{"title":"Applications for piezoelectric leaky surface waves","authors":"K. Yamanouchi, M. Takeuchi","doi":"10.1109/ULTSYM.1990.171319","DOIUrl":"https://doi.org/10.1109/ULTSYM.1990.171319","url":null,"abstract":"The properties of piezoelectric leaky surface waves (PLSWs) in LiNbO/sub 3/, LiTaO/sub 3/, quartz, etc. are summarized. Applications of leaky surface waves, (e.g., in filters with a low-loss and wide bandwidth, voltage-controllable oscillators with a wide bandwidth for mobile communications systems, and temperature stable oscillators) are presented. In particular, it is shown that PLSWs have better properties than surface acoustic waves (SAWs) and that the boundary between metal and free surfaces is important for low-loss devices. Possible future applications of leaky surface waves are described.<<ETX>>","PeriodicalId":412254,"journal":{"name":"IEEE Symposium on Ultrasonics","volume":"150 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1990-12-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123236886","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Selective rate enhancement of etching processes by acoustic agitation","authors":"M. D. Howell, B. Khuri-Yakub, G. Kino","doi":"10.1109/ULTSYM.1990.171486","DOIUrl":"https://doi.org/10.1109/ULTSYM.1990.171486","url":null,"abstract":"The authors introduce a novel method of etching materials in which an acoustic wave is introduced to agitate a selected area of a sample that is exposed to an etchant. A ZnO acoustic transducer is fabricated on one side of a material sample (glass or silicon). The other side is exposed to an etchant where up to 4 W of electrical power is applied to the transducer at 300-500 MHz. The creation of a variety of pits and trenches is shown on the etched sides of glass and silicon substrates without the use of masks. High-quality surface finishes are demonstrated. Etch-rate enhancement as high as 51:1 is shown, and this enhancement is characterized as a function of applied power. Efficient creation of holes is demonstrated by launching the wave through several layers of glass and etching all the way through the layer exposed to the etchant.<<ETX>>","PeriodicalId":412254,"journal":{"name":"IEEE Symposium on Ultrasonics","volume":"73 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1990-12-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126439180","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Design of a miniature in-vivo shock wave hydrophone","authors":"M. Schafer, T. Kraynak, P. Lewin","doi":"10.1109/ULTSYM.1990.171643","DOIUrl":"https://doi.org/10.1109/ULTSYM.1990.171643","url":null,"abstract":"The authors discuss the development of a miniature precision acoustic sensor (hydrophone) which would survive in an in-vivo shock-wave field. The immediate application of the device is in improving the safety and efficacy of extracorporeal shock-wave lithotripsy (ESWL) treatment of kidney and gallbladder stones. The hydrophone is designed for insertion into the body using a catheter or biopsy needle, to provide reliable in-vivo acoustic pressure measurements of the ESWL. The research efforts include, (1) theoretical modeling to examine design trade-offs associated with material choice and sensor configuration; (2) prototype construction; and (3) acoustical performance characterization. The results of prototype testing are shown and compared to existing hydrophone designs. Performance differences involve bandwidth, directivity, and survivability under shock-wave exposure. The fundamental difficulty is improving survivability without sacrificing bandwidth or signal fidelity.<<ETX>>","PeriodicalId":412254,"journal":{"name":"IEEE Symposium on Ultrasonics","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1990-12-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126754327","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Experimental study of stress and thermoelastic effects in planar stress-compensated SAW quartz cuts","authors":"S. Ballandras, E. Bigler","doi":"10.1109/ULTSYM.1990.171409","DOIUrl":"https://doi.org/10.1109/ULTSYM.1990.171409","url":null,"abstract":"Two experimental tests are reported. The first are mechanical tests at constant temperature, involving two- or four-point diametral compression of a circular quartz substrate supporting a SAW (surface acoustic wave) delay line used in an oscillator. The second test involves investigation of dynamical temperature effects. The same circular delay line is subjected to temperature cycles, the external heat flux coming through two-point diametral fixations. Frequency-temperature cycles are measured and used to characterize the sensitivity of the device to dynamical thermal effects. The experimental results indicate that SAW devices present intrinsic compensation to mechanical and thermal perturbation.<<ETX>>","PeriodicalId":412254,"journal":{"name":"IEEE Symposium on Ultrasonics","volume":"389 4","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1990-12-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114125833","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Flexural wave externally-attached mass flowmeter for two-phase fluids in small-diameter tubing, 1-mm ID to 16-mm ID","authors":"L. Lynnworth","doi":"10.1109/ULTSYM.1990.171629","DOIUrl":"https://doi.org/10.1109/ULTSYM.1990.171629","url":null,"abstract":"A way of measuring mass flow rate noninvasively in a metal conduit of small inner diameter (ID), so far 16 mm and 1 mm, was demonstrated with a few air/water mixtures. The method uses flexural waves, which at 100 kHz propagate at an average phase velocity that is a function of conduit parameters and the average density of the fluid inside the conduit. Using externally attached transducers, the flexural pulse transit time t/sub f/ in the conduit is measured in two zones whose centers are axially displaced by a distance L. The cross-correlation time tau between the jittery flexural propagation signatures observed in the first zone and later in the second zone was also measured. Fluid density rho is obtained from t/sub f/, flow velocity V from tau , and the mass flow rate M from the rho V product. If rho changes slowly and only V changes rapidly, it may be preferable to abandon the tag method in favor of either contrapropagation or a reflection method that exploits the small reflections that occur at density inhomogeneities.<<ETX>>","PeriodicalId":412254,"journal":{"name":"IEEE Symposium on Ultrasonics","volume":"201 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1990-12-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114224917","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
S. Olson, E. Garber, D. Streit, W. Jones, D. Ko, B. Meadows
{"title":"Heterojunction acoustic charge transport for transversal filter applications","authors":"S. Olson, E. Garber, D. Streit, W. Jones, D. Ko, B. Meadows","doi":"10.1109/ULTSYM.1990.171357","DOIUrl":"https://doi.org/10.1109/ULTSYM.1990.171357","url":null,"abstract":"HACT (heterojunction acoustic charge transport) devices have been produced which use an AlGaAs/GaAs heterostructure for vertical charge confinement. Results for a tapped delay line and for a 50 tap transversal filter are shown. The devices have a transfer efficiency of 0.9994, and have less than 3 dB rolloff below the Nyquist frequency. The transversal filter gave 5.6 dB insertion loss, and 11.8 dB sidelobe rejection, which was within 1.5 dB of a simple Fourier transform model.<<ETX>>","PeriodicalId":412254,"journal":{"name":"IEEE Symposium on Ultrasonics","volume":"147 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1990-12-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120986474","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Piezoelectric devices for frequency control and selection in Japan","authors":"S. Fujishima","doi":"10.1109/ULTSYM.1990.171331","DOIUrl":"https://doi.org/10.1109/ULTSYM.1990.171331","url":null,"abstract":"Typical results of the distribution of SAW velocity in a substrate as measured by the line-focus-beam ultrasonic microscope are reported. The designs of oscillator circuits using bulk wave and surface acoustic wave resonators are analyzed. Maximum input power for SAW devices is limited by electrode migration, which depends on the maximum stress at interdigital-transducer electrodes. Stress distribution in a SAW substrate can be calculated and shown graphically by the finite element method. The use of oriented Al electrodes, instead of ordinary amorphous Al electrodes, can increase the life of quartz-crystal SAW resonators over 1000 times. Finally, the reliability of dipped resin packages for TV VIF SAW filters is reported.<<ETX>>","PeriodicalId":412254,"journal":{"name":"IEEE Symposium on Ultrasonics","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1990-12-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121665200","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Alternative approaches to in-situ intensity estimation (medical diagnostic ultrasound)","authors":"M. Schafer","doi":"10.1109/ULTSYM.1990.171592","DOIUrl":"https://doi.org/10.1109/ULTSYM.1990.171592","url":null,"abstract":"Experimental results from a study of three alternative approaches to the estimation of in-situ or derated ultrasonic intensity parameters are presented. The existing regulatory approach uses the exponential derating factor e exp(-0.069F/sub c/d), where F/sub c/ is the center frequency of the ultrasonic pulse and d is the focal depth in centimeters. This derating is applied to the values of ultrasonic intensity as measured in water, which are significantly influenced by nonlinear propagation effects. This first alternative approach applies the same general formula to all the frequency components of the ultrasonic pulse spectrum. The second alternative involves reconstructing a time waveform from only the dominant spectral peak of the pulse spectrum, adjusted to account for the energy lost in the higher harmonics. In the third approach, the centroid of the frequency spectrum is used rather than the center frequency. Results of axial beam scans at low and high energy levels (where nonlinear effects dominate) show that the alternative methods may be appropriate for regulatory purposes.<<ETX>>","PeriodicalId":412254,"journal":{"name":"IEEE Symposium on Ultrasonics","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1990-12-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123814251","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Vibration analysis of new shape G-type quartz crystal resonator formed by etching method","authors":"H. Kawashima, M. Matsuyama","doi":"10.1109/ULTSYM.1990.171426","DOIUrl":"https://doi.org/10.1109/ULTSYM.1990.171426","url":null,"abstract":"The frequency temperature behavior and electrical characteristics of a novel G-type quartz crystal resonator, formed by an etching method, are described. An objective of the present research is to provide a miniaturized quartz crystal resonator with a frequency of approximately 1 MHz. A novel shaped G-type portion and supporting portions is proposed, and its resonator frequency constant, frequency temperature behavior, and electrical characteristics are theoretically and experimentally clarified in order to realize a miniaturized quartz crystal resonator with a zero temperature coefficient and good electrical characteristics.<<ETX>>","PeriodicalId":412254,"journal":{"name":"IEEE Symposium on Ultrasonics","volume":"101 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1990-12-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121582189","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
G. Carlotti, D. Fioretto, G. Socino, L. Palmieri, A. Petri, E. Verona
{"title":"Surface acoustic waves in c-axis inclined ZnO films","authors":"G. Carlotti, D. Fioretto, G. Socino, L. Palmieri, A. Petri, E. Verona","doi":"10.1109/ULTSYM.1990.171406","DOIUrl":"https://doi.org/10.1109/ULTSYM.1990.171406","url":null,"abstract":"Surface acoustic wave propagation in c-axis inclined ZnO films has been studied in order to assess the possibility of using films of this kind in shear horizontal (SH) wave devices. The authors calculate the velocity dispersion and the electromechanical coupling coefficient for generalized Rayleigh and Love modes propagating along inclined-axis ZnO films on fused quartz and silicon substrates. The analysis has been done for different values of the inclination angle and of the ratio between film thickness and acoustic wavelength. ZnO films with the c-axis oriented 30 degrees to the surface normal were deposited by reactive RF magnetron sputtering on fused quartz. Measurements of phase velocity of surface modes by ultrasonic and Brillouin scattering techniques permitted the elastic characterization of the films.<<ETX>>","PeriodicalId":412254,"journal":{"name":"IEEE Symposium on Ultrasonics","volume":"63 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1990-12-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131202611","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}