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Optical Measurement Systems for Industrial Inspection XIII最新文献

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A novel phase extraction method based on deep learning for estimating geometric properties of optical flat 一种基于深度学习的光学平面几何性质估计相位提取方法
Optical Measurement Systems for Industrial Inspection XIII Pub Date : 2023-08-10 DOI: 10.1117/12.2673537
Ju-Seob Jeon, Yangjin Kim
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引用次数: 0
Development of Gaussian window for the surface profiling of silicon wafer in wavelength-scanning Fizeau interferometer 波长扫描菲索干涉仪中硅片表面轮廓高斯窗的研制
Optical Measurement Systems for Industrial Inspection XIII Pub Date : 2023-08-10 DOI: 10.1117/12.2673498
Juncheol Bae, Ju-Seob Jeon, Hwan Kim, Juyoung Yun, Yangjin Kim
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引用次数: 1
Coaxial deflectometry: absolute shape measurement with interferometric accuracy 同轴偏转测量:具有干涉精度的绝对形状测量
Optical Measurement Systems for Industrial Inspection XIII Pub Date : 2023-08-10 DOI: 10.1117/12.2673699
Y. Surrel, M. Bordoux
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引用次数: 0
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