M. Guirardel, L. Nicu, D. Saya, S. Hinh, H. Sicard, D. Lagrange, F. Mathieu, É. Cattan, D. Remiens, C. Bergaud
{"title":"On-chip self-sensing function of 4/spl times/4 matrix micromachined resonating piezoelectric membranes for mass detection applications [biosensor/chemical sensor applications]","authors":"M. Guirardel, L. Nicu, D. Saya, S. Hinh, H. Sicard, D. Lagrange, F. Mathieu, É. Cattan, D. Remiens, C. Bergaud","doi":"10.1109/FREQ.2004.1418472","DOIUrl":"https://doi.org/10.1109/FREQ.2004.1418472","url":null,"abstract":"In this paper, we studied the dynamic behavior of micromachined piezoelectric membranes (PMs) as an alternative to QCM biosensors. We use standing waves on our mechanical structures to obtain higher integration density. The 4/spl times/4 matrixes of PMs use PZT as a piezoelectric film whose geometries have been drawn by lift-off techniques. Each PM (circular shaped, with a radius equal to 150 /spl mu/m) can be individually addressed for actuation and/or sensing. Here we show that the same kind of PMs exhibit excellent self-sensing capabilities by using the direct piezoelectric effect of the PZT layer. The open-loop resonant frequencies of several PMs were measured by examining the self-induced charge on the sense electrode using a proximity electronic circuit. We simultaneously performed resonant frequencies measured by means of a dynamic optical interferometer that completely matched the electrical self-sensed resonant spectra. In this case, the PMs were actuated in two different ways, either by using an external transducer or by using the self-actuating (reverse piezoelectric effect) capability of each membrane.","PeriodicalId":369162,"journal":{"name":"Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.","volume":"69 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132029056","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
T. Heavner, S. Jefferts, E. Donley, J. Shirley, T. Parker
{"title":"Improvements in NIST-F1 and a resulting accuracy of /spl delta/f/f = 0.61 /spl times/ 10/sup -15/","authors":"T. Heavner, S. Jefferts, E. Donley, J. Shirley, T. Parker","doi":"10.1109/FREQ.2004.1418429","DOIUrl":"https://doi.org/10.1109/FREQ.2004.1418429","url":null,"abstract":"Over the last several years we have made many improvements to NIST-F1 (a laser-cooled cesium fountain primary frequency standard) resulting in a reduction in the uncertainty by nearly a factor of 2 in the realization of the SI second at NIST. We recently submitted an evaluation with a combined standard fractional uncertainty of 0.61 /spl times/ 10/sup -15/ to the BIPM (Bureau International des Poids et Mesures). The total fractional uncertainty of the evaluation (including dead time and time transfer contributions) was 0.88 /spl times/ 10/sup -15/. This is the smallest uncertainty in a frequency standard yet submitted to the BIPM.","PeriodicalId":369162,"journal":{"name":"Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132149628","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"A new low profile DOCXO","authors":"Y. Vorokhovsky, S. Anastasyev, A. Volkov","doi":"10.1109/FREQ.2004.1418499","DOIUrl":"https://doi.org/10.1109/FREQ.2004.1418499","url":null,"abstract":"Two years ago Morion Incorporated introduced its first DOCXO model. Since that time Morion have produced more than 15000 of such DOCXO mainly for CDMA application. Now we introduce the new DOCXO design having much lower height. Generally the height reduction of the oscillator's case decreases thermal resistance between ovenized components of the oscillator and ambient. This factor causes degradation of the frequency stability versus temperature. In the new DOCXO temperature stability is achieved by increase of thermal gain of the two-stage oven, decrease of thermal gradients in the outer oven's case, and use of some elements, which decrease the thermal link between inner and outer ovens. The major technical characteristics of this DOCXO are: standard frequencies 4.096; 5.0; 8.192; 10.0; 12.288; 15.0; 16.384; 20.0 MHz; frequency stability: versus temperature range -40...+70/spl deg/C /spl plusmn/1*10/sup -10/, /spl plusmn/2*10/sup -10/; versus supply voltage change 12V/spl plusmn/10% /spl plusmn/5*10/sup -11/; versus load change 50 ohm /spl plusmn/10% /spl plusmn/1*10/sup -10/; versus aging per day /spl plusmn/1*10/sup -/10; Allan variance for 1s 1*10/sup -12/; output level 7/spl plusmn/2 dBm; power consumption <3 W (steady state @25/spl deg/C); dimensions 2/sup n/*2/sup 11*/1/sup 11/ (50.8*50.8*25.4mm).","PeriodicalId":369162,"journal":{"name":"Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131002247","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
S. Kurosawa, H. Aizawa, M. Matsumoto, Jong-Won Park, H. Kaida, H. Sakaguchi, J. Inoue
{"title":"Resonant properties of ceramic resonators coated with plasma polymerized styrene film","authors":"S. Kurosawa, H. Aizawa, M. Matsumoto, Jong-Won Park, H. Kaida, H. Sakaguchi, J. Inoue","doi":"10.1109/FREQ.2004.1418454","DOIUrl":"https://doi.org/10.1109/FREQ.2004.1418454","url":null,"abstract":"Ceramic resonators (CR) utilize the mechanical resonance of piezoelectric ceramics, typically of lead zirconate titanate (PZT), which provide various vibration modes depending on the resonance frequency (Jaffe, B. et al., 1971; Murata Manufacturing Co., Ltd., www.murata.com/calalog/p19e7.pdf, 2001). Recently, quartz crystal microbalance (QCM) techniques have found wide application in chemical and biosensors (Lu, C. and Czanderna, A.W., 1984). The high-frequency QCM shows high mass sensitivity, but it has a narrow working range for mass loading. The CR is expected to show a property similar to that of QCM, even though the mass loading effect on CR has not been investigated. The resonant properties of a CR coated with a plasma polymerized styrene film (PPSF) to give a mass loading effect were examined and compared with those of a QCM device.","PeriodicalId":369162,"journal":{"name":"Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.","volume":"152 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123266942","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Reducing PM-to-AM conversion and the light-shift in laser-pumped, vapor-cell atomic clocks","authors":"J. Camparo, J. Coffer, J. Townsend","doi":"10.1109/FREQ.2004.1418442","DOIUrl":"https://doi.org/10.1109/FREQ.2004.1418442","url":null,"abstract":"The alkali vapor-cell atomic clock, either conventional or coherent-population-trapping (CPT), offers one of the most viable approaches to an ultraminiature device. Unfortunately, this atomic clock suffers from two laser-induced noise processes, laser phase-noise (PM) to amplitude-noise (AM) conversion and ac-Stark shift fluctuations. Here, we demonstrate a method to circumvent these problems in a passive and miniaturizable manner based on pressure-broadening of the relevant optical transition. For this purpose, we have constructed a conventional atomic clock employing Rb/sup 87/ vapor confined with 100 torr of N/sub 2/. In this high-pressure environment, both PM-to-AM conversion efficiency and the ac-Stark shift are reduced. Though we employ a \"phase-noisy,\" cleaved-facet diode laser, and lock the laser frequency to the pressure-broadened 1.6 GHz D/sub 1/ absorption line of Rb, we obtain excellent short-term frequency stability (i.e., /spl sigma//sub y/(/spl tau/) = 1.8x10/sup -12///spl tau//sup 1/2/). Moreover, since a single resonance cell generates locking signals for both the laser wavelength and the crystal oscillator, the atomic clock has real potential for miniaturization.","PeriodicalId":369162,"journal":{"name":"Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.","volume":"81 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121515271","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Measurements of particles in liquid using surface acoustic wave sensors","authors":"T. Oyama, J. Kondoh, S. Shiokawa","doi":"10.1109/FREQ.2004.1418459","DOIUrl":"https://doi.org/10.1109/FREQ.2004.1418459","url":null,"abstract":"Measurements of particles in liquids, such as suspensions and slurries, are required in the field of industrial and environmental contamination. A surface acoustic wave with a shear horizontal polarized displacement (SH-SAW) can work as a liquid-phase sensor. The SH-SAW sensor is applied to detecting particles in liquid. Pigments in water paint are selected as the samples. As the SH-SAW sensor is influenced by both mechanical and electrical perturbations, a three-channel SH-SAW sensor is utilized. The experimental results indicate that the SH-SAW sensor for electrical perturbation has high potential for detecting particles in liquid.","PeriodicalId":369162,"journal":{"name":"Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.","volume":"62 35","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114087889","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Tian-chu Li, M. Li, Pingwei Lin, Bingying Huang, J. Qian, Y. Gan, Ping Wang, Mingde Xin, Weiliang Chen, C. Shi, Nianfeng Liu, Xiaohui Zhao
{"title":"NIM4 cesium fountain primary frequency standard: performance and evaluation","authors":"Tian-chu Li, M. Li, Pingwei Lin, Bingying Huang, J. Qian, Y. Gan, Ping Wang, Mingde Xin, Weiliang Chen, C. Shi, Nianfeng Liu, Xiaohui Zhao","doi":"10.1109/FREQ.2004.1418549","DOIUrl":"https://doi.org/10.1109/FREQ.2004.1418549","url":null,"abstract":"The NIM4 atomic fountain clock has been operating since August 2003. We in this paper report the experiments certifying its stability of 8E-13//spl tau//sup 1/2/, reproducibility of 5E-15, and present results of the first evaluation for its systematic frequency correction with an uncertainty of 8.5 E-15 during September to December 2003.","PeriodicalId":369162,"journal":{"name":"Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114158532","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
L. Rodriguez Pardo, J. Fariña, C. Gabrielli, H. Perrot, R. Brendel
{"title":"Miller oscillators for high sensitivity quartz crystal microbalance sensors in damping media","authors":"L. Rodriguez Pardo, J. Fariña, C. Gabrielli, H. Perrot, R. Brendel","doi":"10.1109/FREQ.2004.1418571","DOIUrl":"https://doi.org/10.1109/FREQ.2004.1418571","url":null,"abstract":"The paper presents a new contribution to the design of quartz crystal oscillators for high sensitivity microbalance sensors used in liquid media. The oscillation condition for the Miller configuration was studied in order to optimize the values of the components to obtain oscillators for use in extreme conditions of damping. The equations relating the value of the active and passive components with the maximum supported damping and detected mass were obtained. A CAD tool was developed to help users in the design of microbalances adapted to the application requirements. To increase the mass sensitivity, four optimized microbalance circuits at augmenting frequencies were developed. The components of the circuits were optimized in order to maintain the oscillations in a wide dynamic range of resonator losses. A calibration of the sensors was made. To determine the real sensitivity of the mass sensors, the frequency noise was studied.","PeriodicalId":369162,"journal":{"name":"Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115271124","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Study of frequency-temperature characteristics of quartz with various cut angle and metal thickness of electrode","authors":"Mei-Hui Chung, S.T. Wang, A.C.S. Huang","doi":"10.1109/FREQ.2004.1418532","DOIUrl":"https://doi.org/10.1109/FREQ.2004.1418532","url":null,"abstract":"Choosing a suitable temperature coefficient of frequency (TCF) and turnover temperature (TOT) of quartz substrate for surface acoustic wave (SAW) resonators is extremely important in designing a highly stable SAW oscillator. In general, TCF and TOT depend on the cut angle of the substrate, the wave propagation direction and the metal thickness of the electrodes. The temperature characteristics of quartz substrates were studied experimentally by investigating high-Q one-port SAW resonators. The substrates covered from Y32/spl deg/-X to Y37/spl deg/-X and ST-X. The metal thickness of electrodes covered 1.8%, 3.6% and 5.4%.","PeriodicalId":369162,"journal":{"name":"Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123752270","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. Talbi, F. Sarry, F. Moreira, M. Elhakiki, O. Elmazria, L. Le Brizoual, P. Alnot
{"title":"Zero TCF ZnO/quartz SAW structure for gas sensing applications","authors":"A. Talbi, F. Sarry, F. Moreira, M. Elhakiki, O. Elmazria, L. Le Brizoual, P. Alnot","doi":"10.1109/FREQ.2004.1418515","DOIUrl":"https://doi.org/10.1109/FREQ.2004.1418515","url":null,"abstract":"A zero TCF SAW device was developed for a temperature selfcompensated gas sensor. The device is based on the combination of a ZnO film and a quartz substrate with the appropriate cut and propagation angle. The developed structure IDT/ZnO/quartz, using ST-cut 35/spl deg/ X propagation quartz, presents a zero power flow angle, a very low temperature coefficient of frequency (TCF) value, and a relatively high electromechanical coupling factor. In this structure, the ZnO film is used simultaneously as gas sensitive layer and as TCF compensation layer. As ZnO is a very promising material for the application as gas sensor, the main interaction mechanisms between the acoustic wave and gaseous species (CO/sub 2/, ethanol, butanol) are reviewed. Detailed results for the sensitivity of different acoustic modes are presented.","PeriodicalId":369162,"journal":{"name":"Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123843968","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}