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A semiconductor process for cointegration of BAW thin-film piezoelectrics with microwave BJTs 微波BJTs与BAW薄膜压电体的半导体协整工艺
IEEE Symposium on Ultrasonics Pub Date : 1990-12-04 DOI: 10.1109/ULTSYM.1990.171420
R. Weber, S. Burns, S.D. Braymen
{"title":"A semiconductor process for cointegration of BAW thin-film piezoelectrics with microwave BJTs","authors":"R. Weber, S. Burns, S.D. Braymen","doi":"10.1109/ULTSYM.1990.171420","DOIUrl":"https://doi.org/10.1109/ULTSYM.1990.171420","url":null,"abstract":"A compatible process for the monolithic integration of the BAW (bulk acoustic wave) piezoelectric thin-film resonator with silicon BJTs (bipolar junction transistors) is presented. The process uses RIE (reactive ion etching) trench-isolated BJTs cointegrated with high-Q AlN resonators which do not use the p/sup +/ etch stop. Dielectrically assisted liftoff is used for AlN definition. The process is used for the design of a semicustom ASIC (application-specific integrated circuit) palette consisting of resonators, BJTs, resistors, and digitally weighted MOS capacitors. This ASIC palette is then used for the design of 1-GHz oscillators. To facilitate the use of SPICE and S-parameter techniques, resonator equivalent circuit elements are obtained using TOUCHSTONE optimization routines.<<ETX>>","PeriodicalId":412254,"journal":{"name":"IEEE Symposium on Ultrasonics","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1990-12-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127814712","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
A piezoelectric double-mode filter using the complex-branch-type energy trapping 利用复支路型能量捕获的压电双模滤波器
IEEE Symposium on Ultrasonics Pub Date : 1990-12-04 DOI: 10.1109/ULTSYM.1990.171570
H. Watanabe, K. Nakamura, Hiroshi Shimizu
{"title":"A piezoelectric double-mode filter using the complex-branch-type energy trapping","authors":"H. Watanabe, K. Nakamura, Hiroshi Shimizu","doi":"10.1109/ULTSYM.1990.171570","DOIUrl":"https://doi.org/10.1109/ULTSYM.1990.171570","url":null,"abstract":"A filter using complex-branch-type energy trapping which is caused by contributions from the complex branches of dispersion curves is proposed. Theoretical and experimental results are presented for the width-extensional modes in a thin piezoelectric ceramic strip. Characteristics of the symmetric and antisymmetric trapped-energy modes in this filter have some interesting features that are different from those of the usual trapped-energy modes, such as noticeable undulations in the resonant frequency spectrum and sinusoidally oscillating decay of displacement in the unelectroded region. These results were used to construct double-mode filters with a center frequency of about 1 MHz and a 3-dB fractional bandwidth of 3%.<<ETX>>","PeriodicalId":412254,"journal":{"name":"IEEE Symposium on Ultrasonics","volume":"72 1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1990-12-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128015375","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A study of the acoustic emission from booming sand 砂土轰鸣声发射的研究
IEEE Symposium on Ultrasonics Pub Date : 1990-12-04 DOI: 10.1109/ULTSYM.1990.171518
Z. Chai, M. F. Leach, G. A. Rubin
{"title":"A study of the acoustic emission from booming sand","authors":"Z. Chai, M. F. Leach, G. A. Rubin","doi":"10.1109/ULTSYM.1990.171518","DOIUrl":"https://doi.org/10.1109/ULTSYM.1990.171518","url":null,"abstract":"Qualitative descriptions of acoustic emissions from booming sand discerned in the field contain a characteristic feature: the perception of a low-frequency beat. The first report on the observation of such beat patterns, obtained in the laboratory from airborne signals produced by small samples of booming sand, was presented by M.F. Leach and G.A. Rubin (see 10th Intern. Acoustic Emission Symp., Sendai, Japan, 1990). Results from this earlier quantitative study are summarized. The study indicates that knowledge of the number of sand particles may also be necessary, if not sufficient, in order to understand booming dunes and to identify the booming mechanism. There are many potential applications of this phenomenon. One of the most interesting is the exploration of extraterrestrial space; whereas booming sand is rare in the terrestrial environment, it may be common in the high-Q soils of the Moon and the near-waterless dune environment of Mars.<<ETX>>","PeriodicalId":412254,"journal":{"name":"IEEE Symposium on Ultrasonics","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1990-12-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132808959","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A biopsy sensor for measurement of sound velocity of tissue 一种用于测量组织声速的活检传感器
IEEE Symposium on Ultrasonics Pub Date : 1990-12-04 DOI: 10.1109/ULTSYM.1990.171600
T. Matsunaka, S. Yamashita
{"title":"A biopsy sensor for measurement of sound velocity of tissue","authors":"T. Matsunaka, S. Yamashita","doi":"10.1109/ULTSYM.1990.171600","DOIUrl":"https://doi.org/10.1109/ULTSYM.1990.171600","url":null,"abstract":"A biosensor that can obtain an accurate sound velocity in a part of the soft organic tissue is described. This sensor is in the biopsy needle with a diameter of 1.6 mm and is inserted into the tissue to be measured. The sensor consists of a small transmitting ultrasonic transducer with a center frequency of 5 MHz and another unit of the same transducer positioned 5 mm away from the first for use as the receiving transducer. Measurements of the sound velocity in liquids, gel, and excised pig liver were taken as part of a feasibility study to determine its application in vivo. The accuracy was approximately within +or-0.25 m/s.<<ETX>>","PeriodicalId":412254,"journal":{"name":"IEEE Symposium on Ultrasonics","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1990-12-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133954892","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Spatial anisotropy of the backscattered acoustic field from fiber reinforced composites 纤维增强复合材料后向散射声场的空间各向异性
IEEE Symposium on Ultrasonics Pub Date : 1990-12-04 DOI: 10.1109/ULTSYM.1990.171527
T. Lhermitte, M. Fink
{"title":"Spatial anisotropy of the backscattered acoustic field from fiber reinforced composites","authors":"T. Lhermitte, M. Fink","doi":"10.1109/ULTSYM.1990.171527","DOIUrl":"https://doi.org/10.1109/ULTSYM.1990.171527","url":null,"abstract":"The spatial anisotropy of the backscattered acoustic field from fiber reinforced composites are studied experimentally and theoretically. These composites are formed from elementary layers composed of a unidirectional distribution of carbon fibers impregnated with resin. By stacking these basic building blocks, with a given sequence in predetermined directions, defining a superperiod, three materials have been manufactured: two periodic cross-ply composites, exhibiting a fourfold and an eightfold axis of rotation, and a unidirectional composite. The autocorrelation function of the echo is equal to the autocorrelation of the transducer aperture, except for the unidirectional composite. This means that the cross-ply composites behave, from the point of view of backscattering, like media where the scatterers are randomly distributed (biological tissues).<<ETX>>","PeriodicalId":412254,"journal":{"name":"IEEE Symposium on Ultrasonics","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1990-12-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134023158","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Variable wavelength photoacoustic microscopy 可变波长光声显微镜
IEEE Symposium on Ultrasonics Pub Date : 1990-12-04 DOI: 10.1109/ULTSYM.1990.171445
Y. Nagata, K. Yamanaka, H. Ogiso, T. Koda
{"title":"Variable wavelength photoacoustic microscopy","authors":"Y. Nagata, K. Yamanaka, H. Ogiso, T. Koda","doi":"10.1109/ULTSYM.1990.171445","DOIUrl":"https://doi.org/10.1109/ULTSYM.1990.171445","url":null,"abstract":"Imaging with a variable wavelength photoacoustic (PA) microscope is a technique that permits the characterization of surface-improved materials, layered materials, etc. The authors present theoretical and experimental studies of the modulation frequency dependence and the image for a layered sample using a variable-wavelength PA microscope. The theoretical predictions are compared with experimental results on a PA signal as a function of modulation frequency for a layered polypropylene film when varying the wavelengths. Good agreement was obtained for varied wavelengths. Examples are presented of photoacoustic images obtained with the variable-wavelength PA microscope. These show a change of PA signal caused by the alteration of the layer which absorbs the incident light.<<ETX>>","PeriodicalId":412254,"journal":{"name":"IEEE Symposium on Ultrasonics","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1990-12-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131850679","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Ultrasonic nonlinearities of high temperature superconductor YBa/sub 2/Cu/sub 3/O/sub 7- delta / from 300 to 77 K 高温超导体YBa/sub 2/Cu/sub 3/O/sub 7- δ / 300 ~ 77 K范围内的超声非线性
IEEE Symposium on Ultrasonics Pub Date : 1990-12-04 DOI: 10.1109/ULTSYM.1990.171572
M. Breazeale, W.H. Jiang
{"title":"Ultrasonic nonlinearities of high temperature superconductor YBa/sub 2/Cu/sub 3/O/sub 7- delta / from 300 to 77 K","authors":"M. Breazeale, W.H. Jiang","doi":"10.1109/ULTSYM.1990.171572","DOIUrl":"https://doi.org/10.1109/ULTSYM.1990.171572","url":null,"abstract":"The ultrasonic nonlinearity parameter beta of the high-temperature superconductor YBa/sub 2/Cu/sub 3/O/sub 7- delta / was measured from 300 to 77 K by using the second-harmonic generation technique. The ultrasonic nonlinearity parameter beta decreases with decreasing temperature very rapidly from room temperature to 200 K and vanishes around the transition temperature. The phenomenon can be explained by assuming a structural phase transition, a superconducting transition or a gain boundary change. The behavior is unique and different from that of single crystals.<<ETX>>","PeriodicalId":412254,"journal":{"name":"IEEE Symposium on Ultrasonics","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1990-12-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131987464","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Accurate and fast two-dimensional analysis of long, apodized SAW-transducers 准确和快速的二维分析长，apoedzed saw传感器
IEEE Symposium on Ultrasonics Pub Date : 1990-12-04 DOI: 10.1109/ULTSYM.1990.171399
H. Bachl, G. Kovacs, K. Wagner, A. Baghai-Wadji
{"title":"Accurate and fast two-dimensional analysis of long, apodized SAW-transducers","authors":"H. Bachl, G. Kovacs, K. Wagner, A. Baghai-Wadji","doi":"10.1109/ULTSYM.1990.171399","DOIUrl":"https://doi.org/10.1109/ULTSYM.1990.171399","url":null,"abstract":"The authors present a novel rigorous approach to the two-dimensional analysis of SAW (surface acoustic wave) transducers, which is based on three steps. First the 2-D charge distribution on the IDT (interdigital transducer) is computed. This is done efficiently by means of a 2-D element factor which accounts for the transversal end effects near the gaps. Wave excitation is described by means of the elementary angular spectrum of waves (ASW), derived from the SAW-part of the 2-D Green's function. Wave propagation is modeled by the well-known ASW formalism. It is concluded that considering transversal end effects and modeling wave excitation rigorously gives better correspondence with measurements than a quasi-1-D analysis.<<ETX>>","PeriodicalId":412254,"journal":{"name":"IEEE Symposium on Ultrasonics","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1990-12-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124349202","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Simulation of B-scan images from two-dimensional transducer arrays 二维换能器阵列的b扫描图像仿真
IEEE Symposium on Ultrasonics Pub Date : 1990-12-04 DOI: 10.1109/ULTSYM.1990.171469
D. H. Turnbull, A. T. Kerr, F. Foster
{"title":"Simulation of B-scan images from two-dimensional transducer arrays","authors":"D. H. Turnbull, A. T. Kerr, F. Foster","doi":"10.1109/ULTSYM.1990.171469","DOIUrl":"https://doi.org/10.1109/ULTSYM.1990.171469","url":null,"abstract":"The potential of using sparse 2-D arrays for medical imaging is assessed by simulating B-scan images of spherical nonscattering cysts embedded in a random scattering volume. The imaging potential of an eighth-order sparse array having close to 1000 elements is demonstrated by quantitatively comparing image contrast between a nonscattering cyst and the surrounding random scattering medium. A 32nd-order sparse array with 245 elements is found to perform at a reduced level, producing unacceptable artifactual echoes within images of cysts. It is concluded that 2-D arrays have the potential to produce medical images superior to linear phased arrays, as well as the ability to produce high-quality images of low-contrast objects at arbitrary steering angles.<<ETX>>","PeriodicalId":412254,"journal":{"name":"IEEE Symposium on Ultrasonics","volume":"57 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1990-12-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115795020","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 39
Network model versus COM description of SAW devices SAW设备的网络模型与COM描述
IEEE Symposium on Ultrasonics Pub Date : 1990-12-04 DOI: 10.1109/ULTSYM.1990.171320
E. Adler, M. D. da Cunha, O. Schwelb
{"title":"Network model versus COM description of SAW devices","authors":"E. Adler, M. D. da Cunha, O. Schwelb","doi":"10.1109/ULTSYM.1990.171320","DOIUrl":"https://doi.org/10.1109/ULTSYM.1990.171320","url":null,"abstract":"A network model for SAW (surface acoustic wave) structures fabricated along arbitrary, and hence asymmetric, orientations is described. The model includes NSPUDT (natural single-phase unidirectional transducer) directions. From the predictions of this model for SAW gratings, the coupling-of-modes (COM) phenomenological description is evaluated. It is demonstrated the incremental COM description can be derived from the unit-cell-based network model. Analytical formulas are compared with those calculated from the network model, and simple explicit formulas for the ABCD matrix, and hence for the COM parameters that predict their dependence on frequency, material parameters, and geometrical parameters, are derived.<<ETX>>","PeriodicalId":412254,"journal":{"name":"IEEE Symposium on Ultrasonics","volume":"91 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1990-12-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123176623","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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