{"title":"Intelligent digital thermal flow sensor","authors":"F. Yiu, G. Liu","doi":"10.1109/ICSENS.2003.1279140","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1279140","url":null,"abstract":"In the present work, most of the original analog circuit of a conventional hot-wire anemometer is replaced with digital electronics, and a signal prediction algorithm is implemented to speed up the sensor measurement. This digital sensor also includes the following upgraded features: (1) temperature compensation over the nonlinearity characteristics of thermistors to achieve more accurate measurement, (2) direct interface to computer, (3) easy change of operational parameters and sensor configurations, and (4) energy conservation with the use of a Pulse Width Modulation (PWM) heater.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"92 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116296790","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"A wireless modular sensor architecture and its application in on-shoe gait analysis","authors":"A. Benbasat, S. J. Morris, J. Paradiso","doi":"10.1109/ICSENS.2003.1279111","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1279111","url":null,"abstract":"We have developed a compact wireless modular sensor architecture, which contains a number of circuit boards (panes), currently used in an application for on-shoe gait analysis. Each pane instantiates a major function - e.g. inertial sensing, tactile sensing or data collection and transmission. As opposed to similar architectures, this system treats the sensor panes as discrete design objects that have data collection as their primary goal. This architecture has allowed us to develop a shoe-mounted system that is capable of measuring gait parameters outside of a traditional motion laboratory. The small size of the circuit boards allows for a compact attachment that fits on the back of the shoe, and the integrated wireless transceiver allows the data to be collected continuously and in any environment.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121467097","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. Spetz, H. Wingbrant, M. Andersson, M. Lofdahl, M. Einehag, P. Ljung, H. Svenningstorp, J. Visser, D. Kubinski, M. Mattsson, P. Salomonsson, S. Savage
{"title":"MISiCFET sensor arrays for on line diagnosis","authors":"A. Spetz, H. Wingbrant, M. Andersson, M. Lofdahl, M. Einehag, P. Ljung, H. Svenningstorp, J. Visser, D. Kubinski, M. Mattsson, P. Salomonsson, S. Savage","doi":"10.1109/ICSENS.2003.1279119","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1279119","url":null,"abstract":"Catalytic Metal Insulator Silicon Carbide Field Effect Transistor (MISiCFETs) sensors can be processed as a sensor array on a SIC-chip. Different selectivity of the sensors is achieved by the use of different combinations of catalytic metals and insulators. The response patterns are used to evaluate for example different states of a combustion (low/high emissions, efficient/less efficient combustion) or monitoring different components in the exhausts from the combustion.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"176 ","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"113993002","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"A novel flexible sensor for compression stress relaxation","authors":"Wang Peng, Ding Tian-huai, Xuelan Feng","doi":"10.1109/ICSENS.2003.1278940","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1278940","url":null,"abstract":"In this paper, a novel route was developed to fabricate a new flexible force sensor using carbon composites that consist of micro carbon particles as conductive matrix, silicone rubber as insulating matrix and elastomer fillers as elastic matrix. The force sensor can not only show a gradual change in electrical resistivity with applied quasi-static pressure, but also measure the changes of compression stress relaxation in soft substrates under it. Furthermore, it is flexible and thin (1.2 mm) enough to be adhered on the measured soft substrates, so the result of relaxation can be obtained directly instead of presumption from sample testing.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128059260","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
P. Ivanov, E. Llobet, X. Vilanova, M. Stankova, J. Bresmez, X. Correig, J. Hubálek, K. Malysz, I. Gràcia, C. Cané
{"title":"Screen-printed nano-grain WO/sub 3/ films for micro-hotplate gas sensors","authors":"P. Ivanov, E. Llobet, X. Vilanova, M. Stankova, J. Bresmez, X. Correig, J. Hubálek, K. Malysz, I. Gràcia, C. Cané","doi":"10.1109/ICSENS.2003.1278958","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1278958","url":null,"abstract":"By means of an adapted screen-printing technique, sensitive layers of nanopowder tungsten trioxide were deposited on silicon micromachined substrates. The thickness of the sensing layers was 5 /spl mu/m and particle size was around 50 nm. Each chip contains four thin silicon nitride membranes, in the center of which a polysilicon heating resistor, insulating layers, platinum electrodes and sensitive layer are stacked. Unlike in previously reported works, the technological procedure reported here allows for depositing the sensing layers before the membranes have been etched. This avoids damaging the membranes during film deposition, which leads to gas sensor microsystems with an excellent fabrication yield (Llobet et al., 2003). The deposition method overcomes disadvantages such as low porosity and low surface area, generally associated to chemical vapor deposition or sputtering methods, and keeps power consumption low (80 mW for a working temperature of 480/spl deg/C). As an example, the sensor response to ammonia, NO/sub 2/, ethanol, CO and methane was studied. The sensors were very sensitive to NO/sub 2/ vapors. The influences of the sensor operating temperature and electrode geometry were also investigated.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115801284","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
N. Shen, Zengtao Liu, Sheng-Yu Peng, E.A. Minch, E. Kan
{"title":"Polymer surface electrochemistry for charge-based sensing in chemoreceptive neuron MOS (CvMOS) transistors","authors":"N. Shen, Zengtao Liu, Sheng-Yu Peng, E.A. Minch, E. Kan","doi":"10.1109/ICSENS.2003.1279076","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1279076","url":null,"abstract":"The charge-based sensing in chemoreceptive neuron MOS (CvMOS) transistors with the extended floating-gate structure has brought forth unique features that are beneficial to the system integration of chemical sensing. Surface chemical functionalization by polymers as the sensing-gate coatings has been employed to selectively sense polar and electrolytic fluids, which are physically isolated front the integrated CMOS circuitry with the modular insulation scheme. The repeatable measurement results have shown both good sensitivity and selectivity. The subthreshold-slope responses for various surface coatings have been analyzed and the corresponding circuitry utilizing the high transconductance gain in the CMOS transistors has been proposed to rapidly extract the encoded information for the CvMOS devices.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130293383","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Gas sensing properties based on a doped conducting polymer/inorganic semiconductor","authors":"M. Campos","doi":"10.1109/ICSENS.2003.1279120","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1279120","url":null,"abstract":"For medical diagnostic applications, there is currently a strong need for systems that comprises simple detectors. In this paper, we report the fabrication of heterojunction between p-doped polypyrrole and n-doped silicon and its possible use in the detecting of acetone. In the forward bias voltage region, the heterojunction diode exhibit a significant, fast and reversible response to acetone. The characteristics of the diodes were measured as a function of acetone vapor, temperature, polypyrrole film thickness and frequency, using current density-voltage and capacitance-voltage measurements.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134271890","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. Guadarrama-Santana, A. García-Valenzuela, N. C. Bruce, Juan Hernández-Cordero
{"title":"A new approach for measuring surface parameters by a capacitive sensor","authors":"A. Guadarrama-Santana, A. García-Valenzuela, N. C. Bruce, Juan Hernández-Cordero","doi":"10.1109/ICSENS.2003.1278999","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1278999","url":null,"abstract":"In this work we propose and study novel methodologies to characterize dielectric films and surface roughness on conducting substrates with a capacitance sensor. We show that it is possible to measure both, the dielectric constant and thickness of a dielectric film using a corrugated electrode and a flat electrode. Then we show that the statistical parameters of a rough surface with Gaussian statistics can be obtained from two capacitance measurements. In both cases we present results from numerical simulations. In addition, for the case of dielectric film characterization we present some preliminary experimental results to corroborate the proposed methodology.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"123 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125222709","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Semiconductor-metal hybrid structures: novel perspective for read heads","authors":"M. Holz, O. Kronenwerth, D. Grundler","doi":"10.1109/ICSENS.2003.1279144","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1279144","url":null,"abstract":"Recently, it was shown that semiconductor-metal hybrid structures can exhibit a very large magnetoresistance effect, the so-called extraordinary magnetoresistance (EMR) effect. This led to the perspective of using EMR devices in magnetic-field sensors and ultrafast read heads. Based on the finite element method, we study the EMR and optimize the effect with respect to material parameters and geometry. As the important design rule we find that the width-to-length ratio of a rectangular device should be below 0.042. This holds for a broad regime of mobility /spl mu/ in the semiconductor and specific contact resistance /spl rho//sub c/ between the semiconductor and the metal.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130900686","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Chemical sensor systems using xerogels and CMOS detectors","authors":"M. Davenport, A. Titus, E. Tehan, F. Bright","doi":"10.1109/ICSENS.2003.1279154","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1279154","url":null,"abstract":"We have developed a chemical sensing platform based on xerogel thin film sensor elements coupled with CMOS detectors. We demonstrate the operation of the sensing platform as a simple oxygen sensor. The quenchometric operation of the oxygen sensor coupled with CMOS detectors is compared to standard laboratory detection systems (CCD and PMT). The Stern-Volmer quenching constant (k/sub SV/) is used as a comparative measure of the operation of each of these systems. In our initial experiments all three systems yielded a k/sub SV/ between 0.042 and 0.049 O/sub 2/%/sup -1/. The xerogel sensor elements have demonstrated satisfactory reusability and stability over a period of more than six months. The CMOS detectors consume less than 0.1% of the power required for the PMT or CCD detectors, and are an attractive platform for array processing and portable applications.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"123 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133099072","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}