发布求助
文献互助 智能选刊 最新文献

Novel Patterning Technologies 2022最新文献

筛选
英文 中文
Low variability metal pitch scaling with directed self-assembly 具有定向自组装的低可变性金属音高缩放
Novel Patterning Technologies 2022 Pub Date : 2022-06-07 DOI: 10.1117/12.2623266
Gurpreet Singh
{"title":"Low variability metal pitch scaling with directed self-assembly","authors":"Gurpreet Singh","doi":"10.1117/12.2623266","DOIUrl":"https://doi.org/10.1117/12.2623266","url":null,"abstract":"","PeriodicalId":448143,"journal":{"name":"Novel Patterning Technologies 2022","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-06-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125595984","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Exploring the synergy between EUV lithography and directed self-assembly 探索极紫外光刻与定向自组装之间的协同作用
Novel Patterning Technologies 2022 Pub Date : 2022-06-07 DOI: 10.1117/12.2622565
H. Suh, L. Verstraete, Julie Van Bel, P. Bézard, G. Mannaert, Jae Uk Lee, Shouhua Wang, I. Pollentier, Ashish Rathore
{"title":"Exploring the synergy between EUV lithography and directed self-assembly","authors":"H. Suh, L. Verstraete, Julie Van Bel, P. Bézard, G. Mannaert, Jae Uk Lee, Shouhua Wang, I. Pollentier, Ashish Rathore","doi":"10.1117/12.2622565","DOIUrl":"https://doi.org/10.1117/12.2622565","url":null,"abstract":"","PeriodicalId":448143,"journal":{"name":"Novel Patterning Technologies 2022","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-06-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121181844","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整，为了账户安全，请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
请完成安全验证×
相关产品
×
本文献相关产品
联系我们：info@booksci.cn Book学术提供免费学术资源搜索服务，方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号：481959085
Book学术官方微信