{"title":"Conference Venue Information","authors":"","doi":"10.1109/cloudcom2018.2018.00016","DOIUrl":"https://doi.org/10.1109/cloudcom2018.2018.00016","url":null,"abstract":"","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129036240","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Studies on MEMS Vacuum Sensor Based on Field Emission of Silicon Tips Array","authors":"Weiren Wen, Lingyun Wang, J. Gao, Daoheng Sun","doi":"10.1109/NEMS.2007.352261","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352261","url":null,"abstract":"In this paper, we present our recent works on the fabrication and testing of a novel MEMS (micro electro mechanical systems) vacuum sensor based on field emission of silicon tips array. The prototype vacuum sensor had been fabricated and tested under some conditions. It worked as a diode, having the voltage as the input and field emission current as output, with threshold voltage of approximate 7V and breakdown voltage of about 265V. When the pressure fell from 0.037Pa to 0.0077Pa, the field emission current increased from 80.3muA to 96.3muA. This work suggests a potential application of field emission to vacuum sensor.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"66 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116664548","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Special Invited Lectures: Microfabrication and Nanostructure Processing of Advanced Biological Systems","authors":"J. Ying","doi":"10.1109/NEMS.2007.352004","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352004","url":null,"abstract":"Microelectromechanical systems (MEMS) can be combined with nanostructured materials in the design of multifunctional devices. MEMS provide for the ease of microfluidics control, and allows for the full integration of mechanical and electrical components at the macroscopic level through a top-down approach. In contrast, nanostructured materials enable the bottom-up synthesis and assembly of molecular, supramolecular and nanometer-scale structures with controlled surface functionalization. By bringing together MEMS and nanostructured materials, we can achieve (i) automated preparation and manipulation of biological samples, (ii) high-throughput drug screening, (iii) ultrasensitive biomolecular sensors and medical diagnostics, (iv) complex bioreactors for cell and tissue engineering, and (v) biomimetic artificial organs and implants. This presentation describes the exciting possibilities of engineering advanced biological systems by combining microfabrication of devices and nanostructure processing of materials.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115056493","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Plenary Speech: Micro- and Nano-Technologies for Automotive Research","authors":"A. Pisano","doi":"10.1109/NEMS.2007.351981","DOIUrl":"https://doi.org/10.1109/NEMS.2007.351981","url":null,"abstract":"In this talk, current and future research directions for micro- and nano-technologies applicable to the automotive sensor market will be presented. There exists an opportunity for new research to provide new micro- and nano-technologies that in the short run may not yet compete with the existing automotive sensor technologies, but in the long run are likely to surpass them. Historically, automotive sensor technology has been transitioning through three phases, from 1) early phases in which simple driver information is generated, to 2) computer-in-the-loop control systems to 3) complete driving experience mode selection. This existing technology is in phase 3, and for this phase to be successfully completed, new sensors that have higher resolution, greater bandwidth and lower cost must be developed. The new micro- and nano-technologies will provide that solution. A number of micro- and nano-sensors, currently under development, will be described and reviewed. These include 1) resonant micro strain sensors to determine the smallest deflections of even the most rigid of metal automotive parts, 2) micro sensors that show promise of measuring temperature, acceleration, pressure and strain inside the automobile engine combustion chamber, 3) nanowire and nanotube sensors made using a new, room temperature fabrication method that allows the nanowires and nanotubes to be fabricated directly on CMOS chips and 4) miniaturized, low-cost, micro RF systems to detect the presence of pedestrians in the path of the vehicle. These sensors, and others, promise to revolutionize the automotive sensor market.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115450013","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
M. Miao, Qifang Hu, Y. Hao, Haifeng Dong, Ling Wang, Yunbo Shi, Sanmin Shen
{"title":"A Bulk Micromachined Si-on-glass Tunneling Accelerometer with Out-of-plane Sensing Capability","authors":"M. Miao, Qifang Hu, Y. Hao, Haifeng Dong, Ling Wang, Yunbo Shi, Sanmin Shen","doi":"10.1115/MNC2007-21349","DOIUrl":"https://doi.org/10.1115/MNC2007-21349","url":null,"abstract":"A bulk micromachined tunneling accelerometer on Pyrex 7740 glass substrate is reported in this paper, which is capable of out-of-plane sensing and intended for highly sensitive inertial measurements. Low stress in single crystal Si (SCS) proof mass-suspension structure and low thermal incompatibility between SCS structural layer and substrate can minimize low frequency noise of the device. Double-face ICP etchings are utilized to define the movable proof mass and suspension: one made on the face with the tip to partially defines the movable structure before anodic bonding, and another made to releases the movable structure after the bonding. The process can avoid severe blades, as found on beams of samples fabricated with previous process. A 3-order closed loop control circuit is used to keep the tip staying close to the optimal operation position and to ensure favorable linearity over the measuring range. Theoretical analysis and design of the control electronics are presented. The device is tested in low noise environment and the result shows an excellent low frequency resolution of 0.015mg/rtHz (@1~100Hz), and nonlinearity < 2% over plusmn10g input (<1% over plusmn 1g).","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116413818","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"An RC-Model for Dielectrophoresis of Ellipsoidal Cells: A Method for Determnination of Dielectric Properties","authors":"S. Bunthawin, P. Wanichapichart","doi":"10.1109/NEMS.2007.352061","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352061","url":null,"abstract":"This work proposes an RC-model representing an ellipsoidal cell being induced in an AC electric field. The frequency dependent complex function of the induced cell dipole moment is expressed in terms of real and imaginary parts, which explains cell dielectric properties. This approach provides a simpler method so that only three values are required from experimentation. There are two critical frequencies at the lower (fclscr) and the higher (fch ) boundary which determine cross over points from negative to positive DEP force exerting on the cell and vice versa. By increasing the solution conductivity (sigmas), these frequencies converge and join as soon as the sigmas, reaches a critical value(sigmact). Under this critical conductivity the cell experiences a zero force, and the conductivity of the cytoplasm (sigmac) can be predicted. This work reveals permittivity and conductivity of the membrane and the cytoplasm of yeasts.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122651919","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Quanbin Zhao, J. Jiao, Heng Yang, Fei Duan, Zixin Lin, Tie Li, Ying Zhang, Yuelin Wang
{"title":"Experimental Study on Resonant Response of Piezoresistive Double-clamped (111)-Si Nano-beam","authors":"Quanbin Zhao, J. Jiao, Heng Yang, Fei Duan, Zixin Lin, Tie Li, Ying Zhang, Yuelin Wang","doi":"10.1109/NEMS.2007.352142","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352142","url":null,"abstract":"In this work, the resonant response of piezoresistive double-clamped silicon nano-beam has been investigated. Conventional DRIE and KOH anisotropic etching were used to fabricate the 242 nm thick nano beam from doped (111) Si substrate. High energy argon ion bombardment was then applied on selected area of the top side of the nano beam to destroy the symmetry along thickness direction as atomic bonds were partly broken at top layer. The unbombarded layer underneath could maintain its piezoresistivity. The localized piezoresistor was used to study the resonant response of the double-clamped Si nanobeam in air and vacuum. The resonant frequency and Q-factor were obtained. Frequency shift to low end has been observed. The energy dissipation led by damaged atomic structure is discussed to explain the unexpected low Q factor.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114258093","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
S. Surassmo, Vichuta Lauruengtana, Wiyong Kangwansupamongkol, U. Ruktanonchai
{"title":"Antibacterial Effect of apatite coated Titanium Dioxide for Textiles and Coating Applications","authors":"S. Surassmo, Vichuta Lauruengtana, Wiyong Kangwansupamongkol, U. Ruktanonchai","doi":"10.1109/NEMS.2007.352189","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352189","url":null,"abstract":"Photocatalytic activity of titanium dioxide on thin coatings of the material exhibiting self cleaning and disinfecting properties under exposure to UV radiation, have been widely acknowledged. In this study apatite-coated TiO2 materials were evaluated in terms of its antimicrobial property both under ultraviolet (UV) and visible light. Our results demonstrate antibacterial performance of the TiO2 against 4 types of bacteria under UV/visible light at varying extents. We also proved that this coating technique can be applied effectively to fabric surfaces since its antibacterial ability under UV/visible light remain unchanged.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129825401","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Micro Fluidic System by Integrating Pressure Sensor Arrays with a Micro-Channel","authors":"H. Ko, C.W. Liu, C.G. Liu, C. Gau","doi":"10.1109/NEMS.2007.352042","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352042","url":null,"abstract":"This fabrication process developed in the current paper is almost the reverse of the surface micromachining process usually used for the microchannel system. This allows the use of SU-8 to fabricate, by lithography, the diaphragm and the cavities used for these pressure sensors, and the channel. The fabrication process has many advantages over others, such as completely absence of diaphragm stiction, allowing much wider measurement range and flow conditions. More detailed design and fabrication techniques developed, and the calibration of sensors for this channel system is presented. The pressure distributions measured along the channel are compared with the analysis.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"235 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128620529","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Jianchun Dong, A. Asawachaicharn, S. Tapscott, B. Parviz
{"title":"Electronic Detection of Micro RNA Mir2O6 with Molecularly-Differentiated Nanoelectrodes","authors":"Jianchun Dong, A. Asawachaicharn, S. Tapscott, B. Parviz","doi":"10.1109/NEMS.2007.352157","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352157","url":null,"abstract":"Micro RNAs (miRNAs) play important roles in gene regulation at the translational level. However up to this date, there still lacks a fast and efficient method for its detection and quantification. In this paper, we present the construction and characterization of a nanoelectrode sensor array capable of detecting the presence of micro RNA (miRNA) molecules and directly converting their hybridization with an immobilized probe into an electrical signal. Each sensing unit in the array consists of three nano-scale electrodes: counter, control, and working. Electrochemical desorption is used to program the attachment of DNA oligonucleotides complementary to the target miRNA on the working electrode and a nonfouling poly(ethyleneglycol) (PEG) terminated molecular monolayer on the control and counter electrodes. The current flowing between the electrodes is monitored and the capture and hybridization of the target miRNA is verified via measurement of the differential conductance signals.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"75 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127003751","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}