[1991] Proceedings. IEEE Micro Electro Mechanical Systems最新文献_第5页

Fabrication of active integrated optical micro-encoder 有源集成光学微编码器的研制

[1991] Proceedings. IEEE Micro Electro Mechanical Systems Pub Date : 1991-01-30 DOI: 10.1109/MEMSYS.1991.114802

R. Sawada, H. Tanaka, O. Ohguchi, J. Shimada, S. Hara

引用次数: 31

Ferroelectric thin film ultrasonic micromotors 铁电薄膜超声微电机

[1991] Proceedings. IEEE Micro Electro Mechanical Systems Pub Date : 1991-01-30 DOI: 10.1109/MEMSYS.1991.114779

K. Udayakumar, S. Bart, A. Flynn, J. Chen, L. Tavrow, L. Cross, R. A. Brooks, D. Ehrlich

引用次数: 72

Theoretical modeling of boundary conditions in microfabricated beams 微加工梁边界条件的理论建模

[1991] Proceedings. IEEE Micro Electro Mechanical Systems Pub Date : 1991-01-30 DOI: 10.1109/MEMSYS.1991.114787

R. Mullen, M. Mehregany, M. P. Omar, W. Ko

引用次数: 47

Flexible microactuator for miniature robots 用于微型机器人的柔性微驱动器

[1991] Proceedings. IEEE Micro Electro Mechanical Systems Pub Date : 1991-01-30 DOI: 10.1109/MEMSYS.1991.114797

Koichi Suzumori, S. Iikura, H. Tanaka

引用次数: 140

Mathematical model and experimental verification of shape memory alloy for designing micro actuator 形状记忆合金设计微执行器的数学模型及实验验证

[1991] Proceedings. IEEE Micro Electro Mechanical Systems Pub Date : 1991-01-30 DOI: 10.1109/MEMSYS.1991.114778

K. Ikuta, M. Tsukamoto, S. Hirose

引用次数: 191

A micropipe fabrication process 一种微管制造工艺

[1991] Proceedings. IEEE Micro Electro Mechanical Systems Pub Date : 1991-01-30 DOI: 10.1109/MEMSYS.1991.114773

C. Kuo, T. Masuzawa, M. Fujino

引用次数: 21

Micro-magnetic alloy tubes for switching and splicing single-mode fibers 单模光纤开关和拼接用微磁合金管

[1991] Proceedings. IEEE Micro Electro Mechanical Systems Pub Date : 1991-01-30 DOI: 10.1109/MEMSYS.1991.114774

S. Nagaoka

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引用次数: 15

Integrated microelectromechanical systems: A perspective on MEMS in the 90s 集成微机电系统:90年代微机电系统的展望

[1991] Proceedings. IEEE Micro Electro Mechanical Systems Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.1991.114765

K. Wise

{"title":"Integrated microelectromechanical systems: A perspective on MEMS in the 90s","authors":"K. Wise","doi":"10.1109/MEMSYS.1991.114765","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114765","url":null,"abstract":"The author examines the opportunities and challenges facing the development of integrated microelectromechanical systems (MEMS). It has now been established that micromachined sensors can be produced with high yield and merged with integrated electronics, both in monolithic chips and in hybrid multichip assemblies. For some types of sensors, accuracy is approaching 16 bits, and VLSI interface circuits are being defined to allow features such as self-testing and digital compensation to be used. Continuing technical challenges for full MEMS include the development of processes capable of three-dimensional microstructures, improved drive technologies for microactuators, better approaches to packaging and microassembly, and the creation of workstation-based simulators, operating from rich databases of materials and structural information. Formidable challenges in non-technical areas are also posed, including the definition of appropriate applications for MEMS and the accomplishment of the needed changes in established host systems to take advantage of their features. These issues are illustrated by several devices currently being developed, including integrated neuroelectronic interfaces, pressure and flow sensors, microvalves, and scan tips for near-field microscopy.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"97 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114580970","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 35

Optical exposure systems for three-dimensional fabrication of microprobe 用于微探针三维制造的光学曝光系统

[1991] Proceedings. IEEE Micro Electro Mechanical Systems Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.1991.114766

M. Esashi, K. Minami, S. Shoji

引用次数: 15

Polysilicon microstructures 多晶硅微观结构

[1991] Proceedings. IEEE Micro Electro Mechanical Systems Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.1991.114793

M. M. Farooqui, A. Evans

引用次数: 17