聚四氟乙烯纳米膜两相滤波器的有限元模拟

2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2012-08-01 DOI:10.1109/3M-NANO.2012.6472965

Yankun Liu, W. Lou, Qingfang Shi, Mingru Guo, Peng Liu

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引用次数: 0

摘要

随着纳米技术和微机电系统(MEMS)技术的发展，微孔薄膜在纳米器件和微机电系统的重要部件制造中得到了广泛的应用。研究发现，微孔膜由于其巨大的网状结构和高度有序的孔结构分布，对两相的分离和相界面的固定有一定的影响。基于惯性冲击、拦截和扩散的综合作用，采用了聚四氟乙烯膜滤波器。利用COMSOL Multiphysics软件进行了模拟，模拟结果反映了聚四氟乙烯纳米薄膜材料的过滤效果。最后对聚四氟乙烯膜材料中保护微粒的模拟进行了研究。

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Finite element simulation of PTFE nano-film two-phase filter

With the development of nanotechnology and Micro-Electro-Mechanical System (MEMS) technology, micro-pores films are widely applied in the fabrication of important components of nano-devices and MEMS. It is found that micro-pores films have the effect on the separation of the two-phases and the fix of the phase interfaces, due to huge network structures and highly ordered distribution of pore structure. Based on the combined effects of the inertial impaction, the interception and the diffusion, PTFE membrane filter is adopted. Furthermore, we perform the simulation by the COMSOL Multiphysics, which reflects the filtering effect of the PTFE nano-film materials. Finally we study the simulation of the protective micro-particles in PTFE membrane materials.

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2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

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