用于微电子应用的高分辨率激光诱导正向转移

{"title":"用于微电子应用的高分辨率激光诱导正向转移","authors":"Ali Gökhan Demir, Dario Crimella, Christian Piovera","doi":"10.1117/12.3001784","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":517684,"journal":{"name":"Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX","volume":"41 S191","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Laser induced forward transfer with high resolution for microelectronics applications\",\"authors\":\"Ali Gökhan Demir, Dario Crimella, Christian Piovera\",\"doi\":\"10.1117/12.3001784\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":517684,\"journal\":{\"name\":\"Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX\",\"volume\":\"41 S191\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-03-12\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.3001784\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.3001784","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}