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EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR最新文献

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FILM DEPOSITION BY LASER INDUCED VACUUM ARC EVAPORATION 激光诱导真空电弧蒸发沉积薄膜
EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR Pub Date : 1989-12-31 DOI: 10.1515/9783112575666-096
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引用次数: 0
INVESTIGATION OF THE DYNAMICS OP PULSED LASER AM NEALING OF ION-IMPLANTED SILICON BY THE PICOSECOND TRANSIENT GRATING TECHNIQUE 皮秒瞬态光栅技术在脉冲激光辐照离子注入硅过程中的动力学研究
EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR Pub Date : 1989-12-31 DOI: 10.1515/9783112575666-044
R. Baltramiejünas, R. Gaska, E. Kuokštis, V. Netikšis, M. Petrauskas
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引用次数: 0
In situ RECRYSTALLIZATION OF IMPLANTED Si IN A HIGH-VOLTAGE ELECTRON MICROSCOPE 高压电子显微镜下植入硅的原位再结晶
EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR Pub Date : 1989-12-31 DOI: 10.1515/9783112575666-023
D. Hoehl, H. Bartsch, V. Heera, W. Skorupa, M. Voelskow, K. Wollschläger
{"title":"In situ RECRYSTALLIZATION OF IMPLANTED Si IN A HIGH-VOLTAGE ELECTRON MICROSCOPE","authors":"D. Hoehl, H. Bartsch, V. Heera, W. Skorupa, M. Voelskow, K. Wollschläger","doi":"10.1515/9783112575666-023","DOIUrl":"https://doi.org/10.1515/9783112575666-023","url":null,"abstract":"","PeriodicalId":432951,"journal":{"name":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127729871","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A MIXED BALLISTIC AND THERMODYNAMIC DESCRIPTION OF ION-BEAM MIXING 离子束混合的混合弹道和热力学描述
EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR Pub Date : 1989-12-31 DOI: 10.1515/9783112575666-161
R. Kelly
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引用次数: 0
FORMATION OF A SILICIDE/NITRIDE LAYER SYSTEM BK N+ IMPLANTATION n +注入后硅化物/氮化物层体系的形成
EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR Pub Date : 1989-12-31 DOI: 10.1515/9783112575666-058
B. Weber, J. Danilovich, K. Gärtner, A. Novikov
{"title":"FORMATION OF A SILICIDE/NITRIDE LAYER SYSTEM BK N+ IMPLANTATION","authors":"B. Weber, J. Danilovich, K. Gärtner, A. Novikov","doi":"10.1515/9783112575666-058","DOIUrl":"https://doi.org/10.1515/9783112575666-058","url":null,"abstract":"","PeriodicalId":432951,"journal":{"name":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","volume":"106 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133292831","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
INTERMEDIATE CRYSTALLIZATION OF ION-IMPLANT ED SILICON DURING NANOSECOND LASER ANNEALING 离子注入Ed硅在纳秒激光退火过程中的中间结晶
EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR Pub Date : 1989-12-31 DOI: 10.1515/9783112575666-048
G. Ivlev
{"title":"INTERMEDIATE CRYSTALLIZATION OF ION-IMPLANT ED SILICON DURING NANOSECOND LASER ANNEALING","authors":"G. Ivlev","doi":"10.1515/9783112575666-048","DOIUrl":"https://doi.org/10.1515/9783112575666-048","url":null,"abstract":"","PeriodicalId":432951,"journal":{"name":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","volume":"252 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133713657","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
INVESTIGATION OP SPECIFIC FEATURES OF GALLIUM ARSENIDE IMPLANTATION WITH HIGH IOU DOSES 高剂量砷化镓注入特性的研究
EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR Pub Date : 1989-12-31 DOI: 10.1515/9783112575666-040
V. Yurchenko, V. I. Khytko, V. F. Korotov, V. S. Pivovar, A. B. Ryzhnitsyn, T. S. Gancharik
{"title":"INVESTIGATION OP SPECIFIC FEATURES OF GALLIUM ARSENIDE IMPLANTATION WITH HIGH IOU DOSES","authors":"V. Yurchenko, V. I. Khytko, V. F. Korotov, V. S. Pivovar, A. B. Ryzhnitsyn, T. S. Gancharik","doi":"10.1515/9783112575666-040","DOIUrl":"https://doi.org/10.1515/9783112575666-040","url":null,"abstract":"","PeriodicalId":432951,"journal":{"name":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","volume":"51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134234629","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
HEATING OF SEMICONDUCTORS BY ION BEAMS AND ION-BEAM INDUCED PROCESSES 用离子束和离子束诱导过程加热半导体
EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR Pub Date : 1989-12-31 DOI: 10.1515/9783112575666-046
Yu.A. Bumay, D. S. Domanevskii, N. E. Domorod, A. B. Ulyashin, N. Shlopak
{"title":"HEATING OF SEMICONDUCTORS BY ION BEAMS AND ION-BEAM INDUCED PROCESSES","authors":"Yu.A. Bumay, D. S. Domanevskii, N. E. Domorod, A. B. Ulyashin, N. Shlopak","doi":"10.1515/9783112575666-046","DOIUrl":"https://doi.org/10.1515/9783112575666-046","url":null,"abstract":"","PeriodicalId":432951,"journal":{"name":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133779849","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
APPARATUS FOR INFRARED ANNEALING OP GaAs IN CONTROLLED ATMOSPHERE 可控气氛下砷化镓红外退火装置
EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR Pub Date : 1989-12-31 DOI: 10.1515/9783112575666-038
V. Yurchenko, S. V. Slobodich, A. V. Teselkin, V. S. Pivovar, S. V. Chernenko
{"title":"APPARATUS FOR INFRARED ANNEALING OP GaAs IN CONTROLLED ATMOSPHERE","authors":"V. Yurchenko, S. V. Slobodich, A. V. Teselkin, V. S. Pivovar, S. V. Chernenko","doi":"10.1515/9783112575666-038","DOIUrl":"https://doi.org/10.1515/9783112575666-038","url":null,"abstract":"","PeriodicalId":432951,"journal":{"name":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133784144","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
DEFECT OF PROTON BOMBARDMENT INDUCED DETECTS OH THE OPTICAL ABSORPTION OF GaP AND InP 质子轰击诱导的缺陷检测到OH对GaP和InP的光吸收
EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR Pub Date : 1989-12-31 DOI: 10.1515/9783112575666-042
C. Ascheron, W. Hörig, H. Neumann, V. Orlenko
{"title":"DEFECT OF PROTON BOMBARDMENT INDUCED DETECTS OH THE OPTICAL ABSORPTION OF GaP AND InP","authors":"C. Ascheron, W. Hörig, H. Neumann, V. Orlenko","doi":"10.1515/9783112575666-042","DOIUrl":"https://doi.org/10.1515/9783112575666-042","url":null,"abstract":"","PeriodicalId":432951,"journal":{"name":"EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115777719","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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