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IEEJ Transactions on Sensors and Micromachines最新文献

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Improvement of Gas Sensitivity by Lowering Carrier Density and Thinning Film Thickness of SnO<sub>2</sub> Gas Sensor 降低SnO&lt;sub&gt;2&lt;/sub&gt载流子密度和减薄膜厚度提高气敏性气体传感器
IEEJ Transactions on Sensors and Micromachines Pub Date : 2023-11-01 DOI: 10.1541/ieejsmas.143.344
Ki Ando, Naoya Nishina
{"title":"Improvement of Gas Sensitivity by Lowering Carrier Density and Thinning Film Thickness of SnO&lt;sub&gt;2&lt;/sub&gt; Gas Sensor","authors":"Ki Ando, Naoya Nishina","doi":"10.1541/ieejsmas.143.344","DOIUrl":"https://doi.org/10.1541/ieejsmas.143.344","url":null,"abstract":"In this study, we investigated dependence of carrier density and film thickness on H2 gas sensitivity using tin dioxide (SnO2) films deposited by RF magnetron sputtering. Our aim is fabricating a gas sensor that can detect ppb-level gas concentrations for health care applications. It had been reported that lower carrier density and thinner film thickness contributed improving sensitivity of a gas sensor. We balanced lower carrier density and thinner film thickness by using a sapphire substrate for depositing tin oxide in addition to annealing treatment to tin oxide films. In the result, we clarified that thinning film thickness of tin dioxide affected on improving its gas sensitivity more significantly than lowering carrier density.","PeriodicalId":53412,"journal":{"name":"IEEJ Transactions on Sensors and Micromachines","volume":"47 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135161247","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Monitoring Number of Runners in a Park using Continuous Seismic Data 利用连续地震数据监测公园内跑步者的数量
IEEJ Transactions on Sensors and Micromachines Pub Date : 2023-10-01 DOI: 10.1541/ieejsmas.143.331
Hiro Nimiya, Ayumu Miyakawa, Masaaki Ichiki, Yuki Okamoto, Masashi Kuwahara, Tatsunori Ikeda, Takeshi Tsuji
{"title":"Monitoring Number of Runners in a Park using Continuous Seismic Data","authors":"Hiro Nimiya, Ayumu Miyakawa, Masaaki Ichiki, Yuki Okamoto, Masashi Kuwahara, Tatsunori Ikeda, Takeshi Tsuji","doi":"10.1541/ieejsmas.143.331","DOIUrl":"https://doi.org/10.1541/ieejsmas.143.331","url":null,"abstract":"This paper addresses monitoring human activity as a new way to use seismometers. We estimated the variation of the number of people running in the park by detecting the vibration associated with human steps using the permanent seismic observation data. As a result, the number of runners increased until 2012, then decreased until 2019, and then dramatically increased during the state of emergency in response to the COVID-19. Our seismometer-based monitoring provides the information about human activity anonymously and contributes to additional output of permanent seismometer data.","PeriodicalId":53412,"journal":{"name":"IEEJ Transactions on Sensors and Micromachines","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135372303","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
国際会議報告：The 18th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2023) 国際会議報告 国际会议报告：The 18th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2023) 国际会议报告
IEEJ Transactions on Sensors and Micromachines Pub Date : 2023-10-01 DOI: 10.1541/ieejsmas.143.nl10_1
寛之 工藤
{"title":"国際会議報告：The 18th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2023) 国際会議報告","authors":"寛之 工藤","doi":"10.1541/ieejsmas.143.nl10_1","DOIUrl":"https://doi.org/10.1541/ieejsmas.143.nl10_1","url":null,"abstract":"","PeriodicalId":53412,"journal":{"name":"IEEJ Transactions on Sensors and Micromachines","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135372346","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
研究室だより：豊橋技術科学大学大学院工学研究科 電気・電子情報工学系 集積化バイオセンサ・MEMSグループ 研究室田依:丰桥技术科学大学大学院工学研究科电气·电子信息工学系集成化生物传感器·MEMS组
IEEJ Transactions on Sensors and Micromachines Pub Date : 2023-10-01 DOI: 10.1541/ieejsmas.143.nl10_2
容俊 崔, 俊彦 野田, 一浩 高橋, 和明 澤田
{"title":"研究室だより：豊橋技術科学大学大学院工学研究科 電気・電子情報工学系 集積化バイオセンサ・MEMSグループ","authors":"容俊 崔, 俊彦 野田, 一浩 高橋, 和明 澤田","doi":"10.1541/ieejsmas.143.nl10_2","DOIUrl":"https://doi.org/10.1541/ieejsmas.143.nl10_2","url":null,"abstract":"","PeriodicalId":53412,"journal":{"name":"IEEJ Transactions on Sensors and Micromachines","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135373433","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
反応性スパッタリング法による光導波路用SiCO薄膜における膜特性のガス圧依存性 反应性溅射法的光学波导SiCO薄膜中的膜特性对气体压力的依赖性
IEEJ Transactions on Sensors and Micromachines Pub Date : 2023-10-01 DOI: 10.1541/ieejsmas.143.326
Hiroyuki Nikkuni, Hiroshi Ito, Yu Takatsuka
{"title":"反応性スパッタリング法による光導波路用SiCO薄膜における膜特性のガス圧依存性","authors":"Hiroyuki Nikkuni, Hiroshi Ito, Yu Takatsuka","doi":"10.1541/ieejsmas.143.326","DOIUrl":"https://doi.org/10.1541/ieejsmas.143.326","url":null,"abstract":"In this study, the gas pressure dependence of optical and mechanical characteristics in reactive sputtered SiCO thin films for optical guided-wave pressure sensors was experimentally investigated. Thin films were fabricated by varying the gas pressure from 0.3 to 1.0 Pa at an oxygen flow ratio of 6%, and the gas pressure dependences was clarified. As the gas pressure increased, the optical bandgap of the SiCO thin film increased, resulting in a transparent SiCO films. On the other hand, the refractive index, young’s modulus and hardness decreased with increasing gas pressure. Combining this dependence with the oxygen inflow ratio dependence of the previous study, the first-order approximation formula for the gas pressure and oxygen flow rate ratio for various film characteristics was obtained. Based on this equation, trajectories of equal bandgaps and equal young's moduli on the oxygen flow ratio - gas pressure plane were created on the oxygen influx ratio-gas pressure coordinates, making it easy to fabricate waveguides with desired characteristics.","PeriodicalId":53412,"journal":{"name":"IEEJ Transactions on Sensors and Micromachines","volume":"150 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135372338","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
特集号の論文募集（第40回「センサ・マイクロマシンと応用システム」シンポジウム同時投稿／「ヒト感性デバイスのための機能性材料と応用技術」特集／「化学物質の高次センシングと解析技術」特集） 专刊论文征集(第40届“传感器微机器与应用系统”研讨会同时投稿/“人类感性装置的功能性材料与应用技术”专刊/“化学物质的高阶传感与分析技术”专刊)
IEEJ Transactions on Sensors and Micromachines Pub Date : 2023-10-01 DOI: 10.1541/ieejsmas.143.nl10_3
{"title":"特集号の論文募集（第40回「センサ・マイクロマシンと応用システム」シンポジウム同時投稿／「ヒト感性デバイスのための機能性材料と応用技術」特集／「化学物質の高次センシングと解析技術」特集）","authors":"","doi":"10.1541/ieejsmas.143.nl10_3","DOIUrl":"https://doi.org/10.1541/ieejsmas.143.nl10_3","url":null,"abstract":"","PeriodicalId":53412,"journal":{"name":"IEEJ Transactions on Sensors and Micromachines","volume":"171 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135372798","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
IEEJ Sensors and Micromachines Society 传感器与微机械学会
IEEJ Transactions on Sensors and Micromachines Pub Date : 2023-10-01 DOI: 10.1541/ieejsmas.143.l10_1
{"title":"IEEJ Sensors and Micromachines Society","authors":"","doi":"10.1541/ieejsmas.143.l10_1","DOIUrl":"https://doi.org/10.1541/ieejsmas.143.l10_1","url":null,"abstract":"","PeriodicalId":53412,"journal":{"name":"IEEJ Transactions on Sensors and Micromachines","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135372328","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
環境発電で動作する無線「バットディテクター」端末を用いた回転機予兆診断 利用环境发电工作的无线“buttdetetter”终端的旋转机预兆诊断
IEEJ Transactions on Sensors and Micromachines Pub Date : 2023-10-01 DOI: 10.1541/ieejsmas.143.321
Tsukasa Fujimori
{"title":"環境発電で動作する無線「バットディテクター」端末を用いた回転機予兆診断","authors":"Tsukasa Fujimori","doi":"10.1541/ieejsmas.143.321","DOIUrl":"https://doi.org/10.1541/ieejsmas.143.321","url":null,"abstract":"We have developed a low-power method of collecting sound and vibration in the ultrasonic band by applying the “bat detector”, which is used to detect bats by converting ultrasonic waves into low-frequency waves, to a wireless sensor terminal. The bat-detector wireless sensor node has low power consumption and can be permanently operated with energy harvesting by indoor illumination light. Using the developed bat detector wireless sensor node, we were able to measure the quality deterioration of bearings and observe an increase in the frequency of ultrasonic pulse wave generation due to bearing deterioration. Monitoring of early failure by wireless sensor nodes is expected.","PeriodicalId":53412,"journal":{"name":"IEEJ Transactions on Sensors and Micromachines","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135372652","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Study on MMG Sensor Using Piezoelectric Polymer Nanofibers by Electrospinning 压电聚合物纳米纤维静电纺丝MMG传感器的研究
IEEJ Transactions on Sensors and Micromachines Pub Date : 2023-10-01 DOI: 10.1541/ieejsmas.143.313
Rintaro Abe, Koa Yasuda, Takefumi Kanda, Shuichi Wakimoto, Hisao Oka
{"title":"A Study on MMG Sensor Using Piezoelectric Polymer Nanofibers by Electrospinning","authors":"Rintaro Abe, Koa Yasuda, Takefumi Kanda, Shuichi Wakimoto, Hisao Oka","doi":"10.1541/ieejsmas.143.313","DOIUrl":"https://doi.org/10.1541/ieejsmas.143.313","url":null,"abstract":"In the fields of medical and sports science, it is required to evaluate muscle activity qualitatively and quantitatively. Currently, mechanomyogram (MMG) that can reflect the mechanical activity of muscle fibers is attracting attentions. The purpose of this study is to develop a sensor that can measure MMG during exercise. In this study, a small and flexible MMG sensor using P(VDF/TrFE), which is a piezoelectric polymer material, spun into nanofibers by the electrospinning method has been fabricated and evaluated. By the fabricated electrospinning equipment and the obtained fabrication conditions of the nanofibers MMG sensor has been fabricated by using piezoelectric polymer fibers. By using nanofiber nonwoven fabric for the sensor element, the flexible sensor has been realized. In a sound wave reception experiment assuming MMG measurement, the P(VDF/TrFE) nonwoven fabric element showed that the element detected the sound pressure. Additionally, MMG during isometric contraction and pedaling motion has been measured using the fabricated sensor. The results show that the proposed sensor is effective for measuring MMG during exercise.","PeriodicalId":53412,"journal":{"name":"IEEJ Transactions on Sensors and Micromachines","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135373439","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
研究室だより：芝浦工業大学 工学部機械機能工学科 微小デバイス創造学研究室 研究室だより：芝浦工業大学 工学部機械機能工学科 微小デバイス創造学研究室
IEEJ Transactions on Sensors and Micromachines Pub Date : 2023-09-01 DOI: 10.1541/ieejsmas.143.nl9_1
慎哉 吉田
{"title":"研究室だより：芝浦工業大学 工学部機械機能工学科 微小デバイス創造学研究室","authors":"慎哉 吉田","doi":"10.1541/ieejsmas.143.nl9_1","DOIUrl":"https://doi.org/10.1541/ieejsmas.143.nl9_1","url":null,"abstract":"","PeriodicalId":53412,"journal":{"name":"IEEJ Transactions on Sensors and Micromachines","volume":" ","pages":""},"PeriodicalIF":0.0,"publicationDate":"2023-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"41530184","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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