用于在线诊断的MISiCFET传感器阵列

A. Spetz, H. Wingbrant, M. Andersson, M. Lofdahl, M. Einehag, P. Ljung, H. Svenningstorp, J. Visser, D. Kubinski, M. Mattsson, P. Salomonsson, S. Savage
{"title":"用于在线诊断的MISiCFET传感器阵列","authors":"A. Spetz, H. Wingbrant, M. Andersson, M. Lofdahl, M. Einehag, P. Ljung, H. Svenningstorp, J. Visser, D. Kubinski, M. Mattsson, P. Salomonsson, S. Savage","doi":"10.1109/ICSENS.2003.1279119","DOIUrl":null,"url":null,"abstract":"Catalytic Metal Insulator Silicon Carbide Field Effect Transistor (MISiCFETs) sensors can be processed as a sensor array on a SIC-chip. Different selectivity of the sensors is achieved by the use of different combinations of catalytic metals and insulators. The response patterns are used to evaluate for example different states of a combustion (low/high emissions, efficient/less efficient combustion) or monitoring different components in the exhausts from the combustion.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"176 ","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"MISiCFET sensor arrays for on line diagnosis\",\"authors\":\"A. Spetz, H. Wingbrant, M. Andersson, M. Lofdahl, M. Einehag, P. Ljung, H. Svenningstorp, J. Visser, D. Kubinski, M. Mattsson, P. Salomonsson, S. Savage\",\"doi\":\"10.1109/ICSENS.2003.1279119\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Catalytic Metal Insulator Silicon Carbide Field Effect Transistor (MISiCFETs) sensors can be processed as a sensor array on a SIC-chip. Different selectivity of the sensors is achieved by the use of different combinations of catalytic metals and insulators. The response patterns are used to evaluate for example different states of a combustion (low/high emissions, efficient/less efficient combustion) or monitoring different components in the exhausts from the combustion.\",\"PeriodicalId\":369277,\"journal\":{\"name\":\"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)\",\"volume\":\"176 \",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2003-10-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENS.2003.1279119\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2003.1279119","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

催化金属绝缘体碳化硅场效应晶体管(misicfet)传感器可以作为传感器阵列处理在sic芯片上。通过使用不同的催化金属和绝缘体组合来实现传感器的不同选择性。响应模式用于评估例如燃烧的不同状态(低/高排放,高效/低效燃烧)或监测燃烧废气中的不同成分。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
MISiCFET sensor arrays for on line diagnosis
Catalytic Metal Insulator Silicon Carbide Field Effect Transistor (MISiCFETs) sensors can be processed as a sensor array on a SIC-chip. Different selectivity of the sensors is achieved by the use of different combinations of catalytic metals and insulators. The response patterns are used to evaluate for example different states of a combustion (low/high emissions, efficient/less efficient combustion) or monitoring different components in the exhausts from the combustion.
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