{"title":"矩形离轴非球面镜的双摆光加工与检测","authors":"宋淑梅 Song Shu-mei","doi":"10.3788/CO.20140706.0975","DOIUrl":null,"url":null,"abstract":"A kind of manufacturing and testing method for rectangular off-axis aspheric lightweight mirror is introduced. In order to overcome the corner effect,double-swing polishing( DSP) method is proposed. A DSP machine is made to achieve satisfying manufacturing result. The DSP and the 4-pole method are successfully applied for manufacturing optical system in the spectrometer. Four rectangular off-axis aspheric mirrors with the largest size of 266 mm × 110 mm are polished,and the final surface precision figures are better than0. 020λ( RMS,@ 633 nm). Manufacturing result shows that the double-swing polishing method improves the polishing efficiency and reduces the optical surface medium frequency error.","PeriodicalId":10133,"journal":{"name":"Chinese Journal of Optics and Applied Optics","volume":"39 1","pages":"975-981"},"PeriodicalIF":0.0000,"publicationDate":"2014-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Manufacturing and testing of rectangular off-axis aspheric mirror with double-swing polishing method\",\"authors\":\"宋淑梅 Song Shu-mei\",\"doi\":\"10.3788/CO.20140706.0975\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A kind of manufacturing and testing method for rectangular off-axis aspheric lightweight mirror is introduced. In order to overcome the corner effect,double-swing polishing( DSP) method is proposed. A DSP machine is made to achieve satisfying manufacturing result. The DSP and the 4-pole method are successfully applied for manufacturing optical system in the spectrometer. Four rectangular off-axis aspheric mirrors with the largest size of 266 mm × 110 mm are polished,and the final surface precision figures are better than0. 020λ( RMS,@ 633 nm). Manufacturing result shows that the double-swing polishing method improves the polishing efficiency and reduces the optical surface medium frequency error.\",\"PeriodicalId\":10133,\"journal\":{\"name\":\"Chinese Journal of Optics and Applied Optics\",\"volume\":\"39 1\",\"pages\":\"975-981\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Chinese Journal of Optics and Applied Optics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.3788/CO.20140706.0975\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Chinese Journal of Optics and Applied Optics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.3788/CO.20140706.0975","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
摘要
介绍了一种矩形离轴非球面轻量化反射镜的制造和检测方法。为了克服边角效应，提出了双摆动抛光(DSP)方法。制作了DSP机床，取得了满意的加工效果。将DSP和四极法成功地应用于光谱仪光学系统的制造。对最大尺寸为266 mm × 110 mm的4块矩形离轴非球面反射镜进行抛光处理，最终表面精度优于0。020λ(RMS，@ 633 nm)。制造结果表明，双摆式抛光方法提高了抛光效率，减小了光表面中频误差。
Manufacturing and testing of rectangular off-axis aspheric mirror with double-swing polishing method
A kind of manufacturing and testing method for rectangular off-axis aspheric lightweight mirror is introduced. In order to overcome the corner effect,double-swing polishing( DSP) method is proposed. A DSP machine is made to achieve satisfying manufacturing result. The DSP and the 4-pole method are successfully applied for manufacturing optical system in the spectrometer. Four rectangular off-axis aspheric mirrors with the largest size of 266 mm × 110 mm are polished,and the final surface precision figures are better than0. 020λ( RMS,@ 633 nm). Manufacturing result shows that the double-swing polishing method improves the polishing efficiency and reduces the optical surface medium frequency error.
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