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Workshop on Nanostructure Science, Metrology, and Technology最新文献

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Facilities for fabricating nanostructures 制造纳米结构的设备
Workshop on Nanostructure Science, Metrology, and Technology Pub Date : 2002-07-24 DOI: 10.1117/12.465456
C. Marrian
{"title":"Facilities for fabricating nanostructures","authors":"C. Marrian","doi":"10.1117/12.465456","DOIUrl":"https://doi.org/10.1117/12.465456","url":null,"abstract":"Direct, physical manipulation of matter at the atomic level is the heart of nanostructure science and technology. This requires very special capabilities in terms of tools and personnel. In the past, emphasis has been placed on specialized equipment (e.g., e-beam tools, plasma etchers, proximal probes, etc.), and on environmental control. The point taken here is that management philosophy is at least equally important (if not more important) in achieving project success. The discussion represents a perspective, as derived from experience as director of the Nanoelectronics Processing Facility at the US Naval Research Laboratory and interactions with other Nanofabrication Facilities 1 .","PeriodicalId":291028,"journal":{"name":"Workshop on Nanostructure Science, Metrology, and Technology","volume":"225 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130595497","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Scan linearity: a hidden factor in SEM magnification calibration 扫描线性度:扫描电镜放大校准中的一个隐藏因素
Workshop on Nanostructure Science, Metrology, and Technology Pub Date : 2002-07-24 DOI: 10.1117/12.437972
A. Sicignano, A. Nikitin, D. Yeremin, M. Sandy, E. Goldburt
{"title":"Scan linearity: a hidden factor in SEM magnification calibration","authors":"A. Sicignano, A. Nikitin, D. Yeremin, M. Sandy, E. Goldburt","doi":"10.1117/12.437972","DOIUrl":"https://doi.org/10.1117/12.437972","url":null,"abstract":"Scan linearity of a review (cross-section) Scanning Electron Microscope (SEM) has been studied using Nanometrology’s proprietary software and reference samples. Nonlinearity across the field of view was measured at greater than 6.5% before and under 1% after correction by the SEM company’s engineer. The scan non-linearity was measured with precision better than 0.2% across the field of view. This is in spite of the nonuniformity of the reference sample which was measured at greater than 2.5%. The precision of the non-uniformity measurement of the reference sample was better than 0.1%.","PeriodicalId":291028,"journal":{"name":"Workshop on Nanostructure Science, Metrology, and Technology","volume":"205 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116170523","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Fabrication of photonic crystals in multilayer organic films 多层有机薄膜中光子晶体的制备
Workshop on Nanostructure Science, Metrology, and Technology Pub Date : 2002-07-24 DOI: 10.1117/12.437272
J. Murakowski, D. Prather
{"title":"Fabrication of photonic crystals in multilayer organic films","authors":"J. Murakowski, D. Prather","doi":"10.1117/12.437272","DOIUrl":"https://doi.org/10.1117/12.437272","url":null,"abstract":"We present a novel method for making 2D photonic crystal structures. The method relies on exposing a multilayer electron beam resist. The different layers exhibit different dissolution rates in the developer, which makes it possible to produce a perforated membrane released from the substrate if the resist closest to the substrate has a higher dissolution rate than the resist on the surface. The entire structure is created in a single development step. Various structures fabricated with this method are reported.","PeriodicalId":291028,"journal":{"name":"Workshop on Nanostructure Science, Metrology, and Technology","volume":"316 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122024467","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Sensing macromolecules with microelectronics 微电子传感大分子
Workshop on Nanostructure Science, Metrology, and Technology Pub Date : 2002-07-24 DOI: 10.1117/12.465477
F. Perkins, L. Tender, S. Fertig, M. Peckerar
{"title":"Sensing macromolecules with microelectronics","authors":"F. Perkins, L. Tender, S. Fertig, M. Peckerar","doi":"10.1117/12.465477","DOIUrl":"https://doi.org/10.1117/12.465477","url":null,"abstract":"Biological macromolecules (such as proteins, DNA, and RNA) are the machinery of biological processes. Sensors enabling quantitative, real-time detection of these objects promise an enhanced understanding and management of disease and illness, with obvious application to medicine and public health. Ideally, these such biosensors would be useable in the field, at medical point of care, or even in vivo, all of which places where sample preparation would be minimal and use of labeling reagents (e.g., fluorescently labeled antibodies) not practical. In a collaboration between the Electronics Science and Technology Division and the Center for Bio/Molecular Science and Engineering we have developed a microelectronic biosensor capable of label-free detection of a variety of biological macromolecules. When fully realized and implemented as elements in an array format, this biosensor may enable low cost, simultaneous, real-time detection of thousands of target macromolecules from small sample volumes (10's of ?liters) or even in vivo. We describe here the construction and performance of an example sensor based on conventional siliconbased technology, as well as future applications.","PeriodicalId":291028,"journal":{"name":"Workshop on Nanostructure Science, Metrology, and Technology","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122191542","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 13
Calibrated displacement actuator for nanometer metrology 用于纳米计量的校准位移执行器
Workshop on Nanostructure Science, Metrology, and Technology Pub Date : 2002-07-24 DOI: 10.1117/12.437740
A. Hatheway
{"title":"Calibrated displacement actuator for nanometer metrology","authors":"A. Hatheway","doi":"10.1117/12.437740","DOIUrl":"https://doi.org/10.1117/12.437740","url":null,"abstract":"The author has developed a new instrument mechanism that is sufficiently sensitive to operate in the nanometer and subnanometer dimensional regimes and has sufficient stability to maintain calibration for extended periods of time. The mechanism has been designed into a calibrated displacement actuator for use in calibrating surface metrology instruments. Tests at China Lake, California, and Gaithersburg, Maryland, suggest linearity better than 1:10,000, repeatability better than 1:10,000 and stability better than 6:10,000 per year. These results include contributions from all sources of metrology error and no attempt has been made to separate the contributors and isolate the actuator’s own contributions. The physics of the actuator suggests that its behavior may be even better than these measurements demonstrate. The actuator may be easily adapted to 2- and 3-axis motion control in instruments. It may provide very reliable resources for metrology in the nanometer and sub-nanometer regimes.","PeriodicalId":291028,"journal":{"name":"Workshop on Nanostructure Science, Metrology, and Technology","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115373541","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Nano- and microscale manipulation of biological particles by laser-guided direct writing 用激光引导直接书写的生物粒子的纳米和微观操作
Workshop on Nanostructure Science, Metrology, and Technology Pub Date : 2002-07-24 DOI: 10.1117/12.438454
B. Gao, J. Fass, M. Renn, D. Odde
{"title":"Nano- and microscale manipulation of biological particles by laser-guided direct writing","authors":"B. Gao, J. Fass, M. Renn, D. Odde","doi":"10.1117/12.438454","DOIUrl":"https://doi.org/10.1117/12.438454","url":null,"abstract":"Tissue engineering has shown great potential for solving health problems through replacing or repairing malfunctioning tissue with functional constructs of living cells and associated molecules. To realize this potential, complicated cell-cell interactions both in the macro scale and micro scale need to be understood.","PeriodicalId":291028,"journal":{"name":"Workshop on Nanostructure Science, Metrology, and Technology","volume":"76 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123287342","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
New methods for fabricating step and flash imprint lithography templates 步进压印和闪蒸压印模板的制备新方法
Workshop on Nanostructure Science, Metrology, and Technology Pub Date : 2002-07-24 DOI: 10.1117/12.437269
D. Resnick, T. Bailey, David P. Mancini, K. Nordquist, W. Dauksher, E. Ainley, A. Talin, K. Gehoski, J. Baker, B. Choi, Stephen C. Johnson, M. Colburn, M. Meissl, S. V. Sreenivasan, J. Ekerdt, C. Willson
{"title":"New methods for fabricating step and flash imprint lithography templates","authors":"D. Resnick, T. Bailey, David P. Mancini, K. Nordquist, W. Dauksher, E. Ainley, A. Talin, K. Gehoski, J. Baker, B. Choi, Stephen C. Johnson, M. Colburn, M. Meissl, S. V. Sreenivasan, J. Ekerdt, C. Willson","doi":"10.1117/12.437269","DOIUrl":"https://doi.org/10.1117/12.437269","url":null,"abstract":"Step and Flash Imprint Lithography (SFIL) is an attractive method for printing sub-100 nm geometries. Relative to other imprinting processes SFIL has the advantage that the template is transparent, thereby facilitating conventional overlay techniques. The purpose of this work is to investigate alternative methods for defining features on an SFIL template. The first method used a much thinner (< 20 nm) layer of Cr as a hard mask. Thinner layers still suppress charging during e-beam exposure of the template, and have the advantage that CD losses encountered during the pattern transfer of the Cr are minimized. The second fabrication scheme addresses some of the weaknesses associated with a solid glass substrate. Because there is no conductive layer on the final template, SEM and defect inspection are compromised. By incorporating a conductive and transparent layer of indium tin oxide on the glass substrate, charging is suppressed during inspection, and the UV characteristics of the final template are not affected. Templates have been fabricated using the two methods described above. Features as small as 30 nm have been resolved on the templates. Sub-80 nm features were resolved on the first test wafer printed.","PeriodicalId":291028,"journal":{"name":"Workshop on Nanostructure Science, Metrology, and Technology","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117343980","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Power actuators for nanotechnology 纳米技术的动力执行器
Workshop on Nanostructure Science, Metrology, and Technology Pub Date : 2002-07-24 DOI: 10.1117/12.465224
V. Rakhovsky
{"title":"Power actuators for nanotechnology","authors":"V. Rakhovsky","doi":"10.1117/12.465224","DOIUrl":"https://doi.org/10.1117/12.465224","url":null,"abstract":"Magnetostrictive actuators for superprecision positioning in steps of 10 -2 nm over a range of displacements up to lm have been developed and investigated. The actuators generate forces up to 10 4 N and are suitable as force actuators in steps of 10 nm. Exact displacement is achieved by an active element made from Terfenol D alloy based on rare-earth metals with a giant magnetostriction. The actuators can be controlled manually without any additional power source or by using a computer. For manual control the minimum linear-displacement step does not exceed 0,6 nm, and when the device is used on a turntable the minimum angular displacement step is 15-10 -3 angular seconds, while for computer control these quantities are 10 -2 nm and 4.10 -5 angular seconds respectively. Using the above mentionned micropositionners we developed several new devices, which may radically change the situation in various high-tech fields of modern technology.","PeriodicalId":291028,"journal":{"name":"Workshop on Nanostructure Science, Metrology, and Technology","volume":"53 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125377023","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Toward a retinal prosthesis for the blind: advanced microelectronics combined with a nanochannel glass electrode array 迈向盲人视网膜假体:结合奈米通道玻璃电极阵列的先进微电子技术
Workshop on Nanostructure Science, Metrology, and Technology Pub Date : 2002-07-01 DOI: 10.1117/12.437271
D. Scribner, M. Humayun, B. Justus, C. Merritt, R. Klein, J. G. Howard, M. Peckerar, F. Perkins, L. Johnson, W. Bassett, P. Skeath, J. Weiland, E. de Juan, J. Finch, R. Graham, W. C. Trautfield, Scott Taylor
{"title":"Toward a retinal prosthesis for the blind: advanced microelectronics combined with a nanochannel glass electrode array","authors":"D. Scribner, M. Humayun, B. Justus, C. Merritt, R. Klein, J. G. Howard, M. Peckerar, F. Perkins, L. Johnson, W. Bassett, P. Skeath, J. Weiland, E. de Juan, J. Finch, R. Graham, W. C. Trautfield, Scott Taylor","doi":"10.1117/12.437271","DOIUrl":"https://doi.org/10.1117/12.437271","url":null,"abstract":"An important new area of biomedical engineering is the development of neural prosthesis particularly in the area of cochlear and retinal devices. An intraocular retinal prosthesis test device is currently under development at NRL/JHU. The microelectronic device has an image format of 80 x 40 unit cells interfaced to the retinal surface via an array of microwires in a glass matrix. The system architecture and technology development issues are discussed as well as the topic of biocompatibility. This test device will enable acute human experiments in an operating room environment to demonstrate a massively parallel interface between retinal tissue and a microelectronic array.","PeriodicalId":291028,"journal":{"name":"Workshop on Nanostructure Science, Metrology, and Technology","volume":"185 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132215333","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Performance of a nanocrystalline tungsten composite in ballistic impacts
Workshop on Nanostructure Science, Metrology, and Technology Pub Date : 2001-09-01 DOI: 10.1117/12.465225
L. Magness, L. Kecskes, F. Biancaniello, S. Ridder, M. Chung, D. Kapoor
{"title":"Performance of a nanocrystalline tungsten composite in ballistic impacts","authors":"L. Magness, L. Kecskes, F. Biancaniello, S. Ridder, M. Chung, D. Kapoor","doi":"10.1117/12.465225","DOIUrl":"https://doi.org/10.1117/12.465225","url":null,"abstract":"A novel tungsten heavy alloy with a nanocrystalline microstructure was produced. Tungsten powders were ball milled in a controlled atmosphere environment, with rapidly solidified powders of a binder alloy known to exhibit a stress-induced martensitic transformation. The milled powders were consolidated in a Hot Isostatic Press (HIP). Microstructural examinations and microhardness tests were conducted on the consolidated product. In quarter-scale ballistic testing, the penetration performance of the nanostructured tungsten composite was compared to those of penetrators of conventional tungsten-based composites and depleted uranium alloys, and showed promise as a kinetic energy penetrator material. Optical and SEM metallographic examinations of the residual penetrator debris examine the flow and failure of the nanocrystalline penetrator material.","PeriodicalId":291028,"journal":{"name":"Workshop on Nanostructure Science, Metrology, and Technology","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128599226","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
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