{"title":"PLASMA ETCH MONITORING WITH LASER INTERFEROMETRY","authors":"H. Busta, R. E. Lajos, D. Kiewit","doi":"10.1016/0026-2714(79)90579-1","DOIUrl":"https://doi.org/10.1016/0026-2714(79)90579-1","url":null,"abstract":"","PeriodicalId":21779,"journal":{"name":"Solid State Technology","volume":"22 1","pages":"61-64"},"PeriodicalIF":0.0,"publicationDate":"1979-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0026-2714(79)90579-1","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"53718477","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"ADHESION MECHANISMS OF THICK-FILM CONDUCTORS","authors":"Ho Gi Kim, W. Rothlingshofer, G. Tomandl","doi":"10.1016/0026-2714(79)90552-3","DOIUrl":"https://doi.org/10.1016/0026-2714(79)90552-3","url":null,"abstract":"","PeriodicalId":21779,"journal":{"name":"Solid State Technology","volume":"22 1","pages":"62-66"},"PeriodicalIF":0.0,"publicationDate":"1979-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0026-2714(79)90552-3","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"53718438","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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