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Laser-lift-off of GaN-based transistors with an ultra-short-pulsed deep UV laser

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX Pub Date : 2024-03-12 DOI:10.1117/12.3001106
Lutz Deriks, E. Bahat Treidel, Elisabeth Brandl, Julian Bravin, E. Brusaterra, Serhiy Danylyuk
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Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX
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