Optical Engineering + Applications最新文献_第9页

Advances in at-wavelength metrology of x-ray optics at the Advanced Photon Source 先进光子源x射线光学波长计量研究进展

Optical Engineering + Applications Pub Date : 2023-10-03 DOI: 10.1117/12.2677215

Xianbo Shi, M. Highland, Matthew G. Frith, L. Gades, O. Quaranta, Runyu Zhang, L. Rebuffi, L. Assoufid

{"title":"Advances in at-wavelength metrology of x-ray optics at the Advanced Photon Source","authors":"Xianbo Shi, M. Highland, Matthew G. Frith, L. Gades, O. Quaranta, Runyu Zhang, L. Rebuffi, L. Assoufid","doi":"10.1117/12.2677215","DOIUrl":"https://doi.org/10.1117/12.2677215","url":null,"abstract":"We have made significant progress in developing at-wavelength X-ray techniques and tools for optics characterization and beamline diagnostics at the Advanced Photon Source (APS). In the past few years, advanced techniques, such as the coded-mask-based method, are routinely used to characterize lenses, mirrors, crystals, and windows for APS and the APS upgrade projects at the 28-ID-B Instrumentation Development, Evaluation & Analysis (IDEA) Beamline and the 1-BM optics and detectors testing beamline. This paper reviews our recent achievements in developing at-wavelength metrology tools and activities in characterizing and developing advanced refractive optics for the APS upgrade beamlines. We summarize the quality evaluation results of hundreds of commercial lenses and highlight the measurement procedures and application of data in designing transfocators. We then discuss the characterization of APS-fabricated silicon compound refractive lenses (CRLs) for high-energy (>40 keV) focusing, and their potential application for the CHEX beamline (Coherent High- Energy X-ray Sector for In Situ Science). Silicon CRLs fabricated by Deep Reactive Ion Etching (DRIE) with different design parameters were evaluated at the IDEA beamline. At-wavelength metrology results show that silicon CRLs are promising options as high-energy focusing optics.","PeriodicalId":434863,"journal":{"name":"Optical Engineering + Applications","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125662480","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Compact dual channel free space optical communication for CubeSat inter-satellite links 用于立方体卫星间链路的紧凑型双通道自由空间光通信

Optical Engineering + Applications Pub Date : 2023-10-03 DOI: 10.1117/12.2682028

Sheng-Feng Lin

引用次数: 0

Resonant cavity design for enhanced magneto-optic measurements 增强磁光测量的谐振腔设计

Optical Engineering + Applications Pub Date : 2023-10-02 DOI: 10.1117/12.2676841

S. Reza, M. Syed, Cody Brelage

{"title":"Resonant cavity design for enhanced magneto-optic measurements","authors":"S. Reza, M. Syed, Cody Brelage","doi":"10.1117/12.2676841","DOIUrl":"https://doi.org/10.1117/12.2676841","url":null,"abstract":"This is an ongoing project which involves both the physics of light propagation and magnetism. The idea of the project is to trap photons inside an optical cavity and force these photons to probe magneto-optically responsive samples multiple times – enhancing the non-reciprocal magneto-optic Faraday rotation (FR) imparted to the optical beam. Often, FR in thin film samples is very sensitive to film thickness and its optical properties. In a conventional single-pass arrangement, the usefulness of this technique is limited to films that are thick enough to result in measurable amount of rotation. Such films are typically opaque and therefore are not amenable to transmission techniques like FR. Previously, we measured FR in submicron ITO films on glass substrates [1]. While the FR signal is dominated by the substrate, we can resolve the FR response of the thin films themselves. However, these films, in terms of their thickness, are already a challenge for our set up. An FR-based based multipass sample probing affords reliability to these measurement via an amplification to the FR response. We are optimistic that such an enhancement in the magnetic effects would drastically improve the signal-to-noise ratio of the received optical signal at the detector. This paper focuses on two things; a) the design and performance measurement of an optical cavity for magneto-optic measurements, and b) preliminary characterization of some simple thin film samples. The future goal would be to characterize more challenging samples and measure their response to modulated magnetic fields inside the cavity.","PeriodicalId":434863,"journal":{"name":"Optical Engineering + Applications","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-10-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128150311","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Contrary microscope: opportunities and advantages: optical design 反向显微镜:机会与优势:光学设计

Optical Engineering + Applications Pub Date : 2023-10-02 DOI: 10.1117/12.2678324

D. N. Frolov, O. A. Vinogradova, A. D. Frolov, Alexandr D. Pavlii

引用次数: 0

Excimer laser based photoluminescence device for diamond identification 基于准分子激光的金刚石识别光致发光装置

Optical Engineering + Applications Pub Date : 2023-10-02 DOI: 10.1117/12.2672542

Zhen Wang, Tsung-Han Tsai, Wu-Cheng Wang

引用次数: 0

3D-representation of skin malformations using spectral line imaging and modified Beer-Lambert law 使用光谱线成像和改进的比尔-朗伯定律的皮肤畸形的3d表示

Optical Engineering + Applications Pub Date : 2023-10-02 DOI: 10.1117/12.2687959

I. Ošina, J. Spigulis

引用次数: 0

Arcus x-ray telescope performance and alignment 弧形x射线望远镜的性能和对准

Optical Engineering + Applications Pub Date : 2023-09-29 DOI: 10.1117/12.2677455

H. M. Günther, P. Cheimets, Eric D. Miller, C. DeRoo, Randall K. Smith, Andrew Ptak, R. Heilmann

引用次数: 0

Characterization of transmission in a multiple core-offset Mach-Zehnder interferometer filter using single-mode fiber 单模光纤在多芯偏置马赫-曾德尔干涉仪滤波器中的传输特性

Optical Engineering + Applications Pub Date : 2023-09-28 DOI: 10.1117/12.2683885

Sheila Elvira Bazavilvazo Azua, R. Selvas-Aguilar, J. M. Sierra-Hernández, M. A. Rico-Mendez, E. Gallegos-Arellano, D. Toral-Acosta, Andrea Scarlett Herrera García

引用次数: 0

Design of layered sapphire composites with ablation-tunable coefficient of thermal expansion 具有烧蚀可调热膨胀系数的层状蓝宝石复合材料的设计

Optical Engineering + Applications Pub Date : 2023-09-28 DOI: 10.1117/12.2681781

Brandon D. Chalifoux

{"title":"Design of layered sapphire composites with ablation-tunable coefficient of thermal expansion","authors":"Brandon D. Chalifoux","doi":"10.1117/12.2681781","DOIUrl":"https://doi.org/10.1117/12.2681781","url":null,"abstract":"Composites with high elastic modulus, high specific stiffness, and ultra-low coefficient of thermal expansion (ppb/K-level) will likely be necessary for future ultra-stable optomechanical systems, such as space telescopes for high-contrast imaging. Carbon fiber reinforced polymers (CFRP) offer many favorable properties but suffer from instability due to moisture absorption and creep, and currently cannot cost-effectively achieve the 1-5 ppb/K coefficient of thermal expansion (CTE) required. New materials are desired with high elastic modulus, high specific stiffness, and ppb/K-level CTE. This paper presents three composite designs whose CTE is tunable by ablating material from one or more layers after fabrication and CTE metrology. Each composite design contains sapphire facesheets and a core material of fused silica, silicon carbide or Allvar® to achieve zero- and tunable-CTE. Finite element models reveal that each composite design exhibits CTE tunability of 200-800 ppb/K. The specific stiffness of the Sapphire-Allvar® composite design is around 60 GPa/(g/cc), whereas the others have lower specific stiffness < 20 GPa/(g/cc). These designs demonstrate the principle of tunable low- CTE materials that may have promise for future ultra-stable telescopes.","PeriodicalId":434863,"journal":{"name":"Optical Engineering + Applications","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-09-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130316224","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Inverse optical design using quasi-two-dimensional partially coherent imaging for photolithography overlay metrology 利用准二维部分相干成像进行光刻叠加计量的逆光学设计

Optical Engineering + Applications Pub Date : 2023-09-28 DOI: 10.1117/12.2676094

A. Ohkubo, S. Jang, Jungchul Lee, Sangwoo Bae

{"title":"Inverse optical design using quasi-two-dimensional partially coherent imaging for photolithography overlay metrology","authors":"A. Ohkubo, S. Jang, Jungchul Lee, Sangwoo Bae","doi":"10.1117/12.2676094","DOIUrl":"https://doi.org/10.1117/12.2676094","url":null,"abstract":"Overlay measurement error is a critical technical issue in the production of highly stacked semiconductor devices, including VNAND memory chips, CMOS image sensors, and three-dimensional packages. Complicated device structure and stacked structure increase the measurement error of overlay alignment mark position. Inverse optical design or system optimization is required to improve overlay metrology accuracy and measurement robustness. Illumination light source wavelength, source bandwidth, illumination mode, and imaging pupil filter can be optimized for overlay metrology signal with various kinds of complicated device structure. We proposed a practical inverse optical solution to improve the accuracy of overlay metrology. The inverse optical design consists of overlay mark reflectance estimation and optical configuration optimization. Both the estimation and optimization are accelerated using a quasi-two-dimensional partially coherent imaging model. We achieve more than 50 times faster imaging simulation acceleration compared to a conventional simulation algorithm for partially coherent illumination imaging with practical accuracy. Further improvement can be realized with an introduce of an overlay mark reflectance matrix computed by a rigorous electromagnetic analysis simulation for each specific device structure. This robust and practical inverse solution can help improve the overlay accuracy and manufacturing yield of highly complex three-dimensional devices.","PeriodicalId":434863,"journal":{"name":"Optical Engineering + Applications","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-09-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117326001","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0