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2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)最新文献

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Modification of silicon surface by direct laser interference 直接激光干涉对硅表面的改性
2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2012-08-01 DOI: 10.1109/3M-NANO.2012.6473000
Dapeng Wang, Zuobin Wang, Ziang Zhang, Y. Yue, Dayou Li, C. Maple
{"title":"Modification of silicon surface by direct laser interference","authors":"Dapeng Wang, Zuobin Wang, Ziang Zhang, Y. Yue, Dayou Li, C. Maple","doi":"10.1109/3M-NANO.2012.6473000","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6473000","url":null,"abstract":"Periodic and quasi-periodic structures on silicon surface have numerous significant applications in photoelectronics and surface engineering. A number of technologies have been developed to fabricate these structures in various research areas. In this work, we take the strategy of direct nanosecond laser interference patterning technology. Well-defined grating and dot structures have been achieved and interactive thermal effect was observed obviously. Additionally, the height and width of different structures were analyzed by AFM. It can be demonstrated that direct laser interference lithography is a promising technology which has the capability for the manufacturing of micro and nano structures.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"393 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126972390","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Hydrophobic surface fabricated by laser interference lithography 激光干涉光刻制备疏水表面
2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2012-08-01 DOI: 10.1109/3M-NANO.2012.6472964
W. Liu, X. Gu, W. Zhang, F. Zhang, L. Yuan, Y. Y. Wang, C. Peng
{"title":"Hydrophobic surface fabricated by laser interference lithography","authors":"W. Liu, X. Gu, W. Zhang, F. Zhang, L. Yuan, Y. Y. Wang, C. Peng","doi":"10.1109/3M-NANO.2012.6472964","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472964","url":null,"abstract":"The hydrophobic and self-cleaning effects of micro-nano structures have attracted much attention. In this paper, micro-nano structures have been successfully fabricated on glass substrates by laser interference lithography. The hydrophobic properties of the micro-nano structures have been studied by the determination of the water contact angle(CA). The resultant substrate with micro-nano structures exhibit excellent hydrophobic properties, which can be used as a master for roll-to-roll imprinting technology and easily realize its large-scale manufacture.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130201478","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Analysis of measuring errors of micro-deformation using speckle digital image correlation 基于散斑数字图像相关的微变形测量误差分析
2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2012-08-01 DOI: 10.1109/3M-NANO.2012.6472959
Zhong Chen, Xianmin Zhang, Xiaofeng Zhou
{"title":"Analysis of measuring errors of micro-deformation using speckle digital image correlation","authors":"Zhong Chen, Xianmin Zhang, Xiaofeng Zhou","doi":"10.1109/3M-NANO.2012.6472959","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472959","url":null,"abstract":"Speckle digital image correlation (DIC) method has extended its application to micro-deformation measurement in nanoscale except for in microscale and macroscale. Because of its micro-deformation errors mainly depend upon the correct selection of the parameters of DIC method and its hardware setup, key parameters and how these parameters influence the measuring accuracy should be clarified in detail. So the microdeformation measuring errors using DIC method are evaluated in different conditions of the parameters in deformation simulation experiments and the practical tensile test experiments, considering the difficulties of micro-deformation measuring experiment setup in nanoscale, and Some suggestions has been presented.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131538488","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Theoretical analysis of micro-structural antireflective grating with hydrophobicity 疏水性微结构增透光栅的理论分析
2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2012-08-01 DOI: 10.1109/3M-NANO.2012.6472991
Zhenglong Zhu, Weiguo Liu, Jin Zhang, Ting Yang
{"title":"Theoretical analysis of micro-structural antireflective grating with hydrophobicity","authors":"Zhenglong Zhu, Weiguo Liu, Jin Zhang, Ting Yang","doi":"10.1109/3M-NANO.2012.6472991","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472991","url":null,"abstract":"A 3D contour of sub-wavelength structure was designed and analyzed, to decrease the light lose due to the reflection on the surface, and to keep the self-cleaning for the devices used outside with a long service time. Comparing with the ordinary antireflective structure, it has obvious advantages of lower reflectivity, wider suitable spectral region, and hydrophobicity, etc. The research result shows that if generating a relief structure with equal space/line on the substrate surface, the hydrophilic substrate will be more hydrophilic and the same with hydrophobic substrate. Furthermore, the surface wettability could be controlled by changing patterns' duty ratio.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125432874","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Stiffness analysis and modal analysis of precision parallel manipulator with flexure hinge 柔性铰链精密并联机械臂的刚度与模态分析
2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2012-08-01 DOI: 10.1109/3M-NANO.2012.6472973
W. Rong, Yuliang Luan, Limin Qi, Hui Xie, Lining Sun
{"title":"Stiffness analysis and modal analysis of precision parallel manipulator with flexure hinge","authors":"W. Rong, Yuliang Luan, Limin Qi, Hui Xie, Lining Sun","doi":"10.1109/3M-NANO.2012.6472973","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472973","url":null,"abstract":"According to a 3-PPSR flexible parallel manipulator with specific structure, through theoretical calculation and finite element analysis of the whole robot, stiffness analysis and modal analysis were made and it was obtained the inherent frequency and vibration mode, which can effectively avoid the occurrence of resonance.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116347072","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Modification of the structure and properties of heat-resistant alloys with the help of nanopowders of refractory compounds 用难熔化合物纳米粉末改性耐热合金的结构和性能
2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2012-08-01 DOI: 10.1109/3M-NANO.2012.6472998
C. La-mei, Guangxun Liu, Huaipeng Gu, Liang-ming Yan, A. Cherepanov, V. Ovcharenko, V. Drozdov
{"title":"Modification of the structure and properties of heat-resistant alloys with the help of nanopowders of refractory compounds","authors":"C. La-mei, Guangxun Liu, Huaipeng Gu, Liang-ming Yan, A. Cherepanov, V. Ovcharenko, V. Drozdov","doi":"10.1109/3M-NANO.2012.6472998","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472998","url":null,"abstract":"Influence of nanodispersed refractory compounds on structure and mechanical properties of heat-resistant alloys K403 and K4169 was investigated. Powders of chemical compounds TiN, TiCN, Y2O3 and their mixtures were used as the modifying agents. The results show that the modifying leads to general improvement of grain and carbide structure of heat-resistant alloys in casts. The grain average size in the cast decreased by 2-3 times, the carbide grains size decreased from 40-60 μm to 10-20 μm. This leads to significant improvement of the life at breaking load and LCF properties of the cast.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"305 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116115705","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Optimization of thin film deposition using multi-parametric surface plasmon resonance: A new technique to determine thickness and refractive index of thin and thick layers 利用多参数表面等离子体共振优化薄膜沉积:一种测定薄层和厚层厚度和折射率的新技术
2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2012-08-01 DOI: 10.1109/3M-NANO.2012.6472952
J. Kuncova-Kallio, Jussipekka Tuppurainen, Janusz W. Sadowski, Niko Granqvist
{"title":"Optimization of thin film deposition using multi-parametric surface plasmon resonance: A new technique to determine thickness and refractive index of thin and thick layers","authors":"J. Kuncova-Kallio, Jussipekka Tuppurainen, Janusz W. Sadowski, Niko Granqvist","doi":"10.1109/3M-NANO.2012.6472952","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472952","url":null,"abstract":"We present a new method for measuring thicknesses and refractive indices of ultrathin, thin and relatively thick films by using multi-parametric surface plasmon resonance (MP-SPR). The layers measured can be multiple layers of organic, inorganic, metallic, and it is also possible to follow interaction kinetics of interaction components with all these materials. In this paper, MP-SPR is applied as a method for optimization of thin film deposition, here vacuum evaporation.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123223012","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Role of electric field distribution in local anodic oxidation 电场分布在局部阳极氧化中的作用
2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2012-08-01 DOI: 10.1109/3M-NANO.2012.6472980
Kexiang Hu, Qingkang Wang, P. Wangyang
{"title":"Role of electric field distribution in local anodic oxidation","authors":"Kexiang Hu, Qingkang Wang, P. Wangyang","doi":"10.1109/3M-NANO.2012.6472980","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472980","url":null,"abstract":"Local electric-field-induced anodic oxidation is one of the earliest and most extensively studied techniques in bias-assisted AFM nanolithography. Except the water bridge created between the tip and the sample surface, local anodic oxidation (LAO) process strongly depends on the tip-sample voltage and especially on the electric field distribution under the tip apex center. Once electric field is formed, its distribution and intensity can be modified by changing the tip-sample voltage and separation. The electric field provides the oxidation kinetics of nanoscale electrochemical reaction and controls the spacial resolution of the fabricated structures. In this paper, the s-wave tip quantum model, the influence of the bias voltage and the electric field strength on oxide structures and the theory of electric-field-induced LAO have been analyzed. In addition, dot-array nanogratings, one-dimensional nanogratings and two-dimensional nanogratings are fabricated by using electric-field-induced LAO process with AFM in the ambient atmosphere.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128903703","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Printing sub-micrometer lines based on electrohydrodynamics 基于电流体动力学的亚微米线印刷
2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2012-08-01 DOI: 10.1109/3M-NANO.2012.6472931
Chi Qian, Ruihua Chen, Feilong Wang, Changhai Ru
{"title":"Printing sub-micrometer lines based on electrohydrodynamics","authors":"Chi Qian, Ruihua Chen, Feilong Wang, Changhai Ru","doi":"10.1109/3M-NANO.2012.6472931","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472931","url":null,"abstract":"Printing techniques develop rapidly especially in the areas of electronics and biotechnology in these decades. In this paper, first we describe the use of electrohydrodynamics for jet printing the lines with the sub-micrometer resolution. It also presents the complex pattern printed by electrohydrodynamics jet printing with the same resolution combined with the automatic control technology. In the second part, we research on the parameters which affect the width of the printed lines by a series of experiments. Such experiments focus on the effect of voltage and distance between the tip of the nozzle and the substrate, in addition, concentration of the printed solution and the inner diameter of the nozzle are also considered.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"53 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130419621","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Piezo-resistive ring-shaped AFM sensors with piconewton force resolution 具有皮牛顿力分辨率的压阻环形AFM传感器
2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2012-08-01 DOI: 10.1109/3M-NANO.2012.6472963
Z. Xiong, B. Walter, E. Mairiaux, M. Faucher, L. Buchaillot, B. Legrand
{"title":"Piezo-resistive ring-shaped AFM sensors with piconewton force resolution","authors":"Z. Xiong, B. Walter, E. Mairiaux, M. Faucher, L. Buchaillot, B. Legrand","doi":"10.1109/3M-NANO.2012.6472963","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472963","url":null,"abstract":"A new concept of Atomic Force Microscope (AFM) oscillating probes using electrostatic excitation and piezo-resistive detection is presented. The probe is characterized by electrical methods in a vacuum chamber and by mechanical methods in air. The frequency-mixing measurement technique is developed to reduce the parasitic signal level. These probes resonant in the 1MHz range and the quality factor is measured about 53,000 in vacuum and 3,000 in air. The ring probe is mounted onto a commercial AFM set-up and the surface topography of PMMA sample (2 μm square) is obtained. The force resolution deduced from the measurements is about 10 pN/Hz0.5.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"46 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128210428","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
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