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1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)最新文献

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Physical limits and information bounds of micro control. I. Quantum filters and non-demolition measurements 微控制的物理极限和信息边界。1 .量子滤波器和非破坏测量
1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311) Pub Date : 1997-10-05 DOI: 10.1109/MHS.1997.768873
S. Ulyanov, F. Arai, K. Yamafuji, T. Fukuda, G.G. Rizzotto, I. Kurawaki
{"title":"Physical limits and information bounds of micro control. I. Quantum filters and non-demolition measurements","authors":"S. Ulyanov, F. Arai, K. Yamafuji, T. Fukuda, G.G. Rizzotto, I. Kurawaki","doi":"10.1109/MHS.1997.768873","DOIUrl":"https://doi.org/10.1109/MHS.1997.768873","url":null,"abstract":"The possible accuracy limit of micro control of dynamic systems in which the dominating disturbances are thermal and quantum noises is considered. The optimal control with a Kalman-Bucy filter (KBF) and physical limits of micro control of a macro object are studied. For the individual control of a micro object a quantum prototype of KBF with non-demolition observation on the basis of quantum filtering equation is introduced.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123671579","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Selective laser sintering of metallic powder for microfabrication technology 选择性激光烧结金属粉末微加工技术
1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311) Pub Date : 1997-10-05 DOI: 10.1109/MHS.1997.768854
Y. Kathuria
{"title":"Selective laser sintering of metallic powder for microfabrication technology","authors":"Y. Kathuria","doi":"10.1109/MHS.1997.768854","DOIUrl":"https://doi.org/10.1109/MHS.1997.768854","url":null,"abstract":"This paper describes the 3D micro-structuring by beam technology, which employ the one component solid state and two metal liquid phase selective laser sintering of metallic powder comprising of high and low melting point temperature. The influence of the processing conditions on the type of phases and the microstructure evolution are considered.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"58 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124500618","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Orientation-dependent fracture strain in single-crystal silicon beams under uniaxial tensile conditions 单晶硅梁在单轴拉伸条件下的取向相关断裂应变
1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311) Pub Date : 1997-10-05 DOI: 10.1109/MHS.1997.768857
T. Ando, K. Sato, M. Shikida, T. Yoshioka, Y. Yoshikawa, T. Kawabata
{"title":"Orientation-dependent fracture strain in single-crystal silicon beams under uniaxial tensile conditions","authors":"T. Ando, K. Sato, M. Shikida, T. Yoshioka, Y. Yoshikawa, T. Kawabata","doi":"10.1109/MHS.1997.768857","DOIUrl":"https://doi.org/10.1109/MHS.1997.768857","url":null,"abstract":"The proposed method for testing the uniaxial tensile characteristics of thin film materials is integrated onto a silicon chip. The developed process for fabricating the test chips starts with SOI wafers whose top silicon layer is prepared for the test materials. The results of testing single-crystal silicon films having orientations of <100>, <110>, and <111> were compared with those from bending tests of bulk silicon. The measured Young's moduli and fracture strains clearly showed orientation dependence, and the measured values were reasonable compared with those of the bulk materials. The fracture strains varied from 0.4 to 2.2% depending on the orientation and were the lowest in the <111> direction.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126130238","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 22
Properties and application of jet printed piezoelectric PZT film for actuation purposes 驱动用喷射印刷压电薄膜的性能及应用
1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311) Pub Date : 1997-10-05 DOI: 10.1109/MHS.1997.768859
A. Schroth, M. Ichiki, J. Akedo, M. Tanaka, R. Maeda
{"title":"Properties and application of jet printed piezoelectric PZT film for actuation purposes","authors":"A. Schroth, M. Ichiki, J. Akedo, M. Tanaka, R. Maeda","doi":"10.1109/MHS.1997.768859","DOIUrl":"https://doi.org/10.1109/MHS.1997.768859","url":null,"abstract":"Although piezoelectric thin films are of great interest for actuator application in MEMS, deposition of PZT films with thickness between 5 and 100 /spl mu/m has been hardly possible. It is therefore the goal of this paper, to investigate the properties of PZT-films of this thickness deposited by the recently introduced jet printing system, especially concerning an application in microactuator devices. On basic functional elements (beams, membranes) PZT-layers of 10 to 50 /spl mu/m thickness were deposited, and their relative dielectric constant determined between 20 and 550. For the first time the piezoelectric constant of the jet printed PZT-layer was calculated to 20...30/spl middot/10/sup -12/ C/N from laser measurements of beam deflection, and therefore piezoelectric actuation capability could be proved directly.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"68 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123102808","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Development of a micro force sensor for conduit guided wire and its application to micro master-slave systems 导管导丝微力传感器的研制及其在微主从系统中的应用
1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311) Pub Date : 1997-10-05 DOI: 10.1109/MHS.1997.768878
S. Shimizu, K. Kuribayashi, M. Asari, T. Ueda
{"title":"Development of a micro force sensor for conduit guided wire and its application to micro master-slave systems","authors":"S. Shimizu, K. Kuribayashi, M. Asari, T. Ueda","doi":"10.1109/MHS.1997.768878","DOIUrl":"https://doi.org/10.1109/MHS.1997.768878","url":null,"abstract":"This paper describes fabrication of a micro force sensor for conduit guided wire which is often used to drive a catheter in medical treatment. The diaphragm type force sensor of 2 mm/spl times/2 mm/spl times/216 /spl mu/m for the conduit with an outer diameter 320 /spl mu/m, an inner diameter 150 /spl mu/m and the wire with a diameter 100 /spl mu/m is fabricated. Photolithography, wet and dry oxidation, B-diffusion, through hole etching by TMAH techniques are used. The relation between loaded force and output voltage is measured to be linear with a sensitivity of 10.2 mV/gf under a constant supplied voltage. A micro master-slave system driven by conduit guided wire is expected to be applied to delicate surgical operations, assembling precise and small parts, etc. This system consists of a micro sized slave robot and a master manipulator of which the size is adapted to a human finger. Displacement and torque of the master side are reduced and transferred to the slave robot by controlling the brake torque against the master torque by feeding back tension signals of the force sensor in the slave robot. The master can feel the tensions by the brake torque, though conduit guided wire has a nonlinear input-output characteristics due to friction force.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134214818","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Tensile properties of polysilicon in surface micromachining 多晶硅在表面微加工中的拉伸性能
1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311) Pub Date : 1997-10-05 DOI: 10.1109/MHS.1997.768886
Xiaoqing Lu, X. Ye, Zhaoying Zhou, C. Li, Yihua Yang
{"title":"Tensile properties of polysilicon in surface micromachining","authors":"Xiaoqing Lu, X. Ye, Zhaoying Zhou, C. Li, Yihua Yang","doi":"10.1109/MHS.1997.768886","DOIUrl":"https://doi.org/10.1109/MHS.1997.768886","url":null,"abstract":"Polysilicon is widely used in surface micromachining and often acts as the essential structural material. So mechanical properties of polysilicon are very important for microstructure design. In this paper we propose a simple method using spinner to measure the tensile property of a polysilicon microbeam fabricated by a routine surface process. The specimen is a cantilever with a paddle on which nickel is electroplated to form a seismic mass. When the specimen is placed along the radial vector, the centrifugal force caused by the seismic mass will pull the cantilever to fracture. This method enables a simple specimen preparation and measurement process.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"18 5","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114117106","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Two-dimensional acoustic micromanipulation using a line-focused transducer 使用线聚焦换能器的二维声学微操作
1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311) Pub Date : 1997-10-05 DOI: 10.1109/MHS.1997.768875
T. Kozuka, T. Tuziuti, H. Mitome, T. Fukuda
{"title":"Two-dimensional acoustic micromanipulation using a line-focused transducer","authors":"T. Kozuka, T. Tuziuti, H. Mitome, T. Fukuda","doi":"10.1109/MHS.1997.768875","DOIUrl":"https://doi.org/10.1109/MHS.1997.768875","url":null,"abstract":"Control of position of particles using acoustic radiation pressure in water was studied in order to develop a non-contact micromanipulation technique. The radiation pressure traps particles suspended in water and forms agglomeration every half wavelength in an ultrasonic standing wave field. This paper describes a method to transport the particles two-dimensionally using a line-focused transducer with multiple electrodes. The transducer was fixed upward in water and a ceramic plate reflector was set at the focal line. When an alumina suspension was poured with a pipette into the sound field, the particles were trapped and agglomerated near the reflector. Changing the frequency alters the wavelength and hence the interval of agglomeration. Therefore the trapped particles were transported along the sound beam axis. When the next electrodes were driven, the standing wave field shifted laterally and the trapped particles moved to the corresponding nodal points. Thus two dimensional transportation was realized by using the line-focused transducer.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"58 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125835775","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Cell-free mRNA translation in a microbiochemical reactor 微生化反应器中的无细胞mRNA翻译
1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311) Pub Date : 1900-01-01 DOI: 10.1109/MHS.1997.768863
K. Hosokawa, T. Fujii, T. Nojima, S. Shoji, A. Yotsumoto, I. Endo
{"title":"Cell-free mRNA translation in a microbiochemical reactor","authors":"K. Hosokawa, T. Fujii, T. Nojima, S. Shoji, A. Yotsumoto, I. Endo","doi":"10.1109/MHS.1997.768863","DOIUrl":"https://doi.org/10.1109/MHS.1997.768863","url":null,"abstract":"A living cell is a huge network of chemical reactions in a compartmentalized microstructure. Realization of such a system using MEMS (microelectromechanical systems) technology would contribute to biological study and to development of an intelligent biochip. The authors have been focusing on protein synthesis in microreactors, because this process plays a central role in the chemical networks in living cells. This paper demonstrates that messenger RNA (mRNA)-polyuridylic acid-was translated into polypeptide-polyphenylalanine-in our primitive microreactor which was fabricated using conventional MEMS techniques: silicon anisotropic etching and glass-silicon anodic bonding. The microreactor has a main reaction channel which is 14 millimeters long, 800 microns wide, and 20 microns deep. The amount of polyphenylalanine, which was synthesized in the channel, was determined using radioisotope assay.","PeriodicalId":131719,"journal":{"name":"1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)","volume":"41 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134018176","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
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