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2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)最新文献

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Modification of silicon surface by direct laser interference 直接激光干涉对硅表面的改性
2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2012-08-01 DOI: 10.1109/3M-NANO.2012.6473000
Dapeng Wang, Zuobin Wang, Ziang Zhang, Y. Yue, Dayou Li, C. Maple
{"title":"Modification of silicon surface by direct laser interference","authors":"Dapeng Wang, Zuobin Wang, Ziang Zhang, Y. Yue, Dayou Li, C. Maple","doi":"10.1109/3M-NANO.2012.6473000","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6473000","url":null,"abstract":"Periodic and quasi-periodic structures on silicon surface have numerous significant applications in photoelectronics and surface engineering. A number of technologies have been developed to fabricate these structures in various research areas. In this work, we take the strategy of direct nanosecond laser interference patterning technology. Well-defined grating and dot structures have been achieved and interactive thermal effect was observed obviously. Additionally, the height and width of different structures were analyzed by AFM. It can be demonstrated that direct laser interference lithography is a promising technology which has the capability for the manufacturing of micro and nano structures.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"393 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126972390","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Hydrophobic surface fabricated by laser interference lithography 激光干涉光刻制备疏水表面
2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2012-08-01 DOI: 10.1109/3M-NANO.2012.6472964
W. Liu, X. Gu, W. Zhang, F. Zhang, L. Yuan, Y. Y. Wang, C. Peng
{"title":"Hydrophobic surface fabricated by laser interference lithography","authors":"W. Liu, X. Gu, W. Zhang, F. Zhang, L. Yuan, Y. Y. Wang, C. Peng","doi":"10.1109/3M-NANO.2012.6472964","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472964","url":null,"abstract":"The hydrophobic and self-cleaning effects of micro-nano structures have attracted much attention. In this paper, micro-nano structures have been successfully fabricated on glass substrates by laser interference lithography. The hydrophobic properties of the micro-nano structures have been studied by the determination of the water contact angle(CA). The resultant substrate with micro-nano structures exhibit excellent hydrophobic properties, which can be used as a master for roll-to-roll imprinting technology and easily realize its large-scale manufacture.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130201478","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Analysis of measuring errors of micro-deformation using speckle digital image correlation 基于散斑数字图像相关的微变形测量误差分析
2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2012-08-01 DOI: 10.1109/3M-NANO.2012.6472959
Zhong Chen, Xianmin Zhang, Xiaofeng Zhou
{"title":"Analysis of measuring errors of micro-deformation using speckle digital image correlation","authors":"Zhong Chen, Xianmin Zhang, Xiaofeng Zhou","doi":"10.1109/3M-NANO.2012.6472959","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472959","url":null,"abstract":"Speckle digital image correlation (DIC) method has extended its application to micro-deformation measurement in nanoscale except for in microscale and macroscale. Because of its micro-deformation errors mainly depend upon the correct selection of the parameters of DIC method and its hardware setup, key parameters and how these parameters influence the measuring accuracy should be clarified in detail. So the microdeformation measuring errors using DIC method are evaluated in different conditions of the parameters in deformation simulation experiments and the practical tensile test experiments, considering the difficulties of micro-deformation measuring experiment setup in nanoscale, and Some suggestions has been presented.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131538488","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Tracking control of an electrostatic torsional micromirror beyond the pull-in limit with enhanced performance 静电扭转微镜超越拉入极限的跟踪控制与性能增强
2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2012-08-01 DOI: 10.1109/3M-NANO.2012.6472958
Weijie Sun, J. Yeow, Zhendong Sun
{"title":"Tracking control of an electrostatic torsional micromirror beyond the pull-in limit with enhanced performance","authors":"Weijie Sun, J. Yeow, Zhendong Sun","doi":"10.1109/3M-NANO.2012.6472958","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472958","url":null,"abstract":"In this paper, we will study the output-error-constrained tracking control problem of an electrostatic torsional micromirror beyond the pull-in limit. We will first show that this problem can be formulated as a robust output regulation problem and it further boils down to a robust regulation problem with output-constrained by adaptive internal model design, the solution of which would in turn lead to the solution of the original problem. Then we design a regulation controller for such a regulation problem by using the barrier Lyapunov function technique. Our adaptive control law ensures the electrostatic torsional micromirror with a enhanced tracking performance in the sense that the moveable micromirror can achieve the sinusoidal wave scanning of any frequency up to a full gap operation without contacts of the fixed bottom electrode, and furthermore, the estimated sinusoidal wave frequency converges to its real value.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114284304","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Optimization of thin film deposition using multi-parametric surface plasmon resonance: A new technique to determine thickness and refractive index of thin and thick layers 利用多参数表面等离子体共振优化薄膜沉积:一种测定薄层和厚层厚度和折射率的新技术
2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2012-08-01 DOI: 10.1109/3M-NANO.2012.6472952
J. Kuncova-Kallio, Jussipekka Tuppurainen, Janusz W. Sadowski, Niko Granqvist
{"title":"Optimization of thin film deposition using multi-parametric surface plasmon resonance: A new technique to determine thickness and refractive index of thin and thick layers","authors":"J. Kuncova-Kallio, Jussipekka Tuppurainen, Janusz W. Sadowski, Niko Granqvist","doi":"10.1109/3M-NANO.2012.6472952","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472952","url":null,"abstract":"We present a new method for measuring thicknesses and refractive indices of ultrathin, thin and relatively thick films by using multi-parametric surface plasmon resonance (MP-SPR). The layers measured can be multiple layers of organic, inorganic, metallic, and it is also possible to follow interaction kinetics of interaction components with all these materials. In this paper, MP-SPR is applied as a method for optimization of thin film deposition, here vacuum evaporation.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123223012","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
The effects of ultrasonic vibration on surface finish and tool wear in end-milling machining 超声波振动对立铣削加工表面光洁度和刀具磨损的影响
2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2012-08-01 DOI: 10.1109/3M-NANO.2012.6472972
C. Li, Min Yeop Kim, T. Ko, Jong Kweon Park
{"title":"The effects of ultrasonic vibration on surface finish and tool wear in end-milling machining","authors":"C. Li, Min Yeop Kim, T. Ko, Jong Kweon Park","doi":"10.1109/3M-NANO.2012.6472972","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472972","url":null,"abstract":"Conventionally, tool wear is very high or fracture when processing high hardness steel by milling method. So, we attempted to design a fixture apparatus for hybrid machining process (HMP) by ultrasonic vibration using finite element method. Now this fixture apparatus has been manufactured. We can do many types of hybrid machining experiments using this fixture. And then the milling machining was conducted to compare the effects of the ultrasonic vibration. The results showed that the tool wear and surface roughness with ultrasonic vibration was smoother than without the fixture vibration. This result could be explained as accelerating the heat transfer by ultrasonic vibration.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"380 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122170249","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Finite element simulation of PTFE nano-film two-phase filter 聚四氟乙烯纳米膜两相滤波器的有限元模拟
2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2012-08-01 DOI: 10.1109/3M-NANO.2012.6472965
Yankun Liu, W. Lou, Qingfang Shi, Mingru Guo, Peng Liu
{"title":"Finite element simulation of PTFE nano-film two-phase filter","authors":"Yankun Liu, W. Lou, Qingfang Shi, Mingru Guo, Peng Liu","doi":"10.1109/3M-NANO.2012.6472965","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472965","url":null,"abstract":"With the development of nanotechnology and Micro-Electro-Mechanical System (MEMS) technology, micro-pores films are widely applied in the fabrication of important components of nano-devices and MEMS. It is found that micro-pores films have the effect on the separation of the two-phases and the fix of the phase interfaces, due to huge network structures and highly ordered distribution of pore structure. Based on the combined effects of the inertial impaction, the interception and the diffusion, PTFE membrane filter is adopted. Furthermore, we perform the simulation by the COMSOL Multiphysics, which reflects the filtering effect of the PTFE nano-film materials. Finally we study the simulation of the protective micro-particles in PTFE membrane materials.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"41 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122672601","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Theoretical analysis of micro-structural antireflective grating with hydrophobicity 疏水性微结构增透光栅的理论分析
2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2012-08-01 DOI: 10.1109/3M-NANO.2012.6472991
Zhenglong Zhu, Weiguo Liu, Jin Zhang, Ting Yang
{"title":"Theoretical analysis of micro-structural antireflective grating with hydrophobicity","authors":"Zhenglong Zhu, Weiguo Liu, Jin Zhang, Ting Yang","doi":"10.1109/3M-NANO.2012.6472991","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472991","url":null,"abstract":"A 3D contour of sub-wavelength structure was designed and analyzed, to decrease the light lose due to the reflection on the surface, and to keep the self-cleaning for the devices used outside with a long service time. Comparing with the ordinary antireflective structure, it has obvious advantages of lower reflectivity, wider suitable spectral region, and hydrophobicity, etc. The research result shows that if generating a relief structure with equal space/line on the substrate surface, the hydrophilic substrate will be more hydrophilic and the same with hydrophobic substrate. Furthermore, the surface wettability could be controlled by changing patterns' duty ratio.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125432874","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
MEMS slide block locking mechanism based on elastic supporting structure 基于弹性支撑结构的MEMS滑块锁定机构
2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2012-08-01 DOI: 10.1109/3M-NANO.2012.6472985
Fan Chenyang, Li Xiaojie, W. Falin
{"title":"MEMS slide block locking mechanism based on elastic supporting structure","authors":"Fan Chenyang, Li Xiaojie, W. Falin","doi":"10.1109/3M-NANO.2012.6472985","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472985","url":null,"abstract":"Aiming at the condition that when the Fuze MEMS (micro electro mechanical system) S&A system bears setback/centrifugal overload in an experiment, the clamping head of a setback/centrifugal slide block deforms considerably when entering the clamping seat of a base plate, so that the slide block cannot be locked successfully by the clamping seat of the base plate, this paper presents an MEMS slide block locking mechanism with an elastic supporting structure. The structure of the mechanism, which is contrary to the original structure, is that rigid barbs are arranged on the clamping head, and an elastic supporting arm is arranged on the base plate. The finite element simulation with ANSYS shows that when the clamping head and the clamping arm of the locking mechanism with the elastic supporting structure bear overload, the stress of the dangerous cross-section of the locking mechanism is reduced by 52%, compared with that of the original mechanism, so that plastic deformation is avoided, and the slide block can enter the clamping seat smoothly and locked. Therefore, it can provide selection and reference for the design of locking mechanisms of MEMS S&A system in future.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"66 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125904387","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Role of electric field distribution in local anodic oxidation 电场分布在局部阳极氧化中的作用
2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2012-08-01 DOI: 10.1109/3M-NANO.2012.6472980
Kexiang Hu, Qingkang Wang, P. Wangyang
{"title":"Role of electric field distribution in local anodic oxidation","authors":"Kexiang Hu, Qingkang Wang, P. Wangyang","doi":"10.1109/3M-NANO.2012.6472980","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472980","url":null,"abstract":"Local electric-field-induced anodic oxidation is one of the earliest and most extensively studied techniques in bias-assisted AFM nanolithography. Except the water bridge created between the tip and the sample surface, local anodic oxidation (LAO) process strongly depends on the tip-sample voltage and especially on the electric field distribution under the tip apex center. Once electric field is formed, its distribution and intensity can be modified by changing the tip-sample voltage and separation. The electric field provides the oxidation kinetics of nanoscale electrochemical reaction and controls the spacial resolution of the fabricated structures. In this paper, the s-wave tip quantum model, the influence of the bias voltage and the electric field strength on oxide structures and the theory of electric-field-induced LAO have been analyzed. In addition, dot-array nanogratings, one-dimensional nanogratings and two-dimensional nanogratings are fabricated by using electric-field-induced LAO process with AFM in the ambient atmosphere.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128903703","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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