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Chinese Journal of Optics and Applied Optics最新文献

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Mirror surface figure evaluation based on power spectral density 基于功率谱密度的镜面图形评价
Chinese Journal of Optics and Applied Optics Pub Date : 2014-01-01 DOI: 10.3788/CO.20140701.0156
杨. Y. Fei, 安其昌 An Qi-chang, 张景旭 Zhang Jing-xu
{"title":"Mirror surface figure evaluation based on power spectral density","authors":"杨. Y. Fei, 安其昌 An Qi-chang, 张景旭 Zhang Jing-xu","doi":"10.3788/CO.20140701.0156","DOIUrl":"https://doi.org/10.3788/CO.20140701.0156","url":null,"abstract":"Firstly,Power Spectral Density( PSD) is proposed for mirror surface figure evaluation in the large aperture telescope system as for some difficulties for Root Mean Square( RMS) in the evaluation of large scale variety and disadvantage of robust for rigid body displacement. Then,the decomposition arithmetic of PSD is analyzed with Zernike polynomial,and Zernike polynomial spectrum energy distribution is analyzed in some order. The algorithm has been used in the surface figure evaluation of a Φ 500 mm mirror,and energy distribution in the frequency domain of the actual mirror surface has been obtained. The experimental results indicate that the evaluation of PSD is more practical when used in large aperture mirror for their manufacture and testing and for the error budget allocation in telescope system. Finally,a kind of noncorrelative sub-aperture stitching method for evaluation of reflective mirror shape based on PSD is proposed which can be used in the large aperture telescope.","PeriodicalId":10133,"journal":{"name":"Chinese Journal of Optics and Applied Optics","volume":"69 1","pages":"156-162"},"PeriodicalIF":0.0,"publicationDate":"2014-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86441862","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Interferometer instrument transfer function testing method 干涉仪传递函数测试方法
Chinese Journal of Optics and Applied Optics Pub Date : 2014-01-01 DOI: 10.3788/CO.20140701.0137
孙鸽 Sun Ge, 马冬梅 Ma Dongmei, 张海涛 Zhang Hai-tao
{"title":"Interferometer instrument transfer function testing method","authors":"孙鸽 Sun Ge, 马冬梅 Ma Dongmei, 张海涛 Zhang Hai-tao","doi":"10.3788/CO.20140701.0137","DOIUrl":"https://doi.org/10.3788/CO.20140701.0137","url":null,"abstract":"To acquire the spatial frequency response of the interferometer,the testing method on instrument transfer function( ITF) of interferometer was researched. First,the theoretical calculation model of instrument transfer function of imaging system was established,and the testing model of Fizeau interferometer was simulated via lens design program. Then the theoretical value was calculated and anaysed. Comparing ITF based on the method of sine phase plate with the theoretical ITF,the error is less than 0. 6%,and this method is proved to be feasible via the simulation of the optical design program.","PeriodicalId":10133,"journal":{"name":"Chinese Journal of Optics and Applied Optics","volume":"70 1","pages":"137-143"},"PeriodicalIF":0.0,"publicationDate":"2014-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76540933","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Techniques of radiation contamination monitoring for extreme ultraviolet devices 极紫外器件辐射污染监测技术
Chinese Journal of Optics and Applied Optics Pub Date : 2014-01-01 DOI: 10.3788/CO.20140701.0079
王珣 Wang Xun, 金春水 Jin Chunshui, 匡尚奇 Kuang Shang-qi, 喻波 Yu Bo
{"title":"Techniques of radiation contamination monitoring for extreme ultraviolet devices","authors":"王珣 Wang Xun, 金春水 Jin Chunshui, 匡尚奇 Kuang Shang-qi, 喻波 Yu Bo","doi":"10.3788/CO.20140701.0079","DOIUrl":"https://doi.org/10.3788/CO.20140701.0079","url":null,"abstract":"This paper reviews the \"in situ\"surface analysis and monitoring techniques for contamination induced in Extreme Ultraviolet Lithography( EUVL). It introduces the EUV lithography,reflective multilayer mirror and the mechanism of carbon contamination induced by EUV. It points out the requirement of the \"in situ\"surface analysis techniques in EUV lithography. The mainly surface analysis techniques are discussed. Analyzed results show the applied potentiality of each measurement used in the EUV optical system. Finally,it points out that the Fiber-based ellipsometry has further application prospect in \"in situ\"surface contamination monitoring of EUV lithography.","PeriodicalId":10133,"journal":{"name":"Chinese Journal of Optics and Applied Optics","volume":"64 1","pages":"79-88"},"PeriodicalIF":0.0,"publicationDate":"2014-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73863770","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Analysis for opto-electrical acquisition tracking and pointing control technology on satellite 卫星光电采集跟踪与指向控制技术分析
Chinese Journal of Optics and Applied Optics Pub Date : 2014-01-01 DOI: 10.3788/CO.20140706.0879
王卫兵 Wang Wei-bing, 王挺峰 Wang Ting-feng, 郭. G. Jin
{"title":"Analysis for opto-electrical acquisition tracking and pointing control technology on satellite","authors":"王卫兵 Wang Wei-bing, 王挺峰 Wang Ting-feng, 郭. G. Jin","doi":"10.3788/CO.20140706.0879","DOIUrl":"https://doi.org/10.3788/CO.20140706.0879","url":null,"abstract":"","PeriodicalId":10133,"journal":{"name":"Chinese Journal of Optics and Applied Optics","volume":"58 1","pages":"879-888"},"PeriodicalIF":0.0,"publicationDate":"2014-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80157356","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Method for measuring nonlinear calibrated curve of infrared focal plane arrays 红外焦平面阵列非线性标定曲线的测量方法
Chinese Journal of Optics and Applied Optics Pub Date : 2014-01-01 DOI: 10.3788/CO.20140701.0144
王. W. Fei, 戢运峰 Ji Yun-feng, 冯. F. Gang, 徐作冬 Xu Zuo-dong, 邵碧波 Shao Bibo
{"title":"Method for measuring nonlinear calibrated curve of infrared focal plane arrays","authors":"王. W. Fei, 戢运峰 Ji Yun-feng, 冯. F. Gang, 徐作冬 Xu Zuo-dong, 邵碧波 Shao Bibo","doi":"10.3788/CO.20140701.0144","DOIUrl":"https://doi.org/10.3788/CO.20140701.0144","url":null,"abstract":"As for the nonlinear effects of infrared focal plane arrays intensity response,a nonlinear calibration method is proposed based on single wavelength laser. Experimental equipment is designed for measuring,and the nonlinear calibration curve of the focal plane array is obtained through the measuring equiprment. Experimental results show that this method aviods the influence of infrared focal plane arrays spectral response nonuniformity,and meets the requirement of generality and practicability of the device in the engineering technology,which ensures the high accuracy of measurement as well as simpleness.","PeriodicalId":10133,"journal":{"name":"Chinese Journal of Optics and Applied Optics","volume":"53 2","pages":"144-149"},"PeriodicalIF":0.0,"publicationDate":"2014-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91478018","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Benefits of optogalvanic effect and beam shaping for laser stabilized GMA welding 光电效应和光束整形对激光稳定GMA焊接的好处
Chinese Journal of Optics and Applied Optics Pub Date : 2014-01-01 DOI: 10.3788/CO.20140701.0112
Hermsdorf Jorg Hermsdorf Jorg, Kaierle Stefan Kaierle Stefan
{"title":"Benefits of optogalvanic effect and beam shaping for laser stabilized GMA welding","authors":"Hermsdorf Jorg Hermsdorf Jorg, Kaierle Stefan Kaierle Stefan","doi":"10.3788/CO.20140701.0112","DOIUrl":"https://doi.org/10.3788/CO.20140701.0112","url":null,"abstract":"","PeriodicalId":10133,"journal":{"name":"Chinese Journal of Optics and Applied Optics","volume":"382 1","pages":"112-117"},"PeriodicalIF":0.0,"publicationDate":"2014-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83464042","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design of individual intraocular lens based on wavefront aberrations 基于波前像差的个体人工晶体设计
Chinese Journal of Optics and Applied Optics Pub Date : 2014-01-01 DOI: 10.3788/CO.20140705.0837
王. W. Yang, 卢. L. Jia, 韩力英 Han Li-ying, 贺永洁 He Yong-jie
{"title":"Design of individual intraocular lens based on wavefront aberrations","authors":"王. W. Yang, 卢. L. Jia, 韩力英 Han Li-ying, 贺永洁 He Yong-jie","doi":"10.3788/CO.20140705.0837","DOIUrl":"https://doi.org/10.3788/CO.20140705.0837","url":null,"abstract":"","PeriodicalId":10133,"journal":{"name":"Chinese Journal of Optics and Applied Optics","volume":"13 1","pages":"837-843"},"PeriodicalIF":0.0,"publicationDate":"2014-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86781148","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Analysis on error and tolerance for the wavefront reference source of point diffraction interferometer 点衍射干涉仪波前参考源误差及容限分析
Chinese Journal of Optics and Applied Optics Pub Date : 2014-01-01 DOI: 10.3788/CO.20140705.0855
代晓珂 Dai Xiao-ke, 金春水 Jin Chunshui, 于杰 Yu Jie
{"title":"Analysis on error and tolerance for the wavefront reference source of point diffraction interferometer","authors":"代晓珂 Dai Xiao-ke, 金春水 Jin Chunshui, 于杰 Yu Jie","doi":"10.3788/CO.20140705.0855","DOIUrl":"https://doi.org/10.3788/CO.20140705.0855","url":null,"abstract":"To keep the advantages of fiber point diffraction interferometer which is easy to align and control the diffracted light,we design a new wavefront reference source( WRS). WRS can keep the advantages of fiber point diffraction interferometer and pin-hole point diffraction interferometer,and it also can be used to test the wavefront aberration of larger NA optical system for Extreme Ultraviolet Lithography( EUVL). The analysis of error for this new WRS and calibration of the system error is very important for realizing a more accurate test of wavefront aberration. Based on the analysis of various errors,we study the calibration algorithm in detail,and obtain the tolerance of several WRS important components including that the angle tolerance of rotation stage is0. 5° and the deviation factor is 0. 5% when rotation is away optical axis.","PeriodicalId":10133,"journal":{"name":"Chinese Journal of Optics and Applied Optics","volume":"54 39 1","pages":"855-862"},"PeriodicalIF":0.0,"publicationDate":"2014-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88496941","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design and manufacture of a large-area collimation solar simulator 大面积准直太阳模拟器的设计与制造
Chinese Journal of Optics and Applied Optics Pub Date : 2014-01-01 DOI: 10.3788/co.20140704.0657
高. G. Yan, 刘洪波 Liu Hong-bo, 王. W. Li, 顾国超 Gu Guo-chao
{"title":"Design and manufacture of a large-area collimation solar simulator","authors":"高. G. Yan, 刘洪波 Liu Hong-bo, 王. W. Li, 顾国超 Gu Guo-chao","doi":"10.3788/co.20140704.0657","DOIUrl":"https://doi.org/10.3788/co.20140704.0657","url":null,"abstract":"","PeriodicalId":10133,"journal":{"name":"Chinese Journal of Optics and Applied Optics","volume":"10 1","pages":"657-664"},"PeriodicalIF":0.0,"publicationDate":"2014-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84599082","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Manufacturing and testing of rectangular off-axis aspheric mirror with double-swing polishing method 矩形离轴非球面镜的双摆光加工与检测
Chinese Journal of Optics and Applied Optics Pub Date : 2014-01-01 DOI: 10.3788/CO.20140706.0975
宋淑梅 Song Shu-mei
{"title":"Manufacturing and testing of rectangular off-axis aspheric mirror with double-swing polishing method","authors":"宋淑梅 Song Shu-mei","doi":"10.3788/CO.20140706.0975","DOIUrl":"https://doi.org/10.3788/CO.20140706.0975","url":null,"abstract":"A kind of manufacturing and testing method for rectangular off-axis aspheric lightweight mirror is introduced. In order to overcome the corner effect,double-swing polishing( DSP) method is proposed. A DSP machine is made to achieve satisfying manufacturing result. The DSP and the 4-pole method are successfully applied for manufacturing optical system in the spectrometer. Four rectangular off-axis aspheric mirrors with the largest size of 266 mm × 110 mm are polished,and the final surface precision figures are better than0. 020λ( RMS,@ 633 nm). Manufacturing result shows that the double-swing polishing method improves the polishing efficiency and reduces the optical surface medium frequency error.","PeriodicalId":10133,"journal":{"name":"Chinese Journal of Optics and Applied Optics","volume":"39 1","pages":"975-981"},"PeriodicalIF":0.0,"publicationDate":"2014-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90717883","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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