2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale最新文献_第2页

A piezoelectric inchworm actuator based on the principle of flexible amplification 一种基于柔性放大原理的压电尺蠖驱动器

2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale Pub Date : 2013-08-01 DOI: 10.1109/3M-NANO.2013.6737414

Li Ma, Chenyang Jiang, Jintao Xiao, Kun Wang, Wei Xie, Bo Liu

{"title":"A piezoelectric inchworm actuator based on the principle of flexible amplification","authors":"Li Ma, Chenyang Jiang, Jintao Xiao, Kun Wang, Wei Xie, Bo Liu","doi":"10.1109/3M-NANO.2013.6737414","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737414","url":null,"abstract":"Piezoelectric inchworm actuators have a wide application in the field of Nano positioning and ultra-precision detecting instruments which depend on the characteristics of large stroke, high resolution and rigidity, quick response speed, small size, high driving force, low power consumption, not being affected by electromagnetic interference, and so on. A new piezoelectric inchworm actuator based on the principle of flexible amplification is developed in this paper. In the moving mechanism of the actuator, its clamping mechanism adopts symmetrical lever amplification structure, and its middle drive mechanism uses compound bridge structure. Theoretical analysis and finite element analysis are carried out to design the hinge structure which has influences on the properties of the moving mechanism. High precision cross roller guide ways are utilized to improve the positioning accuracy of the actuator. The laboratory platform of the piezoelectric inchworm actuator is built. A controlling program of the actuator is compiled by Lab-VIEW. Then, the properties of the actuator are tested. The experimental results show that the working stroke of the actuator is 50 mm, the minimum step pitch is 60 μm the maximum step pitch is 105 μm the fast speed is 2.04 mm/s, the maximum clamping force is 21 N, the maximum dead load is 500 g, and the average speed of the actuator can reach 1.47 mm/s when the driving frequency is 50 Hz and the load is 1 kg.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126527456","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 6

Multi-coupling hydrophobic characteristics on the lower surface of the lotus leaf 荷叶下表面多偶联疏水特性研究

2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale Pub Date : 2013-08-01 DOI: 10.1109/3M-NANO.2013.6737456

Jing Li, Feng Du, Jinkai Xu, Xue Wang, Huadong Yu

引用次数: 0

Effect of pulse repetition rate on silicon wafer modification by four-beam laser interference 脉冲重复率对四束激光干涉硅片改性的影响

2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale Pub Date : 2013-08-01 DOI: 10.1109/3M-NANO.2013.6737385

L. Zhao, Z. Wang, W. Li, M. Yu, Z. Zhang, J. Xu, Y. Yu, Z. Weng, S. Li, C. Maple, D. Li, Y. Yue

引用次数: 0

Research on a micro-to-nano bio-manipulation device 一种微纳米生物操纵装置的研究

2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale Pub Date : 2013-08-01 DOI: 10.1109/3M-NANO.2013.6737454

Huixiang Wang, Lining Sun

引用次数: 2

Effect of fullerenol on the morphology features of SW480 cells 富勒烯醇对SW480细胞形态学特征的影响

2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale Pub Date : 2013-08-01 DOI: 10.1109/3M-NANO.2013.6737383

Jinyun Liu, Zuobin Wang, Yingmin Qu, Guoliang Wang, Dayou Li, C. Maple

引用次数: 2

The next generation microelectronics craft technique: Nanoimprint lithography 下一代微电子工艺技术:纳米压印光刻

2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale Pub Date : 2013-08-01 DOI: 10.1109/3M-NANO.2013.6737445

Jiang Wei, Wang Nan, Yan Wei, Hu Song, Pu Xiao-qiong

引用次数: 0

Simulation and experimental verification of driving mechanism for a microfluidic device based on electrowetting-on-dielectric 基于介质电润湿的微流控装置驱动机理仿真与实验验证

2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale Pub Date : 2013-08-01 DOI: 10.1109/3M-NANO.2013.6737391

Liguo Chen, Xiaowei Xu, Wenyuan He, Lining Sun

{"title":"Simulation and experimental verification of driving mechanism for a microfluidic device based on electrowetting-on-dielectric","authors":"Liguo Chen, Xiaowei Xu, Wenyuan He, Lining Sun","doi":"10.1109/3M-NANO.2013.6737391","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737391","url":null,"abstract":"According to obtain the mechanism of electrowetting-on-dielectric (EWOD), the instantaneous pressure difference inside a droplet was obtained by means of a numerical simulation method in this paper, which was the root reason for EWOD. First, based upon the theory of electrowetting-on-dielectric(EWOD), a geometrical model of EWOD was established in a commercial software using VOF method. Next, deriving that two kinds of fluid which should follow the law of mass conservation and principle of momentum conservation. The experimental results show that the numerical simulation results are in good agreement with the experimental results, In one period of motion, the higher pressure region inside a droplet will keep changing and transferring along with the driving time until a steady state of pressure difference is obtained; besides, the much longer driving time is, the much larger pressure difference will be inside a droplet. The transfer of higher pressure region is the root reason for droplet establishing the velocity field which vividly illustrates how the droplet deforms.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125226592","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Pattern stretchable micro-nano thin film via Electrohydrodynamic Direct-Writing 通过电流体动力直接写入的图案可拉伸微纳薄膜

2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale Pub Date : 2013-08-01 DOI: 10.1109/3M-NANO.2013.6737379

Jin Wei, Jianyi Zheng, G. Zheng, Xiang Wang, Guangqi He, Haiyan Liu, Daoheng Sun, Juan Liu

{"title":"Pattern stretchable micro-nano thin film via Electrohydrodynamic Direct-Writing","authors":"Jin Wei, Jianyi Zheng, G. Zheng, Xiang Wang, Guangqi He, Haiyan Liu, Daoheng Sun, Juan Liu","doi":"10.1109/3M-NANO.2013.6737379","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737379","url":null,"abstract":"In this paper, mechanical stretching force is introduced into the Electrohydrodynamic Direct-Write (EDW) process. The effects of mechanical stretching on the rheology and deposition behaviors of EDW jet were investigated. The stretching affects that stemmed from the EDW motion platform provided an extra force on the charged jet. The larger stretching force applied on the jet played a good role to overcome bending instability, and stretch the jet into finer ones. Since the short distance between spinneret and collector, the mechanical stretching force acted more important role on the jet formation process. Thanks to the stretching effect, the whipping of charged jet can be avoided and micro/nano thin film without curve structure can be direct-written on the collector. With increasing collector motion velocity, the line width and thickness of micro/nano thin film will be decreased. During the EDW process, the mechanical stretching force had provided an excellent aspect to control the morphology and deposition pattern of EDWed micro/nano thin film.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125647700","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Experimental system identification and feed-forward control of a 2-DOF flexure-based mechanism 二自由度柔性机构的实验系统辨识与前馈控制

2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale Pub Date : 2013-08-01 DOI: 10.1109/3M-NANO.2013.6737413

U. Bhagat, B. Shirinzadeh, L. Clark, Y. Qin, D. Zhang, Y. Tian

{"title":"Experimental system identification and feed-forward control of a 2-DOF flexure-based mechanism","authors":"U. Bhagat, B. Shirinzadeh, L. Clark, Y. Qin, D. Zhang, Y. Tian","doi":"10.1109/3M-NANO.2013.6737413","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737413","url":null,"abstract":"The work presented in this paper focuses on the system identification of a 2-DOF flexure-based mechanism, designed for micro/nano scale positioning and manipulation. In the presented compliant mechanism, the cross axis coupling ratio is below 1% indicating excellent decoupling performance. The system identification procedure, experimental design, data collection, data analysis, and validation of the identified system are detailed in this paper. A linear sine swept signal over a range from 1 Hz to 1000 Hz is applied to the system as an input. Laser interferometry-based sensing and measurement technique is used to measure the response of the system. The experimental data is used to evaluate the transfer function of the system in the X and Y axes. The first natural frequency of the 2-DOF mechanism in the X and Y axes are estimated using the identified models, which are found out to be 557 Hz and 545 Hz respectively. Validation data is collected and used to verify the accuracy of the identified model. The error between the predicted output of the identified model and the experimental response is found to be less than ±10%, mostly resulted from actuator hysteresis. Further, a feedforward controller is implemented to track a 1-DOF smooth multiple-frequency trajectory.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128492773","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Design and research of miniaturization two-dimensional micro-positioning platform based on parallel sheet plate flexible decoupling beams 基于平行薄板柔性解耦梁的小型化二维微定位平台设计与研究

2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale Pub Date : 2013-08-01 DOI: 10.1109/3M-NANO.2013.6737389

Chen Li-guo, Lei Yan-yan, Chen Tao, Pan Ming-qiang, Gu Yang-qin

引用次数: 1