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1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)最新文献

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Precise positioning of a micro conveyor based on superconducting magnetic levitation 基于超导磁悬浮的微型输送机精确定位
1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311) Pub Date : 1997-10-05 DOI: 10.1109/MHS.1997.768870
T. Iizuka, H. Fujita
{"title":"Precise positioning of a micro conveyor based on superconducting magnetic levitation","authors":"T. Iizuka, H. Fujita","doi":"10.1109/MHS.1997.768870","DOIUrl":"https://doi.org/10.1109/MHS.1997.768870","url":null,"abstract":"The design and the driving characteristics of a micro conveyor based on superconducting magnetic levitation are reported. This actuator consists of three parts; a superconductor (Y-Ba-Cu-O), a stator layer made by patterned copper electrodes (line pitch: 180 /spl mu/m, width: 70 /spl mu/m) on the polyimide film and a slider with four permanent magnets (the size of one magnet is 1 mm cube). This conveyance actuator is free from particle generation, because there is no friction by the magnetic levitation. The position of the slider is controlled by the current in the patterned electrodes. We have obtained quick conveyance (280 /spl mu/m/s over 2.8 mm) and precise positioning with an accuracy of 40 /spl mu/m by combining the step actuation in the entire area and the micro-step actuation in the local area near the target position.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134418219","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 16
Shape memory alloy bending actuator for catheter with movable link and guide wires 带活动连杆和导丝导管的形状记忆合金弯曲致动器
1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311) Pub Date : 1997-10-05 DOI: 10.1109/MHS.1997.768883
Muoung-Soon Kim, Seung-Ki Lee, Sang-Hoon Lee
{"title":"Shape memory alloy bending actuator for catheter with movable link and guide wires","authors":"Muoung-Soon Kim, Seung-Ki Lee, Sang-Hoon Lee","doi":"10.1109/MHS.1997.768883","DOIUrl":"https://doi.org/10.1109/MHS.1997.768883","url":null,"abstract":"This paper proposes two kinds of novel bending actuator using three links, two shape memory alloy coil-type springs and guide wires. One is a macro model for one directional bending actuator, the other is a micro model for two directional bending actuator. By heating the two shape memory alloy coil-type springs sequentially, bending and stretching motion of the actuator is possible. The performance of the actuator has been characterized for the possible application to catheters.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"109 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116534542","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Nano-technologies for head-medium interface in magnetic disk storage 磁盘存储中磁头介质接口的纳米技术
1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311) Pub Date : 1997-10-05 DOI: 10.1109/MHS.1997.768852
Y. Mitsuya
{"title":"Nano-technologies for head-medium interface in magnetic disk storage","authors":"Y. Mitsuya","doi":"10.1109/MHS.1997.768852","DOIUrl":"https://doi.org/10.1109/MHS.1997.768852","url":null,"abstract":"Nano-technologies used in head-medium interfaces for magnetic disk drives are presented. To allow for an increase in bit density, head-to-medium spacing has to be minimized. Recently, the spacing has reduced to 40-50 nm. Such an ultimately small spacing could be realized by nano-technologies wherein the dimensions and physical quantities are required to be controlled to the nanometer scale. First, a law of scale analogy is introduced resulting from the history of increases in bit density. Then, the dimensions and configurations relating to the head-medium interface are described. Finally, typical nano-technologies, such as, design of a gas lubricating surface, formation of a liquid lubricant layer, manufacturing of texture and the micro-flow for lubricants are discussed.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122380125","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Mechanism and driving method of an inertial driven micromanipulator 惯性驱动微机械臂的机构与驱动方法
1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311) Pub Date : 1997-10-05 DOI: 10.1109/MHS.1997.768877
N. Mitsumoto, T. Kaneko, N. Kawahara
{"title":"Mechanism and driving method of an inertial driven micromanipulator","authors":"N. Mitsumoto, T. Kaneko, N. Kawahara","doi":"10.1109/MHS.1997.768877","DOIUrl":"https://doi.org/10.1109/MHS.1997.768877","url":null,"abstract":"This paper proposes an inertial driven micromanipulator utilizing BEMA, a bending and expanding motion actuator. The goal of this paper is to improve the speed of the manipulator by means of optimum voltage pattern. In this paper, motion of the manipulator dependence on voltage pattern was investigated. Also, a design method for making an optimum voltage pattern was proposed. The optimum voltage improved the manipulator's motion speed by 5 times with respect to the conventional one.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"74 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125917725","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Present and future of micromechatronics 微机电一体化的现在与未来
1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311) Pub Date : 1997-10-05 DOI: 10.1109/MHS.1997.768850
Y. Ishikawa, T. Kitahara
{"title":"Present and future of micromechatronics","authors":"Y. Ishikawa, T. Kitahara","doi":"10.1109/MHS.1997.768850","DOIUrl":"https://doi.org/10.1109/MHS.1997.768850","url":null,"abstract":"Micromachine technology has brought about a profound technological innovation over a wide range of industries. It is expected to be the basic technology used in the new industries in the future. Micromachine technology is being studied throughout the world. In Japan, R&D on Micromachine Technology, one of the Industrial Science and Technology Frontier Program Projects sponsored by the Ministry of International Trade and Industry (MITI), started in 1991 as a 10-year plan. This paper briefly outlines and describes the current status of this R&D project. It then discusses the problems of the current technology which have become clear during the course of R&D on micromachine technology (micromechatronics). To solve these problems, and also to achieve \"microminiaturization\" and \"precision\", or \"micro-scale and integration\" and \"wide-range application\" simultaneously, we propose the new technology systems of \"wide-area 3D nano-scale machining technology\" and \"mechanical engineering based on nano-scale effects.\" Mechanical parts have become increasingly smaller in size recently. In contrast, these small part processing machines are still very large and their production efficiency is simply wasted. A \"Microfactory\" intends to dramatically save energy, space and resources at production plants by reducing the size of the production machines to that comparable with that of the product. The concept of a \"microfactory\" is outlined in this paper. The \"micro-lathe\", which has been developed to verify the feasibility and effectiveness of a microfactory, is also outlined.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116771440","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 18
Design of micro-hand with two magnetic levitated fingers 双磁悬浮手指微型手的设计
1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311) Pub Date : 1997-10-05 DOI: 10.1109/MHS.1997.768871
T. Nakamura, I. Ando
{"title":"Design of micro-hand with two magnetic levitated fingers","authors":"T. Nakamura, I. Ando","doi":"10.1109/MHS.1997.768871","DOIUrl":"https://doi.org/10.1109/MHS.1997.768871","url":null,"abstract":"A micro-hand with two fingers was designed and a prototype of one finger subsystem with three degrees of freedom was developed to show the validity of the design. The finger is constrained with a 3-DOF link mechanism and is directly driven with three pairs of electromagnets. Friction of the mechanism is negligibly small so that force control is easily realized by regulating the currents of the magnets. The performance of the prototype was evaluated by the application to micro drawing.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"159 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122184679","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Optical multi-transmission system using pyroelectric and optical piezoelectric element 采用热释电和光压电元件的光多路传输系统
1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311) Pub Date : 1997-10-05 DOI: 10.1109/MHS.1997.768880
H. Ishihara, T. Fukuda
{"title":"Optical multi-transmission system using pyroelectric and optical piezoelectric element","authors":"H. Ishihara, T. Fukuda","doi":"10.1109/MHS.1997.768880","DOIUrl":"https://doi.org/10.1109/MHS.1997.768880","url":null,"abstract":"We propose an optical multi-transmission system using a pyroelectric and optical piezoelectric element as transmitter. We apply the PLZT element to the proposed system as the pyroelectric and optical piezoelectric element. The PLZT element generates the electric charge according to the change of temperature and strength of the UV irradiation. We aim at an energy supply system using the pyroelectric effect, and an information transmission system using the optical piezoelectric effect. We show a numerical model of the transmission system using the PLZT element and simulation results of the transmission of the photo energy and information source to the electric information. The experimental results explain the performance of the developed transmission system and its capability.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128971870","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A micromachined single-crystal silicon flow sensor with a cantilever paddle 微机械单晶硅流量传感器与悬臂桨
1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311) Pub Date : 1997-10-05 DOI: 10.1109/MHS.1997.768884
Lian Zhang, X. Ye, Zhaoying Zhou, Jian Yao
{"title":"A micromachined single-crystal silicon flow sensor with a cantilever paddle","authors":"Lian Zhang, X. Ye, Zhaoying Zhou, Jian Yao","doi":"10.1109/MHS.1997.768884","DOIUrl":"https://doi.org/10.1109/MHS.1997.768884","url":null,"abstract":"A series of micro flow sensors with cantilever paddles are developed which are based on the detection of surface strain on the cantilever caused by the mass flow. The sensing structure is a 10-/spl mu/m thick single crystal silicon cantilever beam attaching a square paddle. In measuring, the flow causes a deflection on the cantilever which is proportional to the volume flow rate, then the strain is detected by the piezoresistance bridge integrated on the supporting root of the beam. The size of the sensing chip is 3.5 mm/spl times/3.5 mm. The packaged sensor is /spl Phi/ 10 mm/spl times/4 mm in size, with two /spl Phi/ 2 mm/spl times/25 mm inlet and outlet fluid tubes. The sensors with different detecting structures achieve different measuring ranges. The lowest theoretically detectable flow rate is 100 /spl mu/l/min for water, and 5 ml/min for air. Testing of the fabricated sensors shows an acceptable linearity of /spl plusmn/5% under an air flow rate of 10 ml/min to 200 ml/min.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"56 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117304184","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
Dynamics analysis of a 6-DOF serial-parallel micromanipulator 六自由度串并联微机械臂动力学分析
1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311) Pub Date : 1997-10-05 DOI: 10.1109/MHS.1997.768879
W. Shoujie, Z. Guanghua, B. Shusheng, Zhao Wei
{"title":"Dynamics analysis of a 6-DOF serial-parallel micromanipulator","authors":"W. Shoujie, Z. Guanghua, B. Shusheng, Zhao Wei","doi":"10.1109/MHS.1997.768879","DOIUrl":"https://doi.org/10.1109/MHS.1997.768879","url":null,"abstract":"A new dexterous 6-DOF two-stage serial-parallel micromanipulator is described. The kinematics of this mechanism are analyzed with the method of vector analysis, and some advantages are also discussed. Inertia forces, moments of inertia and elastic potential energy are also analyzed. The dynamics of the SP mechanism has been modeled using a Lagrangian approach.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121237854","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Multi-layered piezoelectric bimorph actuator 多层压电双晶片致动器
1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311) Pub Date : 1997-10-05 DOI: 10.1109/MHS.1997.768860
S. Kawakita, T. Isogai, N. Ohya, N. Kawahara
{"title":"Multi-layered piezoelectric bimorph actuator","authors":"S. Kawakita, T. Isogai, N. Ohya, N. Kawahara","doi":"10.1109/MHS.1997.768860","DOIUrl":"https://doi.org/10.1109/MHS.1997.768860","url":null,"abstract":"We have developed a multi-layered bimorph actuator whose power consumption is low and whose displacement is large. Each actuator layer comprises a piezoelectric element and elastic plate. Because volume of the piezoelectric element is constant, the actuator expands in the direction of applied voltage, but contracts in the perpendicular direction. This bends the elastic plate, amplifying displacement. Layer number determines actuator force. We also developed in-pipe locomotive mechanism utilizing the developed actuator and conventional stack type piezoelectric actuator. The power consumption and moving speed of two-actuator mechanism were investigated. The mechanism of the multi-layered actuator moves 2.5 times faster compared with that of the conventional one, and consumes only 1/80 of electric power of the conventional one.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"101 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126544182","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 33
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