2021-09560","DOIUrl":"https://doi.org/10.3390/MICROMACHINES2021-09560","url":null,"abstract":"Ultrasonic motors are characterized by low speed and high-torque operation, without the need for gear trains. They can be compact and lightweight, and they can also work in the absence of applied loads, due to the frictional coupling between the rotor and the stator induced by the traveling wave. In this work, we discuss a concept design based on thin piezoelectric films, sol-gel directly deposited onto a silicon substrate to provide high-torque motors compatible with wafer integration technologies. Due to the large dielectric constants and the enhanced breakdown strengths of thin piezoelectric films, such ultrasonic micromotors can lead to meaningful improvements over electrostatic ones in terms of energy density. As far as the fabrication of the micromotor at the mm-scale is concerned, an integrated approach is proposed with significant improvements regarding: the comb-tooth structure, to maximize/optimize the motor torque; a back and front etch lithographic process; and the design of the electrodes, which provide the electric signal at the central anchor of the stator, taking advantage of low-temperature soldering. The proposed design has been assessed through multiphysics simulations, carried out to evaluate the resonant behavior of the stator and the motor performance in terms of angular velocity, torque, and output power, and it is shown to lead to promising results.","PeriodicalId":137788,"journal":{"name":"Proceedings of Micromachines 2021 — 1st International Conference on Micromachines and Applications (ICMA2021)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-04-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126996599","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
W. Cha, Matthew Campbell, Akshat Jain, I. Bargatin
{"title":"Hollow AFM Cantilever with Holes","authors":"W. Cha, Matthew Campbell, Akshat Jain, I. Bargatin","doi":"10.3390/MICROMACHINES2021-09544","DOIUrl":"https://doi.org/10.3390/MICROMACHINES2021-09544","url":null,"abstract":"Since its invention, atomic force microscopy (AFM) has enhanced our understanding of physical and biological systems at sub-micrometer scales. As the performance of AFM depends greatly on the properties of the cantilevers, many works have been done to improving cantilevers by means of modifying their geometries via lithography [1] and ion-beam milling [2,3] that primarily involved opening areas on the cantilever’s face, resulting in high resonant frequency, low spring constant, and low hydrodynamic damping. Similar improvements were achieved using a hollow beam cantilever with nanoscale wall thickness [4]. In fact, the combination of these two approaches (in-plane opening and hollow beam) can result in unique metamaterial structures with tunable properties [5], but it has not been explored for AFM application. \u0000In this work, we explore the hollow AFM cantilevers with in-plane modifications. We accomplished this by (1) taking a commercial solid silicon cantilever, (2) making a different number of holes on the face using pulsed laser micromachining, and (3) coating them with alumina using atomic layer deposition and etching the internal silicon that results in a hollow probe with holes. We present the effects of these modifications on the cantilever’s resonant frequency, quality factor, and spring constant in air. This work provides an insight into strategies for tuning cantilever’s properties for both flexural and torsional modes. \u0000References: \u0000[1] Nilsen, M.; Port, F.; Roos, M.; Gottschalk, K.-E.; Strehle, S. Journal of Micromechanics and Microengineering 2019, 29, (2), 025014. \u0000[2] Bull, M. S.; Sullan, R. M. A.; Li, H.; Perkins, T. T. ACS Nano 2014, 8, (5), 4984-4995. \u0000[3] Hodges, A. R.; Bussmann, K. M.; Hoh, J. H. Review of Scientific Instruments 2001, 72, (10), 3880-3883. \u0000[4] Cha, W.; Nicaise, S.; Lilley, D.; Lin, C.; Bargatin, I. Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head Island, South Carolina, 2018; Transducer Research Foundation: Hilton Head Island, South Carolina, pp 232-233. \u0000[5] Lin, C.; Nicaise, S. M.; Lilley, D. E.; Cortes, J.; Jiao, P.; Singh, J.; Azadi, M.; Lopez, G. G.; Metzler, M.; Purohit, P. K.; Bargatin, I. Nature Communications 2018, 9, (1), 4442. \u0000[5] C. Lin, S. M. Nicaise, D. E. Lilley, J. Cortes, P. Jiao, J. Singh, et al., \"Nanocardboard as a nanoscale analog of hollow sandwich plates,\" Nature Communications, vol. 9, p. 4442, 2018/10/25 2018.","PeriodicalId":137788,"journal":{"name":"Proceedings of Micromachines 2021 — 1st International Conference on Micromachines and Applications (ICMA2021)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-04-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132864521","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Nonlinear Absorption of Ag Nanoparticles Coupled The Local Light Field in The Slit of ZnO Microrod","authors":"Chunxiang Xu, Ru Wang","doi":"10.3390/micromachines2021-09554","DOIUrl":"https://doi.org/10.3390/micromachines2021-09554","url":null,"abstract":"","PeriodicalId":137788,"journal":{"name":"Proceedings of Micromachines 2021 — 1st International Conference on Micromachines and Applications (ICMA2021)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-04-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129895649","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Zhipeng Lu, Mohsen Azadi, G. Popov, C. Stanczak, Pratik Ponnarassery, Andy G. Eskenazi, John Cortes, Matthew Campbell, I. Bargatin
{"title":"Demonstration of Atmospheric-Pressure Radiometer with Metamaterial Vanes","authors":"Zhipeng Lu, Mohsen Azadi, G. Popov, C. Stanczak, Pratik Ponnarassery, Andy G. Eskenazi, John Cortes, Matthew Campbell, I. Bargatin","doi":"10.3390/micromachines2021-09558","DOIUrl":"https://doi.org/10.3390/micromachines2021-09558","url":null,"abstract":"We report a Crookes radiometer that rotates at atmospheric pressure using architected microporous dielectric plates, known as nanocardboard, as vanes [1,2]. Compared to most light mills working at tens of Pascals [3,4], the functionality at pressures three orders-of-magnitude larger results from the metamaterial vanes’ unique features: (1) extremely low areal density (0.1 mg/cm2) that reduces the vane mass and hub friction force by almost 100 times; (2) high thermal resistivity that increases the cross-vane temperature difference; and (3) micro-channels that enable through-vane thermal transpiration gas flows. \u0000Each nanocardboard vane features a basketweave-style five-flow-channel pattern to amplify the thermal transpiration force. We manufactured these vanes using microfabrication techniques in four stages: (1) silicon mold creation using photolithography and reactive ion etching; (2) mold conformal coating using atomic layer deposition; (3) carbon nanotube drop-casting and oxygen plasma etching; and (4) mold cleaving and removing using XeF2 isotropic etching [1, 5]. We 3D-printed a 26-mm-diameter quad-arm hub and mounted the vanes to it using super glue. \u0000We measured the temperature and rotation speed of the radiometer using thermal and video cameras while illuminating it using an octagonal LED array. We found that our radiometer could operate at atmospheric pressure, and that its rotation rate increased with light intensity. To our knowledge, no other radiometers have achieved such functioning in ambient air. Lastly, we simulated the radiometer’s fluid dynamics, obtaining similar trends between its rotation speed and light intensity and achieving order-of-magnitude agreement with our experiments. Our photophoretically-propelled microstructures reveal new possibilities for light sensing and actuation, aerial microflyers, and photo-generators. \u0000References: \u0000[1] Lin, Chen, et al. “Nanocardboard as a nanoscale analog of hollow sandwich plates.” Nature Communications 9.1 (2018): 1-8. \u0000[2] Cortes, John, et al. “Photophoretic Levitation: Photophoretic Levitation of Macroscopic Nanocardboard Plates” (Adv. Mater. 16/2020). Advanced Materials 32.16 (2020): 2070127. \u0000[3] Han, Li-Hsin, et al. “Light-powered micromotor: design, fabrication, and mathematical modeling.” Journal of Microelectromechanical Systems 20.2 (2011): 487-496. \u0000[4] Wolfe, David, Andres Larraza, and Alejandro Garcia. “A horizontal vane radiometer: Experiment, theory, and simulation.” Physics of Fluids 28.3 (2016): 037103. \u0000[5] Azadi, Mohsen, et al. “Demonstration of Atmospheric-Pressure Radiometer With Nanocardboard Vanes.” Journal of Microelectromechanical Systems 29.5 (2020): 811-817.","PeriodicalId":137788,"journal":{"name":"Proceedings of Micromachines 2021 — 1st International Conference on Micromachines and Applications (ICMA2021)","volume":"62 10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-04-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130626070","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Carbon-Origami : Controlling 3D Shapes and Microstructure","authors":"M. Madou","doi":"10.3390/micromachines2021-09557","DOIUrl":"https://doi.org/10.3390/micromachines2021-09557","url":null,"abstract":"Over the last two decades, we have gained more and more insight into how to convert patterned polymer precursors into predicable 3D carbon shapes using pyrolysis/carbonization (carbon origami are a more recent example). Over the last four years, we have started gaining control over the internal carbon microstructure and its functionality. The key to the latter is a precise control of the polymer precursor chains and the exact polymer atomic composition of the polymer before and during pyrolysis. Contradicting Rosalind Franklin, we have found that it is possible to graphitize even non-graphitizing carbons, simply by applying mechanical stresses to align the polymer precursor chains and stabilizing them in position before pyrolysis. Perhaps the most surprising outcome of this work is the demonstration of the conversion of PAN fibers through pyrolysis into turbostratic graphene-suspended wires with diameters as small as 2 nanometers. The suspended graphene bridges have a conductivity similar to that of multiwall carbon nanotubes (MWCNTs), a Young’s modulus of >400 GPa, and electrochemically the material behaves similarly to graphene doped with nitrogen. The latter material represents a very electroactive electrode ideally suited for energy and sensing applications. The current fabrication process for graphene doped with nitrogen is lengthy and complicated; ours is a one-step, simple process that is easily scalable.","PeriodicalId":137788,"journal":{"name":"Proceedings of Micromachines 2021 — 1st International Conference on Micromachines and Applications (ICMA2021)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-04-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126158786","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Jiang Guo, Yong Zhao, Zhuji Jin, Q. Wang, J. Feng, Xiuru Li
{"title":"Influence of Substrate Surface States on Interface Bonding Quality for Bonding Joints Manufactured by Hot-compression Bonding","authors":"Jiang Guo, Yong Zhao, Zhuji Jin, Q. Wang, J. Feng, Xiuru Li","doi":"10.3390/micromachines2021-09562","DOIUrl":"https://doi.org/10.3390/micromachines2021-09562","url":null,"abstract":"The hot-compression bonding process is a new technology used to manufacture heavy forgings which can avoid the size effect caused by the traditional casting process. In this new technology, the surface state of substrates is a key factor to guarantee the quality of bonding joints. At present, the influence of different surface states on the quality of interface bonding is uncertain. Therefore, the effect of surface state on the bonding quality of interface was studied in this paper for the first time. Different methods such as optical observation and elemental analysis were used to composite characterize the surface state. Furthermore, the microscopic morphology of the cross-section samples derived from the bonding joints was used to analyze the quality of interface bonding. The influence of the surface state on interface bonding quality was obtained by analyzing the relationship between the surface state and interface bonding quality. The results show that 90% of the interface bonding area can achieve a seamless interface effect after the bonding of two relatively clean substrates, which means that a clean surface state can greatly improve the bonding quality of bonding joints. This study can help to understand the relationship between the surface state of the substrate and the bonding quality of the interface. It is beneficial to guarantee the interface bonding quality of the substrate and is of great significance to further improve the quality of the joint.","PeriodicalId":137788,"journal":{"name":"Proceedings of Micromachines 2021 — 1st International Conference on Micromachines and Applications (ICMA2021)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-04-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133654367","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Thomas J. Celenza, Zhipeng Lu, Matthew Campbell, Mohsen Azadi, I. Bargatin
{"title":"Enhancing the Photophoretic Lift Force at Low Reynolds Numbers using Three-Dimensional Porous Structures","authors":"Thomas J. Celenza, Zhipeng Lu, Matthew Campbell, Mohsen Azadi, I. Bargatin","doi":"10.3390/micromachines2021-09566","DOIUrl":"https://doi.org/10.3390/micromachines2021-09566","url":null,"abstract":"It is well documented that the lift force of hovering micro aerial vehicles can be enhanced by increasing their air-flow velocities. This is commonly accomplished using nozzles and other flow-manipulating geometries with Reynolds numbers above order 100. [1,2] However, the effects of nozzles and other geometries are not well characterized for lower Reynolds numbers within the Stokes’ regime. In general, controlled flight in low-Reynolds number conditions using conventional propulsion methods such as propellers is difficult. Instead, levitation at ultra-low Reynolds number conditions has been accomplished through other means, including photophoretically as demonstrated recently by Cortes et al. [3] and Azadi et al. [4]. These works levitated planar materials without macroscale geometric enhancements and relied strictly on the lift force created through a temperature or accommodation coefficient difference across the planar structure. In the current work, we numerically explored the feasibility of multi-scale structures operating at low-to-moderate Reynolds numbers that pair microscale photophoretic gas pumping with macroscale jet-inducing nozzles. \u0000We used ANSYS Fluent to simulate the lift forces in centimeter-scale porous membrane discs (no macroscale enhancements) and in conical nozzles created from porous membranes. Our results indicate that porous conical nozzles provide an order of magnitude lift enhancement relative to flat discs with inlet velocities as low as 10-6 m/s. In addition, we developed a semi-analytical flow model and found good agreement with the simulations. We are currently fabricating mylar structures analogous to the simulation geometries, laser machined to create porosity and adhered to lightweight frames to maintain their shape. The multi-scale structures we create will be of critical importance for exploring low-pressure environments such as Earth’s mesosphere and the Martian atmosphere. \u0000 \u0000References: \u0000[1] Benedict, Moble, et al. \"Experimental investigation of micro air vehicle scale helicopter rotor in hover.\" International Journal of Micro Air Vehicles3 (2015): 231-255. \u0000[2] Seddon, John M., and Simon Newman. Basic helicopter aerodynamics. Vol. 40. John Wiley & Sons, 2011. \u0000[3] Cortes, John, et al. \"Photophoretic levitation of macroscopic nanocardboard plates.\" Advanced Materials16 (2020): 1906878. \u0000[4] Azadi, Mohsen, et al. \"Controlled levitation of nanostructured thin films for sun-powered near-space flight.\" Science Advances7 (2021): eabe1127.","PeriodicalId":137788,"journal":{"name":"Proceedings of Micromachines 2021 — 1st International Conference on Micromachines and Applications (ICMA2021)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-04-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123481306","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"A Piezo-MEMS Device for Fatigue Testing of Thin Metal Layers","authors":"A. Ghisi, N. Boni, R. Carminati, S. Mariani","doi":"10.3390/MICROMACHINES2021-09559","DOIUrl":"https://doi.org/10.3390/MICROMACHINES2021-09559","url":null,"abstract":"Several micro devices, such as micro-mirrors, are subjected to working conditions featuring alternating loadings that can possibly induce fatigue in the thin metal layers, which represent critical structural parts. The quantification of the degradation of the material properties under fatigue loading is a time consuming task, and the effects of environmental conditions (e.g. humidity) and load characteristics (e.g. frequency, stress ratio) must be properly accounted for. In this work, we propose and assess the efficiency of an on-chip test device based on piezoelectric actuators, able to generate a time-varying (sinusoidal) strain in the mentioned thin metal layers and lead to fatigue. The aim of the research activity is the characterization of the stress/strain-induced degradation process of a thin layer located on the top of a lead zirconate titanate (PZT) actuation system. The characterization has been carried out through measurements of resistivity and roughness, respectively carried out via an ohmmeter and a confocal microscope. The proposed testing device has shown capability to qualitatively highlight the degradation of the metal layers. A re-design of the on-chip device is also discussed, in order to also carry out quantitative evaluations.","PeriodicalId":137788,"journal":{"name":"Proceedings of Micromachines 2021 — 1st International Conference on Micromachines and Applications (ICMA2021)","volume":"53 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-04-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130678657","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"A New Spatiotemporal Scanning Technique for Two-Photon Fluorescence","authors":"Q. Cui, Chunxiang Xu, Yizhi Zhu","doi":"10.3390/micromachines2021-09561","DOIUrl":"https://doi.org/10.3390/micromachines2021-09561","url":null,"abstract":"Two-photon laser scanning microscope (TPLSM) provides outstanding optical three dimension section properties and it has been widely used in fundamental science and biomedical application. However, Current 3D two-photon fluorescence (TPF) imaging techniques usually overlook the spatiotemporal evolution of TPF ellipsoid along the axial direction, which might contain fine dynamical information of imaged targets. Here, we develop a spatiotemporal scanning technique and realize the measurement of spatiotemporal scanning of TPF ellipsoid with a semiconducting CsPbBr3 nanosheet. Results have shown that axial size of TPF ellipsoid present linear growth as a function of excitation fluence by using spatial scanning. Furthermore, we have observed that axial size of TPF ellipsoid exhibits inhomogeneous linear growth with time delay by introducing spatiotemporal scanning technique. We attribute this phenomenon to the fact that surface and bulk region of CsPbBr3 nanosheet have inhomogeneous timescale on TPF decay lifetime. Our results not only provide new insights for spatiotemporal resolving of TPF ellipsoid, but also helpful to promote the development of fluorescence lifetime microscopy technology.","PeriodicalId":137788,"journal":{"name":"Proceedings of Micromachines 2021 — 1st International Conference on Micromachines and Applications (ICMA2021)","volume":"77 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-04-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124100963","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}