Microtechnologies for the New Millennium最新文献_第6页

Atomic layer deposition of Al2O3 on NF3-pre-treated graphene Al2O3在nf3预处理石墨烯上的原子层沉积

Microtechnologies for the New Millennium Pub Date : 2015-06-01 DOI: 10.1117/12.2181242

Marcel Junige, Tim Oddoy, R. Yakimova, V. Darakchieva, C. Wenger, G. Lupina, J. Kitzmann, M. Albert, J. Bartha

{"title":"Atomic layer deposition of Al2O3 on NF3-pre-treated graphene","authors":"Marcel Junige, Tim Oddoy, R. Yakimova, V. Darakchieva, C. Wenger, G. Lupina, J. Kitzmann, M. Albert, J. Bartha","doi":"10.1117/12.2181242","DOIUrl":"https://doi.org/10.1117/12.2181242","url":null,"abstract":"Graphene has been considered for a variety of applications including novel nanoelectronic device concepts. However, the deposition of ultra-thin high-k dielectrics on top of graphene has still been challenging due to graphene's lack of dangling bonds. The formation of large islands and leaky films has been observed resulting from a much delayed growth initiation. In order to address this issue, we tested a pre-treatment with NF3 instead of XeF2 on CVD graphene as well as epitaxial graphene monolayers prior to the Atomic Layer Deposition (ALD) of Al2O3. All experiments were conducted in vacuo; i. e. the pristine graphene samples were exposed to NF3 in the same reactor immediately before applying 30 (TMA-H2O) ALD cycles and the samples were transferred between the ALD reactor and a surface analysis unit under high vacuum conditions. The ALD growth initiation was observed by in-situ real-time Spectroscopic Ellipsometry (irtSE) with a sampling rate above 1 Hz. The total amount of Al2O3 material deposited by the applied 30 ALD cycles was cross-checked by in-vacuo X-ray Photoelectron Spectroscopy (XPS). The Al2O3 morphology was determined by Atomic Force Microscopy (AFM). The presence of graphene and its defect status was examined by in-vacuo XPS and Raman Spectroscopy before and after the coating procedure, respectively.","PeriodicalId":232941,"journal":{"name":"Microtechnologies for the New Millennium","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124968457","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

Reduced QCSE in InGaN-based LEDs by patterned sapphire substrates with enlarging the diameter of hexagonal hole 通过扩大六方孔直径的蓝宝石衬底来降低ingan基led的QCSE

Microtechnologies for the New Millennium Pub Date : 2015-06-01 DOI: 10.1117/12.2178768

Yen-Pu Chen, V. Su, M. Lee, Y. You, Po-Hsun Chen, R. Lin, C. Kuan

引用次数: 1

A new equalizer for 2 Gb/s short-reach SI-POF links 用于2gb /s短距离SI-POF链路的新型均衡器

Microtechnologies for the New Millennium Pub Date : 2015-06-01 DOI: 10.1117/12.2178761

C. Gimeno, E. Guerrero, C. Sánchez-Azqueta, G. Royo, C. Aldea, S. Celma

引用次数: 1

Integrated microfluidic technology for sub-lethal and behavioral marine ecotoxicity biotests 集成微流体技术在亚致死和行为海洋生态毒性生物试验中的应用

Microtechnologies for the New Millennium Pub Date : 2015-06-01 DOI: 10.1117/12.2180692

Yushi Huang, Constantino Carlos Reyes Aldasoro, G. Persoone, D. Wlodkowic

{"title":"Integrated microfluidic technology for sub-lethal and behavioral marine ecotoxicity biotests","authors":"Yushi Huang, Constantino Carlos Reyes Aldasoro, G. Persoone, D. Wlodkowic","doi":"10.1117/12.2180692","DOIUrl":"https://doi.org/10.1117/12.2180692","url":null,"abstract":"Changes in behavioral traits exhibited by small aquatic invertebrates are increasingly postulated as ethically acceptable and more sensitive endpoints for detection of water-born ecotoxicity than conventional mortality assays. Despite importance of such behavioral biotests, their implementation is profoundly limited by the lack of appropriate biocompatible automation, integrated optoelectronic sensors, and the associated electronics and analysis algorithms. This work outlines development of a proof-of-concept miniaturized Lab-on-a-Chip (LOC) platform for rapid water toxicity tests based on changes in swimming patterns exhibited by Artemia franciscana (Artoxkit M™) nauplii. In contrast to conventionally performed end-point analysis based on counting numbers of dead/immobile specimens we performed a time-resolved video data analysis to dynamically assess impact of a reference toxicant on swimming pattern of A. franciscana. Our system design combined: (i) innovative microfluidic device keeping free swimming Artemia sp. nauplii under continuous microperfusion as a mean of toxin delivery; (ii) mechatronic interface for user-friendly fluidic actuation of the chip; and (iii) miniaturized video acquisition for movement analysis of test specimens. The system was capable of performing fully programmable time-lapse and video-microscopy of multiple samples for rapid ecotoxicity analysis. It enabled development of a user-friendly and inexpensive test protocol to dynamically detect sub-lethal behavioral end-points such as changes in speed of movement or distance traveled by each animal.","PeriodicalId":232941,"journal":{"name":"Microtechnologies for the New Millennium","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115119556","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 10

Colour performance and stack optimisation in phase change material based nano-displays 基于相变材料的纳米显示器的颜色性能和堆叠优化

Microtechnologies for the New Millennium Pub Date : 2015-06-01 DOI: 10.1117/12.2178658

P. Hosseini, H. Bhaskaran

引用次数: 9

Electrospray ionization deposition of BSA under vacuum conditions 真空条件下BSA的电喷雾电离沉积

Microtechnologies for the New Millennium Pub Date : 2015-06-01 DOI: 10.1117/12.2184807

D. Hecker, D. Gloess, P. Frach, G. Gerlach

引用次数: 0

Rapid prototyping of integrated biochips for on-demand 3D cell culture 快速成型集成生物芯片按需3D细胞培养

Microtechnologies for the New Millennium Pub Date : 2015-06-01 DOI: 10.1117/12.2180361

M. Hautefeuille, C. Stern-Forgach, Jehú López-Aparicio, L. Cabriales, Edgar Jiménez-Díaz, M. Macías-Silva, Marcela Sosa‐Garrocho, A. Sánchez-Cedillo, M. Vilatobá-Chapa, D. Kershenobich-Stalnikowitz

{"title":"Rapid prototyping of integrated biochips for on-demand 3D cell culture","authors":"M. Hautefeuille, C. Stern-Forgach, Jehú López-Aparicio, L. Cabriales, Edgar Jiménez-Díaz, M. Macías-Silva, Marcela Sosa‐Garrocho, A. Sánchez-Cedillo, M. Vilatobá-Chapa, D. Kershenobich-Stalnikowitz","doi":"10.1117/12.2180361","DOIUrl":"https://doi.org/10.1117/12.2180361","url":null,"abstract":"The future of research in biology and medicine depends on modular tridimensional cell culture platforms with suitable on-demand geometries that can imitate any cell-specific environment with micron-size features. A high level of control of physico-chemical properties of the substrates is critical, as mechanotransduction signals are passed to the cells that sense their environment. The possibility to pattern nanoscale geometries on chip are also leading to better culture results. All these biomimicry parameters influence the cells phenotype, structure and behavior and are now opening new perspectives in 3D cell culturing for basic biology, medicine and drug testing applications. However, this growing need for on-demand 3D platforms is currently limited by two factors: the specificity of the commercial biochips is not suitable for many cell types and the high cost of technology used to design and fabricate custom-made substrates. In this work, we present the application of a simple, low-cost alternative technique enabling the rapid fabrication of on-demand, custom-made biochips for cell culture with micron-scale resolution. We developed a process that enables the use of low-power, low-cost lasers to etch on-demand micropatterns in transparent biopolymers, circumventing the need for high power lasers or photolithography. We also report the integration of embedded electronics for in situ monitoring or actuation and microchannels on chip. We also succeeded in producing localized carbon nanodomains that are enhancing cell cultures and allowing regionalization in 3D cell culture platforms.","PeriodicalId":232941,"journal":{"name":"Microtechnologies for the New Millennium","volume":"9518 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129992010","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Fabrication of parylene channels embedded in silicon using a single parylene deposition step 用单一聚对二甲苯沉积步骤制备嵌入硅中的聚对二甲苯通道

Microtechnologies for the New Millennium Pub Date : 2015-06-01 DOI: 10.1117/12.2179780

E. Tolstosheeva, J. V. Pimentel, A. Schander, L. Kempen, M. Vellekoop, W. Lang

{"title":"Fabrication of parylene channels embedded in silicon using a single parylene deposition step","authors":"E. Tolstosheeva, J. V. Pimentel, A. Schander, L. Kempen, M. Vellekoop, W. Lang","doi":"10.1117/12.2179780","DOIUrl":"https://doi.org/10.1117/12.2179780","url":null,"abstract":"In-situ integration of microfluidic channels into the microfabrication process flow of implantable microsystems is desirable, for example to enable efficient drug delivery. We propose a fabrication method for such microfluidic channels using parylene C, a biocompatible material whose inert nature favours water flow. A single deposition of parylene C enabled monolithical integration of fully-sealed micro-channels in a silicon substrate. The channel geometry was predefined by etching 100 μm-deep grooves into a silicon substrate. A PVC foil was fixed manually on the wafer and served as a top-cover for the grooves. The wafers were coated with the adhesion promoter AdPro Poly® and a 15 μm-thick parylene C film was deposited conformally into the grooves-foil enclosed space. The outgasing nature of the PVC foil hindered the adhesion of parylene C, allowing the foil to be peeled off easily from the parylene surface. The functionality of the fully-sealed parylene channels, embedded in the silicon wafer, was verified by injecting DI water with dispersed polystyrene microbeads (diameter 6 μm): the polystyrene beads were successfully transported along the channel. Further, a fully-sealed parylene chamber remained leak-tight throughout a stepwise application of hydrostatic pressures from 0.2 to 3.0 bar (15 s step-interval). In short, our parylene channels are: (1) suitable for microsystem drug-delivery; (2) in-situ enclosed hollow spaces embedded in the silicon substrate, realized with a single parylene deposition; (3) intact at hydrostatic pressures up to 3 bar.","PeriodicalId":232941,"journal":{"name":"Microtechnologies for the New Millennium","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134171797","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Small-volume multiparametric electrochemical detection at low cost polymeric devices featuring nanoelectrodes 基于纳米电极的低成本聚合物器件的小体积多参数电化学检测

Microtechnologies for the New Millennium Pub Date : 2015-06-01 DOI: 10.1117/12.2178908

M. Kitsara, Josep M. Cirera, Miguel Aller-Pellitero, N. Sabaté, Jaume Punter, J. Colomer-Farrarons, P. Miribel-Català, F. D. del Campo

引用次数: 3

Trajectory of microscale entities in a microdevice for field-flow fractionation based on dielectrophoresis 基于介质电泳的场流分馏微装置中微尺度实体的运动轨迹

Microtechnologies for the New Millennium Pub Date : 2015-06-01 DOI: 10.1117/12.2179526

B. Mathew, A. Alazzam, S. Khashan, B. El-Khasawneh

引用次数: 0