2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846)最新文献

An e-Diagnostics framework with security considerations for semiconductor factories 半导体工厂的电子诊断框架与安全考虑

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846) Pub Date : 2004-12-01 DOI: 10.1109/SMTW.2004.1393711

Min-Hsiung Hung, Rui-Wen Ho, F. Cheng

引用次数: 3

Process optimization by advanced process control with fault detection system for flash memory 采用先进的过程控制和故障检测系统对闪存进行工艺优化

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846) Pub Date : 2004-09-09 DOI: 10.1109/SMTW.2004.1393723

T. Luoh, Changrui Liao, Li-Chung Yang, Ling-Wu Yang, Chi-Tung Huang, H. Shih, Kuang-Chao Chen, H. Chung, J. Ku, Chih-Yuan Lu

引用次数: 0

Supply chain driven - advanced taget delivery system 供应链驱动-先进的目标交付系统

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846) Pub Date : 2004-09-09 DOI: 10.1109/SMTW.2004.1393704

Yih-Yi Lee, N. Fan

引用次数: 2

Machine grouping algorithm for stepper back-up and an empirical study 步进备份的机器分组算法及实证研究

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846) Pub Date : 2004-09-09 DOI: 10.1109/SMTW.2004.1393757

Chia-Yu Hsu, Chen-Fu Chien, Yung-Chen Tsao, Cheng-Yi Li

引用次数: 0

Planning yields in recycling test wafers 计划回收测试晶圆的产量

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846) Pub Date : 2004-09-09 DOI: 10.1109/SMTW.2004.1393750

Muh-Cherng Wu, C. Chien, K. Lu

引用次数: 0

Global CD uniformity improvement using dose modulation pattern correction of pattern density-dependent and position-dependent errors 使用剂量调制模式校正模式密度依赖和位置依赖误差来改善全局CD均匀性

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846) Pub Date : 2004-09-09 DOI: 10.1109/SMTW.2004.1393734

Chia-Jen Chen, Hsin-Chang Lee, L. Yeh, Kai-Chung Liu, Ta-Cheng Lien, Yi-Chun Chuo, H. Hsieh, B. Lin

引用次数: 2

Key factor for new technology transfer on the R&D cycle-time system 研发周期时间系统中新技术转移的关键因素

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846) Pub Date : 2004-09-09 DOI: 10.1109/SMTW.2004.1393760

C. Yu-Chih, K. L. Young, J.Y. Chou

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引用次数: 0

On achieving large inductances for small on-chip inductors through providing pre-programmed multi-dipole cushioning for the spiral inductors via nano technology 利用纳米技术为螺旋电感提供预编程多偶极缓冲，实现小型片上电感的大电感

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846) Pub Date : 2004-09-09 DOI: 10.1109/SMTW.2004.1393752

C. Liao, H.Y. Shao, Chien-Jung Liao, J. Hsu

引用次数: 0

A tool portfolio elimination mechanism (TPEM) for a wafer fab 用于晶圆厂的工具组合消除机制(TPEM)

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846) Pub Date : 2004-09-09 DOI: 10.1109/SMTW.2004.1393716

S. Chung, Ming-Hsiu Hsieh, Jui-Chun Liu

引用次数: 2

Risk management in semiconductor industry 半导体行业的风险管理

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846) Pub Date : 2004-09-09 DOI: 10.1109/SMTW.2004.1393764

Kochun Mou, Guang-Hann Chen

引用次数: 2