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Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX最新文献

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High-precision femtosecond laser processing with aberration compensation based on machine learning 基于机器学习的高精度飞秒激光加工与像差补偿
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX Pub Date : 2024-03-13 DOI: 10.1117/12.3005065
Satoshi Hasegawa
{"title":"High-precision femtosecond laser processing with aberration compensation based on machine learning","authors":"Satoshi Hasegawa","doi":"10.1117/12.3005065","DOIUrl":"https://doi.org/10.1117/12.3005065","url":null,"abstract":"","PeriodicalId":517684,"journal":{"name":"Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX","volume":"99 3","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140394800","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Microfabrication of thermoset polymer PDMS using laser-induced bubble (microFLIB) and its mechanism study 利用激光诱导气泡（microFLIB）对热固性聚合物 PDMS 进行微加工及其机理研究
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX Pub Date : 2024-03-12 DOI: 10.1117/12.3001300
Yoichi Toba, Yasutaka Hanada
{"title":"Microfabrication of thermoset polymer PDMS using laser-induced bubble (microFLIB) and its mechanism study","authors":"Yoichi Toba, Yasutaka Hanada","doi":"10.1117/12.3001300","DOIUrl":"https://doi.org/10.1117/12.3001300","url":null,"abstract":"","PeriodicalId":517684,"journal":{"name":"Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX","volume":"63 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140394822","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Non-disruptive Bessel-beam array generation for high-throughput shadow mask laser patterning 用于高通量阴影掩膜激光图案化的非破坏性贝塞尔光束阵列生成技术
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX Pub Date : 2024-03-12 DOI: 10.1117/12.3003603
Hyungsik Kim, Konstantin Mishchik, Woohyun Jung, S. Park, Kyunghan Yoo, Jekil Ryu, SeungJoo Lee, Seongho Jeong, Cheol-Ha Roh
{"title":"Non-disruptive Bessel-beam array generation for high-throughput shadow mask laser patterning","authors":"Hyungsik Kim, Konstantin Mishchik, Woohyun Jung, S. Park, Kyunghan Yoo, Jekil Ryu, SeungJoo Lee, Seongho Jeong, Cheol-Ha Roh","doi":"10.1117/12.3003603","DOIUrl":"https://doi.org/10.1117/12.3003603","url":null,"abstract":"","PeriodicalId":517684,"journal":{"name":"Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX","volume":"3 2","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140284890","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Laser induced forward transfer with high resolution for microelectronics applications 用于微电子应用的高分辨率激光诱导正向转移
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX Pub Date : 2024-03-12 DOI: 10.1117/12.3001784
Ali Gökhan Demir, Dario Crimella, Christian Piovera
{"title":"Laser induced forward transfer with high resolution for microelectronics applications","authors":"Ali Gökhan Demir, Dario Crimella, Christian Piovera","doi":"10.1117/12.3001784","DOIUrl":"https://doi.org/10.1117/12.3001784","url":null,"abstract":"","PeriodicalId":517684,"journal":{"name":"Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX","volume":"41 S191","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140395052","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Multilevel diffraction gratings inside silicon towards spectral filtering 用于光谱滤波的硅内多级衍射光栅
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX Pub Date : 2024-03-12 DOI: 10.1117/12.2692796
Mehmet Bütün, S. Saylan, R. Sabet, O. Tokel
{"title":"Multilevel diffraction gratings inside silicon towards spectral filtering","authors":"Mehmet Bütün, S. Saylan, R. Sabet, O. Tokel","doi":"10.1117/12.2692796","DOIUrl":"https://doi.org/10.1117/12.2692796","url":null,"abstract":"","PeriodicalId":517684,"journal":{"name":"Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX","volume":"18 5","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140395235","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Rapid and high throughput formation of through glass vias 快速、高通量地形成玻璃通孔
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX Pub Date : 2024-03-12 DOI: 10.1117/12.2685276
Joel N. Schrauben, Hisashi Matsumoto, Zhibin Lin, Jan Kleinert
{"title":"Rapid and high throughput formation of through glass vias","authors":"Joel N. Schrauben, Hisashi Matsumoto, Zhibin Lin, Jan Kleinert","doi":"10.1117/12.2685276","DOIUrl":"https://doi.org/10.1117/12.2685276","url":null,"abstract":"","PeriodicalId":517684,"journal":{"name":"Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX","volume":"72 2","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140284760","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
GHz burst pumped third-harmonic pulses for precise microfabrication of silicon 用于硅精确微细加工的千兆赫猝发泵浦三次谐波脉冲
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX Pub Date : 2024-03-12 DOI: 10.1117/12.3008827
H. Sakurai, Kuniaki Konishi
{"title":"GHz burst pumped third-harmonic pulses for precise microfabrication of silicon","authors":"H. Sakurai, Kuniaki Konishi","doi":"10.1117/12.3008827","DOIUrl":"https://doi.org/10.1117/12.3008827","url":null,"abstract":"","PeriodicalId":517684,"journal":{"name":"Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX","volume":"25 2‐3","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140394920","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Laser-lift-off of GaN-based transistors with an ultra-short-pulsed deep UV laser 利用超短脉冲深紫外激光器实现氮化镓晶体管的激光升华
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX Pub Date : 2024-03-12 DOI: 10.1117/12.3001106
Lutz Deriks, E. Bahat Treidel, Elisabeth Brandl, Julian Bravin, E. Brusaterra, Serhiy Danylyuk
{"title":"Laser-lift-off of GaN-based transistors with an ultra-short-pulsed deep UV laser","authors":"Lutz Deriks, E. Bahat Treidel, Elisabeth Brandl, Julian Bravin, E. Brusaterra, Serhiy Danylyuk","doi":"10.1117/12.3001106","DOIUrl":"https://doi.org/10.1117/12.3001106","url":null,"abstract":"","PeriodicalId":517684,"journal":{"name":"Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX","volume":"115 11","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140394922","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Developing laser-induced graphene from colorless polyimide for enhanced performance in pressure sensors and triboelectric nanogenerators 开发无色聚酰亚胺激光诱导石墨烯，提高压力传感器和三电纳米发电机的性能
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX Pub Date : 2024-03-12 DOI: 10.1117/12.2691860
Sung-Yeob Jeong, Yusuke Ito, Jae‐Yeop Chung, Yong‐Wan Kwon, N. Sugita
{"title":"Developing laser-induced graphene from colorless polyimide for enhanced performance in pressure sensors and triboelectric nanogenerators","authors":"Sung-Yeob Jeong, Yusuke Ito, Jae‐Yeop Chung, Yong‐Wan Kwon, N. Sugita","doi":"10.1117/12.2691860","DOIUrl":"https://doi.org/10.1117/12.2691860","url":null,"abstract":"","PeriodicalId":517684,"journal":{"name":"Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX","volume":"113 8","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140285105","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Laser singulation of high refractive index glasses for augmented reality waveguides 用于增强现实波导的高折射率玻璃的激光单一化
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX Pub Date : 2024-03-12 DOI: 10.1117/12.3007998
Jason R. Grenier, Erin K. Hosmer
{"title":"Laser singulation of high refractive index glasses for augmented reality waveguides","authors":"Jason R. Grenier, Erin K. Hosmer","doi":"10.1117/12.3007998","DOIUrl":"https://doi.org/10.1117/12.3007998","url":null,"abstract":"","PeriodicalId":517684,"journal":{"name":"Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX","volume":"91 8","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140395372","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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