{"title":"Low variability metal pitch scaling with directed self-assembly","authors":"Gurpreet Singh","doi":"10.1117/12.2623266","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":448143,"journal":{"name":"Novel Patterning Technologies 2022","volume":"43 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-06-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Novel Patterning Technologies 2022","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2623266","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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