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Accelerating FinFET MOL Process Development Using Design for Inspection Methodology 利用设计检测方法加速FinFET MOL工艺开发
2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Pub Date : 2022-05-02 DOI: 10.1109/asmc54647.2022.9792513
Fangrui Wu, Lin-an Yang, Runling Li, Chiung-Han Ye, Haiqiong Zhang, I.H.W. Hsu, T. Brożek, Bo Yu
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