{"title":"How the Properties of ta-C Coatings Are Modified by Doping","authors":"V. Weihnacht","doi":"10.14332/svc22.proc.0029","DOIUrl":"https://doi.org/10.14332/svc22.proc.0029","url":null,"abstract":"","PeriodicalId":305525,"journal":{"name":"65th Annual Technical Conference Proceedings","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-11-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133770770","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"PVD of Metallic Lithium Layers and Lithiated Silicon Layers for High-Performance Anodes in Lithium Ion Batteries","authors":"S. Saager","doi":"10.14332/svc22.proc.0008","DOIUrl":"https://doi.org/10.14332/svc22.proc.0008","url":null,"abstract":"","PeriodicalId":305525,"journal":{"name":"65th Annual Technical Conference Proceedings","volume":"416 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-11-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124268912","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Linear RF Ion Source for a Wide Range of Plasma Processing Applications","authors":"R. Viswan","doi":"10.14332/svc22.proc.0025","DOIUrl":"https://doi.org/10.14332/svc22.proc.0025","url":null,"abstract":"","PeriodicalId":305525,"journal":{"name":"65th Annual Technical Conference Proceedings","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-11-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127775622","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Optical Emission Spectroscopy Monitoring and Active Control of Metallic and Reactive HIPIMS Processes","authors":"R. Bandorf","doi":"10.14332/svc22.proc.0010","DOIUrl":"https://doi.org/10.14332/svc22.proc.0010","url":null,"abstract":"","PeriodicalId":305525,"journal":{"name":"65th Annual Technical Conference Proceedings","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-11-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115172909","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}