2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)最新文献

{"title":"Optimization of RF sputtered PZT thin films for MEMS cantilever application","authors":"A. Joshi, S. Gangal, D. Bodas, J. Rauch","doi":"10.1109/ISPTS.2012.6260913","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260913","url":null,"abstract":"Optimization of RF sputtered piezoelectric PZT thin films for thickness and stoichiometry for use in MEMS application is discussed in this paper. The effect of sputtering parameters on PZT film stoichiometry is studied using EDS and XPS techniques. 600 nm thin PZT film with Zr:Ti ratio of 52∶48 is achieved in single sputtering cycle. The film is annealed using conventional furnace annealing technique and the effect of annealing process on phase formation is studied using XRD technique. The optimized PZT thin film shows sufficiently good stoichiometry. A piezoelectric coefficient (d33) value for PZT thin film deposited at optimum parameters is 450pm/V. Optimized PZT thin film parameters are used for successful fabrication of cantilever using silicon bulk micromachining.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":"17 1","pages":"173-176"},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90033513","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Selective detection of NH3 by Ag6Mo10O33 thick film by AC impedance spectroscopy","authors":"E. Prabhu, C. Mariappan, G. Hareesh, K. I. Gnanasekar, V. Jayaraman, T. Gnanasekaran","doi":"10.1109/ISPTS.2012.6260920","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260920","url":null,"abstract":"An ammonia sensor based on Ag6Mo10O33 thick film was fabricated and tested. The morphology of the film was characterized by SEM. The electrical capacitance and impedance of the compound were investigated by exposing the film in air, air containing 500 vppm of H2, petroleum gas (PG) and NH3 independently at 350°C using AC impedance spectroscopy. When the film was exposed to air containing ammonia significant increase in capacitance was observed at lower frequencies. The mechanism for the changes in capacitance and impedance as a function of frequency is presented.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":"26 1","pages":"193-196"},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91273246","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Solid state sensors for biomedical instruments","authors":"R. A. Mishra, Narendra B. Raut","doi":"10.1109/ISPTS.2012.6260959","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260959","url":null,"abstract":"The output of transducers which are used in physiological measuring is observed to be nonlinear. This nonlinear characteristic of transducers fails to measure the actual value of physiological parameter like temperature, pulse rate, heart beats, etc. the researcher has developed the body temperature measuring transducer using time base oscillating circuit and thermister as temperature sensing element. The time base circuit, phototransistor and LED are used for designing quick recovery heart beat sensor. The design technique of these transducers, their characteristics and comparisons with existing sensors in similar kind of biomedical instruments is discussed in this paper.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":"61 1","pages":"326-329"},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76525185","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Microcantilever based biosensor with electrical read-out method","authors":"J. Kalambe, R. Patrikar","doi":"10.1109/ISPTS.2012.6260937","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260937","url":null,"abstract":"Recently, an all polymer system based biosensor with integrated optical read-out has been developed. Optical detection techniques are perhaps the most common due to their prevalent use in biology and life sciences. Fluorescence-based detection in Bio-MEMS has been applied to detection of cells within micro-chips, using antibody-based assays. Majority of the detection schemes in microarray and numerous lab-on-a-chip devices and applications utilize optical detection schemes. For size shrinkage, and to reduce the hardware we proposed the new read-out method which utilize the electrical detection method. The paper present design and analysis of microcantilever based biosensor based with electrical read-out method. This method is ideal for the manufacture of low cost disease diagnostic Kits. The sensor structure is designed and simulated using Coventorware software. The corresponding deflection with respect to voltage and stress is analyzed. To solve the fabrication process related issue of the sensor control circuit has been designed and tested using Spartan II-FPGA Kit & PCB. The reliability issues of the sensor are also studied.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":"108 1","pages":"249-252"},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75926468","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Magnetically controlled flexible valve for flow manipulation in polymer microfluidic devices","authors":"Madhushree Bute, A. Sheikh, V. Mathe, D. Bodas, R. N. Karekar, S. Gosavi","doi":"10.1109/ISPTS.2012.6260969","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260969","url":null,"abstract":"The paper describes design and fabrication of simple, magnetically actuated flexible polymer valve for flow manipulation in the microfluidic network. The valve is made up of a polymer composite. The CoFe2O4 was embedded in PDMS (Polydimethylsiloxane) for making this polymer composite. The composites of different volume percentage loading of CoFe2O4 were used and for each concentration valves of different thicknesses were fabricated, as thin rectangular membranes. This membrane was magnetized in the thickness direction and showed typical permanent magnet behaviour. For actuation of the valve the membrane was deflected by externally applied magnetic force which can close either of the channels. The flow manipulation and proper operation of the valve depends on thickness and percentage loading of magnetic material in membrane as well as dimensions of channel, chamber and membrane with respect to the location of outlet channels. The microfluidic channel was completely close for any fluid flow rate.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":"10 1","pages":"357-360"},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74579579","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A new transition metal oxide sensor material for thermistor applications: Manganese-vanadium-oxide","authors":"Girish M. Gouda, C. L. Nagendra","doi":"10.1109/ISPTS.2012.6260898","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260898","url":null,"abstract":"Manganese vanadium oxide thermistor materials both in bulk and thin film form have been prepared and characterized. The bulk materials synthesized by ceramic tape casting and solid state sintering are crystalline in nature while thin films are amorphous even after post deposition annealing at high temperature. The electrical properties' study clearly shows that these materials follow a typical characteristic of negative temperature coefficient (NTC) of resistivity which is attributed to small polaron hopping. The thin film samples have direct optical band gap and shows increased absorption in the infrared region.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":"40 1","pages":"125-128"},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74626739","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Development of vertically stacked packaging based miniaturized camera electronics for high resolution imaging payloads","authors":"Shweta Kirkire, Ashok Kumar, M. Karimi, Amarnath, Hanuman Prasad, Ashish Srivastava, Sanjeev Mehta, Sandip Paul, R. Parmar, D. Samudraiah","doi":"10.1109/ISPTS.2012.6260951","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260951","url":null,"abstract":"Future Remote Sensing Satellites with high resolution electro-optical payloads require multiple detectors to meet mission goals of multiple spectral bands and large swath. High speed detectors are available with limited pixels array length with multiple video ports. Large number of detectors at the focal plane calls for miniaturized camera electronics. Miniaturization requires usage of low power, low weight components and adaption of new packaging techniques like Multi chip module, System-in Package, Systems-on-chip and wafer level packaging etc. These technologies require multiple dice which are not readily available in required high quality levels. Hence, new packaging approach named as vertically stacked packaging (VSP) is developed in-house and demonstrated. This incorporates vertical stacking of PCBs, inter-board interfaces using copper leads, usage of flexi-rigid boards, single external interface connector and vertical passive component mounting. Here, using VSP technology, reduction is achieved in size by about 91% and weight by about 85% as compared to traditional packaging approaches. This paper mainly discusses the VSP development, optimization and integrated test results with 4K TDI detector.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":"20 1","pages":"294-297"},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85708434","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"LPG and NH3 sensing characteristics of 1-D interlinked nanowired Co3O4 films deposited by using pulsed D.C. electrochemical deposition method","authors":"P. Shelke, Y. Khollam, M. Chaskar, K. Mohite","doi":"10.1109/ISPTS.2012.6260866","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260866","url":null,"abstract":"Presently, our environment is polluted by number of gases exhausted from auto and chemical industry. The detection of harmful gases is becoming a need of society. Sensors play an important role in the areas of emissions control, environmental protection, public safety and human health. Over the past decades, several kinds of gas sensors have been developed. Co3O4 is an important p-type semiconductor with a normal spinel structure and it has many commercial or potential applications. However, literature research revealed that thin film gas sensors based on Co3O4 are not reported up to now. In view of this, the LPG and NH3 sensing characteristics of 1-D interlinked nanowired Co3O4 films deposited by using pulsed D.C. electrochemical deposition method are presented in this paper. The (CH3COO)2Co.4H2O (0.5 M) and H3BO3 (0.15 M) were dissolved one by one in 250 ml of double distilled water and then filtered using Whatman 41 filter paper. The cobalt based thin films were deposited on thoroughly cleaned stainless steel (SS) and copper (CU) substrates (each of size: 2 cm × 2 cm & thickness = 0.5 mm) using pulsed DC electrochemical deposition method. The films were deposited by using following parameters: (1) pH of solution ∼ 4.5 (by adding NaOH / HCl in solution), (2) cathode-anode distance ∼ 2.5 cm, (3) pulsed deposition on time = 1.5 minute, (4) pulsed off time = 20 sec, (5) total deposition time = 11 minute and (6) current density ∼ 8 mA/cm2. All as-deposited films were heated at 350 °C for 2 hr. The films prepared on SS and CU substrates were identified as PESA and PEUA respectively. The resultant films were characterized by using X-ray diffraction (XRD), Raman spectroscopy and scanning electron microscopy (SEM). The LPG and NH3 gas sensing properties: sensitivity factor (S.F.), response time, recovery time and repeatability of these films were measured at room temperature (RT) by using home-built static gas sensing system at different concentrations ranging from ∼ 25 to 350 ppm of a given test gas.The XRD and Raman spectroscopy studies clearly indicated the formation of pure Co3O4 phase in these films. The values of lattice parameter (ao) calculated for PESA and PEUA films are found to be 8.063 Å and 8.062 Å respectively, which are found to be matching with reported value = 8.084 Å for cubic spinel Co3O4. The morphological studies of films by SEM showed some interesting observations. The surface of each film is found to be covered with the mesh of interlinked wires with more or less flat base. The interlinked wired mesh is noted to be attached firmly to base at different points with the insertion of ends of wires into the surface at those points. The diameters and lengths of 1-D interlinked wires are found to be between 250 – 350 nm and 2 – 10 µm respectively. The densification at the surface of each film is seen to be moderate, however, qualitatively the densification below the interlinked wired mesh structure is found to be good. The LPG and NH3 g","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":"4 1","pages":"21-24"},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86709363","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"New LTCC materials: From fundamental to applied research","authors":"M. Valant","doi":"10.1109/ISPTS.2012.6260950","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260950","url":null,"abstract":"Over the last twenty years, low-temperature co-firing ceramic (LTCC) technology has advanced to such an extent that it now allows the integration of a variety of passive components within the LTCC module. However, to achieve better performance some of them are still mounted as discrete components on the top of the module. An example of this type of component is a capacitor. In principle, no technological or design obstacles exist that would prevent the integration of capacitors into the module. The only problem is a lack of suitable LTCC material that exhibits the proper dielectric characteristics and is compatible with current LTCC materials and technology. Because the NP0-type capacitors represent the largest group of capacitors used with LTCC modules for RF applications we started the development of an NP0-type ceramic layer suitable for direct implementation with existing LTCC production lines. In this talk an example of such development will be presented where the very fundamental research has successfully been upgraded with an applied research and the new functional LTCC layers have been developed. They are characterized by K80, temperature stability, low dielectric loss and cosinterability with commercial low K tapes and silver electrode. The review of all the material properties relevant for the existing LTCC technology shows the possibility of a direct integration of the developed NP0-capacitor layer into the current LTCC modules.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":"43 1","pages":"1-1"},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87565706","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Thick film hydrogen sensor based on nanocrystalline nickel ferrite prepared using simple microwave oven","authors":"S. Tatkare, S. Rane, S. Gosavi","doi":"10.1109/ISPTS.2012.6260926","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260926","url":null,"abstract":"This paper reports the synthesis of nano crystalline nickel ferrite (NiFe2O4) by solvothermal technique using simple microwave oven. This ferrite nano powder was used as a functional material in the thick film sensors. Thick film sensors were fabricated using screen printing technique. The structural, microstructural, thermal analysis of powder and the film were characterized by XRD, SEM and TG analysis. The hydrogen sensing properties of the sensor was detected by measuring the change in resistance under the exposure of gas. The results show that nickel ferrite provides good sensitivity nd response to H2 gas at an operating temperature of 175°C.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":"38 1","pages":"212-215"},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82865153","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}