{"title":"具有定向自组装的低可变性金属音高缩放","authors":"Gurpreet Singh","doi":"10.1117/12.2623266","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":448143,"journal":{"name":"Novel Patterning Technologies 2022","volume":"43 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-06-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Low variability metal pitch scaling with directed self-assembly\",\"authors\":\"Gurpreet Singh\",\"doi\":\"10.1117/12.2623266\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":448143,\"journal\":{\"name\":\"Novel Patterning Technologies 2022\",\"volume\":\"43 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-06-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Novel Patterning Technologies 2022\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2623266\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Novel Patterning Technologies 2022","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2623266","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2