1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)最新文献

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Screening of single Escherichia coli by electric field and laser tweezer 电场与激光镊子联合筛选单一大肠杆菌
K. Morishima, F. Arai, T. Fukuda, K. Yoshikawa
{"title":"Screening of single Escherichia coli by electric field and laser tweezer","authors":"K. Morishima, F. Arai, T. Fukuda, K. Yoshikawa","doi":"10.1109/MHS.1997.768874","DOIUrl":"https://doi.org/10.1109/MHS.1997.768874","url":null,"abstract":"In this paper, we propose a novel methodology for high throughput screening of microbes. We have developed a prototype of a microchannel system for high throughput screening of Escherichia coli. Experimental demonstrations of noncontact transportation and manipulation of Escherichia coli by dielectrophoretic force and radiation pressure of laser tweezers were carried out with a laser manipulator system. We discuss research issues in bio-micromanipulation and present a new direction in this field. We consider the basic strategies to improve the working efficiency and the operability of bio-micromanipulation. In experiments, we show that transportation and separation of Escherichia coli with electric field and optical radiation pressure is profitable for future practical application in high throughput screening of microbes.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"72 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124562485","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
A study on development of artificial larynx with PZT ceramics PZT陶瓷人工喉的研制
K. Ooe, T. Nishisaka
{"title":"A study on development of artificial larynx with PZT ceramics","authors":"K. Ooe, T. Nishisaka","doi":"10.1109/MHS.1997.768864","DOIUrl":"https://doi.org/10.1109/MHS.1997.768864","url":null,"abstract":"Various speech production substitutes which aim to reconstruct speech function have been used practically for vocally handicapped persons. However, the substitute vocalizations used presently have problems in clearness and acquisition. We studied improving clarity by sound quality improvement. We paid attention to PZT ceramic as a sound source of an artificial larynx, and we tried to produce an artificial larynx using these PZT ceramics experimentally. We put this artificial larynx into a human being and evaluated its performance. The artificial larynx produced experimentally showed a similar power spectrum to that of the voice of an unhandicapped person. This voice had good clarity in listening estimation. This artificial larynx is composed of two parts: one part is in the body and the other part is the sound source attached outside of the body. This separated type device has biocompatibility and safety, and it is expected that is possible to be practical use in the near future by miniaturization of power supply.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"317 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116770125","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
An artificial fish robot using ICPF actuator 采用ICPF作动器的人工鱼机器人
Shuxiang Guo, K. Wakabayashi, N. Kato, T. Fukuda, T. Nakamura, Keisuke Oguro
{"title":"An artificial fish robot using ICPF actuator","authors":"Shuxiang Guo, K. Wakabayashi, N. Kato, T. Fukuda, T. Nakamura, Keisuke Oguro","doi":"10.1109/MHS.1997.768881","DOIUrl":"https://doi.org/10.1109/MHS.1997.768881","url":null,"abstract":"It is our purpose to develop an artificial fish robot that has characteristics of flexibility, driven by a low voltage, good response and safety in body. In this paper, we propose a new prototype model of an artificial fish robot utilizing ICPF (Ionic Conducting Polymer Film) actuator as the servo actuator. Biomimetic fish-like propulsion using ICPF actuator as a propulsion tail fin for an artificial fish robot swimming structure in water or aqueous medium is developed. The overall size of the artificial fish robot prototype shaped as a boat is 40 mm in length, 10 mm in width and 2 mm in thickness. There is a pair of platinum electrodes. Characteristics of the artificial fish robot are measured by changing the frequency of the input voltage from 0.1 Hz to 5 Hz. The experimental results indicate that the swimming speed of the proposed artificial fish robot can be controlled by changing the frequency of input voltage.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"41 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124689907","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
A remote micro-manipulator for teleoperation using magnetic levitation 一种利用磁悬浮进行遥操作的遥控微型机械手
M. B. Khamesee, T. Nakamura, N. Kato, Shuxiang Guo, K. Mizutani
{"title":"A remote micro-manipulator for teleoperation using magnetic levitation","authors":"M. B. Khamesee, T. Nakamura, N. Kato, Shuxiang Guo, K. Mizutani","doi":"10.1109/MHS.1997.768876","DOIUrl":"https://doi.org/10.1109/MHS.1997.768876","url":null,"abstract":"This paper presents a new approach to the design of teleoperation systems. Magnetic levitation technology is employed to levitate and move a microhand in three-dimensional space with multi-degrees-of-freedom. The microhand consists of three main parts; cross-shaped mounted magnets, fingers made from two thin ribbons of a copper alloy, and the body together with an electronic circuit and batteries. The fingers are operated by a shape memory alloy (SMA) actuator. For absolute remote control of the microhand, the electronic circuit and batteries for delivering the current to the SMA actuator are put into the body of the microhand so that merely by a distant illumination of several LEDs to it, the fingers can be operated. The results of several experiments are shown to verify the effectiveness of the proposed teleoperation system. The microhand has a total mass of 8.1 g and can grasp and elevate an object with a maximum mass of 1 g. The grasped object can be manipulated within a volume of 29/spl times/29/spl times/26 mm/sup 3/ with a resolution of 0.02 mm in steady state.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114394066","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
An xy/spl theta/ actuator using piezoelectric and electromagnetic actuators 采用压电和电磁作动器的xy/spl θ /作动器
A. Torii, H. Kato, K. Hayakawa, A. Ueda
{"title":"An xy/spl theta/ actuator using piezoelectric and electromagnetic actuators","authors":"A. Torii, H. Kato, K. Hayakawa, A. Ueda","doi":"10.1109/MHS.1997.768862","DOIUrl":"https://doi.org/10.1109/MHS.1997.768862","url":null,"abstract":"Microactuators with a micro tool and a micro sensor can provide a lot of benefits to precise engineering. Precise positioning is needed in precision engineering. A system with multi degrees of freedom is required for industrial application. A system with multi degrees of freedom is composed of some systems with one degree of freedom. Therefore, the system becomes complicated and large. We propose a new actuator which can move in x, y and /spl theta/ directions by the extension of piezoelectric actuators and the adhesion of electromagnetic actuators. The proposed actuator realizes high resolution by using the piezoelectric actuator. We describe the structure and principle of the proposed actuator. In order to demonstrate the proposed actuator, we constructed the actuator and measured the velocity in x and /spl theta/ direction. The measured fastest velocity in x direction was 190 /spl mu/m/s and that in /spl theta/ direction was 9.5 mrad/s. The resolution in x direction was obtained to be 0.24 /spl mu/m and that in /spl theta/ direction was 0.1 mrad. We are now improving the resolution of the proposed actuator.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115063845","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Anisotropic trench etching of Si using SF/sub 6//O/sub 2/ mixture 用SF/sub - 6//O/sub - 2/混合物刻蚀Si的各向异性
Yao Yahong, Zhao Yongjun
{"title":"Anisotropic trench etching of Si using SF/sub 6//O/sub 2/ mixture","authors":"Yao Yahong, Zhao Yongjun","doi":"10.1109/MHS.1997.768858","DOIUrl":"https://doi.org/10.1109/MHS.1997.768858","url":null,"abstract":"This paper presents the etching results of single crystalline silicon using SF/sub 6//O/sub 2/ mixture in the traditional RIE work mode of ICP790 system. We investigate the effect of O/sub 2/ addition on the etched profile and etch rate at system pressure of 35 mTorr and DC bias voltage of 50 V and the SEM photographs are given. According to these results the anisotropic profile can be achieved at a wide process window by adjusting the O/sub 2/ flow rate. The influences of pressure and DC bias voltage on etch rate and parallel shift degree of the trench vertical edge beneath the mask layer are studied and the respective figures are presented also. The etch rate increases with the system pressure at constant DC bias voltage and it also increases with DC bias voltage at constant gas flow rates. All the experiment results are discussed and explained.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128385684","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Application of DNA micromanipulation to gene mapping and localized restriction enzyme digestion DNA微操作在基因定位和限制性内切酶酶切中的应用
H. Yasuda, K. Hirano, Y. Matsui, Y. Matsuzawa, S. Katsura, A. Mizuno
{"title":"Application of DNA micromanipulation to gene mapping and localized restriction enzyme digestion","authors":"H. Yasuda, K. Hirano, Y. Matsui, Y. Matsuzawa, S. Katsura, A. Mizuno","doi":"10.1109/MHS.1997.768866","DOIUrl":"https://doi.org/10.1109/MHS.1997.768866","url":null,"abstract":"Accurate manipulation of a single DNA molecule will support genome analysis, such as gene mapping, physical mapping and sequencing of chromosome. This paper presents the micromanipulation of single-stranded DNA and its application to gene mapping. As a model template DNA, monomeric /spl lambda/ phage DNA was tandemly ligated which was then denatured and hybridized with a cloned probe DNA of /spl lambda/-exo gene region. The hybridized molecules were terminally bound with magnetic beads, elongated, and video-imaged. We could observe the islands of gleaming spots which stood in line from a bead at regular intervals. This agree well with the expected images from the construction of the templates and probes. We have also demonstrated the localization of restriction enzyme activity only in a small area of stretched long chromosomal DNA using temperature control technique. The DNAs were digested about 10 /spl mu/m around the laser focal spot (about 10 pico liter portion) under a microscopic observation view. This technique may open up quick physical mapping by handling a single DNA molecule.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"109 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133986716","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Millimeter-sized shape memory alloy bending actuator using buckling of the beam 毫米尺寸的形状记忆合金弯曲驱动器使用的梁的屈曲
K. Lee, Seung-Ki Lee
{"title":"Millimeter-sized shape memory alloy bending actuator using buckling of the beam","authors":"K. Lee, Seung-Ki Lee","doi":"10.1109/MHS.1997.768882","DOIUrl":"https://doi.org/10.1109/MHS.1997.768882","url":null,"abstract":"We have proposed a novel bending actuator for a catheter, of which the major components are a shape memory alloy spring, a stainless steel strip and two acrylic links. In order to analyse the characteristics of the proposed bending actuator, the buckling equation of the beam has been used and compared with experimental results on the fabricated actuator. Experimental results show excellent agreement with calculated values. Also, a micro model has been fabricated and characterized for possible application to micro active catheters. The repeatable actuation of the micro model is found to be adequate for practical application.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"257 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127543106","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Aerodynamic control of a delta-wing using MEMS sensors and actuators 基于MEMS传感器和致动器的三角翼气动控制
Y. Tai
{"title":"Aerodynamic control of a delta-wing using MEMS sensors and actuators","authors":"Y. Tai","doi":"10.1109/MHS.1997.768851","DOIUrl":"https://doi.org/10.1109/MHS.1997.768851","url":null,"abstract":"The Caltech Micromachining Lab has been developing fluid-mechanics MEMS for many years. What is presented here are two basic devices and their applications for delta-wing control. The first device is a surface shear-stress sensor that is small, sensitive, fast and arrayable. The device has a structure of a polysilicon resistor on a 1.2 /spl mu/m thick silicon-nitride diaphragm (200/spl times/200 /spl mu/m/sup 2/) which is on top of a vacuum cavity. The device has a shear-stress sensitivity of 120 mV/Pa and a constant-temperature bandwidth of 10 kHz at a power of 5 mW. The second device is an electromagnetic flap that is strong, fast and also arrayable. The actuator has a flap structure hinged with silicon-nitride beams and the flap size is either 1/spl times/1 mm/sup 2/ or 2/spl times/2 mm/sup 2/. The actuators can provide an out-of-plane motion with an actuating torque resulting from an on-flap magnetic moment (from permalloy and/or electrical coils) interacting with an external magnetic field. The out-of-plane force from the flap can be as high as 100 /spl mu/N and the flap rotational angle up to 80/spl deg/. In the delta-wing control project, an array of shear-stress sensors are made on a flexible skin and used at the leading edge of the wing to detect flow separation. Then, an array of microactuators are placed right in front of the separation to produce maximum control moments. To date, a rolling moment of 50% that of the lifting torque has been produced using MEMS devices. This result has proven the feasibility of an aircraft controlled by microactuators.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"61 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121218731","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
A novel centrifugal miniature pump and its medical application 一种新型离心微型泵及其医疗应用
C. Hainan, Zhou Zhaoying, L. Yong, Ye Xiongying, Y. Yihua
{"title":"A novel centrifugal miniature pump and its medical application","authors":"C. Hainan, Zhou Zhaoying, L. Yong, Ye Xiongying, Y. Yihua","doi":"10.1109/MHS.1997.768867","DOIUrl":"https://doi.org/10.1109/MHS.1997.768867","url":null,"abstract":"A miniature pump based on a high precision machining technique is described. The working principle of the pump is centrifugal. The blades of the pump are driven by a micromotor to rotate at very high speed, so the fluids from the axial direction of the pump are thrown out to the tangential direction of the pump. The available back pressure of the pump is 0 to 10 kPa (1 mH/sub 2/O). Its highest flow rate is relatively very large, so by using throttle tubes of different length and different inner diameter, variable flow rates of less than 1 /spl mu/l/min and up to 100 ml/min can be achieved easily. It is of very useful in medical and other applications.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"100 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116241386","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
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