Microtechnologies for the New Millennium最新文献_第4页

Precise micromachining of materials using femtosecond laser pulses 利用飞秒激光脉冲对材料进行精密微加工

Microtechnologies for the New Millennium Pub Date : 2015-06-01 DOI: 10.1117/12.2182427

K. Garasz, M. Tański, R. Barbucha, M. Kocik

{"title":"Precise micromachining of materials using femtosecond laser pulses","authors":"K. Garasz, M. Tański, R. Barbucha, M. Kocik","doi":"10.1117/12.2182427","DOIUrl":"https://doi.org/10.1117/12.2182427","url":null,"abstract":"We present the results of the experimental parametric study on efficiency, accuracy and quality of femtosecond laser micromachining of different materials. The laser micromachining process was performed with a solid-state Yb:KYW laser. The laser generates 500 fs pulses of three different wavelengths, repetition rate from 100 to 900 kHz and output power up to 50 W. This allows to perform a complex research for a wide range of parameters and materials. Laser micromachining is a process based on a laser ablation phenomenon, i.e. total evaporation of material from the target surface during laser irradiation. It is the most precise method of material removal. Applying a femtosecond laser in the process, allows the use of ultra short pulses, with a duration of 10-15 seconds, while maintaining a high laser power. The concentration of energy within a single pulse is sufficiently high to cause the detachment of particles from the irradiated target without any thermal interactions with the surrounding material. Therefore, the removal of the material occurs only in the laser focus. This allows to avoid most of the unwanted effects of the heat affected zone (HAZ). It has been established, that the quality of laser ablation process using femtosecond pulses is much higher than while using the long pulsed lasers (i.e. nanosecond). The use of femtosecond laser pulses creates therefore an attractive opportunity for high quality micromachining of many groups of materials.","PeriodicalId":232941,"journal":{"name":"Microtechnologies for the New Millennium","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128272608","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Production of porous oxide coatings with ultrafine crystalline structure on medical implants fabricated from alloy 12Cr18Ni9Ti 12Cr18Ni9Ti合金医用植入体超细晶结构多孔氧化物涂层的制备

Microtechnologies for the New Millennium Pub Date : 2015-06-01 DOI: 10.1117/12.2185444

I. Rodionov, M. Fomina, A. Fomin, E. Poshivalova, A. Zakharevich

引用次数: 1

GammarusChip: innovative lab-on-a-chip technology for ecotoxicological testing using the marine amphipod Allorchestes compressa GammarusChip:创新的实验室芯片技术，用于海洋片足类动物Allorchestes compressa的生态毒理学测试

Microtechnologies for the New Millennium Pub Date : 2015-06-01 DOI: 10.1117/12.2180689

R. Cartlidge, D. Nugegoda, D. Wlodkowic

{"title":"GammarusChip: innovative lab-on-a-chip technology for ecotoxicological testing using the marine amphipod Allorchestes compressa","authors":"R. Cartlidge, D. Nugegoda, D. Wlodkowic","doi":"10.1117/12.2180689","DOIUrl":"https://doi.org/10.1117/12.2180689","url":null,"abstract":"Traditional marine ecotoxicity testing is inherently labor intensive, requiring extensive manual procedures both to set up the tests and more importantly to collect experimental readouts. Moreover, static test procedures offer poor control of water parameters such as toxicant concentration and dissolved oxygen, which are important considerations in evaluating environmental impacts of aquatic pollution. So far only minimal levels of automation have been adopted in ecotoxicology. Our current work attempts to address the current limitations by capitalizing on latest advances in microfluidics, 3D printing and laser micromachining technologies to develop highly customized, low cost and high-throughput devices. Here we for the first time introduce a proof-of-concept laboratory automation system to perform ecotoxicity tests on the marine amphipod Allorchestes compressa in a microfluidic environment. Our innovative system incorporated a microperfusion Lab-on-a-Chip device that enabled the biotests to be run in both closed- or open-loop regimens. Miniaturized video cameras were utilized to monitor the amphipods movement patterns during the experiments. Furthermore innovative video analysis algorithms was applied for detection of sub-lethal endpoints such as changes in swimming activity that would otherwise go unnoticed. A key advantage of this flow-through system as compared to conventional approach is the automation of analysis and emphasis on sub-lethal behavioral parameters. We present preliminary data validating the technology and compared to a gold standard method for testing organisms from the order Amphipoda This work provides a foundation to enable automation of ecotoxicity biotests performed on marine test organisms.","PeriodicalId":232941,"journal":{"name":"Microtechnologies for the New Millennium","volume":"79 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132275226","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 5

Fabrication of photonic crystal circuits based on GaN ultrathin membranes by maskless lithography 基于GaN超薄膜的无掩模光刻制备光子晶体电路

Microtechnologies for the New Millennium Pub Date : 2015-06-01 DOI: 10.1117/12.2178525

O. Volciuc, T. Braniste, V. Sergentu, V. Ursaki, I. Tiginyanu, J. Gutowski

{"title":"Fabrication of photonic crystal circuits based on GaN ultrathin membranes by maskless lithography","authors":"O. Volciuc, T. Braniste, V. Sergentu, V. Ursaki, I. Tiginyanu, J. Gutowski","doi":"10.1117/12.2178525","DOIUrl":"https://doi.org/10.1117/12.2178525","url":null,"abstract":"We report on maskless fabrication of photonic crystal (PhC) circuits based on ultrathin (d ~ 15 nm) nanoperforated GaN membranes exhibiting a triangular lattice arrangement of holes with diameters of 150 nm. In recent years, we have proposed and developed a cost-effective technology for GaN micro- and nanostructuring, the so-called surface charge lithography (SCL), which opened wide possibilities for a controlled fabrication of GaN ultrathin membranes. SCL is a maskless approach based on direct writing of negative charges on the surface of a semiconductor by a focused ion beam (FIB). These charges shield the material against photo-electrochemical (PEC) etching. Ultrathin GaN membranes suspended on specially designed GaN microstructures have been fabricated using a technological route based on SCL with two selected doses of ion beam treatment. Calculation of the dispersion law in nanoperforated membranes in the approximation of scalar waves is indicative of the occurrence of surface and bulk modes, and there is a range of frequencies where only surface modes can exist. Advantages of the occurrence of two types of modes in ultrathin nanoperforated GaN membranes from the point of view of their incorporation in photonic and optoelectronic integrated circuits are discussed. Along with this, we present the results of a comparative analysis of persistent photoconductivity (PPC) and optical quenching (OQ) effects occurring in continuous and nanoperforated ultrathin GaN suspended membranes, and assess the mechanisms behind these phenomena.","PeriodicalId":232941,"journal":{"name":"Microtechnologies for the New Millennium","volume":"235 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128658261","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 4

Multifunctional biosensing with three-dimensional plasmonic nanoantennas 三维等离子体纳米天线的多功能生物传感

Microtechnologies for the New Millennium Pub Date : 2015-06-01 DOI: 10.1117/12.2178845

M. Dipalo, G. Messina, Hayder Amin, F. Moia, R. La Rocca, V. Shalabaeva, A. Maccione, L. Berdondini, F. De Angelis

引用次数: 2

A PEDA approach for monolithic photonic BiCMOS technologies 单片光子BiCMOS技术的PEDA方法

Microtechnologies for the New Millennium Pub Date : 2015-06-01 DOI: 10.1117/12.2178388

S. Simon, G. Winzer, H. Rossmann, M. Kroh, L. Zimmermann, Thomas Mausolf

引用次数: 2

Simulation and characterization of hollow microbridge resonators for label-free biosensing 用于无标签生物传感的空心微桥谐振器的仿真与表征

Microtechnologies for the New Millennium Pub Date : 2015-06-01 DOI: 10.1117/12.2178981

S. Márquez, M. Alvarez, D. Fariña, C. Domínguez, L. Lechuga

{"title":"Simulation and characterization of hollow microbridge resonators for label-free biosensing","authors":"S. Márquez, M. Alvarez, D. Fariña, C. Domínguez, L. Lechuga","doi":"10.1117/12.2178981","DOIUrl":"https://doi.org/10.1117/12.2178981","url":null,"abstract":"In this work we describe the use of a micro-scale array of polysilicon doubly clamped beams, based on the approach of embedding microfluidic channels inside the resonators, as an innovative platform for multiplexed biosensors. Finite element methods in COMSOL were employed to simulate the structural mechanical behavior and to know the conditions to determine the frequency response in order to achieve optimal sensitivities and quality factors. Particularly, we studied the effect of microchannel cross-section area, length and sidewall thickness respect to the microchannel dimensions with the objective of injecting solutions of different densities. By integrating additional multiphysics models we analyzed the governing microfluidics, and we estimated that a maximum pressure difference of 7 MPa along the microchannels is required to establish an optimum water flow rate of 0.1 μl/min, which is adequate for biosensor applications. To validate the simulations we compared the thermal noise response of a fabricated array of microbridges in air, and we obtained resonant frequencies between 700 KHz and 1 MHz, in good agreement with our simulated results but with downward frequency shifts due to the undercut effect after fabrication.","PeriodicalId":232941,"journal":{"name":"Microtechnologies for the New Millennium","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117264771","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Measurement of nonlinear refractive index based on multiple configuration of FBG in generating multi wavelength 基于多波长光纤光栅的非线性折射率测量

Microtechnologies for the New Millennium Pub Date : 2015-06-01 DOI: 10.1117/12.2178252

M. N. Abdullah, S. Shaari, A. Ehsan, Susthitha Menon, Osman Zakaria

引用次数: 0

A multi-rate continuous-time adaptive equalizer for high-speed serial links 用于高速串行链路的多速率连续时间自适应均衡器

Microtechnologies for the New Millennium Pub Date : 2015-06-01 DOI: 10.1117/12.2178971

E. Guerrero, C. Gimeno, C. Sánchez-Azqueta, J. Aguirre, S. Celma

引用次数: 1

Luminescence yield in Al and Tb3+delta-doped oxide thin films fabricated by electron beam evaporation 电子束蒸发制备Al和Tb3+掺杂氧化物薄膜的发光率

Microtechnologies for the New Millennium Pub Date : 2015-06-01 DOI: 10.1117/12.2178855

O. Blázquez, J. Ramírez, J. López-Vidrier, Y. Berencén, S. Hernández, P. Sanchis, B. Garrido

引用次数: 2