M. Panzner, H. Müller, G. Kessler, W. Pompe, S. Vellmar, H. Vinzelberg, K. Fischer, B. Schöneich, C. Ritscheli
{"title":"SUPERCONDUCTING TBAzCUsOz FILMS OR SILICON PREPARED BY LPVD","authors":"M. Panzner, H. Müller, G. Kessler, W. Pompe, S. Vellmar, H. Vinzelberg, K. Fischer, B. Schöneich, C. Ritscheli","doi":"10.1515/9783112575666-134","DOIUrl":"https://doi.org/10.1515/9783112575666-134","url":null,"abstract":"","PeriodicalId":432951,"journal":{"name":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","volume":"44 17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128080124","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"DEPENDENCE OF Si-SiO2 INTERFACE STATE DENSITY ON ION IMPLANTATION PROCESS AND ITS EXPLOITATION FOR EVALUATING LOW DOSE ION IMPLANTATION","authors":"M. Kejhar","doi":"10.1515/9783112575666-024","DOIUrl":"https://doi.org/10.1515/9783112575666-024","url":null,"abstract":"","PeriodicalId":432951,"journal":{"name":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131165652","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"QSZMS M M PRORAINO IN THBRHILLY OXIDIZBD POLYSILICON LAYBRS","authors":"U. Gunot, B. Miller","doi":"10.1515/9783112575666-114","DOIUrl":"https://doi.org/10.1515/9783112575666-114","url":null,"abstract":"","PeriodicalId":432951,"journal":{"name":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131202905","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"EFFECTS OF ION FLOWS ON STRUCTURE AND PROPERTIES OF CERTAIN INORGANIC DIELECTRICS","authors":"V. Pichugin, A. Feodorov, A. J. Shmyrin","doi":"10.1515/9783112575666-081","DOIUrl":"https://doi.org/10.1515/9783112575666-081","url":null,"abstract":"","PeriodicalId":432951,"journal":{"name":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","volume":"90 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133584573","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Frontmatter","authors":"","doi":"10.1515/9783112575666-fm","DOIUrl":"https://doi.org/10.1515/9783112575666-fm","url":null,"abstract":"","PeriodicalId":432951,"journal":{"name":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","volume":"66 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133463206","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"ULTRASONIC SURFACE WAVES FOR STUDYING THE PROPERTIES OF THIN FILMS","authors":"R. Küchler","doi":"10.1002/PSSA.2211320229","DOIUrl":"https://doi.org/10.1002/PSSA.2211320229","url":null,"abstract":"The change of the spreading velocity of ultrasonic surface waves by thin film deposition is described by an approximation of the nonlinear equations of motion. The effect of residual stress in deposited films on the spreading velocity is considered. As an example for practical applications, the velocity change of surface waves after TiN film deposition on steel bars is investigated.","PeriodicalId":432951,"journal":{"name":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116824274","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
V. Goltsev, V. M. Drako, V. V. Khomsevich, V. Uglov
{"title":"STRUCTURAL-PHASE CHARGES IN PE FILMS IRRADIATED SUCCESSIVELY BY NITROGEN AND BORON IONS","authors":"V. Goltsev, V. M. Drako, V. V. Khomsevich, V. Uglov","doi":"10.1515/9783112575666-064","DOIUrl":"https://doi.org/10.1515/9783112575666-064","url":null,"abstract":"","PeriodicalId":432951,"journal":{"name":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","volume":"134 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127367142","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. Suvorov, V. Chelnokov, G. Gusinsky, M. Leshchenko, V. Makarov, D. D. Prokofiev, V. Tretiakov, T. B. Zohukova
{"title":"FORMATION Of HIGH-TEMPERATURE SUPERCONDUCTING Bi-Sr-Ca-Cu-O FILMS BY ION-BEAM SPIKE SPUTTERING","authors":"A. Suvorov, V. Chelnokov, G. Gusinsky, M. Leshchenko, V. Makarov, D. D. Prokofiev, V. Tretiakov, T. B. Zohukova","doi":"10.1515/9783112575666-131","DOIUrl":"https://doi.org/10.1515/9783112575666-131","url":null,"abstract":"","PeriodicalId":432951,"journal":{"name":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127435439","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
D. Kothari, L. Guzman, A. Tomasi, A. Miotello, A. Gupta, G. Principi
{"title":"ION BEAM ASSISTED DEPOSITION OF Al ON Fe","authors":"D. Kothari, L. Guzman, A. Tomasi, A. Miotello, A. Gupta, G. Principi","doi":"10.1515/9783112575666-091","DOIUrl":"https://doi.org/10.1515/9783112575666-091","url":null,"abstract":"","PeriodicalId":432951,"journal":{"name":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130073481","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
W. Skorupa, M. Voelskow, R. Grötzschel, J. Albrecht, Jan Vanhellemonta, A. De Veirman
{"title":"OPTIMIZED SO I-PROCESS I NB BY ION BEAM SYNTHESIS OF BURIED SILICON OXYNITRIDE IN SILICON","authors":"W. Skorupa, M. Voelskow, R. Grötzschel, J. Albrecht, Jan Vanhellemonta, A. De Veirman","doi":"10.1515/9783112575666-104","DOIUrl":"https://doi.org/10.1515/9783112575666-104","url":null,"abstract":"","PeriodicalId":432951,"journal":{"name":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128924105","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}