2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)最新文献

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Spherical Wave Power Generator with Origami-structured Double-helix Multifold Electrets 具有折纸结构双螺旋多重驻极体的球形波浪发电机
Haiping Yi, Yiwei Wang, Honglong Chang, K. Tao
{"title":"Spherical Wave Power Generator with Origami-structured Double-helix Multifold Electrets","authors":"Haiping Yi, Yiwei Wang, Honglong Chang, K. Tao","doi":"10.1109/PowerMEMS49317.2019.P2-10","DOIUrl":"https://doi.org/10.1109/PowerMEMS49317.2019.P2-10","url":null,"abstract":"This paper presents a spherical wave power generator integrating origami-inspired double-helix multifold electrets for ocean wave energy harvesting. The overall device is self-sustained origami structure, which works as generator as well as suspending spring of central oscillator simultaneously. With ultra-low excitation frequency of 2 Hz, the peak-to-peak output voltage and peak power can be reached up to around 300 V and 18 mW, respectively. It is capable of charging a $10 mu mathrm{F}$ capacitor to 2.5 V within 60 s after connecting a bennet circuit. The output of generator can supply power for 30 LED bulbs and the low-power temperature as well as humidity sensors. Furthermore, with array of folded electret generator units around the central oscillator, the generator is capable of harvesting low-frequency vibration energy in random directions, with a great potential in the field of wave energy collection and power supply for environmental monitoring sensors.","PeriodicalId":6648,"journal":{"name":"2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"41 1","pages":"1-5"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76725467","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Piezoceramic Electrodynamic Wireless Power Receiver Using Torsion Mode Meandering Suspension 基于扭转模式弯曲悬挂的压电陶瓷电动力无线电源接收器
M. A. Halim, J. Samman, S. Smith, D. Arnold
{"title":"Piezoceramic Electrodynamic Wireless Power Receiver Using Torsion Mode Meandering Suspension","authors":"M. A. Halim, J. Samman, S. Smith, D. Arnold","doi":"10.1109/PowerMEMS49317.2019.20515809768","DOIUrl":"https://doi.org/10.1109/PowerMEMS49317.2019.20515809768","url":null,"abstract":"This paper reports the design, fabrication and experimental characterization of an electrodynamic wireless power transmission (WPT) receiver that utilizes a meander-shaped suspension and two piezo-ceramic transducers to achieve up to 8.2 mW/cm$^{3}cdot$ mT2 normalized power density (NPD). The system operates at its torsion mode mechanical resonance of 211 Hz. The 2.5 cm3 prototype generates 3.3 mW average power (1.3 mW/cm3 power density) at a distance of 3 cm from a transmitter coil that is operating at the maximum allowable human exposure limit (a maximum 2 mTrms field generated at the center of the coil). Compared to prior works, the proposed design affords the use of multiple piezo transducers within a compact footprint while maintaining a form factor suitable for low-profile system implementation for bio-implantable and wearable applications.","PeriodicalId":6648,"journal":{"name":"2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"34 1","pages":"1-5"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73970810","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Towars Portable Mems Mass Spectrometer 面向便携式Mems质谱仪
P. Szyszka, T. Grzebyk, M. Białas, A. Gorecka-Drzazga, J. Dziuban, D. Hasan, Chang-Soon Lee
{"title":"Towars Portable Mems Mass Spectrometer","authors":"P. Szyszka, T. Grzebyk, M. Białas, A. Gorecka-Drzazga, J. Dziuban, D. Hasan, Chang-Soon Lee","doi":"10.1109/PowerMEMS49317.2019.92321112609","DOIUrl":"https://doi.org/10.1109/PowerMEMS49317.2019.92321112609","url":null,"abstract":"This paper presents the concept of a MEMS mass spectrometer, which integrates all necessary modules on a single vacuum-sealed chip: a high vacuum micropump, a sample injection system, an ion source, an analyzer and a detector. Our MEMS mass spectrometer chip is fabricated using monocrystalline silicon and borosilicate glass substrates has dimensions of $10 times 10 times35$ mm 3 and internal volume of 0.45 cm 3.","PeriodicalId":6648,"journal":{"name":"2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"59 1","pages":"1-4"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84596994","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Aluminum nitride based piezoelectric harvesters 氮化铝基压电收割机
I. Gablech, J. Klempa, J. Pekárek, P. Vyroubal, J. Kunz, P. Neužil
{"title":"Aluminum nitride based piezoelectric harvesters","authors":"I. Gablech, J. Klempa, J. Pekárek, P. Vyroubal, J. Kunz, P. Neužil","doi":"10.1109/PowerMEMS49317.2019.82063211368","DOIUrl":"https://doi.org/10.1109/PowerMEMS49317.2019.82063211368","url":null,"abstract":"This work demonstrates the fabrication of simple of AlN-based piezoelectric energy harvesters (PEH), made of cantilevers with thin films prepared by ion beam-assisted deposition. The preferentially (001) orientated AlN thin films have exceptionally high piezoelectric coefficients of (7.33 ± 0.08) pC·$N^{-1}$. The fabrication of PEH was done using only three lithography steps, employing conventional silicon substrate with precise control of the cantilever and it’s mass thicknesses. The AlN deposition was done at a temperature of ≈ 330 °C which makes it compatible with complementary metal oxide semiconductor technology (CMOS). The PEH cantilever deflection and efficiency were characterized using both laser interferometry and a vibration shaker, respectively. This technology could become useful for future CMOS-based energy harvesters integrated on chip with circuits.","PeriodicalId":6648,"journal":{"name":"2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"21 1","pages":"1-4"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84001329","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Towards Integrated Flexible Energy Harvester and Supercapacitor for Self-powered Wearable Sensors 用于自供电可穿戴传感器的集成柔性能量采集器和超级电容器
A. Vyas, Q. Li, R. V. D. Eeckhoudt, G. Geréb, A. Smith, C. Rusu, P. Lundgren, P. Enoksson
{"title":"Towards Integrated Flexible Energy Harvester and Supercapacitor for Self-powered Wearable Sensors","authors":"A. Vyas, Q. Li, R. V. D. Eeckhoudt, G. Geréb, A. Smith, C. Rusu, P. Lundgren, P. Enoksson","doi":"10.1109/PowerMEMS49317.2019.008","DOIUrl":"https://doi.org/10.1109/PowerMEMS49317.2019.008","url":null,"abstract":"We present the first results of a flexible energy harvester and a foldable supercapacitor to power wearable and flexible sensors. The flexible energy harvester is fabricated by using $38 mu m$ piezoelectric polyvinylidene difluoride (PVDF) sandwiched between carbon-electrodes. Both the design and process excel in simplicity and cost-effectiveness. The flexible harvester demonstrates a power output of $2.6 mu W$ cm-3 at a resonant frequency of 50 Hz with a 3dB bandwidth of about 11 Hz, which is higher than devices previously reported and similar to a commercial PZT harvester film of same size. A flexible energy storage supercapacitor (GP-SC) was fabricated using a graphite/VACNTs (vertically aligned carbon nanotubes) material as electrodes. A prototype GP-SCs has an areal capacitance of about 1.2 mF cm-2. Finally, an integrated scheme is proposed for future work.","PeriodicalId":6648,"journal":{"name":"2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"71 1 1","pages":"1-6"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91119346","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Features of evaluating properties of field emitters using effective parameters 利用有效参数评价场发射体性能的特点
A. G. Kolosko, S. Filippov, M. Chumak, E. O. Popov, G. Demin, I. D. Evsikov, N. Djuzhev
{"title":"Features of evaluating properties of field emitters using effective parameters","authors":"A. G. Kolosko, S. Filippov, M. Chumak, E. O. Popov, G. Demin, I. D. Evsikov, N. Djuzhev","doi":"10.1109/PowerMEMS49317.2019.8206320100884","DOIUrl":"https://doi.org/10.1109/PowerMEMS49317.2019.8206320100884","url":null,"abstract":"The paper considers the features of evaluating the effective parameters of nanostructured field cathodes – the area of the field emission Seff and the field gain $beta_{eff}$. A variety of approaches to parameter estimates is shown. The dependence of these estimates on the magnitude of the applied electric voltage is shown by the example of a three-dimensional model of a carbon nanotube. The possibility of the experimentally estimation of individual emission sites using a computerized field projector is considered. A method for analyzing the current-voltage characteristics in Fowler-Nordheim coordinates (IVC-FN) with an interval estimate of the effective parameters is proposed.","PeriodicalId":6648,"journal":{"name":"2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"17 1","pages":"1-4"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84734916","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Performance Modeling and Design of High Energy Density Microbatteries 高能量密度微电池的性能建模与设计
A. Johnson, R. Kohlmeyer, M. Ates, C. Kiggins, A. Blake, X. Yue, J. Cook, J. Pikul
{"title":"Performance Modeling and Design of High Energy Density Microbatteries","authors":"A. Johnson, R. Kohlmeyer, M. Ates, C. Kiggins, A. Blake, X. Yue, J. Cook, J. Pikul","doi":"10.1109/PowerMEMS49317.2019.61547405528","DOIUrl":"https://doi.org/10.1109/PowerMEMS49317.2019.61547405528","url":null,"abstract":"This work reports the design and simulated performance of high energy density lithium metal primary microbatteries whose 2016 Wh/L and 605 Wh/kg energy densities are 3X greater than the best microbatteries. The simulations match experimental data and give insight into the excellent energy and power density performance. The high energy density is the result of the ultra-thick and dense cathode which has high lithium-ion diffusivity and electronic conductivity. These results show great promise towards realizing the next generation of high performance microbatteries.","PeriodicalId":6648,"journal":{"name":"2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"15 1","pages":"1-5"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87772273","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
13.56 MHz Mixed Mode Rectifier Circuit for Implantable Medical Devices 用于植入式医疗设备的13.56 MHz混合模式整流电路
Yasemin Engür, H. Uluşan, H. Yigit, S. Chamanian, H. Külah
{"title":"13.56 MHz Mixed Mode Rectifier Circuit for Implantable Medical Devices","authors":"Yasemin Engür, H. Uluşan, H. Yigit, S. Chamanian, H. Külah","doi":"10.1109/PowerMEMS49317.2019.51289506488","DOIUrl":"https://doi.org/10.1109/PowerMEMS49317.2019.51289506488","url":null,"abstract":"This paper presents a mixed mode rectifier circuit operating at 13.56 MHz for wireless power transmission system to rectify the AC signal and power up the implantable medical device. The proposed design includes both voltage and current mode operation that covers a wide range of coupling ratios between the coils. The circuit is designed in 180 nm CMOS technology. Extracted simulations show that the mixed mode design charges the load with the maximum efficiency 72.4% for the voltage mode, and 38.6% for the current mode at the operating frequency 13.56 MHz for both modes. The voltage and current modes are beneficial for high and low coupling ratios, respectively. Operation under different modes extends the usable coupling range in power transmission.","PeriodicalId":6648,"journal":{"name":"2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"25 1","pages":"1-4"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78443350","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Energy harvesting and wireless power transfer in a unified system for wearable devices 用于可穿戴设备的统一系统中的能量收集和无线电力传输
B. Truong, Caleb Roundy, R. Rantz, S. Roundy
{"title":"Energy harvesting and wireless power transfer in a unified system for wearable devices","authors":"B. Truong, Caleb Roundy, R. Rantz, S. Roundy","doi":"10.1109/PowerMEMS49317.2019.92321112648","DOIUrl":"https://doi.org/10.1109/PowerMEMS49317.2019.92321112648","url":null,"abstract":"This paper presents a device concept that allows us to utilize the coils of an electromagnetic vibration-based energy harvester as a receiver for a magnetic resonant coupled wireless power transfer system (WPTS), with focus on low-power wearable applications. The parasitic capacitances of the coils along with their inductances form a single equivalent receiver coil configured in parallel. This self-resonance characteristic relaxes the requirement of adding an additional capacitor and still retains the system inherent simplicity. Measurements with an arbitrarily chosen load resistance of $R_{L},= 100 Omega$ demonstrate a generated power of $sim 397.4 mu W$ at a distance between the transmitter and receiver of 2 cm at a root mean square applied $mathbf{B}$ – field of $200 mu T$, approximately.","PeriodicalId":6648,"journal":{"name":"2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"153 1","pages":"1-5"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84967228","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Prototyping of Power Supply for Vibration Condition Monitoring Modules using a Magnetostrictive Vibration Energy Harvester 采用磁致伸缩振动能量采集器的振动状态监测模块电源原型设计
M. Ito, H. Katsumura
{"title":"Prototyping of Power Supply for Vibration Condition Monitoring Modules using a Magnetostrictive Vibration Energy Harvester","authors":"M. Ito, H. Katsumura","doi":"10.1109/PowerMEMS49317.2019.51289500084","DOIUrl":"https://doi.org/10.1109/PowerMEMS49317.2019.51289500084","url":null,"abstract":"To be used as a power supply for a module monitoring the vibration condition, we built a prototype unit capable of storing the power generated by a compact magnetostrictive vibration energy harvester (VEH) in an electric double layer capacitor (EDLC), via a bridge rectifier circuit and boost converter. The prototype could store 3.1 J of energy within ten hours or so, from mechanical vibration of 100 Hz, $4mathrm{m}/ mathrm{s}^{2}$. The storage energy enables about 7800 times the triple-axis acceleration measurement and wireless transmission, or five times the operation of wireless vibration condition monitoring module commercially available. The EDLC storage efficiency was 25% compared to the effective value of magnetostrictive VEH output power. Despite the need to further boost efficiency, it is noteworthy that we could demonstrate scope to operate the vibration condition monitoring module using only the power generated by magnetostrictive VEH.","PeriodicalId":6648,"journal":{"name":"2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"24 1","pages":"1-4"},"PeriodicalIF":0.0,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82798363","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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